Wafer Scale Integration - SEMICON · PDF file2015 2.2M € investment for ... FORMAT RAW...

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Wafer Scale Integration July, 2016

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  • Wafer Scale Integration

    July, 2016

  • 2 Private and confidential

    Outline

    What is Graphene?

    Introduction to Graphenea

    A market overview

    Graphene wafer scale integration allows many applications

    Wafer Scale Integration Graphenea Roadmap

  • 3 Private and confidential

    Graphene has outstanding electronic, optical, thermal and mechanical properties

  • 4 Private and confidential

    2004 2008 2009 2010 2011 2012 2013 2014

    Geim & Novoselov publiish Science paper

    Jesus de la Fuente writes first Business Case

    First funding round closed $1,8 m

    First Graphene produced in Graphenea

    Moving to a larger

    laboratory

    Sigma-Aldrich selects

    Graphenea as supplier

    Graphenea is a high-quality graphene producer

    Repsol Energy

    Ventures joins

    Graphenea 1 m

    Graphene Flasghip

    approved 1 B 10 years

    project

    First commercial

    order

    Graphenea founded

    1 m sales milestone

    US branch opened

    Global Top 100 Ones to

    Watch

    2015

    2.2M investment for

    scale up secured

  • 5 Private and confidential

    Graphenea SitesHeadquarters & Research (San Sebastian, Spain)

    GO Production Lab @ Miramon Technology Park App Laboratory (Cambridge, MA)

  • 6 Private and confidential

    and key Scientific talent involved...

    Dr. Jing Kong MIT Boston

    Scientific Advisor 2011-2012

    Prof. Manish Chhowalla Rutgers New Jersey

    Scientific Advisor 2010-

    Dr. Tomas Palacios MIT Boston

    Scientific Advisor 2011-

    Dr. Luis Hueso CIC nanogune

    Scientific Advisor 2010-

    Dr. Amaia Zurutuza Grapheneas

    Scientific Director

    Dr. Andreas Berger CIC nanoGune

    Scientific Advisor 2009-2010

    Dr. Alexander Balandin University of California Riverside

    Scientific Advisor 2014-

  • 7 Private and confidential

    CVD graphene!

    SiC Sublimation

    Mechanical Exfolliation

    Chemical Exfoliation

    (-) Large area (+)!

    (-)

    H

    omog

    enei

    ty

    (+

    )!

    Industrial scalability

    Graphene synthesis technologies comparison

    Mechanical exfoliation

    Chemical exfoliation

    SICSublimation

    CVD

    Graphenea is working with industrial-scalable technology CVD and GO

  • 8 Private and confidential

    Graphenea is working with industrial-scalable technology CVD and GO

    Mechanical exfoliation

    FORMAT RAW MATERIAL

    CVD(Chemical

    VapourDeposition)

    GO(Graphene

    Oxide)

    PROPERTIES

    CH4

    Graphite

    POTENTIAL

    High electron mobility

    VersatilityFunctionalization

    High

    Medium

    MAIN APPLICATIONS

    ElectronicsOptoelectronics

    Sensors/BiosensorsMembranes

    Flexible Electrodes

    Advanced PolymersComposites

    SensorsBatteries

    Supercaps

  • 9 Private and confidential

    1. Method for Transferring Graphene, EP15382430, filing date 24 Aug 2015

    2. Method for Obtaining Graphene Oxide, EP15382123, filing date 17 Mar 2015

    3. Quality Inspection of Thin Film Materials, PCT/EP2014/079171, filing date

    23 Dec 2014

    4. Equipment and Method to Automatically Transfer a Graphene Monolayer

    to a Substrate, EP14382148, filing date 24 Apr 2014

    5. Method of Manufacturing Graphene Monolayer on Insulating Substrates, EP2679540, filing date 29 June 2012

    Graphenea Intellectual Property

  • 10 Private and confidential

    Graphenea siteOfficial distributor site

    Applications Laboratory

    Headquarters

    We are expanding our global presence

  • 11 Private and confidential

    Graphenea has a growing customer base and distribution network

    INDUSTRIES RESEARCH CENTERS UNIVERSITIES

    Note: Partial list illustrative only

  • 12 Private and confidential

    Market Overview

  • 13 Private and confidential

    Each application requires a specific type and grade of graphene

    RESEARCH APPLIED RESEARCH & DEVELOPMENT DEMONSTRATION COMMERCIAL

    CVD

    GOADVANCED POLYMERS

    DNA sequencing

    Optoelectronics

    Carbon Fiber

    PHOTOSENSORS

    LED lighting

    MEMBRANES

    Electron Microscopy

    Solar Cells

    CERAMIC COMPOSITES

    Li-ion Batteries

    Supercapacitors

    BIOSENSORS

    Flexible Transparent Conductors

    Metal Alloys

    Printed Electronics

    Li-S Batteries

    R&D Materials

    TECHNOLOGYREADINESS

    LEVEL

    1BASIC

    PRINCIPLES

    2TEHCN.

    CONCEPT

    3PROOF OFCONCEPT

    4VALIDATION

    LAB

    5VALIDATION

    FIELD

    6PROTOTYPE

    7PROTOTYPEREAL ENV.

    8QUALIFIED & TESTED

    9OPERATION

    Illustrative TRL application map

  • 14 Private and confidential

    Graphene market is very small and driven by Research-related demand.

    Global Graphene market forecast ($M)

    BCC has reduced it market expectation in 2017 from 270 MM$ to 122.9 MM$, fully aligned with IDTechEx forecasted market of 100 MM$ in 2018, Lux Research estimates $126 in 2020

    0

    100

    200

    300

    400

    500

    600

    700

    800

    900

    1.000

    2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022

    BCC IDTechEx Lux Research

    Early-stage applications demand Research-related demand

    Source: BCC, IDTechEx, Lux Research, Graphenea elaboration

  • 15 Private and confidential

    Quantum dotsHow things can change dramatically

  • 16 Private and confidential

    Graphene wafer scale integration allows many applications

  • 17 Private and confidential

    Nanowires on graphene enables UV LEDs

    By growing AlGaN (aluminium gallium nitride) nanowires on graphene, graphene

    will be used both as a substrate and as a UV transparent electrode in order to achieve

    a high external efficiency

    Food ProcessingAir PurificationWater Disinfection

    UV LED Dies

  • 18 Private and confidential

    Flexible WiFi receivers

    2.4 GHz receiver circuits on plastic Ideal for IoT and flexible electronics

    Source: McKinsey

  • 19 Private and confidential

    Flexible Hall sensor

    High sensitivity, linearity and

    flexibility The key factor determining

    sensitivity of Hall effect sensors is high electron mobility

    Source: Honeywell

  • 20 Private and confidential

    Ultra-sensitive and low-cost Graphene Quantum-Dot Photodetector

    Non-invasive health monitoring applications

  • 21 Private and confidential

    Wafer Scale Integration

  • 22 Private and confidential

    CMOS-Fab Integration

    CVD growth on Cu foil

    Automated transfer of graphene on CMOS

    wafer

    Transfer on a carrier substrate

    Patterning of Graphene structures and contact metals

    Functional material deposition and encapsulation

    Pick and Place assembly

    Final testing and calibration

    Graphenea allows integration for graphene

  • 23 Private and confidential

    Graphene on a carrier substrate

    Important factors to consider Transfer method selection Substrate type Semiconductor industry requirements: metal impurities,

    contamination, wafer uniformity Large scale quality control method

    Wafer Scale Integration

  • 24 Private and confidential

    Quality of the transfer Substrate supporting the graphene Quality of the interface between

    graphene & substrate

    Graphene on catalystGraphene on

    the desired substrate

    Large impact on graphene properties & device

    performance

    Wafer Scale Integration

  • 25 Private and confidential

    Graphene on a carrier substrate to facilitate integration

    Graphenea End user

    Wafer Scale Integration

  • 26 Private and confidential

    WetTransfer

    DryTransfer

    Semi-dryTransfer

    There is non standard process for all the substrates and applications

    Wafer Scale Integration

  • 27 Private and confidential

    Conven&onalwettransferprocess

    G

    Cu

    G

    Cu Polymer

    G

    Polymer

    Sisubstrate

    G

    Protec&vepolymercoa&ng

    G

    PolymerSisubstrate

    TransferontothefinalsubstrateRemovalofthesacrificialpolymer

    Cleaningsteps(H2O)

    MetaletchingProtec&vePolymer

    Wafer Scale Integration

  • 28 Private and confidential

    Drytransferprocess

    Wafer Scale Integration

  • 29 Private and confidential

    Alternative to Cu etching electrochemical delamination

    ARTICLE NATURE COMMUNICATIONS | DOI: 10.1038/ncomms1702

    NATURE COMMUNICATIONS | 3:699 | DOI: 10.1038/ncomms1702 | www.nature.com/naturecommunications

    2012 Macmillan Publishers Limited. All rights reserved.

    with different orientations, similar to the graphene grains grown on Cu foils by LP-CVD21. Note that the size of the single-crystal grains in this graphene is at least 150 m, larger than those grown on Cu foils by AP-CVD (usually about 20 m)21,22, but little smaller than the dendritic graphene grown on Cu by LP-CVD19.

    It is first important to note that the predominant hexagonal graph-ene grains grown on Pt substrates have no reflex angle at the edges and no visible lines in their planes even in high-resolution scanning

    electron microscope images. Second, the size of the graphene grains is inversely proportional to the nucleation de


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