Handbook of Optical Constants of Solids

Edited by

EDWARD D. PALIK

Naval Research Laboratory Washington, D.C.

ACADEMIC PRESS, INC. Harcourt Brace Jovanovich, Publishers

Boston San Diego New York London Sydney Tokyo Toronto

Contents

List of Contributors Preface

xv xvii

Part I DETERMINATION OF OPTICAL CONSTANTS

Chapter 1 Introductory Remarks EDWARD D. PAUK

I. Introduction II. The Chapters

III. The Critiques IV. The Tables V. The Figures of the Tables

VI. General Remarks References

Chapter 2 Basic Parameters for Measuring Optical Properties ROY F. POTTER

I. Introduction II. Intrinsic Material Parameters in Terms of Optical Constants

III. Reflectance, Transmittance, and Absorptance of Layered Structures

IV. The General Lamelliform—Phase Coherency Throughout V. The General Lamelliform—Phase Incoherency in Substrate

VI. Summary Appendix A. Basic Formulas for Fresnel Coefficients Appendix B. General Formulas for the Case of a Parallel-Sided Slab Appendix С Reflectance, RJk aij-k Interface Appendix D. Reflectance of Single Layer on Each Side of a Slab and Single

Layer on Either Side of a Slab Appendix E. Critical Angle of Incidence

Definition of Terms References

3 4 5 6 7 8 9

11

11 16

18 19 21 24 24 25 26

26 30 33 34

Chapter 3 Dispersion Theory, Sum Rules, and Their Application to the Analysis of Optical Data D. Y. SMITH

I. Introduction II. Optical Sum Rules and Their Physical Interpretation

35

36 36

I

VIII Contents

III. Finite-Energy Sum Rules IV. Sum Rules for Reflection Spectroscopy V. Analysis of Optical Data and Sum-Rule Applications

VI. Summary References

45 51 55 64 64

Chapter 4 Measurement of Optical Constants in the Vacuum Ultraviolet Spectral Region

W. R. HUNTER

I. Introduction II. General Discussion of Reflectance Methods

III. Reflectance Method for Two Media References

69

69 70 85 87

Chapter 5 The Accurate Determination of Optical Properties by Ellipsometry

D. E. ASPNES

I. Reflection Techniques; Background and Overview II. Measurement Configurations

III. Accurate Determination of Optical Properties: Overlayer Effects IV. Living with Overlayers V. Eliminating Overlayers

VI. Bulk and Thin-Film Effects; Effective-Medium Theory VII. Conclusion

References

89

89 92 96 99 102 104 108 110

Chapter 6 Interferometric Methods for the Determination of Thin-Film Parameters

JOSEPH SHAMIR

I. Introduction II. Basic Principles

III. Nonlaser Interferometers IV. Kösters-Prism Interferometers V. A Self-Calibrating Method

VI. Surface Effects VII. Conclusions

References

113

113 114 117 123 126 131 132 133

Chapter 7 Thin-Film Absorptance Measurements Using Laser Calorimetry

P. A. TEMPLE

I. Introduction II. Single-Layer Films

III. Wedged-Film Laser Calorimetry IV. Electric-Field Considerations in Laser Calorimetry V. Entrance versus Exit Surface Films

135

135 138 139 143 147

Contents ix

VI. Experimental Determination of af, erf, and afs References

149 153

Chapter 8 Complex Index of Refraction Measurements at Near-Millimeter Wavelengths GEORGE J. SIMONIS

I. Introduction II. Fourier Transform Spectroscopy

III. Free-Space Resonant Cavity IV. Mach-Zehnder Interferometer V. Direct Birefringence Measurement

VI. Overmoded Nonresonant Cavity VII. Crystal Quartz as Index Reference

VIII. Conclusion References

155

155 156 161 163 164 165 165 167 167

Chapter 9

i. п.

in. IV.

The Quantum Extension of the Drude-Zener Theory in Polar Semiconductors B. JENSEN

Introduction Quantum Theory of Free-Carrier Absorption Theoretical Results Comparison with Experimental Data Appendix References

169

169 172 174 176 187 188

Chapter 10 Interband Absorption—Mechanisms and Interpretation DAVID W. LYNCH

I. Introduction II. One-Electron Model

III. Electron-Hole Interaction, Excitons IV. Local Field Effects V. Examples

References General References

189

189 190 198 203 204 210 211

Chapter 11 Optical Properties of Nonmetallic Solids for Photon Energies below the Fundamental Band Gap SHASHANKA S. MITRA

I. Introduction II. Infrared Dispersion by Polar Crystals

III. Kramers-Kronig Dispersion Relations IV. Determination of Absorption Coefficient

in the Intermediate Region V. Absorption Coefficient in the Transparent Regime

VI. Multiphonon Absorption

213

213 215 227

229 230 232

Contents

VII. Infrared Absorption by Defects and Disorders VIII. Infrared Dispersion by Plasmons

References

254 263 267

Part II CRITIQUES

Subpart 1 Metals

i. и.

in.

IV.

vi.

VII.

VIII.

IX.

XI.

XII.

Comments on the Optical Constants of Metals and an Introduction to the Data for Several Metals DAVID W. LYNCH AND W. R. HUNTER

Introduction Anomalous Skin Effect References Copper (Cu) References Gold (Au) References Iridium (Ir) References Molybdenum (Mo) References Nickel (Ni) References Osmium (Os) References Platinum (Pt) References Rhodium (Rh) References Silver (Ag) References Tungsten (W) References

275

275 277 279 280 280 286 287 296 296 303 304 313 314 324 324 333 334 342 342 350 351 357 358

The Optical Properties of Metallic Aluminum D. Y. SMITH, E. SHILES, AND MITIO INOKUTI

I. General Features II. Optical Measurements and Sample Conditions

III. Tabulated Data References

369

369 372 377 383

Subpart 2 Semiconductors

Cadmium Telluride (CdTe) EDWARD D. PAUK

409

References 413

Gallium Arsenide (GaAs)

EDWARD D. PALIK

References

Gallium Phosphide (GaP)

A. BORGHESI AND G. GUIZZETTI

References

Germanium (Ge)

ROY F. POTTER

References

Indium Arsenide (InAs)

EDWARD D. PALIK AND R. T. HOLM

References

Indium Antimonide (InSb)

R. T. HOLM

References

Indium Phosphide (InP)

0 . J. GLEMBOCKI AND H. PILLER

References

Lead Selenide (PbSe)

G. BAUER AND H. KRENN

References

Lead Sulfide (PbS)

G. GUIZZETTI AND A. BORGHESI

References

Lead Telluride (PbTe)

G. BAUER AND H. KRENN

References

Silicon fSh

xi

429

432

445

449

465

469

479

481

491

494

503

506

517

518

525

528

535

538

547

DAVID F. EDWARDS

References 552

xii Contents

Silicon (Amorphous) (a-Si) 571

H. PILLER

References 573

Silicon Carbide (SiC) 587

W. J. CHOYKE AND EDWARD D. PALIK

References 589

Zinc Sulfide (ZnS) 597

EDWARD D. PALIK AND A. ADDAMIANO

References 602

Subpart 3 Insulators

Arsenic Selenide (As2Se3) 623

D. J. TREACY

References

Arsenic Sulfide (As2S3)

D. J. TREACY

References

Cubic Carbon (Diamond)

DAVID F. EDWARDS AND H. R. PHILIPP

References

Lithium Fluoride (LiF)

EDWARD D. PALIK AND W. R. HUNTER

References

Lithium Niobate (LiNb03)

EDWARD D. PALIK

References

Potassium Chloride (KCl)

625

641

644

665

668

675

678

695

697

703

EDWARD D. PALIK

References 706

Contents xiii

Silicon Dioxide (Si02), Type a (Crystalline) 719 H. R. PHILIPP

References 721

Silicon Dioxide (Si02) (Glass) 749 H. R. PHILIPP

References 752

Silicon Monoxide (SiO) (Noncrystalline) 765 H. R. PHILIPP

References 766

Silicon Nitride (Si3N4) (Noncrystalline) 771 H. R. PHILIPP

References 772

Sodium Chloride (NaCI) 775 J. E. ELDRIDGE AND EDWARD D. PAUK

References 779

Titanium Dioxide (Ti02) (Rutile) 795 M. W. RIBARSKY

References 798