Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Amtech Systems, Inc.
Nasdaq: ASYS
J.S. Whang Chairman & Chief Executive Officer
Brad Anderson Chief Financial Officer
February 2010
Solar & Semiconductor Solutions
25th LISTING ANNIVERSARY ASYS / NASDAQ
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Safe Harbor Statement Certain statements in the following presentation relate to future results that are forward
looking statements as defined in the Private Securities Litigation Reform Act of 1995.
Actual results may differ materially from those projected as a result of certain risks and
uncertainties, including but not limited to, changes in the technologies used by Amtech’s
customers, change and volatility in the demand for diffusion, PSG and PECVD equipment,
the effect of changing worldwide political and economic conditions on government-funded
solar initiatives, capital expenditures, production levels, including those in Europe and
Asia, the effect of overall market conditions, market acceptance, risks associated with
dependence on suppliers, the impact of competitive products and pricing, technological
and product development risks (including the risks inherent in launching new products)
and other risk factors noted in our forms 10-K, 10-Q, and other filings with the SEC. This
presentation includes historical and forward-looking pro forma information. The Company
assumes no responsibility to update the information contained in this presentation.
This presentation and the information contained herein is the property of Amtech Systems,
Inc.
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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A Market Leading Supplier of Solar Horizontal Diffusion Furnace Systems used for Solar Cell Manufacturing
Partnering with solar manufacturers to achieve higher efficiencies!
Horizontal Diffusion Furnace
Revenue & Backlog
$M
$53
$100-$105 Est.
$74
$32
0
20
40
60
80
100
120
2009 2010 YTD
RevenueBacklog
* FY10 YTD orders include announced orders; FY09 backlog as of 9/30/09; FY10 backlog as of 12/31/09
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Solar Strategy: Expand total available market by becoming the front-end “Technology Turnkey Provider”
Solar Cell Manufacturing Process Flow Chart
4. Etching Oxide (PSG)
5. Applying Anti- Reflective Coating
(PECVD)
6. Printing Rear Side Contacts 7. Drying 9. Drying 10. Printing Front
Side Contacts
11. Drying and Sintering
12. Testing and Sorting
8. Printing Aluminum on Back
Surface Field
1. Inspecting and Splitting Wafers
2. Etching Saw Damage
(Texturing)
3. Diffusion
Legend:
Existing Products
Targeted Products
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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A long-term player: over 26 years listed on NASDAQ
Named to Fortune’s 2009 List of America’s fastest-growing small public companies
Named to Deloitte’s Fastest 500
2008 - 25th Listing Anniversary
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Revenue/Order Trends (in millions)
4046
80
53
100-105
0
20
40
60
80
100
120
2006 2007 2008 2009 2010
Est.
40
55
107
35
78
0
20
40
60
80
100
120
2006 2007 2008 2009 2010
YTD
($M) ($M)
REVENUE (FY) ORDERS (FY)
* Fiscal 2010 YTD orders include announced orders
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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32 33
13
22
4
34
74
22
8
73
0
20
40
60
80
100
120
2006 2007 2008 2009 2010 YTD
• Semi • Solar
Revenue Order Trend (solar/semi)
Transitioned to Solar dominant from Semi
$55M
$40M
$107M
$35M
$78M
* Fiscal 2010 YTD Orders include announced orders
· OEM have comfortable order backlogs. Their plants are fully booked until at least the end of 2008.
· Some players produce diffusion furnaces for R&D labs or small fabs and want to keep this product in their portfolio: ATV Technology (Germany), for example. These kind of manufacturers produce very specific and highly customized products.
· Main players
— The main players are Tempress, Centrotherm, Sierratherm, SEMCO, SVCS.
— “Others” category integrates players such as Schmid, BTU, Koyo, Sevenstar, Tecnofimes, MRL.
Diffusion furnace market shares in 2008
Share of the capacity to sell in 2008
©2008• 150
Tempress
(Amtech)
39%
Centrotherm 33%
Sierratherm 12%
Semco 6%
SVCS 5%
Others 5%
Market study by Yole Development
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Significant SOLAR business opportunity Large emerging solar market
Grid parity expected to be reached in 3 - 5 years
A market leader in solar DIFFUSION processing systems
Gaining market share with newly developed DIFFUSION TECHNOLOGY
On course to become technology turnkey provider with: New Diffusion Technology
New solar DEPOSITION product (anti-reflective coating system – PECVD)
New solar DRY ETCH product (PSG removal)
$42 million in cash at 12-31-09 to support growth initiatives
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Solar Industry Segments
MEMC, Hemlock, Wacker, REC, Tokuyama, SUMCO
Silicon Ingots and Wafers
COMPANY DOING BUSINESS IN THAT SEGMENT
MEMC, Wacker, REC, LDK, SUMCO, Yingli, M.SETEK, ReneSola
Kyocera, DelSolar, Q-Cell, E-ton, CSI, Motech, Yingli, Sharp, Trina, BP Solar, SolarWorld, GE Energy, Evergreen Solar, SunPower
Amtech Systems (Tempress®), CentroTherm, Roth & Rau, BTU International, 48th Institute
Sharp, Q-cell, Kyocera, Suntech, Yingli, Sunpower, SolarWorld, Evergreen, ErSol, CSI
Polycrystalline
Solar Cells
Solar Modules
Solar Cell Prod. Equip.
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Amtech History (Diffusion Experts) 1981 Founding of Amtech Systems, Inc., semi quartz consumable
business.
1983 Acquired Intel Corp invention: Diffusion processing tool (ATMOSCAN).
1994 Acquired Tempress® Systems: Diffusion furnace business.
1997 Acquired P.R. Hoffman®, silicon polishing consumable business.
2004 Acquired Bruce Technologies® from Hitachi Kokusai; Diffusion furnace business.
2005 Became No. 1 semi horizontal Diffusion company in the world.
2006 Entered Solar Diffusion market using core semiconductor diffusion competency.
Acquired R2D™ Ingenierie SAS; Solar Diffusion Automation. 2007
Introduced Solar PECVD. 2008
Introduced Solar Dry Etch (PSG removal) product. 2009
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Solar Market Opportunity & Growth Strategy
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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5.36 5.16
8.34
12.09
19.42
29.95
5.23 3.54
5.05
8.77
16.36
25.90
0.00
5.00
10.00
15.00
20.00
25.00
30.00
35.00
2008 2009 2010 2011 2012 2013
13
iSuppli Total PV Installations (Nov 09)
iSuppli Total PV Installations (May 09)
Data: Energy Information Administration PV-tech.org, ISuppli Corp, November 14, 2009
Solar Industry Installation Forecast
(In GWs)
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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China’s Domestic PV Demand Potential
Data Source: GTM Research September 2009
242
679
1050
1406
461
1171
1823
2461
0
500
1000
1500
2000
2500
3000
2009 2010 2011 2012
BaseDemandScenario UpsideDemandScenario
(In MWs)
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Global PoliSi Capacity
0
50
100
150
200
250
300
2008 2009 2010 2011 2012 2013 2014
Poly
Si M
etric
Ton
s (th
ousa
nds)
ConservativeAll News
With 4 billion US$ in announced expansions, projects reaching manufacturing capacities of 63,000 metric tons by 2014 at its plants in Michigan and Tennessee - up from its current capacity of just under 30,000 MT.
Hemlock Semiconductor VP Gary Homan:
by Homan
Data Source: PV Tech – www.pv-tech.org September 2009
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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— Renewable Energy push by all G-8 and G-20
— Energy Security & Independence Issue
— Economic Stimulus Plan focuses on Solar industry
— Creating True New Jobs
— 30% Tax Credit, No Cap; $3 Billion in tax grants
— Solar Energy Cost achieving Grid Parity within next 5 years
— Record low interest rate around the world
— Solar Value Chains largely remain focused on future growth
Solar Fundamentals Remain Intact
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Diffusion Furnace, PSG & PECVD
Furnace Automation & Wafer Handling Systems Wafer Carriers
Silicon Wafers Solar Cells & Semiconductor Chips
®
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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52%
28%
20%
68%
16%
16%
67%
19%
14%
Customer Base: Asia-Focused
Largest Customer (% of Rev)
FY09: 25%
FY08: 20%
FY07: 13%
Asia
Europe
North America
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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$0
$20
$40
$60
$80
$100
$120
2006 2007 2008 2009 2010 Est
Summary of Annual Net Revenue R
even
ue
Fiscal Year (Oct. 1 Sep. 30)
($ in Millions)
$46M $40M
$100 -$105M *
$80M
$53M
* Guidance reaffirmed 2-10-10
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-0.3
1.3
2.42.9
-1.6
0.5
2.2 2.3
5.1
1.2
($2.0)
($1.0)
$0.0
$1.0
$2.0
$3.0
$4.0
$5.0
$6.0
2005 2006 2007 2008 2009
Annual Earnings Summary $
In M
illio
ns
GAAP Net Income (Loss) EBITDA (before impairment & restructuring charges)
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Balance Sheet
(In Millions)
9.0
$7.21
$73.7
$0.2
$91.7
$42.5 Cash and cash equivalents
Total assets
Total debt
Shareholders’ equity
Shares outstanding
Tangible BV per share
December 31, 2009
Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.
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Significant SOLAR business opportunity Large emerging solar market
Grid parity expected to be reached in 3 - 5 years
A market leader in solar DIFFUSION processing systems
Gaining market share with newly developed DIFFUSION TECHNOLOGY
On course to become technology turnkey provider with: New Diffusion Technology
New solar DEPOSITION product (anti-reflective coating system – PECVD)
New solar DRY ETCH product (PSG removal)
$42 million in cash at 12-31-09 to support growth initiatives
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