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Parylene coatings for enhancedreliability of electronics
Alan Hardy, Electronics Market Manager
SEMICON Taiwan2011
September 9, 2011
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AgendaParylene
- History
- Overview of Specialty CoatingSystems
- What is it?
- Why coat with it?- How is it applied?
- Properties and benefits
- Industries and applications
Adhesion Technologies
Advanced Parylene Applications
Conclusion
Questions & Answers
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History of Parylene Dr. WM Gorham at Union Carbide Corporation (UCC) in late 1940s
Dr. Gorham announced the vapor deposition polymerization (VDP) process
Coating process that bears his name patented in 1967
Nova Tran Corp. purchased license agreement from UCC in 1971
Made Parylene VDP a commercial success
Union Carbide Corporation purchased Nova Tran Corp. in 1984
Renamed Specialty Coating Systems in 1991
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SCS is the direct descendant of Union Carbide Corporation
Unbroken transfer of technology and I.P.
Over 40 years of Parylene applications experience
SCS - the global leader in Parylene coating solutions
Parylene variants, coating center locations, process development, coating
technologies, equipment design, regulatory support
SCS controls its own dimer source, quality and formulation
Specialty Coating Systems
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11 Worldwide Centers
North America (5)
Costa Rica United Kingdom
Ireland
Czech Republic
Japan
Singapore
All coating centers use global Manufacturing Standard Procedures
(MSPs) and quality standards
Multiple locations enable SCS to react to changes in requirements,
volume ramp-up or natural disasters
SCS Around the World
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Dielectric strength
Electrically conductive
Antistatic Thermal insulation
Heat dissipating
Radiation shielding Moisture, chemical, fluid barrier
Anti-stiction, low friction
Seal or reduce microporosity Abrasion resistance
Stabilizes components and structures
Biostability and biocompatibility
Why Conformal Coat?
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Conformal Coating Material Considerations Freedom from byproducts
Application temperatures
Cure forces Conformability - uniformity
Control of thickness
Crevice penetration Regulatory/Quality compliance
Biostability/Biocompatibility
Properties of the coating Barrier capabilities
Environmental stability
Sterilizability and bio-acceptability
Minimization of mechanical loading
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A common generic name for a unique series of polymers based on
p-Xylylene
POLY(PARA-XYLYLENE)
A truly conformal, thin, optically clear, inert coating applied in a
vacuum chamber at room temperature
A non-line-of-sight coating that follows molecular level depositionprocess
A chemically pure coating that does not use any catalysts or
leachable materials
What is Parylene?
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Why Parylene? Completely conformal
Ultra-thin and lightweight
Free from pinholes and defects
Moisture & chemical barrier
High dielectric strength
Chemical insolubility
Dry film lubricity
Particle immobilization
Hydrophobicity
Optically clear colorless
Biocompatible and biostable
Chemically pure, inert and free
of catalytic, plasticizer and
solvent residues
No outgassing
No leachable ingredients
No cure forces/stresses
Environmentally friendly
No thermal stresses during
room temperature deposition
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Parylene Variants
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Parylene N High dielectric strength 7,000 V@ 25m
Maximum continuous service temperature 60C
Short term (24 hrs.) maximum service temperature 80C
Coefficient of Friction 0.25
Certifications
IPC-CC-830, MIL-I-46058C and listed on the QPL
USP Class VI and ISO-10993 biological evaluations
Parylene Variants
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Parylene C High dielectric strength 5,600 V@ 25m
Maximum continuous service temperature 80C
Short term (24 hrs.) maximum service temperature 100C
Excellent chemical resistance
Lowest permeability to moisture and gases
Coefficient of Friction 0.29
Certifications
IPC-CC-830, MIL-I-46058C and listed on the QPL
USP Class VI and ISO-10993 biological evaluations
Parylene Variants
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Parylene VariantsParylene D
High dielectric strength 5,500 V@ 25m
Maximum continuous service temperature 100C
Short term (24 hrs.) maximum service temperature 120C
Lowest elongation
Coefficient of Friction 0.31
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Parylene VariantsParylene HT
High dielectric strength 5,400 V@ 25m
UV stable
Lowest dielectric constant & dissipation factor
Highest continuous service temperature 350C
Short term (24 hrs.) maximum service temperature 450C
Coefficient of Friction 0.13
Certifications IPC-CC-830, MIL-I-46058C and listed on the QPL
USP Class VI and ISO-10993 biological evaluations
Parylene HT is a registered trademark of Specialty Coating Systems, Inc.
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Parylene CharacteristicsCrevice Penetration
Parylene C 5 times the diameter
Parylene N 40 times the diameter
Parylene HT 50 times the diameter
Results may vary depending on a number of factors
Acrylics Spray or brush
Silicones Spray or brush
Urethanes Spray or brush
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16TECH BRIEFS WEBINAR DEC. 2010
Parylene Deposition Process
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Parylene Deposition Film grows one molecule at a time
Coating thickness is controllable
- 500 angstroms to 75 microns
Coating thickness is based on dimer
quantity and chamber load
Nominal coating rate is 5 microns/hour
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Parylene Deposition No cure forces
No thermal reactions
No expansion or contraction
Very high degree of penetration/conformity
Under, inside, edges and sides
No liquid phase
No meniscus, no edge effects
Nothing to leach or outgas
Parylene Coating Liquid Coating
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SEMs courtesy of
E.E. Hui, UC Berkeley.
Parylene Characteristics
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Parylene Properties
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Parylene Electrical Properties
Properties ParyleneN ParyleneC ParyleneHT
DieletricConstant
6GHz 2.46 2.54 3.06 3.10 2.10 2.15
DissipationFactor
6GHz 0.0002 0.0010 0.0021 0.0028 0.0015 0.0020Additional Data
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Improvement in Wire Lead & Bond Strength
A bare 1 mil aluminum wire has a
typical bond strength of 3 to 5.5 grams
With a 1 mil coating of Parylene C over
the wire, bond strength increases to
between 60 and 70 grams
Wire-bond strength vs. Parylene C coating
thickness on a hybrid-to-chip lead
0
10
20
30
40
50
60
70
80
0 5 10 15 20 25 30
PullStrength(ingrams)
CoatingThickness (inmicrons)
ParyleneC
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Parylene Barrier Properties
Water Vapor Transmission
P olym er N 2 O 2 CO 2 H 2Pary len e N 3 1 5 .4 8 4 .3 2 1 2 .6Pary lene C 0 .4 2 .8 3 4 3 .3Pary lene H T 4 .8 2 3 .5 9 5.4 E po xy (E R ) 1 .6 4 3.1 4 3 .3Po lyu rethane (U R ) 3 1 .5 7 8 .7 1 ,1 8 1 Sil ico ne (SR ) 1 9 ,6 8 5 1 1 8,1 1 0 1 7 ,7 1 7
Gas Permeabil ity at 25C, (ccmm)/(m 2dayatm)a
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Circuit boards after 144-hour salt fog test, in accordance with ASTM B117- (03).
Parylene Barrier Properties
Uncoated Coated
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Parylene Solvent Resistance
Chemical Tested Parylene N Parylene C Parylene HT10% Nitric Acid, RT 0.1 0.1 0.0
10% Nitric Acid at 75oC 0.2 0.1 0.0
70% Nitric Acid, RT 0.2 0.2 0.0
70% Nitric Acid at 75oC Brittle 1.8 1.2
10% Sulfuric Acid, RT 0.1 0.3 0.0
10% Sulfuric Acid at 75oC 0.2 4.1 0.0
95-98% Sulfuric Acid, RT 0.2 0.4 0.0
95-98% Sulfuric Acid at 75oC 5.3 5.1 2.8
% Swelling
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Parylene Properties
0
1
2
3
4
Effectiveness
Rating
Parylene N Parylene C Parylene HT Filter Cotton Duck
Test Samples
7 days
14 days21 days
28 days
Rating: 0 = None
1= Traces of growth (less than 10%)
2= Light growth (10-30%)
3= Medium growth (30-60%)
4= Heavy growth (60% to complete
coverage)
Test Method: ASTM G-21
Microorganism Resistance
Tested in accordance with Mil-STD 202, Method 302,
test condition B (Temp: 650C, RH: 90-96%)
Moisture Resistance
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0
2
4
6
8
10
12
0 100 250 500 1000 1250 1500 2000
Visua
lco
lor,c
ha
lk,
crac
kratin
g
[Sca
le:
0
Verypoor,
10
Excellent]
UVexposuretime(hrs)
Parylene C
Parylene HT
Parylene films were exposed to radiation from a bank of fluorescent lamps
using the following test parameters:
- Device used: QUV - Type of test: Accelerated weathering
- Test method: ASTM 154 - Irradiance: 0.77 Watts per square meter- Source: UVA 340 lamp
UV Stability
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AgendaParylene
- History
- Overview of Specialty CoatingSystems
- What is it?
- Why coat with it?
- How is it applied?
- Properties and benefits
- Industries and applications
Adhesion Technologies
Advanced Parylene Applications
Conclusion
Questions & Answers
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Adhesion Considerations Adhesion effects all types of applications
Aerospace
Automotive
Electronics
Medical
Military
Properties impacted by poor adhesion Electrical insulation
Chemical resistance
Corrosion protection
Environmental stress protection
Moisture resistance
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Physical and chemical nature of
substrate
Solder masks Cleanliness of substrate
Manufacturing and human
residues
Particle contamination
Factors Affecting Adhesion
Particle was not removed before
Parylene coating and is now
captured
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Mode of coating - solution, vapor, plasma
Cure forces
Stresses in the coating Nature of coating material and coating
formulation
Primer and adhesion promotion
Chemical
Plasma
Abrasion
Factors Affecting Adhesion
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Corrosion of a PCB
Delamination, chipping
Blister
Adhesion Issues
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Failed assembly with spots of poor adhesion Good assembly with strong adhesion (no spots)
Adhesion Issues
Latest Developments in
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AdPro PlusChemical compound applied to a variety of metallic and plastic
substrates (e.g., Stainless Steel, Cobalt-Chromium, Copper, Gold,Iridium, Nitinol, Platinum, Solder, Tin, Titanium, Tungsten,Aluminum, Nickel, Chromium, Brass, Polycarbonate, etc.) as a tielayer prior to the application of Parylene coating.
AdPro PolyChemical compound applied to a variety of polymeric substrates
(e.g., Polyimide, Epoxy, Acrylic, EPDM, etc.) as a tie layer prior tothe application of Parylene coating.
AdPro Plus and AdPro Poly are a registered trademarks of Specialty Coating Systems, Inc.
Adhesion Promotion Technologies
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Adhesion Promotion Technologies
0
1
2
3
4
5
StainlessSteel
(Mirrorlikefinish
#8),24hrs
@50%RH
StainlessSteel
(Mirrorlikefinish
#8),48hrs
@50%RH
StainlessSteel
(Mirrorlikefinish
#8),Autoclave
125C1hr
Titanium Alloy
Grade5(Mil
Finish),24hrs
@50%RH
Titanium Alloy
Grade5(Mil
Finish),50hrs
@50%RH
Titanium Alloy
Grade5(Mil
Finish),Autoclave
125C1hr
1
2.2
0
4.7 4.7
0
4.8 4.8 4.8 4.8 4.8 4.8
SilaneA174 AdProPlus
ASTM
D
3359
2,
MethodB
(0=Poor,5=Excellent)
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Adhesion Promotion Technologies
0
1
2
3
4
5
24hrs@50%RH Autoclave125C1hr
0 0
1.9
3.2
4.9 4.9
SilaneA174 AdProPlus AdProPoly
ASTM
D3359
2,Method
B(0=Poor,5=Exc
ellent)
Polyimide (Kapton)Substrate
DuPont and Kapton are trademarks or registered trademarks of E.I. du Pont de Nemours and Company.
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AdPro Plus solves adhesion
challenges for difficult metallic and
plastic substrates
AdPro Poly a new system that solves
adhesion challenges for Polyimide
substrates
Both enhance the reliability ofminiaturized and advanced
components in all markets
Courtesy of DuPont.
Adhesion Promotion Technologies
DuPont and Kapton are trademarks or registered trademarks of E.I. du Pont de Nemours and Company.
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Industries and Applications
Automotive Coating Applications
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Mass air temperature and pressure
sensors
Emission sensors
Tire Pressure Monitoring Systems
(TPMS)
Diesel fuel heaters
O-rings, seals and engine gaskets
Fuel cell and hybrid electronic
systems
Engine electronics
MEMS sensors
Renewable Energy Coating Applications
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Wind power
Solar/photovoltaic Energy harvesting
Hydropower
Geothermal
Medical Device Coating Applications
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Cardiac assist devices and components
ICDs, pacemakers, VADs
Drug delivery devices
Stents, inhalers (MDI, DPI, nasal)
Cochlear and intraocular implants
Catheters Neurostimulators
Gastric balloons and cuffs
Endotracheal tubes
Laboratory devices
Printed circuit boards
Military/Aerospace Coating Applications
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Military/CommercialMEMS
Sensors
Circuit card assemblies
Motor components
Power supplies
Backplanes
Elastomeric parts
AerospaceSpacecraft and satellite electronics
Cameras and assemblies
International Space Station remote arm componentsSpace Shuttle and International Space Station lab equipment
LED Coating Applications
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Video displays
Electronic billboards
Marine lighting Transportation signage
Outdoor illumination
Vehicle lighting
Commercial refrigeration
Aviation lighting
Electronics Coating Applications
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Printed circuit boards
MEMS wafers
Probes / pins
Rotors / stators
Components
Metal
Brackets
Cables
Ferrite cores
Advanced Parylene Applications
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Chip integration onto flexible
Parylene electrodes
Images courtesy of Dr. Y. C. Tai, Caltech.
Parylene/Platinum retinal
implant electrodes
Parylene Etching
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Anisotropic profile of
55 Parylene
Anisotropic profile of
10 Parylene
ICP etch recipes for low temperature (5C) Parylene etching
Reference: A HIGH ASPECT RATIO, FLEXIBLE, TRANSPARENT AND LOW-COST PARYLENE-C SHADOW MASK
TECHNOLOGY FOR MICROPATTERNING APPLICATIONS
By: S. Selvarasah1, S. H. Chao, C.-L. Chen, D. Mao, J. Hopwood, S. Ryley, S. Sridhar, A. Khademhosseini, A.
Busnaina, and M. R. Dokmeci, Shadow Mask Transducers 2007
Etching Method ParylenePlasma (200 mT, 400W) 0.19 m/min
RIE (100 sccm, 200mT, 400W) 0.56m/min
DRIE (60 sccm, 23mT, 800W) 0.77m/min
Conclusion
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Parylene ultra-thin conformal coatings are being used more than ever to
protect devices and components and enhance the reliability of todays and
tomorrows innovative technologies.
Ultra-thin and conformal
Complete encapsulation
No liquid phase
No cure forces
Excellent moisture, chemical and
electrical properties
Low coefficient of friction
Exceptional thermal stability
Superior UV stability
Biocompatible and biostable
Thank you for attending
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Specialty Coating Systems
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Contacts
Mr. Hoon Keat, SCS, SingaporeTel: 65. 6862. 8687; Email: [email protected]
Mr. Alan Hardy, SCS, Indianapolis, USATel: 317. 244. 1200 x 261; Email: [email protected]
Visit Booth 3040 for more information onParylene and Specialty Coating Systems
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