““World Leader in Electro-Optical Fire Detection Technology”World Leader in Electro-Optical Fire Detection Technology”

Fire Sentry CorporationFire Sentry Corporation

2 Stage Electro-Optical2 Stage Electro-OpticalFire DetectorsFire Detectors

forforSemiconductor Wet Benches Semiconductor Wet Benches Prevent Costly Clean Room Fire Damage and Prevent Costly Clean Room Fire Damage and

Business InterruptionsBusiness Interruptions

Fire Sentry CorporationFire Sentry Corporation

2 Stage Electro-Optical2 Stage Electro-OpticalFire DetectorsFire Detectors

forforSemiconductor Wet Benches Semiconductor Wet Benches Prevent Costly Clean Room Fire Damage and Prevent Costly Clean Room Fire Damage and

Business InterruptionsBusiness Interruptions

Fires Cause Major Losses to Semiconductor Fabs

Over 1,000 semiconductor fabs worldwide totaling $1 Trillion US dollars in assetsare at risk due to fire in tools constructed of combustible materials using flammable solvents and gasses.

Business disruption losses due to these fires can be more costly than property damage.

In the USA, the average is 2 to 8 weeks production downtime resulting in business interruption.

In the USA, property damage costs from fire range from $2 million to $60 millionUS dollars.

Two recent international semiconductor fabs were severely damaged due to catastrophic fires resulting in $1 Billion US dollars in property damages and unrecoverable production downtimes.

In the USA during 1995, there was one fire loss for every 10 insured fabs with an average loss in excess of $8 Million US dollars.

Property Damage and Business Interruptions are due to:

Fire itself.

Black smoke caused by the fire.

Corrosive by-products of smoke caused by fire.

Fire Hazards Wet Benches manufactured from Polypropylene or

PVC

Flammable chemicals such as isopropyl alcohol (IPA), acetone, etc.

Flammable gasses, such as Silane and Hydrogen

Wet Benches and tools manufactured from non-burn materials but using flammable gases and chemicals

Semiconductor tools constructed of plastic combustible materials that may present a serious fire threat in the clean room are:

1. Steppers

2. Plating benches.3. Spray acid tools.4. Ion Implanters.5. Spray Coaters.

Cleaning equipment using flammable chemicals such as IPA and acetone

Fire Hazards

Silane & Hydrogen gas cylinder cabinets.

Valve manifold boxes that regulate flammable gasses.

Outdoor bulk gas storage and distribution areas for silane, hydrogen and other flammable gasses

Central Chemical Supply Systems

Chemical Storage Areas

Fire Hazards

Traditional Fire Detection Apparatus

Heat-Activated Sprinklers Heat-activated sprinklers alone are inadequate to prevent extensive

damage to wet benches because they are slow to react to a fire. Once a tool, such as a wet bench, constructed of plastic,

(i.e., polypropylene, PVC, etc.), catches on fire, the fire burns with such intensity that heat-activated overhead sprinklers CANNOT contain the fire damage. The resulting black, corrosive smoke permeates the clean room contaminating costly product, processing equipment, and the clean room surface environment.

Wet benches have enclosed hidden compartments and obstructionswhich typically are not protected by sprinklers.

Overhead sprinklers do not meet the business needs of the Semiconductor Industry and the Insurance Companies.

Smoke, Aspirating Smoke, and Heat Detectors

High air flow in wet benches prevents fast detection, therefore the response time is too slow for wet bench fire detection.

By the time smoke or heat detectors do respond, the polypropylene is fully burning and releasing black smoke into the clean room and it may not possible to extinguish the fire.

Smoke and heat detectors are not sealed in leak-proof and corrosion-proof housings, and should not be installed inside the plenum and on the surface areas of wet benches.

Electro-Optical Fire Detectors

Electro-Optical Fire Detectors provideFast Detection of Wet Bench Fires

Electro-Optical Fire Detectors with a Two-Stage Alarm respond before damaging black, corrosive smoke, (from a fully burning polypropylene fire), is released and permeates the Clean Room.

Each detection stage level is based on the radiant heat output of the fire, not the time period of the fire, which only the Fire SentryMulti-Spectral Wide Band IR™ fire sensing technology can provide, (detects over 88% of the fire’s spectral radiant energy).

A Two-Stage fire response approach avoids costly destruction of in-process product while providing early warning that a fire exists in the bench.

Infrared Sensor Wavebands

0.7 1.1 3.5 4.3

Near Band Infrared

0.7 to 1.1 Microns

Alert condition, (4kw fire), energizes a relay for external audibleand visual alarms to notify operators of the Fire Early Warning condition.

Alert provides time for operators to select the following actions to deal with the fire condition:

1. Wait to finish the chip production batch if a fire is non-threatening andappears to be retreating and may self-extinguish on its own.

2. Apply a localized suppression agent with a portable extinguisher.

3. Manually shut off electrical power to the wet bench, which potentiallycould be the ignition source.

4. Download FirePicTM

which records 8 seconds of Detector spectral data preceding the fire, to enable a postulation of the cause of the fire.

1st Stage Response - Alert

If the fire still exists and grows to the Factory Mutual specified heat level criteria of 13 kW*, the following occurs:

1. Energize relays for remote annunciation notifying operators of the Fire ALARM condition, and signal for suppression release.

2. Automatically shut off electrical power to thewet bench.

3. FirePic data stored in the detector’s non-volatile memory.

* 13kW is the equivalent of a 8” polypropylene fire 8 feet from the detector. This level of energy will not ignite polypropylene

2nd Stage Response - Alarm

Two-Stage Early WarningElectro-Optical Fire Detection

May also be used for: Plating Benches Steppers Ion Implanters Spray Coaters Spray Acid Tools

Gas Cabinets

FSC Electro-Optical Fire DetectionAdvantages & Benefits

1. Wide Band IRTM (0.7 to 3.5 microns) sees all hydrocarbon & non-hydrocarbon fires, (i.e., polypropylene, IPA, acetone, silane, hydrogen, etc.)

2. Wide Band IR sees through smoke, gasses, fumes, chemical vapors, as well as fire suppression agents such as water mist, FM200, and CO2, (should the fire re-flash).

3. Wide Band IR provides an accurate measure of Factory Mutual’s 13 kW fire alarm criteria.

4. No false alarms which could cause product loss and production downtime.

5. No Ultraviolet sensors, as UV is easily blinded by smoke, acetone, suppression agents, etc. UV is susceptible to false alarms.

6. Two-Stage response to fire provides an early warning that a fire exists.

7. Solid-state Wide Band Infrared, Near Band Infrared and Visible sensors,and digital electronics for stability, long-life, and reliability.

8. Automatic electro-optical test source to assure Detector operational readiness at all times.

9. Wide 120 degree field-of-view

10. Built-in temperature compensation using temperature transducer & software

11. Leak-proof, heat-sealed, corrosion-proof housing rated for IP67 with corrosion-proof cabling, enables the Fire Detectors to be installed in plenum areas.

12. Ease of Installation using Detector snap slide mounting brackets

FSC Electro-Optical Fire DetectionAdvantages & Benefits

13. FirePic™ stores in detector’s non-volatile memory Alert and Alarm Fire datafor up to six 8 second fire events.

14. User-friendly PC software for monitoring:

a. Graph on a PC screen in real-time what the installed Detector “sees”.

b. Display and save FirePic Alert and Alarm fire data for up tosix 8 second fire events.

c. Event Log downloads a Controller’s and/or Detector’s event history.

d. Documented Certification provides hard-copy of system configuration data.

15. Proven track record with large installed user base worldwide.

16. FM Approved family of stand alone detectors and detector/controller combinations for all types of applications.

FSC Electro-Optical Fire DetectionAdvantages & Benefits

Fire Sentry Fire Detectors for Semiconductor Applications

Model FS7-2173 Fire Detector, used with:- Model FS7-130-SX Controller (12 Detectors)- Model S7-2175 Controller (22 Detectors)- Model FSWB-1 Wall Mount Controller (7 Detectors)

Model FS7-2173-2RP Stand Alone Fire Detector with Alert, Alarm and Fault relays

Wet Benches and Tools

Fire Sentry Controllers Model FS7-130-SX Controller (12 Detectors)

- designed to work with new or existing Fire control panels- 4 programmable zones

Model S7-2175 Controller (22 Detectors)- 24 hour battery back up- Single Zone

Fire Sentry Controllers

Fire Sentry Controllers

Model FSWB-1 Wall Mount Controller (7 Detectors)- 24 hour battery back up- Single Zone- Outputs for Suppression Release and Annunciators- Inputs for smoke, heat & gas detection

Silane Gas Cabinets and Silane Bulk Storage

Fire Sentry Fire Detectors for Semiconductor Applications

Model SS4-A UV/IR Fire Detector- Explosion-proof- Fire Alarm, Verified Fire Alarm

& Fault Relays- use unitized or with CM1-A Wallmount

Controller

Overhead Heat-Activated Sprinklers are too slow.

Ionization and Photoelectric Smoke Detectors, Aspirating Smoke Detection Systems, and Heat Detectors are too slow.

Fire Sentry’s Electro-Optical Fire Detectors are fast. The fire is caught BEFORE fire damage and smoke permeation.

No false alarms due to Digital Signal Processing and Wide Band IR Technology

Thousands of proven detector operating hours. Used by all major semiconductor manufacturers. The worldwide industry standard.

FSC Electro-Optical Fire DetectionReview

Application and Installationof Electro-Optical

Fire Detectionfor Semiconductor Wet Benches

Inverse Square Law

Distance

8ft 7ft 6ft 5ft 4ft 3ft 2ft 1ft

Model FS7-2173Electro-OpticalFire Detector

13 kW

0.4 kW

FS7-2173 Fire Detector will ALARM to a 13 kW fire at 8 ft,which is the equivalent of:a 1.6 kW fire at 2 ftora 0.4 kW fire at 1 ft

1.6 kW

As a fire event is located closer to a Detector, the Detector’s ALARM activationthreshold is correspondingly reduced by the “Inverse Square Law”

Potential Fire Ignition Sources Heaters

Transformers

Terminal Blocks

Power Cable Connections

Static Electricity

Chemical Reactions

Flammable liquids in Plastic Heated Modules

Fire Control Panel Actions Audible and Visual Warnings via Horn/Strobe

mounted on Wet Bench or in immediate area

Wet Bench Electrical Shutdown, in ALARM response, via Power Control Module, (Emergency Off)

Notify Facility Alarm System of fire, via Control Panel outputs

Location of Electro-Optical Fire Detectorsin a typical 34 ft Wet Bench

Equipment Area behind Wet Bench

Robot Wafer Load and Unload Area

Plenum Area under Process Tanks

Surface Area detection, includingrobot deck area acrossProcess Tanks

Head Case

Typical location of Fire Detectors, Control Panel, Manual Pull Station and Horn/Strobe in a 34 ft Wet Bench

Headcase

Working Surface

RobotArea

Equipment Area

ProcessTank

FS7-2173 Electro-Optical Fire Detector

FS7-2173 Electro-OpticalFire Detector

Side View

Note:Model FS7-2173 has a120 Degree Field of View

Plenum

Model S7-2175 Control Panelwith Model S7-2177-224 hour Battery Back-Up Panel

Horn/Strobe

Manual PullStation

Fire Detection System Schematic for 34 ftWet Benches

ModelS7-2175Control Panel

Model S7-2177-2Battery Back-Up

Panel

24VDC

120VAC

S7-2179

JB

S7-2179

JB

S7-2179

JB

Up to total of 22FS7-2173 Fire

Detectors

FS7-2173Fire Detector

FS7-2173Fire Detector

FS7-2173Fire Detector

FS7-2173Fire Detector

FS7-2173Fire Detector

FS7-2173Fire Detector

FS7-2173Fire Detector

Alarm Outputto Plant Facilities

Horn/Strobe

Manual PullStation

Model S7-2178Power Control Module

Emergency Off (EMO)

Typical location of FS7-2173 Fire Detectors in a Small Wet Bench - Front View

Field of View Field of View

Headcase Headcase

Working Surface

Plenum

Model FS7-2173Fire Detectors

Front View

Note: Detector has a 120 Degree Field of View

Typical location of FS7-2173 Electro-Optical Fire Detectors in a Small Wet Bench - Side View

Field of View

ProcessTank

EquipmentArea

Side View

Plenum

FS7-2173Fire Detectors

FS7-2173Fire Detectors

Note: Detector has a 120 DegreeField of View

Typical Location and Quantities of FS7-2173 Fire Detectors in Different Size Wet Benches

No. of FS7-2173 Fire Detectors

8 foot Wet Bench 34 foot Wet Bench

Plenum Areas Underneath the Process Tanks

Surface Area, including Robot Deck Area across Process Tanks

Equipment Area behind Wet Bench

Robot Load and Unload Areas

Head Case Area

Total

2

1

2

N/A

7

5

5

5

2

2

22

1

Description of Detector Location

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“World Leader in Electro-Optical Fire Detection Technology”