Download - Introduction METROLOGY

METROLOGY FGB 20102METROLOGY FGB 20102

What is metrology?What is metrology? It is the science of weights and measures It is the science of weights and measures Refers primarily to the measurements of Refers primarily to the measurements of

length, weight, time, etc.length, weight, time, etc. It also includes other engineering It also includes other engineering

measurements for the establishment of a flat, measurements for the establishment of a flat, plane reference surface plane reference surface

To ensuring these process meet specific To ensuring these process meet specific degrees of both accuracy and precisiondegrees of both accuracy and precision

METROLOGY MET 3012METROLOGY MET 3012

AccuracyAccuracy is the degree of conformity of a measured or is the degree of conformity of a measured or

calculated quantity to its actual, nominal, calculated quantity to its actual, nominal, absolute, or some other reference, value absolute, or some other reference, value

PrecisionPrecision Is the degree of mutual agreement or Is the degree of mutual agreement or

repeatability among a series of individual repeatability among a series of individual measurements, values, or results. measurements, values, or results.


What is a Measurement?What is a Measurement? A measurement is an act of assigning a specific A measurement is an act of assigning a specific

value to a physical variablevalue to a physical variable The physical variable becomes the measured The physical variable becomes the measured

variablevariable Measurements provide a basis for judgments aboutMeasurements provide a basis for judgments about

Process informationProcess information Quality assuranceQuality assurance Process controlProcess control


Measurable ParametersMeasurable Parameters What do we want to measure?What do we want to measure?

- Length or distance - Length or distance - Mass- Mass- Temperature - Temperature - Elemental composition- Elemental composition- Viscosity- Viscosity - Displacements or distortions- Displacements or distortions- Time- Time - Pressure- Pressure- Forces - Forces - Stress- Stress- Strain- Strain - Friction- Friction- Resistance - Resistance - Roughness- Roughness- Depth- Depth - Intensity- Intensity- etc.- etc.


Measurement Systems and ToolsMeasurement Systems and Tools Measurement systems are important tools for the Measurement systems are important tools for the

quantification of the physical variablequantification of the physical variable Measurement systems extend the abilities of the Measurement systems extend the abilities of the

human senses, while they can detect and recognize human senses, while they can detect and recognize different degrees of physical variablesdifferent degrees of physical variables

For scientific and engineering measurement, the For scientific and engineering measurement, the selection of equipment, techniques and interpretation selection of equipment, techniques and interpretation of the measured data are importantof the measured data are important


Importance of MetrologyImportance of Metrology In human relationships, things must be In human relationships, things must be

counted and measuredcounted and measured Metrology is an absolute necessity for human Metrology is an absolute necessity for human

development development This necessity increased greatly with the advent This necessity increased greatly with the advent

of the industrial ageof the industrial age As society develops further, metrology must As society develops further, metrology must

also be refined furtheralso be refined further


How Important are Measurements?How Important are Measurements? Measurement is the language of scienceMeasurement is the language of science It helps us communicate about size, quantity, It helps us communicate about size, quantity,

position, condition, time, etc.position, condition, time, etc. Simple measurement errors can cost a company a Simple measurement errors can cost a company a

contract, work, jobs, and lots of moneycontract, work, jobs, and lots of money Three areas to which the basic principles of Three areas to which the basic principles of

measurement can be appliedmeasurement can be applied Communication of the measurementCommunication of the measurement Act and application of the measurementAct and application of the measurement Codification of the measurementCodification of the measurement


Human Interaction in MeasurementsHuman Interaction in Measurements Almost always require the use of visionAlmost always require the use of vision

Other senses not always good at “measurement”Other senses not always good at “measurement” Measurements usually require toolsMeasurements usually require tools

They rely on the visual processThey rely on the visual process What happens if object is too small to perceive?What happens if object is too small to perceive?

At what size do things become to small to At what size do things become to small to measure?measure?

Handling and/or perception problemsHandling and/or perception problems Limits of vision/ perception without aid or assistanceLimits of vision/ perception without aid or assistance


What is Microsystems MetrologyWhat is Microsystems Metrology Measurement of physical dimensions of Microsystems or Measurement of physical dimensions of Microsystems or

structures that are at the dimension scale below our ability to structures that are at the dimension scale below our ability to perceive without the help of measurements systems or perceive without the help of measurements systems or instrumentsinstruments

Microsystems: IC, MEMSMicrosystems: IC, MEMS Microstructures: Line widths, film thickness, surface structure Microstructures: Line widths, film thickness, surface structure

and roughness, step heights, particle size, atomic and roughness, step heights, particle size, atomic composition, defect inspections, etccomposition, defect inspections, etc

Nanosystem metrology is emerging now!Nanosystem metrology is emerging now!


Where Metrology at the Micro Level is UsedWhere Metrology at the Micro Level is Used Precision engineering and measurementsPrecision engineering and measurements Micron and nano manufacturingMicron and nano manufacturing Research and developmentResearch and development Calibration of instruments and standardsCalibration of instruments and standards


SI UnitsSI Units International System of UnitsInternational System of Units (abbreviated (abbreviated SISI

from the French phrase, from the French phrase, Système International Système International d'Unitésd'Unités) is the most widely used system of units. ) is the most widely used system of units. • Ex. The unit of length (or distance or linear size) is the Ex. The unit of length (or distance or linear size) is the

metermeter (m) (m), ,


Imperial UnitsImperial Units The imperial units were mostly used in the United The imperial units were mostly used in the United

Kingdom and related countries Kingdom and related countries The imperial units are now used mainly in the The imperial units are now used mainly in the

United States, where they are known as US United States, where they are known as US customary unitscustomary units• Ex. inch, foot, yard, mile Ex. inch, foot, yard, mile

METROLOGY MET 3012METROLOGY MET 3012SI Base UnitsSI Base Units

Basic Unit of LengthBasic Unit of Length MeterMeter is fundamental unit of length in the metric system. The is fundamental unit of length in the metric system. The

meter was originally defined as 1/10,000,000 of the distance meter was originally defined as 1/10,000,000 of the distance between the equator and either pole; however, the original between the equator and either pole; however, the original survey was inaccurate and the meter was later defined simply survey was inaccurate and the meter was later defined simply as the distance between two scratches on a bar made of a as the distance between two scratches on a bar made of a platinum-iridium alloy and kept at Sevres, France, near Paris. platinum-iridium alloy and kept at Sevres, France, near Paris. More recently, it has been defined as the distance light travels More recently, it has been defined as the distance light travels through a vacuum in 1/299,792,458 of a second. The meter is through a vacuum in 1/299,792,458 of a second. The meter is now the legal standard of length for most of the world, other now the legal standard of length for most of the world, other standards, such as the yard, being defined in terms of the standards, such as the yard, being defined in terms of the meter.meter.

METROLOGY MET 3012METROLOGY MET 3012 SI Base UnitsSI Base Units

Basic Unit of MassBasic Unit of Mass KilogramKilogram is fundamental unit of mass is equal is fundamental unit of mass is equal

to the mass of the international prototype to the mass of the international prototype kilogram (a platinum-iridium cylinder) kept at kilogram (a platinum-iridium cylinder) kept at the Bureau International des Poids et Mesures the Bureau International des Poids et Mesures (BIPM), Sèvres, Paris (1st CGPM (1889), CR (BIPM), Sèvres, Paris (1st CGPM (1889), CR 34-38). 34-38).


Basic Unit of TimeBasic Unit of Time SecondSecond is fundamental unit of time is the is fundamental unit of time is the

duration of exactly 9 192 631 770 periods of duration of exactly 9 192 631 770 periods of the radiation corresponding to the transition the radiation corresponding to the transition between two hyperfine levels of the ground between two hyperfine levels of the ground state of the caesium-133 atom at a state of the caesium-133 atom at a temperature of 0 K (13th CGPM (1967-1968) temperature of 0 K (13th CGPM (1967-1968) Resolution 1, CR 103). Resolution 1, CR 103).


Basic Unit of Electrical CurrentBasic Unit of Electrical Current AmpereAmpere is fundamental unit of electrical is fundamental unit of electrical

current is the constant current which, if current is the constant current which, if maintained in two straight parallel conductors, maintained in two straight parallel conductors, of infinite length and negligible cross-section, of infinite length and negligible cross-section, placed 1 meter apart in a vacuum, would placed 1 meter apart in a vacuum, would produce a force between these conductors produce a force between these conductors equal to 2×10 −7 Newton per meter of length equal to 2×10 −7 Newton per meter of length (9th CGPM (1948) Resolution 7, CR 70). (9th CGPM (1948) Resolution 7, CR 70).


Basic Unit of thermodynamic TemperatureBasic Unit of thermodynamic Temperature KelvinKelvin is fundamental unit of thermodynamic is fundamental unit of thermodynamic

temperature (or absolute temperature) is the temperature (or absolute temperature) is the fraction 1/273.16 (exactly) of the fraction 1/273.16 (exactly) of the thermodynamic temperature at the triple point thermodynamic temperature at the triple point of water (13th CGPM (1967) Resolution 4, CR of water (13th CGPM (1967) Resolution 4, CR 104). 104).


Basic Unit of Amount of SubstanceBasic Unit of Amount of Substance MoleMole is fundamental unit of amount of substance is is fundamental unit of amount of substance is

the amount of substance which contains as many the amount of substance which contains as many elementary entities as there are atoms in 0.012 elementary entities as there are atoms in 0.012 kilograms of pure carbon-12 (14th CGPM (1971) kilograms of pure carbon-12 (14th CGPM (1971) Resolution 3, CR 78). (Elementary entities may be Resolution 3, CR 78). (Elementary entities may be atoms, molecules, ions, electrons, or particles.) It is atoms, molecules, ions, electrons, or particles.) It is approximately equal to 6.02214199×1023 approximately equal to 6.02214199×1023 unitsunits (Avogadro's number). (Avogadro's number).


Basic Unit of Luminous IntensityBasic Unit of Luminous Intensity CandelaCandela is fundamental unit of luminous is fundamental unit of luminous

intensity is the luminous intensity, in a given intensity is the luminous intensity, in a given direction, of a source that emits direction, of a source that emits monochromatic radiation of frequency monochromatic radiation of frequency 540×1012 hertz and that has a radiant 540×1012 hertz and that has a radiant intensity in that direction of 1/683 watt per intensity in that direction of 1/683 watt per steradian (16th CGPM (1979) Resolution 3, steradian (16th CGPM (1979) Resolution 3, CR 100). CR 100).

METROLOGY MET 3012METROLOGY MET 3012SI Dimensionless UnitsSI Dimensionless Units

NameName SymbolSymbol QuantityQuantity DefinitionDefinition

radian radian radrad Angle Angle The unit of angle is the angle subtended The unit of angle is the angle subtended at the centre of a circle by an arc of the at the centre of a circle by an arc of the circumference equal in length to the circumference equal in length to the radius of the circle. There are 2π radians radius of the circle. There are 2π radians in a circle. in a circle.

steradian steradian srsr Solid Solid angle angle

The unit of solid angle is the solid angle The unit of solid angle is the solid angle subtended at the centre of a sphere of subtended at the centre of a sphere of radius radius rr by a portion of the surface of the by a portion of the surface of the sphere having an area sphere having an area r2r2. There are 4π . There are 4π steradians on a sphere. steradians on a sphere.

METROLOGY MET 3012METROLOGY MET 3012SI Derived Units With Special NamesSI Derived Units With Special Names

NameName SymbSymbolol

QuantityQuantity Expressed in base unitsExpressed in base units

HertzHertz HzHz FrequencyFrequency SS-1-1

NewtonNewton NN ForceForce Kg m sKg m s-1-1

JouleJoule JJ EnergyEnergy N m N m

WattWatt WW PowerPower J/sJ/s

PascalPascal PaPa Pressure, StressPressure, Stress N/mN/m22

LumenLumen LmLm Luminous fluxLuminous flux cd srcd sr

LuxLux LxLx I luminanceI luminance lm/mlm/m22

CoulombCoulomb CC Electric chargeElectric charge A sA s

VoltVolt VV Electric potential differenceElectric potential difference W/AW/A

OhmOhm ΩΩ Electric ResistanceElectric Resistance V/AV/A

FaradFarad FF Electric CapacitanceElectric Capacitance C/VC/V

WeberWeber WbWb Magnetic fluxMagnetic flux Kg mKg m22 s s-2-2 A A-1-1

TeslaTesla TT Magnetic Flux densityMagnetic Flux density Wb/mWb/m22

HenryHenry HH InductanceInductance Wb/AWb/A

SiemensSiemens SS Electric ConductanceElectric Conductance ΩΩ-1-1

BecquerelBecquerel BqBq RadioactivityRadioactivity ss-1-1

GrayGray GyGy Adsorbed Dose (of ionizing radiation)Adsorbed Dose (of ionizing radiation) J/kgJ/kg

SievertSievert SvSv Equivalent Dose (of ionizing radiation)Equivalent Dose (of ionizing radiation) J/kgJ/kg

KatalKatal KatKat Catalytic activityCatalytic activity Mol/sMol/s

Degree of CelsiusDegree of Celsius 00CC Thermodynamic TemperatureThermodynamic Temperature KK


Convert Measurement Units of LengthConvert Measurement Units of Length Meter to Inches Meter to Inches

multiply by 39.37multiply by 39.37

Meter to Feet Meter to Feet multiply by 3.281multiply by 3.281

Meter to Yards Meter to Yards multiply by 1.094multiply by 1.094

Meter to MilesMeter to Miles multiply by 6.214 E-4. multiply by 6.214 E-4.


Convert Measurement Units of MassConvert Measurement Units of Mass Kilogram to PoundKilogram to Pound

Multiply by 2.204621 Multiply by 2.204621