1
Granite table 1000×1500×500, 2.2tons
CFRPSUS
Channel100x50 → 150x75
Level Jack < 5000kg
Dec. 04,’03KEK H. Yamaoka
2
FEM Model
・ Thermal Effect(±1 )℃・ Deformation due to self-weight
・ Resonant frequency
・ P.S.D
1
X
Y
Z
DEC 2 200316:59:38
ELEMENTS
REAL NUM
U
3
Thermal Effect(±1 )℃
1
X
Y
Z
DEC 2 200316:59:38
ELEMENTS
REAL NUM
U
CFRP
SUS
Granite
SUS
SUS Granite CFRPYoung’s modulus(kg/mm2) : 2.1×104 4.8 ×103 1.5×104
Density(×10-6kg/mm3) : 7.85 2.8 1.6Thermal expansion coeff.(×10-6/ ): ℃ 17 8 0.
4
P2 = -6m
1
MN
MX
X
Y
Z
-.579E-05
-.515E-05-.452E-05
-.389E-05-.326E-05
-.262E-05-.199E-05
-.136E-05-.723E-06
0
DEC 3 200314:35:05
NODAL SOLUTION
STEP=1SUB =1TIME=1UY (AVG)RSYS=0DMX =.596E-05SMN =-.579E-05 P1 P2
P1-P2 = 0.23m
Self-weight
1
MN
MX
X
Y
Z
-.247E-05
-.312E-06.184E-05
.400E-05.615E-05
.831E-05.105E-04
.126E-04.148E-04
.172E-04
DEC 3 200314:55:13
NODAL SOLUTION
STEP=1SUB =1TIME=1UY (AVG)RSYS=0DMX =.182E-04SMN =-.247E-05SMX =.172E-04
P1 P2
P2 = +11m
P1-P2 = 4.3m
Self-weight + +1℃
P2 = -23m
P1-P2 = 3.8m
Self-weight + -1℃
CFRP
SUS
GraniteSUS
P2 = +16m
P1-P2 = 4.1m
1
MN
MX
X
Y
Z
0
.247E-05.494E-05
.741E-05.988E-05
.124E-04.148E-04
.173E-04.198E-04
.226E-04
DEC 3 200314:44:11
NODAL SOLUTION
STEP=1SUB =1TIME=1UY (AVG)RSYS=0DMX =.230E-04SMX =.226E-04
P1 P2+1℃
P2 = -16m
P1-P2 = 4.1m
-1℃
5
CFRP→ GFRP or Alumina(Ceramics)
SUS
Granite
SUS → GFRP or Alumina(Ceramics)
GFRP Alumina GraniteYoung’s modulus(kg/mm2) : 4.5×103 1.5×104 3.5×104
Density(×10-6kg/mm3) : 2 2.9 2.8Thermal expansion coeff.(×10-6/ ): ℃ 7, 23 8 7.8
Alumina ceramics, most widely used material among fine ceramics, has same sintered crystal structure (Al2O3) as Sapphire and Ruby. Its application is widely used due to its superb properties such as high insulation, high strength, high wear-resistance and chemical resistance.
6
Ref. Bar Side Plate Base Plate Self-weight +1℃ (Self-weight)+1℃ (Self-weight)-1℃CFRP SUS SUS -5.8 +16.8 +11.0 -22.6CFRP CFRP SUS -4.4 +8.2 +3.8 -12.7CFRP CFRP CFRP -4.2 +7.2 +3.0 -11.5
Alumina SUS SUS -5.8 +18.4 +12.6 -24.2Alumina Alumina Alumina -4.5 +13.2 +8.7 -17.7
GFRP SUS GFRP -6.6 +18.3 +11.7 -24.9
Ref. Bar Side Plate Base Plate Self-weight +1℃ (Self-weight)+1℃ (Self-weight)-1℃CFRP SUS SUS 0.23 4.07 4.30 3.83CFRP CFRP SUS 0.44 2.72 3.15 2.28CFRP CFRP CFRP 0.44 0.96 1.39 0.52
Alumina SUS SUS 0.17 1.54 1.71 1.37Alumina Alumina Alumina 0.18 0.09 0.27 0.11
GFRP SUS GFRP 1.2 0.63 1.81 0.62
Deformation @P2
Difference(P1-P2)
Side plate
SUS
GraniteBase plate
Ref. bar
Unit: m
Unit: m
P1 P2
7
P2 = -4.5m
P1 P2
P1-P2 = 0.18m
P2 = +13m
P1-P2 = 0.09m
P2 = +9m
P1-P2 = 0.3m
Self-weight
+1℃
Self-weight + +1℃
P2 = -18m
P1-P2 = 0.1m
Self-weight + -1℃
P2 = -13m
P1-P2 = 0.09m
-1℃
Alumina
SUS
GraniteAlumina
8
Resonant Frequencies
1
X
Y
Z
DEC 4 200310:39:54
DISPLACEMENT
STEP=1SUB =2FREQ=110.356DMX =.099132
2nd: 110Hz
1
X
Y
Z
DEC 4 200310:40:18
DISPLACEMENT
STEP=1SUB =3FREQ=143.042DMX =.108583
3rd: 143Hz
1
X
Y
Z
DEC 4 200310:40:44
DISPLACEMENT
STEP=1SUB =4FREQ=238.831DMX =.132114
4th: 239Hz
1
X
Y
Z
DEC 4 200310:39:24
DISPLACEMENT
STEP=1SUB =1FREQ=88.008DMX =.09065
1st: 88Hz
CFRP
SUS
Granite
SUS
9
1
X
Y
Z
DEC 2 200316:59:38
ELEMENTS
REAL NUM
U
0.1 1 10 100 10001E-291E-281E-271E-261E-251E-241E-231E-221E-211E-201E-191E-181E-171E-161E-151E-141E-131E-121E-111E-10
Res
po
nse
: P
.S.D
(m2 /H
z)
Frequency (Hz)
X- R X- C X- L Fixed
0.1 1 10 100 10001E-291E-281E-271E-261E-251E-241E-231E-221E-211E-201E-191E-181E-171E-161E-151E-141E-131E-121E-111E-10
Res
po
nse
: P
.S.D
(m2 /H
z)
Frequency (Hz)
Y- R Y- C Y- L Fixed
0.1 1 10 100 10001E-291E-281E-271E-261E-251E-241E-231E-221E-211E-201E-191E-181E-171E-161E-151E-141E-131E-121E-111E-10
Res
po
nse
: P
.S.D
(m2 /H
z)
Frequency (Hz)
Z- R Z- C Z- L Fixed
L CR
Z
Y
X
Fixed
0.5nm/Hz1/2
0.03nm/Hz1/2
0.3nm/Hz1/2
X-direction
Y-direction Z-direction
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