1
Silicon Microchannel Cooling.. and related
microfluidic and microcoolingtopics
Han GardeniersMESA+ Research Institute -University of Twente, NL
20th January 2003
Outline
• short overview MESA• short overview BIOS / Lab-on-a-Chip• buried microchannels:
– micromachining process– silicon nitride and polysilicon– applications: pipette for mechanical DNA study
• cryogenic microcooler project overview
3
Chem. Eng.: Chemical Analysis (CA) Inorganic Materials Science (IMS) Materials Science and Technology of Polymers (MTP) Supra Molecular Chemistry and Technology (SMCT)
Electr. Eng.: Biosensors / Lab-on-a-Chip (BIOS)Semiconductor Components (SC)Computer Architecture, Design & Test for Embedded Systems (CADTES)Integrated Circuit Design (ICD) Systems and Materials for Information Storage (SMI)*Lightwave Devices (LDG)*Transducers Science and Technology (TST)
Appl.Phys.: Biophysical Techniques (BFT) Computational Materials Science (CMS) Systems and Materials for Information Storage (SMI)*Lightwave Devices (LDG)*Low Temperature Physics (LT) Optical Techniques (OT) Solid State Physics (VSF) Complex Photonic Systems (COPS)
Appl. Math.: Applied Analysis and Mathematical Physics (AAMP)
MESA+ Research Groups
Micro and nanofluidicdevices for chemical and biomedical applications
Current researchBIOS Lab-on-a-Chip group
Han GardeniersMESA+ Research Institute -University of Twente, NL
(also with Micronit Microfluidics B.V.)
1st November 2002
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Lab-on-a-Chip: motivation
General reasons for miniaturisation:• Reduced weight (portable)• Reduced size (implantable, integratable)• Reduced price (batch fabrication, disposable)• Reduced consumption of chemicals (expensive or limited source)• Reduced energy consumption• Reduced production of waste (toxic products)• Reduced flow (accurate dosing)• Increased heat exchange• Fast mass transport• Integration of sensors• Parallellisation• Automation
Micro Flow Injection Analysis System for Ammonia determination
from: Ph.D. thesis Theo Veenstra
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Measurements modular system
R.M. Tiggelaar et al., Sens. & Act. B in press
Hydrodynamic chromatography chip
Separation is enhanced by smaller channel height
Mass M1
Mass M2
0.9
0.92
0.94
0.96
0.98
1
0 10 20 30 40 50 60
Reff (nm)
Rel
ativ
e re
tent
ion
10 ? m channel
1 ? m channel
Anal. Chem. 74, 2002, p. 3470-3475, Sens. & Act. B 82 (2002) pp. 111-116
from: Ph.D. thesis Marko Blom
Separation of 26, 44, 110, 180 nmfluorescent polystyrene particles and a marker
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Silicon micromachined hollow microneedles for trandermal liquid transport
Epidermis
Dermis
Diagnosticsensor ordrugcontainer
Hollow microneedles
20 ?m
Fabricationprocessout-of-planeneedles
DRIE etch
KOH etch
1
2
3
4
5
c
d
Si{111}
Proc. MEMS 2002, pp. 141-146; submitted J. MEMS
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Resulting microneedles
Application of Sodium Diclofenac to rats
0
100
200
300
400
500
600
700
800
Dic
lofe
nac
plas
ma
Leve
ls,
Drug plasma concentrations obtained after 6-hrapplications of increasing number of microneedles
Diffusion process withoutneedles
350 micron, 16 needles
350 micron, 36 needles
350 micron, 81 needles
ng
/mL
Microneedle array type Courtesy of NanoPass Ltd.
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Microsystem for lithium therapy monitoring
work of: Elwin Vrouwe and Regina Luttge
glass chip for capillary electrophoresiswith end-column integratedconductivity detection
close-up of platinum electrodesintegrated at end of
electrophoresis microchannel
Sample
PDMS
High Voltage
Injector Chamber to Separation Buffer
CE “ Sensor Chip”
Si-needle array chip clamped on top of sample vial “Blood Sampler”
Time / sec
Li+Na+
K+
Calibration
Sample intakethrough needles
C ond
uctiv
it y a
.u.
Work of: Regina Luttge
Silicon microneedles + CE chip
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Buried microchannelsin silicon
SEE PRESENTATION PART 1
Mechanical measurements on DNA
Capture bead Place bead on pipette Capture bead
Capture DNA Stretch DNA
11
-100
10
2030
40
5060
70
80
0,6 0,8 1 1,2 1,4 1,6 1,8
Relative extension
Fo
rce
(pN
)
stretching
relaxing
entropic effects
spring-like
conformational effects
Two beads, one gripped by amicromachined pipette and the other by optical tweezers, with a DNA molecule (not observable) in between
(a) no force applied
(b) 30pN force applied
Stretching of? -phage DNA
Miniaturizedcryocooler
Johannes BurgerJohannes Burger, Han van Egmond, Harry Holland, , Han van Egmond, Harry Holland, Han Gardeniers, Marcel ter Brake and Miko ElwenspoekHan Gardeniers, Marcel ter Brake and Miko Elwenspoek
MESAMESA++ Research Institute, University of Twente, The NetherlandsResearch Institute, University of Twente, The Netherlands
Financial support: Financial support: Dutch Foundation for Technological Research (STW)Dutch Foundation for Technological Research (STW)Project TTN.3100 “Microcooling”Project TTN.3100 “Microcooling”
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Gas-gapheatswitch with pressure controller
Sorption compressorcell with heater
Checkvalveunit
Aftercooler
So
rption
com
pres
sor u
nit
T environment
Q
Counterflow heatexchanger 1
Throttlevalveand cryostat
Co
ld s
tage
Refrigeration load
Insulating vacuumhousing
Counterflow heatexchanger 2
CondenserTE-cooler
Heat-sink
Heat-sink
300 K
300-600K15 W
0.1 -2 MPa
244K2.1 W input
0.4 W cooling
165K0.4 W
Xenon5 mg/s
MicroCooler
Micromachined check valves
Sieve
Boss
Wafer 1
Wafer 2
Wafer 3
Wafer 4
Input glass tube(glued)
Output glass tube(glued)
Spring
Top view Top view
Valve seat
J.F. Burger e.a., Proc. MEMS 1999
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Glued capillary-to-chip connection
sintered filter
thermocouple/heater
activated carbon
support for thermocouple
gas supply tube
suspension of inner cell
ZrNi thin-film hydrogenactuator
10
cm
10 mm
‘splitter’ of gas supply tubeand thermocouple
inner cylinder (150 mwall thickness)
?
gas-gap heat switch
cro
ss s
ectio
n
Compressor design
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1
1
Filter 2 micrometerFilter
Sorber
Innercontainer
with heater
Gas-gap
Inletoutlet
Sorber cellSorber cell
Compressor test set-up
mp2p1
gassupply pump
compressor cell
valve
metering valve
safety valvepressure sensor
flow sensor T2T1
P2P1
Tambient
heater power
temp.
gas gap
gas-gapcontrol
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Compressor flow test
0
100
200
300
40 45 50 55 60 65 70 75 80
T (
C) T1
T2
0
4
8
12
16
40 45 50 55 60 65 70 75 80
p (b
ar) p1
p2
0
5
10
15
20
40 50 60 70 80time (min)
flo
w (
mg
/s)
-2
mflow
valve
open
closed
Thermal switches: mechanical example
T. Slater e.a. Techn. Digest Transducers 95, Stockholm
C. Baert e.a. (MME 94, Pisa)
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Gas gap heat switch with hydrogen (1)
J.F. Burger e.a., Thermodynamic considerations on a microminiature sorption cooler, Cryocoolers 10, Kluwer Academic / Plenum Press, New York, 1999, p. 553
0.1
1
10
100
1000
10000
0.1 1 10 100 1000 10000 100000pressure (Pa)
measurements, gap = 0.3 mm
0.03 mm
0.3 mm
3 mm
Gas gap heat switch with hydrogen (2)
J.F. Burger e.a., Thermodynamic considerations on a microminiature sorption cooler, Cryocoolers 10, Kluwer Academic / Plenum Press, New York, 1999, p. 553
Requirements heat switch:
• low pressure < 0.5 Pa• ON-OFF pressure ratio > 50*• switching times < 30 sec• actuation power < 0.2 W• lifetime > 106 cycles
*limiting ON-OFF ratio ? 150 (mm) / gap width = 500 for gap of 300 ?m
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Metal hydrides
Van ‘t Hoff plots forseveral metal hydrides
Metal hydrides: phase transition
Absorption and desorption lines for one isotherm
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ZrNi-H
Experimental data for the ??? and ? ?? phase changes of ZrNi-HW. Luo e.a., J. Less-Common Metals 162, 1990, p.251
ZrNi films for reversible H2 pressure actuation
To be presented at Actuator 2000
Why films?• Sputtered films offer possibilities for integration
with e.g. heater elements• Passivation with Pd film possible
(bulk ZrNi is very sensitive to oxygen)• Thin films offer faster hydrogen pressure switching
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To be presented at Actuator 2000
0.0001
0.001
0.01
0.1
1
10
0 0.2 0.4 0.6 0.8 1 1.2
H/ZrNi
Pre
ssu
re (
mb
ar)
2202001801601401201008060
Temperature:
ZrNi films: Experimental results (1)
Gardeniers e.a., Proc. AKTUATOR 2000
To be presented at Actuator 2000
ZrNi films: Experimental results (2)
TEM pictures of ZrNi-Pd film before (left) and after (right)several thousands of absorption cycles
Gardeniers e.a., Proc. AKTUATOR 2000
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To be presented at Actuator 2000
0.0001
0.001
0.01
0.1
1
10
0 5000 10000 15000 20000 25000 30000Time (s)
Pre
ssur
e (m
bar)
60 oC
230 oC
ZrNi films: Experimental results (3)
Gardeniers e.a., Proc. AKTUATOR 2000
Obtained pressure swing: 0.03 Pa - 125 Pa
0
0.2
0.4
0.6
0.8
1
1.2
0 10 20 30 40 50time (s)
Pre
ssu
re (
mb
ar)
T=60
T=80
T=100
T=120
T=140
ZrNi films: Experimental results (4)
Gardeniers e.a., Proc. AKTUATOR 2000
Obtained switching times: less than 60 secs.
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