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µ-Contact Printing System µCP2.1

short overview of the current status

GeSiM mbH, February 2008

µ-Contact Printing System µCP2.1stamps with PDMS-membrane, scaled in the nm to µm range

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compressed air

a) Basic Mode: PDMS-membran planar b) Print-Mode: PDMS-membran deflected

Stamp Chamber

PDMS-Membran

Stampframe

Stampholder Stamp Chamber

nm/µm Patterns

SEM picture Si-Master Master in Casting Staion Casting of PDMS-Stamp PDMS-Stamp µCP-Stamping Unit

µ-Contact Printing System µCP2.1stamp in touch with glass slide

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PDMS-Stampframe not patterned

PDMS-Stamp10µm lines, 20µm pitch

1mm Slide

PDMS - Stamp

Microscope

a) scheme "PDMS-Stamp on Slide" b) photograph shows PDMS-Stamp and slide perfectly in touch, stamp area (1x1) cm²

Remarks:

The system µCP2.1 guarantees reproducible and perfect contact between the PDMS-stamp and the substrate.

The USER of µCP2.1 has to develope the surface chemistry to transfere samples, nano-particles, molecules, bacteria, viruses or cells onto the biochip.

µ-Contact Printing System µCP2.1accessories top view

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Stamp - Casting Station

Stamp - Washing StationµCP-2.1 Accessories

µ-Contact Printing System µCP2.1µm- scaled stamps made in PDMS

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Fig.1: 10µm x10µm PDMS-mesa structures, a view onto a real stamp surface

Fig.2: Donut structures, Ø 50µm, a view onto a real stamp surface

µ-Contact Printing System µCP2.1foot print of µCP2.1

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Stamp1 Stamp2 Stamp3 Stamp4

Inking-Station

Sample Pad

Dry-Station

Slide-Tray

Stamping- Unit

M 1M 2

N2-blow-dry

vernier drive in y-axis

vernier drive in x-axis

M 1: drive inking M2: drive stamping

Top View µ-ContactPrinting System µCP2.1Dimensions in total LxWxH= (42x40x35)cm³

µ-Contact Printing System µCP2.1system housing

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µ-Contact Printing System µCP2.1photographs of the real device

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• (a) inking station with 4 ink pads

• (b) drying nozzles, two per stamp

• (c) stamping unit

General View on µCP2.1 a

b

c

Stamping Unit

Slide Tray

Microscope

µ-Contact Printing System µCP2.1a video-microscope is implemented from below

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µCP2.1 mit Videomikroskop(currently the chassis is under develeopment, thevisible one is a test approach only!)

X-Y-Slide Tray and Stamp Head

µ-Contact Printing System µCP2.1nano- and micro imprint on the same platform

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µCP2.1 with an UV-light sourceThe commercial µCP2.1 will be equipped with a manually

driven slider, which holds video-microscope and UV-source.

As UV-light source we recommend a system from DELO

GmbH Germany, for example the system DELOLUX 80.

µ-Imprinting with the System µCP2.1imprinting of thin polymer films

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50µm

Fig.1: 1,0µm thick polymer film of an UV-active ink, coated on a standard glass slide, structure was made by µ-imprinting using a PDMS-stamp, film thickness 2µm, lateral dimensions of the squares25x25µm², the connecting lines are 2µm wide (Inkcomposition: 4-(2-[4-[2-[2-Cyanophenyl)-vinyl]-phenyl]-vinyl)-benzonitril, diluted withTetrahydrofuran)

40µm

Fig.2: 1,0µm thick polymer film of an UV-active ink, coated on a standard glass slide like fig.1, lines width 20µm, pitch 40 µm

µ-Imprinting with the System µCP2.1imprinting of spin coated photo restist films

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Fig.3: Imprinted photo resist AZ-4562, 8µm thick, on glass slidePDMS-Stamp: height of structures10µm, lateral dimensions of the squares 25x25µm², the connectinglines are 2µm wideMethod: spin coating of a high viscous photo resist on a glass slide, imprinting the PDMS-stamp into the wetresist, drying at RT without UV-radiation on air for 5min Remark: in pictures 3 a status is shown, where theimprinted resist is not back etched by RIE

scale bare: 50µm

Fig.4: Imprinted photo resist AZ-1514, 0.5µm

thick on glass slidePDMS-Stamp: like fig.3Method: like fig.3 Remark: in picture 4 a status is shown, wherethe imprinted resist is not back etched by RIE

µ-Contact Printing System µCP2.1µm- scaled stamps made in PDMS

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25x25µm²Quadrate

2µm Stege

Fig.5: µ-Contact-Print on hydrophilicglass slide using an PDMS-stamp inkedwith a water based CY3-labeled buffersolution, stamp area 1x1cm², thestamp pattern consists of thousands of squares and connecting lines (see thedetail on the right), the stamp gets in contact with the slide approx. 1 min after the inking procedureMethod: a) inking of PDMS-stamp for1min, b) drying with compressed air 2 bar/30sec, c) stamp contact at 0,25bar stamp-pressure/ 60sec. contact time

Fig.6: second contact print with thesame stamp and method of fig.5 without nearly inking step

Fig. 7: third contact print with the samestamp and method of fig.5 withoutnearly inking step

µ-Contact Printing System µCP2.1µ-Contact-Printing and parallel shifts of the substrate

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A

ØA

2

x A

A

Ø

A

2 x

A

Pattern: A=100

Fig. 8: µ-Contact-Print on hydrophilic glass slideusing an PDMS-stamp inked with a water basedCY3-labeled buffer solution, stamp area 1x1cm²Method: 2-STEP µ-Contact-Print with parallel shift of 600µm in the y-axis, PDMS-stamp: squares and circles are 100µm forparameter A (see detail drawing above) Remark: µCP2.1 allows a manually x-y-shift in single steps of 500nm

Fig.9: µ-Contact-Print on hydrophilic glass slide using an PDMS-stamp inked with a water based CY3-labeled buffer

solution, stamp area 1x1cm²Method: 2-STEP µ-Contact-Print with parallel shift of 1200µm in the y-axisPDMS-stamp: squares and circles are 200µm for parameterA (see detail drawing above)

µ-Contact Printing System µCP2.1µ-Contact-Printing to transfer nano-particles

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3µm 8µm

Fig.11: µ-Contact-Printing of spherical gold nano-particles (Ø=37nm, diluted in water) on a hydrophilic glass slide, PDMS-Stamp: no O2-plasma treatment stamp-design consists of thousands of 8x8µm² mesa structures, which are 10µm high (see the detail in fig.11), the photograph was created by dark-field upright microscopy, nano-particle clusters appears in red

Method: a) inking of the PDMS-stamp, for 60sec using 40µl of the nano-particle solution, b) drying of the PDMS-stamp with compressed air 2,0 bar/30sec, c) contact printing, stamp pressure 1,2 bar /contact time 60 sec

µ-Contact Printing System µCP2.1µm- scaled stamps made in PDMS

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25x25µm²Quadrate

2µm Stege

Fig.12: µ-Contact-Printing of spherical gold nano-particles (Ø=37nm, diluted in water) on a hydrophilic silicon chip, PDMS-stamp is not O2-plasma treated, stamp-design consists of thousands 25x25µm² mesa structures connected with 2µm wide footbridges, the stamp pattern are 10µm high (see the detail in fig.12), the photograph was created by dark-field upright microscopy, nano-particle clusters appears in a light green

Method: a) inking of the PDMS-stamp, for 60sec using 40µl of the nano-particle solution, b) drying of the PDMS-stamp with compressed air 2,0 bar/30sec, c) contact printing, stamp pressure 1,2 bar /contact time 60 sec

µ-Contact Printing System µCP2.1a first result

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Ref.: M. Gepp, H. Zimmermann - IBMT-St.Ingbert and S. Howitz - GeSiM, Großerkmannsdorf, June 2007

Fig.: The glass slide with poly-L-Lysin imprints made with a PDMS-stamp. The stamp carries donut-mesapatterns wetted before with alginat.

Fig.: The slide after a 19 hours cultivation of L929 cells. Each donut reacts as an adhesion point for the cells.

µ-Contact Printing System µCP2.1example of a possible nano-structure Silicon-master

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Approximated Master Price

4“- Silicon wafer with 10 master chipscontaining indically patterns

6.500,- k€