Apollowave Corporation 2010.
Apollowave Corporation
Company profile & Product information
Apollowave Corporation 2010.
Our keywords are
High Frequency
Low leakage and
Temperature
■ Daisho Bldg.4 F, 6-7-8 Nishinakajima,
Yodogawa-ku, Osaka 532-0011 JAPAN
■ T E L/F A X :(81)6-6838-3233/(81)6-6838-3234
■ URL: http://www.apollowave.co.jp
AAppollowave Corporation
About Us
Foundation : February, 2000
Capital : JPY 15,000,000
Location : Daisho Bldg. 4F, 6-7-8 Nishinakajima, Yodogawa-ku, Osaka 532-0011 Japan
Main customers:
NEC Electronics, Omron, Sharp, Sony, Toshiba, Panasonic, Mitusbishi, Rohm, Fujitsu, Renesas Technology and etc.
Osaka University, Tohoku University, Tokyo University, Kyoto University, Nagoya University etc.
2000 Feb. Foundation of Apollowave Corporation
Aug. Development of Gyro Sensor Measurement System
2001 Jan. Development of Semi-Automatic wafer Prober
Mar. Certified as SMBs Creation Act and promotion Company by Osaka pref. with R&D of Vertical RF Probe Card.
Apr. Set up of patent project room at Osaka Prefectural Patent Information Center
Jul. Set up R&D center at Osaka Technology Research Institute and developed RF Probe and Low-leakage Probe.
2002 Jan. Made Prototype 6GHz Probe Card
Oct. Development of TDDB/EM Probe Card
Dec. Capital increased to 150M and prefectural financial group “FORECS” became one of our share holders.
2003 Oct. Grand Prize at Venture’s Economic Development Project Award by Ikeda Bank.
2004 Apr. Certified as SMBs Creation Act and promotion Company by Osaka pref. with development of
“Wafer level EM Evaluation System”.
2005 Feb. Releasing 300mm WLR probing system and Probe card
Oct. Received a special prize at Osaka Frontier award venture of business encouragement division.
2006 Apr. New manual prober model “Alpha” Series were released.
2007 Mar. Releasing model PEM300 as special manual prober for WLR
2008 Apr. Selected as “Vitality Manufacturers 100 of Kansai”.
2009 May. Received a prize “Vitality Manufactures SME 300 of Kansai/Twinkling Manufactures・Small scale” by Ministry
Economy SME Ministry.
Apollowave Corporation 2010.
Manual Probers Product Line
For LCD
Magnet Prober (For MRAM) For WLR Test
RF Prober
α 200 CS
(Ultra low level measurement at hot & cold temperature)
Vacuum Prober
UP to now, APW has developed and provided several type of manual prober to our customers.
Customizing to your requirements is welcomed.
Magnet Prober (For MRAM)
α Series (100/ 200/ 150/ 300)
From ship to 300mm wafer
Apollowave Corporation 2010.
α100
Just Fit point # 1
Compact body W“370 x D370mm
Just Fit point #2
Small wafer, chip and cracked
Wafer as your request!
Just Fit point #3
Variety of wafer chucks and easy
Chuck replacement
Just Fit point #4
Usability
� Precision alignment by accrete
X, Y, Z, θ Stage with micrometer
� Enhancing measurement efficiency by
3-stage Z drive action
� Quick positioning by vacuum grip
Standard Specifications
Stage Travel X: 100mm Y:100mm
Sub-stage travel X:+- 6.5mm Y:+-6.5mm
Wafer chuck Diameter 110mm/ thickness:5mm
Wafer hold Vacuuming
Z-stage travel Fine: 5mm / Coarse:5mm
Θ-stage travel 360 degree. / Fine: +-5deg.
Dimension & Weight W320*H300*D355mm / 25Kg
(Height : without microscope)
Features and specifications
Hot Chuck
Thermo Chuck
Norma Chuck (SUS)
Chuck for film
Resinous Chuck
And etc…
In-Circuit
Board holder
Just Right, Just Fit!
Vacuum grip Lever for plate
Apollowave Corporation 2010.
α150/ α200
� Optics system selection
Efficient alignment by 3-position Z axis drive action
“0” to contact the target (after first alignment, no need to make Z-axis alignment)
“0.3mm” to change the target (just right distance without losing focus through microscope
while stage is moving). “5mm” to load/unload wafer or other sample safely.
Precise alignment
X, Y, Z, Theta stage with accurate micrometer. It also enables easy alignment for using probe
card.
Quick positioning
Operator can move XY stage freely by stage knob and hold tightly by releasing hand from the
switch. XY travel range is equal to the chuck size.
High
Magnification
Micro-zoom Stereomicroscope
*Front opening type
For easy wafer load/ unload
*Robust Platen
A150/200 is designed to mount max.4pcs of
M60 micro-manipulators as standard
*Shock absorber
Used for soft contact probing to prevent
damage to the device.
Apollowave Corporation 2010.
RF Probe Station α―RF
M 60M 60M 60M 60 SpecificationsSpecificationsSpecificationsSpecifications
Fixation Magnet base or Screw type
Stroke XYZ+-6.5mm, Theta 360deg
Movement 0.5mm/REV
Linearity 3um
Resolution 10um
Vacuum adsorption (400mmHg≦) Wafer holding
6inches Chuck diameter
X:14mm, Y:14mm Sub stage travel
X:150mm, Y:150mm Stage travel
40KGS Body Weight
D:550mm W:500mm H:330mm Dimension
RFRFRFRF parameter measurement in
frequency range up to 40 GHz
Standard configuration
� αSeries prober base (α100,150,200)
� From “4 up to 8” wafer chuck
� Microscope
� RF micromanipulator (M60)
W.E = RF Probe (GGB) / N.S=DC (AW Probe)
Micro manipulator M60 supports precise
measurement for high frequency test.
Features M60
� Accurate probing by high linearity
� RF & DC measurement is available
� X-Y-Z Theta adjustable
� Compatible with most of RF probe heads
* Optimum with micromanipulator model M60RF
(X,Y,Z,θ adjustment mechanism) for accurate probing.
Type α-RF is compatible with various type of RF probe head. We
provide DC probe head (Multi-Contact Wedge type) with quick
delivery.
α150
Apollowave Corporation 2010.
Extract application of αseries
Triaxial Probe
Connector Triaxial
Tip diameter 5 to 40 um
For more precise measurement
Low leakage measurement
M20 with tungsten probe needles
For fA level IV and CV measurement
Standard configuration
� αSeries prober base (α100,150,200)
� 4inch or 6inch wafer chuck
� Microscope
� Micro positioner (M20) (M30) (M40)
� Triaxial probe
� Triaxial connector panel
� Tungsten probe needles
Specifications M 20 (R) (L) M30 (R) (L) M40 (R) (L)
Fixation Magnet rubber base Magnet base Magnetic base
(with ON/OFF lever)
Stroke XYZ+-5mm XYZ+-3.2mm XYZ+-6.5mm
Movement 0.5mm/REV 0.5mm/REV 0.5mm/REV
Linearity 30um 3um 1um
Remark Without micrometer Resolution/ 10um Resolution/ 10um
Micropositioner M20 Micropositioner M30 Micropositioner M40
Apollowave Corporation 2010.
Extract application of αseries
Mounting -55 to +300deg.C (option) Thermo-chuck
Mounting max. 9pcs of positioners available.
Switch units such as Agilent ASU/RSU,
Keithley PreAmp can be mounted close to probe.
Addressing pulse IV and high speed NBTI tester
Using APW ultra low leak probe card
Compact Shield enables Ultra Low Level
measurement in wide operation temperature range.
α200CS
General Specifications Model α200CS
Stage travel X:200mm Y:200mm
Sub-stage travel X:+-14mm Y:+-14mm
Wafer chuck Diameter200mm (4 to 8”)
Wafer hold Vacuuming (>400mm Hg)
Dimension & Weight W 610* H 390* D 685mm
(Height: without microscope)
71Kg (w/o microscope &chuck)
Leak data in the compact shield
I-T test dasta
I1 9
- 1 .5 0 E- 1 4
- 1 .0 0 E- 1 4
- 5 .0 0 E- 1 5
0 .0 0 E+ 0 0
5 .0 0 E- 1 5
0 2 0 4 0 6 0 8 0 1 0 0 1 2 0
時 間 ( s)
I(A
)
Apollowave Corporation 2010.
Dedicated equipment for WLR
Compact chamber for saving N2 consumption
PEM300
Easy wafer load / unload Chuck stage
comes out from chamber.
All operations can be made in front of
operator safely and alignment as well.
Mounting CCD camera with smooth
movement and monitor. CCD travel
range: X.Y 300mm
Heat resistance glass enables
clear alignment by preventing
heat-shimmering generated
from heating,
Integrating APW probe card makes the best WLR solution!
For 300mm full wafer For 200 mm full wafer For 1 Chip measurement
Apollowave Corporation 2010.
For R & D of Organic electronic device, MEMS and Material
Vacuum Prober Specialized for probe card use to measure multiple pads
Compact design
D310*W320*H180mm, WT 8Kg only!
� Multiple of pads can be measured by probe card
� Vacuum :10-5
toll
� Connector panel depended on requirements
� Low current measurement available
Vacuum Prober Vacuum Prober
Mini prober PM20
For vacuum chamber
Easy chip level measurement
For organic electronic device and MEMS sensors
PM20 can be used in vacuum chamber or in oven
Small design (Dia.80mm*H80mm) only!!
Vacuum chamber or Oven
IN
� Multiple pads can be measured by probe card
� Contact 100um pad is available
� Connector panel depended on requirements
� Low current measurement available
� With XYZ (+-2.5mm) and 360 deg.Theta stage
Mini prober PM20
PEL-S1 Simple box type prober for N2 purge
Low cost solution for IV/CV measurement
fA level measurement is available by connecting
Parameter analyzer and LCR meter easily at low
cost
� N2 gas environment is the shielding box is available
� Connector panel depended on requirements
� Low current measurement available
� Incorporating anti vibration table is available
Apollowave Corporation 2010.
Hot Chuck System
Hot Chuck system
Stable data acquired for low current,
low resistance and low capacitance
measurement at high temperature.
Features
・Chuck stage:4 to 12” wafer size
・Accurate temperature control
・Simple configuration and compact system
because chiller is not used.
・Capable of small current measurement.
Thermo chuck system
Chiller cooling type
For high temp. environment requirement from RT to 400deg.C
Controlling from -55deg. C up to +300deg.C
Features
・Chuck stage: 4 to 12” wafer size
・Wide operating temp. by employing both
chiller and heater
・Capable of small current measurement
Thermo chuck system
Peltier module type Controlling from -40deg. C up to +125deg.C
Features
・Chuck stage: 4 to 12” wafer size
・Wide operating temp. by employing both
chiller and heater
・Capable of small current measurement
Material, color and coating of respective wafer chucks will be
decided by material of samples, multi-site or single chip test
and high voltage measurement or normal impressed voltage.
Start Set Time Over shoot Under shoot Set Temp. Time Chiller
20 C 50 C 1’10” 2.0 C 0.2 C 20 C 1’20” 5.0 C
20 C 100 C 5’45” 0.5 C 0.1 C 20 C 3’05” -2.0 C
20 C 0 C 1’25 2.6 C 0.2 C 20 C 0.58” -6.0 C
20 C -20 C 3’28” 1.9 C 0.2 C 20 C 1’12” -7.0 C
Apollowave Corporation 2010.
Probe Cards
Supporting Advanced Wafer Level Test
RF probe card Up to 6GHz
DC Multi Contact Probe
*Free pad location is available.
(No need to be traditional alignment of GSG
or SGS with certain pitch)
*Pitch : Min. 100um
*Pin count: max.20pins
*Probe type: Ceramic blade
*Probe tip material : BeCu, WRe and PD
*Special request is welcomed
Ex. Make a circuit on the strip line.
Connecting ferrite to restrain oscillation.
For parametric test
*Stable measurement date at extreme temp.
*100~200C by using ceramic blade
*Option: Ultra low leakage 10fA
*Max. pin count of 48Pin
( depends on pad layout)
*For more stable measurement, WRe needle
can be used.
For parametric test Covering 300mm full wafer
Because of using ceramic PCB which
has almost the same expansion factor
as silicon makes accurate probing
extensively without misalign in high
temp. Allowing pad pitch of 100um
and pad size of 70 x 70um.
Test temp.350deg.C available
Apollowave Corporation 2010.
Option
High linearity & wide strokes High linearity & compact Low cost / High performance
For EMC & light shielding
Customizing to match existed probe station is available
Choices of accessories to enhance your measurement
Model: M 20 ( R ) or ( L )
*Fixation: Magnetic rubber base
*Stroke: X,Y,Z +-5mm
*Accuracy: 30um
*Movement: 0.5mm/REV
*Exclude Micrometer
Model: M 30 ( R ) or ( L )
*Fixation: Magnetic base
*Stroke: X,Y,Z +-3.2mm
*Linearity: 1um
*Movement: 0.5mm/REV
*Resolution: 10um
Model: M 40 ( R ) or ( L )
*Fixation: Magnetic base
(with ON/ OFF lever)
*Stroke: X,Y,Z +-6.5mm
*Linearity: 1um
*Movement: 0.5mm/REV
*Resolution: 10um
Model: M60
*Fixation: Magnet base or Screw type
*Stroke: XYZ+-6.5mm,Theta 360deg
*Linearity: 3um
*Movement: 0.5mm/REV
*Resolution: 10um
Compatible with major RF probe head
maker’s
Ensure RF probe contact For small current/ Capacitance /RF measurement
Coaxial probe
Connector: SMA
Probe tip dia. 5 to 40um
1set=10pcs
Kelvin coaxial probe
Connector: SSMC
Probe tip dia.:
1 to 40um
Triaxial probe
Connector: Triaxial
Probe tip dia.;
5 to 40um
For DC measurement
L-arm (2types)
Isolated type or
Conductive type
To be used with tungsten probe
Tungsten probe
Probe tip diameter
And probe material
Can be designated
By customer
Shielding
BOX
Standard size:
750*750*1000
mm
Customizing is
Anti-vibration
Table type or Desktop type
For small chip hold chip chuck
Vacuuming small chip
size 200um is available.
In-circuit board holder
Very easy to replace
with wafer chuck
Apollowave Corporation 2010.
Table : Compatibility of peripheral items to alpha series prober
*1 For operating temperature range +-20deg.C <
*2 Adaptor for positoner is necessary
Apollowave Corporation 2010.
J-P-J, J-J-J
TXA (J) – TXA (J)
TXA (P) - BNC (J)
TXA (J) – BNC (P)Straight type
Coaxial adaptor (TRIAX.) Remarks
3m
2m
1 to 3m
1m
<1m
Item Cable lengths
3 to 5m
Up to 3m
New_TXA_Cable
Leak-Time @RT
-3.00E-14
-2.00E-14
-1.00E-14
0.00E+00
1.00E-14
2.00E-14
3.00E-14
0 10 20 30 40 50 60 70
Time[Sec]
Leak[A]
New 0V
New 100V
New -100V
電圧依存性 New_TXA_Cable
Leak-Time @RT
-5.00E-14
-4.00E-14
-3.00E-14
-2.00E-14
-1.00E-14
0.00E+00
1.00E-14
2.00E-14
3.00E-14
4.00E-14
5.00E-14
0 10 20 30 40 50 60 70
Time[Sec]
Leak[A]
振動有り 0V
振動無し 0V
振動の影響確認
J-P-J
Triax. Cable (External dia. 5mm)
TXA (P)-TXA (P)
Guaranteed leak level: <50fA at 10V
Triax. Cable Special thin line
External dia. 2.8mm, heat-resisting up to 200deg.CTXA(P) –TXA (P) Guaranteed leak level : <50fA at 10V
Low noise triaxial cable
Equivalent ability to tester maker’s products
External diameter: 3.3mmTXA(P)-TXA(P) Guaranteed leak level : <10fA at 10V
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Outer floating
Outer floating
Inner floating
Straight type
Inner floating
Triaxial (T) type adaptor
SMA (T) type adaptor Au plating
�Lead time: please ask APW
�Changing cable length or assembly method is available
�All triax. connectors are 3 Lug type
�“J “ means Jack and “P” for Plug
�Guarantee leakage is limited to both side triaxial only
Triaxial cable and connector assemblies
Optimum for low noise and low leak measurement
Leakage is guaranteed
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