Industrial Excimer Lasers

Total Metal/Ceramic SUPERCHAMBER II Industrial lasers feature additional technology to improve gas, optics and system lifetimes. Including ♦ High Speed Laser Blower ♦ Soft gas discharge ♦ Generation II Corona Pre-Ionization ♦ Active gas cleanup ♦ Industrial grade electronic power modules ♦ Beam line connections

GAM LASER, INC GAM LASER, INC Hard ScienceHard Science

Excimer laser -Industrial Versions

EX10IN Specifications

PARAMETER ArF KrF XeCl XeF

Wavelength nm 193 248 308 351

Energy Max. mJ 20 35 15 12

Energy Control Range, mJ 5-20 10-35 7-15 7-12

Average Power EX10IN/300 4.0 7.0 3.0 3.0

Average Power EX10IN/600 7.0 13.0 6.0 6.0

Average Power EX10IN/750 9.0 18.0 8.0 8.0

Repetition rate Hz 300/600/750

Dynamic gas lifetime1 20E6 35E6 20E6 20E6

Static gas lifetime1 60 days 90 days > 12 months 90 days

Pulse length, ns 15

Beam Size, mm 8 x 3-4

Divergence, mRad full angle 1 x 2

Stability2 < 2% standard deviation

Cooling Air

Optics service 500E6 1000E6 100E6 200E6

Tube service > 3 Billion pulses

Dimensions: 61 X 40 X 27cm (L X W X H) Power Requirements: 95-135 and 185-240 VAC, 8A/15A, 47/63Hz. Weight 40Kg

GAM LASER, INC GAM LASER, INC Hard ScienceHard Science

Industrial Excimer Lasers

GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700

Email : Sales@ gamlaser.com Web : www.gamlaser.com

MADE IN USA

Copyright © 2005 GAM Laser Inc.,

PARAMETER F2 ArF KrF XeCl XeF

Wavelength nm 157 193 248 308 351

Energy Max. mJ 2.5 35 50 20 20

Average Power @ 250Hz 0.5 5 10 5 5

Average Power @ 500Hz 1 10 20 9 9

Average Power @ 750Hz 1.5 14 28 12 12

Dynamic gas lifetime1 10E6 20E6 35E6 20E6 20E

6

Static gas lifetime1 15 days

90 days

120 days

> 6 months

120 days

Pulse length, ns 10 17-20

Beam Size, mm 9 x 4

Divergence, mRad full angle 0.8 x 1.6

Stability2 < 2% standard deviation

Cooling Air/Water

Optics service 1000E6

1000E6

1000E6 200E6 300

E6

Tube service 3 Billion pulses

EX50IN Specifications

1) To 50% energy 2) <1% at Max Voltage

Dimensions: 78 X 43 X 34cm (L X W X H) Power Requirements: 250/ 500Hz 95-240 VAC, 8/15A, 47/63Hz 1000Hz 208-240 VAC 15A 47/63Hz Weight 48kg.

Dimensions and electrical service

The EX50 gives high performance in a lightweight compact package. The laser is only 78 cm long. The entire laser including the vacuum pump is packaged in one table top unit..

Industrial Excimer Lasers

GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700

Email : Sales@ gamlaser.com Web : www.gamlaser.com

MADE IN USA

PARAMETER F2 ArF KrF XeCl XeF

Wavelength nm 157 193 248 308 351

Energy Max. mJ 1.5 12 20 7 5

Average Power @ 250Hz 0.5 2.4 4 5 5

Average Power @ 500Hz 1 4 8 9 9

Average Power @ 750Hz 1.5 5 10 12 12

Dynamic gas lifetime1 10E6 20E6 35E6 20E6 20E

6

Static gas lifetime1 15 days

90 days

120 days

> 6 months

120 days

Pulse length, ns 10 17-20

Beam Size, mm 9 x 4

Divergence, mRad full angle 0.8 x 1.6

Stability2 < 2% standard deviation

Cooling Air/Water

Optics service 1000E6

1000E6

1000E6 200E6 300

E6

Tube service 3 Billion pulses

EX5IN Specifications

1) To 50% energy 2) <1% at Max Voltage

Dimensions and electrical service

The EX5 gives high performance in a lightweight compact package. The laser is only 47 cm long. The entire laser including the vacuum pump is packaged in one table top unit..

Dimensions: 47 X 25 X 25cm (L X W X H) Power Requirements: 95-135 and 185-240 VAC, 2.5A/5A, 47/63Hz. Weight 15Kg