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8/16/2019 Semiconductor Devices (Amna)

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Microtechnology and

Nanotechnologyfor Semiconductor Devises

Integrated Circuits and MEMS

fabrication

By

Amna Z. Shaa


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How much is Micro and Nano?

One Micrometer = 1/1000,000 Like if you have one -meter strin !on divided

into mi!!ion "arts# each "art re"resents oneMicrometer

One Nanometer = 1/1000,000,000


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$emiconductor %echno!oy &""!ications

Micro-'!ectronic (nterated )ircuits*)hi"s+ )

&$() and .& *.ie!d-roramma!e &na!o &rray +

$O) *$ystem on )hi"+

Micro-'!ectro-Mechanic $ystems*M'M$+


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$emiconductors!

'!ements have the "ro"erty of hihconductivity at hih tem"eratures and

near!y ero conductivity at !owtem"eratures $i!icon, ermanium and a!!ium are %he

most famous semiconductor materia!s $i!icon is the most dominant in the

industry


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2hy $i!icon!!

$im"!y, si!icon is each sand "rocessed inhih tem"erature so it3s chee" and

avai!a!e

'asi!y o4idied to form e!ectrica! insu!ator

Has e4ce!!ent mechanica! "ro"erties, it3sstrenth e4ceeds hih-strenth stee!


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%ransistor %ransistor is a

semiconductor e!ement

Has three termina!s

& sma!! current or vo!taea""!ied to one termina!contro!s the current

throuh the other two (t is the key com"onent in

a!! modern e!ectronics


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2hat can %ransistor do?

(n diita! circuits 5ery fast e!ectrica! switch

.unction as !oic ate 6&M-ty"e memory

(n ana!o circuits &m"!ify current sina!s &m"!ify vo!tae sina!s


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%he .irst %ransistor 1789


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5L$(- %ransistor :008

$ide-intersection foran interated

transistor %oday3s techno!oy

reached thenanometer sca!e

70nm transistors areused in entium 8


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%he %ransistor vs; the 5acuum%ue

%ransistor Made from

semiconductor $ma!!

.ast 6e!ia!e and effective

5acuum %ue $imi!ar to Liht


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'N(&) - %he first e!ectronic com"uter*178+


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Had 19,000 vacuum tues

Occu"ied 1> s m *1,900 s ft+

weihed more than @0 %ans *0,000 !+

)oasted AB00,000

)onsumed :00 ki!owatts of e!ectrica!"ower

6ouh!y :,000 of the vacuum tues

were re"!aced each month y a team ofsi4 technicians;

cou!d "erform B,000 additions, @B>mu!ti"!ications or @9 divisions


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%he first interated circuit

%he first interatedcircuit was deve!o"ed inthe 17B0s y Cack Di!y

of %e4as (nstruments Di!yEs idea was to make

a!! the com"onents andthe chi" out of the same!ock of semiconductormateria!


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Cack Di!y

His idea founded anew industry

Has Noe! "rice in"hysics year :000


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(nte! 8008 Micro-rocessor

17>1

1000 %ransistors

1 MH O"eration


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entium *(5+ micro"rocessor (nte!

:00:

0 Mi!!ion %ransistors

@;0 F @; HO"erations


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Moor3s Law

!"###"###

!##"###

!#"###

!"###

!#

!##

!

!$%& !$'# !$'& !$$# !$$& (### (##& (#!#

'#')

'#(')i*')

i+'),entium -

,entium - ,ro

! Billion! Billion/ransistors/ransistors

Source0 IntelSource0 Intel

,ro1ected,ro1ected

,entium - II

,entium - IIII

2


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roduction 6euirements

%he "roduction of a chi" demands care atan atomic !eve!;

%iny "artic!es !ike dust,a dead skin ce!!,oracteria ecome hue oGects that arei enouh to ruin a chi"

chi" "roduction takes "!ace in a s"ecia!!ydesined room ca!!ed the )!ean 6oomI


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%he )!ean 6oom

&ir circu!ation fi!terschane the aircom"!ete!y u" to tentimes a minute

workers wear s"ecia!suits ca!!ed Junny

suits .urniture is ui!t from

s"ecia! materia!s thatdonEt ive off "artic!es


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)hi" .arication rocess

(main and Masks "roduction O4idiation

'tchin Ke"osition )!eanin

%estin ackain .ina! %est


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.arication "rocess in detai!..

%he construction"!ans for the chi" are

made and tested witha com"uter


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Masks

.rom the construction"!ans, masks with the

circuit "atterns aremade

Makin masks is themost cost!y "rocess

in the entire microchi"farication


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%he $i!icon


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%he 2afer

%he si!icon is sawedinto thin wafers with a

diamond saw wafers are then

"o!ished in a numerof ste"s


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%he O4idiation

%he si!icon wafer iscovered with a !ayer

of insu!atin si!icono4ide

& !ayer of si!icono4ide is rown on the

to" of the si!iconwafer


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%he hotoresist

& "hotoresist !ayer "uton to" of the si!icon

o4ide %his materia! is

sensitive to !iht, !ikethe fi!m in camera


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Maskin

5-!iht is shonethrouh a mask and

onto the chi"; On the"arts of the chi" thatare hit y !iht, the"rotective materia!

reaks a"art


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'tchin

%he wafer is"rocessed chemica!!y

to remove the "artsof the "hotoresist fi!mthat e4"osed to !iht

)hemica! sustances

wi!! etch the surfaceof the non coveredsi!icon o4ide !ayer


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Ke"osition

%o form the activeareas, im"urities

de"osited in theo"ened windows


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Kicin

%he chi"s on thewafer are se"arated

with a diamond sawto form individua!interated circuits


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Single die

-Chip-

2afer


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Close look for chip surface


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ackain

'ach chi" is "ackedinto the "rotective

casin and suGectedto another series oftests


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Package Types

Mi '! t M h i !


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Micro-'!ectro-Mechanica!$ystems *M'M$+


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M'M$ are faricated from e4treme!y thin!ayers of si!icon; %he si!icon !ayers can esha"ed into !evers, ears, and other

mechanica! devices

%he M'M$ com"onents are faricated y

etch away "arts of the si!icon wafer or addnew structura! !ayers to form the mechanica!and e!ectromechanica! devices

%h d t f M'M$3


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%he advantae of M'M$3stechno!oy

M'M$ are very sma!!

more sensitive, faster, use !ess enery

and chea"er than !arer machines Have reat mechanica! "ro"erties

the strenth-to-weiht ratio for si!icon is

hiher than many other enineerinmateria!s


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M'M$ &""!ications

(main systems

motion sensors


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$ensors

&utomoi!e air aacce!eration sensorsdetect the sudden

chane in s"eed thatoccurs when avehic!e crashes


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1B0 mm-diameter

micromotor rotateB0,000 r"m


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Biotechnology

Kru de!ivery devices Microsco"ic need!es are

ca"a!e of "rovidin

"athways for mo!ecu!artrans"ort across the skiny o"enin micron-sca!eho!es in the skin, they

avoid contactin nerves"ain!ess and !ood!ess


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(mae and )ommunications

Micromirrors fier-o"tic

communication ca!es

mi!!ions of mova!emicromirrors re"!aces aconventiona! videocathode-ray tue to"roGect diita! video

imaes


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%hanks

&ny uestion??