Download - €¦ · Certification to ISO 14644-1 Class 7 and 8 was achieved for the cleanrooms mentioned above. 95% Upper Confidence Limit calculations also met the requirement of the Standard.

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Page 1: €¦ · Certification to ISO 14644-1 Class 7 and 8 was achieved for the cleanrooms mentioned above. 95% Upper Confidence Limit calculations also met the requirement of the Standard.
Page 2: €¦ · Certification to ISO 14644-1 Class 7 and 8 was achieved for the cleanrooms mentioned above. 95% Upper Confidence Limit calculations also met the requirement of the Standard.