Control PC

(Operator control, data display, data logging, fiber interface to rack) RGA

PC

ELECTRONICS RACK

Fiber Interface:1MB/sec streaming data out32 data lines in4 RS-232 ports

HP Meter

RS232-RS485 Converter

Thickness Monitor

RGA Controller

RelayMUX

SOURCEXFMR

INV PWR SUP

SRC PWR DIAG

PUMP PANEL

Relay Boards:LN2 Flow ControlAir Valve ControlPump PowerPump Alarm Interlock

Micro Lynx StepperController (x2)

Locking

Device

(x6)

Transformer

& Source

(x28)

Source Shutter

(x28)

Thickness

Sensor

Convectron

Locking

Device Panel

(PC104 Control Sys)

PUMP

BLOWER

PUMP

BLOWER 2nd Pump Stack(Future Upgrade)

Cryopanel

(x2)

RTD’s

LN2 Tank

119 gal vent

vent

Shutter Driver

RGA Head

Convectron

Ion Gauge

Convectron

Hi voltage power

Low voltage driver

Data

Air

LN2

480V 3P

Control

480V 3P

RS-232

480V

3P

480V 3P

480V 3P 4COND

RS-485 BUS

RS-485 BUS

RS-485 BUS

RS-485 BUS

RS-485 BUS

208V 3P PWM +/- 180V

To RS-485 BUS

V1

V5 MAN

V4 MOVV3 MOV

V2 AIR

V1 AIR

OPTICALFIBERS

RS-485 BUS

RS-485 BUS

BELL CARRIAGE480V 3P

480V 3P