X-Ray Reflectivity Measurement (From Chapter 10 of Textbook 2) %20Principles%20of%20X-...
-
Upload
junior-dominic-morton -
Category
Documents
-
view
220 -
download
0
Transcript of X-Ray Reflectivity Measurement (From Chapter 10 of Textbook 2) %20Principles%20of%20X-...
X-Ray Reflectivity Measurement(From Chapter 10 of Textbook 2)
http://www.northeastern.edu/nanomagnetism/downloads/Basic%20Principles%20of%20X-ray%20Reflectivity%20in%20Thin%20Films%20-%20Felix%20Jimenez-Villacorta%20[Compatibility%20Mode].pdf
http://www.google.com/url?sa=t&rct=j&q=x-ray+reflectivity+amorphous&source=web&cd=1&cad=rja&ved=0CDEQFjAA&url=http%3A%2F%2Fwww.stanford.edu%2Fgroup%2Fglam%2Fxlab%2FMatSci162_172%2FLectureNotes%2F09_Reflectivity%2520%26%2520Amorphous.pdf&ei=L3zBUKfSEaLNmAX8vIC4AQ&usg=AFQjCNFfik-tSw8bSPGGyx1ckTK5WBTnSA
X-ray is another light source to be used to performreflectivity measurements.
Refractive index of materials (: X-ray):
in 1 eer 2
2
x
4
re: classical electron radius = 2.818 × 10-15 m-1
e: electron density of the materials x: absorption coefficient
Definition in typical optics: n1sin1 = n2sin2
In X-ray optics: n1cos1 = n2cos2
> 1 n <1,
1
2
n1cos1 = n2cos2, n1= 1; n2=1- ;
1 = c; 2 = 0
cosc =1- sinc =
and c <<1
~ 10-5 – 10-6; and c ~ 0.1o – 0.5o
1c
1-
2)1(1 2)1(1
2c
Critical angle for total reflection
X-ray reflectivity from thin films:
Path difference = BCD 2sin2 t
Single layer:
Snell’s law in X-ray optics: n1cos1 = n2cos2
cos1 = n2cos2=(1-)cos2.
1
coscos 1
22
1-1
22 cos)1(
cos1
1
cos)1(sin 1
22
2
221
221
2
2 ...)1)(sin1(1)1(
cos1sin
When 1 , 2, and << 1
2212
21...)321( 2 2
11
ntt 22sin2 212 Constructive interference:
2221
2 )2(4 nt 24 2
222
1 t
n
Ignore
24
22
22
1 nt
Si on Ta
baxy
eeerb 2
2
b
/180
at
ta
2
4 2
2
Slope = a
baxy 22use So that the horizontal axis is linear
Reflection and Refraction: • Random polarized beam travel in two homogeneous, isotropic, nondispersive, and nonmagnetic media (n1 and n2). Snell’s law:
n1 n2
k1
k3 k2
1
3
2Incident
beam
Reflectedbeam
Refractedbeam
x
y
and
Fresnel reflectivity: classical problem of reflection of an EM wave at an interface – continuity of electric field and magnetic field at the interface
2211 sinsin nn 31
Continuity can be written for two different cases: (a) TE (transverse electric) polarization: electric field is to the plane of incidence.
y
x
y
x
y
x
y
x
y
x
y
x
E
E
r
r
E
E
E
E
t
t
E
E
1
1
3
3
1
1
2
2
0
0 and
0
0
E1
E2
E3E1x
H1y
E3x
E2x
H3y
H2y
1 3
2
xxx EtE 12 xxx ErE 13
xxx EEE 231
xxxxx EtErE 111
221311 coscoscos yyy HHH
022201310111 /cos/cos/cos xxx EnEnEn nHE // 0
xx rt 1
(horizontal field)
(scalar)
212111111 coscoscos xxxxx EtnErnEn
1122 cos/cos1 nntr xx xx tr 1
2211
2211
2211
11
coscos
coscos ;
coscos
cos2
nn
nnr
nn
nt xx
&
(b) TM (transverse magnetic) polarization: magnetic field is to the plane of incidence.
E1
E2
E3H1x
E1y
H3x
H2x
E3y
E2y
1 3
2
xxx HHH 231
yyy EtE 12 yyy ErE 13
221311 coscoscos yyy EEE
nHE //& 0
yyyyy EntEnrEn 121111
211111 coscoscos yyyyy EtErE
12 cos/cos1 yy tr 12 /1 nntr yy
2112
2112
2112
11
coscos
coscos ;
coscos
cos2
nn
nnr
nn
nt yy
yy tnrn 21 )1(
http://en.wikipedia.org/wiki/Image:Fresnel2.png
Rs: s-polarization; TE mode Rp: p-polarization; TM mode
Another good reference (chapter 7)http://www.ece.rutgers.edu/~orfanidi/ewa/
221
221
2211
2211
sinsin
sinsin
sinsin
sinsin
n
n
nn
nnrx
In X-ray arrangement n1 = 1, change cos sin
all angles are small; sin1 ~ 1. Snell’s law obey cos1 = n2 cos2.
2
12
coscos
n
2
1
cos1/n2
22
12cos
1n
122
22222
12
2 cossincos
1sin nnn
2222
2 2221)1( iiin
iin 22sincos221sin 1
2
1
2
22
i
i
n
nr
c
cx
2
2
sinsin
sinsin22
11
22
11
221
221
21
2c
2
22
11
22
11*
12
2)(
i
irrR
c
cxxflat
Effect of surface roughness is similar to Debye-Waller factor
)/8exp()()( 2221
211 flatroughness RR
in term of sin4
q2
2
222
11
2
222
11
132
32
)(
iqqq
iqqq
qR
c
c
flat
The result can be extended to multilayer. The treatment is the same as usual optics except definition of geometry!
)5.0exp()()( 22111 qqqRqR flatroughness
One can see that the roughness plays a major role at high wave vector transfers and that the power law regime differs from the Fresnel reflectivity at low wave vector transfers
X-ray reflection for multilayers
L. G. Parratt, “Surface studies of solids by total reflection of x-rays”, Phys. Rev. 95 359 (1954).
Electric vector of the incident beam: )( 11 zE
z
Reflected beam: )( 11 zE R
Refracted beam: )( 22 zE
y
1,11,1111 exp)0()( zkyktiEzE zy
1,11,1111 exp)0()( zkyktiEzE zyRR
2,22,2222 exp)0()( zkyktiEzE zy
2 and 1 medium inr wavevecto:, 21 kk
Boundary conditions for the wave vector at theinterface between two media:
frequencies must be equal on either side of the interface: 1 = 2 , n1 1 = n22 n2k1 = n1k2;
wave vector components parallel to the interface are equal || ,2|| ,1 kk
1
2
2
,12
2
2
1
2
2
2
2
2
,2
2
,2 cos y
zy
knknkkk
)221(cos
2
122
2
,1
1
2
2
,12
2
ikk
n y
y
222
1
1
1
in
n
From first boundary condition
From second boundary condition yy kk ,2,1 2
,1
2
1
2
1
2
2
2
,1
2
1
2
2
2
,2
2
2
2
,2 zyyz kkknkknkkk )22(sin)1( 22
2
1
2
11
22
1
2
1
2
2 ikkkn
122/1
222
11,2 )22( kfikk z
]exp[)](exp[)0()( 2212,2222 zfikxktiEzE y
Shape of reflection curve: two media
The Fresnel coefficient for reflection
2211
2211
1
12,1 sinsin
sinsin
nn
nn
E
EF
R
Page 10
221
2
1
2
2222 22sincos221sin iin
2f
21
21
21
212,1 ff
ff
f
fF
2/1
112
11 )22( if
iBAf 2
2/12/122
22
212
21 }]4)2[()2{(
2
1 A
2/12/122
22
212
21 }]4)2[()2({
2
1 B
A, B are real value
From Snell’s law 22 2 c Page 4
2/121
2/121
221
221
2
1
1
)1(2)/(
)1(2)/(
)(
)(
hh
hh
BA
BA
E
E
I
I
c
cR
R
2/12/122
222
21
22
21 }]4)[(){(
2
1 ccA
2/12/122
222
21
22
21 }]4)[()({
2
1 ccB
2/12
2
2
2
2
1
2
2
1 1
cc
h
N layers of homogeneous media
Thickness of nth layer: nd medium 1: air or vacuum
an : the amplitude factor for half the perpendicular depth
nnnnnn
n
dfidkifdika exp
2exp
2exp 1
0
nd
R
nn EE ,
nn Ea 1
n-1
n
nnEaR
nn Ea 1
R
nn Ea
R
nnnn
R
nnnn EaEaEaEa
1
1
1
111
n
R
nnnnn
R
nnnn HaHaHaHa sin)(sin)( 1
11
1
111
The continuity of the tangential components of the magnetic field for the n-1, n boundary
nn
R
nnnnnn
R
nnnn nEaEanEaEa sin)(sin)( 1
111
1
111
11kfn 1kfn
1
1
111
1
111 )()( kfEaEakfEaEa n
R
nnnnn
R
nnnn
The continuity of the tangential components of the electric vectors for the n-1, n boundary
Solve (1) and (2); (1)fn-1+(2), (1)fn-1-(2)
(1)
(2)
)]()([2
111
1
111 nn
Rnnnnnn
nnn ffEaffEa
faE
)]()([2
111
1
111
1 nnRnnnnnn
nn
Rn ffEaffEa
faE
)]()([
)]()([
111
111
21
1
1
nnRnnnnnn
nnRnnnnnn
nn
Rn
ffEaffEa
ffEaffEaa
E
E
)])(/()[(
)])(/()[(
12
1
12
121
1
1
nnnRnnnn
nnnRnnnn
nn
Rn
ffEEaff
ffEEaffa
E
E
)]/())(/(1[
)]/()/()[(
112
2112
11
1
nnnnnRnn
nRnnnnnn
nn
Rn
ffffEEa
EEaffffa
E
E
)/()( ; )/( 11,12
1, nnnnnnnRnnnn ffffFEEaR
]1[
][
,11,
1,,141
1
121,1
nnnn
nnnnn
n
Rn
nnn FR
RFa
E
EaR
For N layers, starting at the bottom medium01, NNR (N+1 layer: substrate)
Also, a1 = 1 (air or vacuum) 112,1 EER R
2
1
12
2,10 E
ER
I
I RR
Finally, the reflectivity of the system is
For rough interfaces: )]/()[( 11,1 nnnnnn ffffF
)/8exp()]/()[( 2211
211,1 nnnnnnnnn ffffffF
1222/12
1 cos)22( nnnn nif
Can be calculated numerically!
Example of two layers with roughness
Au on Si substrate
Interface roughness
z
Probability density
2
2
2exp
2
1)(
nn
n
zzP
Refractive index
Integration
n
nnnnnn
zzerf
nnnnzn
222)( 11
111 1 nnn in
nnn in 1
Same roughness & refractive index profile
1/ 1/
Félix Jiménez‐Villacorta