What barriers challenged a major cardiac pacemaker manufacturer when starting production on its

newest thin film electrode?

•High performance fractal films

•Full software testing and validation to support FDA regulations

•Best-in-class data logging and diagnostics and process control

•Employee training in an overseas manufacturing location

•Long-term service and production support

Altor™ Production Platform

Altor™ is the only PVD system of its kind specifically designed to support medical implant coatings in FDA-regulated facilities.

How did the world’s leader in ultrasound technology navigate the right geometries for

its sputtering needs?

•Up to 8 cathodes with triaxis adjustment of radius, distance and angular presentation to provide

Denton’s Discovery® 785 Magnetron Sputtering System

The Denton Discovery® platform of magnetron sputter deposition systems for challenging and demanding shapes, sizes and distances in confocal and perpendicular sputtering geometries.

An Asian industrial giant producing solar cells sought to evaporate, sputter and e-beam (or deposit, process and analyze) simultaneously and asked themselves, what should we do first?

•Thermal, e-beam or organic evaporation

•Magnetron sputtering, atomic layer deposition and surface analysis••Pure films

•Improved process control and cycle time

•100° before/after temperature

•Separate processing, isolated, load lock and transfer chambers.

Denton’s Infinity Cluster Platform

A multi-reaction chamber for multiple, independent and simultaneous processes for those with only one real sequence option: uniform, production film deposition.

What’s the best advice you could give the photo lithographer who seeks high-uniformity, high-purity, high-density, moisture-stable metal and dielectric films for system-critical optics?

•Differential (Lower) Pressure at Deposition Surface(for improved film density & uniformity)

•Planetary Workholder(for uniformity and productivity)

•Variable Source to Substrate Distance(for a wider process window)

•Precise application of metal and dielectric films

•Real-time optical control

Denton Discovery ® Long Throw Sputtering Platform when you need to control the angular distribution, superior uniformity, density and purity characteristics in metal and dielectric films.

Denton Discovery ® Long Throw Sputtering

What kind of evaporation system would you create to assist a global, high-power semiconductor solutions provider who seeks to improve their switches to operate at higher frequencies and that offer more integrated functions?

•Internal (multi-piece) evaporation plenum

•Six pocket, 6x100 cc pocket, electron beam gun

•4-pocket auto crucible selection

•10.0 kW electron beam gun power supply and X/Y sweep

• 3-segmented single dome

•Dome holder inserts for 3.0” and 4.0

Denton’s Integrity 39

Denton’s Integrity 39 creates solutions for solutions providers through E-beam Evaporation Ion Assisted Deposition

If the future belongs to smart materials, which change their properties in response to their environment, and to coatings that improve the performance of materials or endow them with additional functions, what tools will we need?

•Base vacuum better than ≤ 2 x 10-7 torr(vacuum gauging atmosphere to 10-10 torr capability minimizing process chamber exposure to atmosphere)

Load-locked evaporation system capable of handling 200 mm cassettes

Denton designed and demonstrated wafer-scale IR filters using evaporated MgO, Ge, and ZnS

•Single rotation assembly for single wafer processing

•Home position enabled for high accuracy load lock transfers

Denton’s Integrity 26 Cassette Load Lock Vacuum Platform

Denton’s Integrity provides a high performance development platform for wafer-scale IR filter development.

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