Vision Measuring Systems… · Quick Vision ELF Compact CNC Vision Measuring Systems M-4 QV Apex...

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M-1 Vision Measuring Systems Vision Measuring Systems M Quick Vision WLI INDEX Vision Measuring Systems Quick Scope SERIES 359 — CNC / Manual Vision Measuring System M-2 Quick Image SERIES 361 — Non-contact 2-D Vision Measuring System M-3 Quick Vision ELF Compact CNC Vision Measuring Systems M-4 QV Apex SERIES 363 — CNC Vision Measuring System M-5 QV STREAM PLUS SERIES 363 — CNC Vision Measuring System M-6 QV Hyper SERIES 363 — High accuracy CNC Vision Measuring System M-7 QV HYBRID TYPE1, TYPE4 SERIES 365 — CNC Vision Measuring System equipped with a non-contact displacement sensor M-8 Quick Vision WLI SERIES 363 — CNC Video Measuring System with White Light Interferometry M-9 ULTRA QV SERIES 363 — Ultra-high Accuracy CNC Vision Measuring System M-10 UMAP Vision System TYPE2 SERIES 364 — Micro Form Measuring System M-11 QV ACCEL SERIES 363 — Large Format CNC Vision Measuring System M-12 Quick Vision with Touch Trigger Probe M-13 Accessories for Quick Vision M-14 OPTI-FIX Kits — Modular clamping system for vision measuring systems M-15,16, 17 Quick Guide to Precision Measuring Instruments M-18,19 QI-A2010C QVH4 606

Transcript of Vision Measuring Systems… · Quick Vision ELF Compact CNC Vision Measuring Systems M-4 QV Apex...

Page 1: Vision Measuring Systems… · Quick Vision ELF Compact CNC Vision Measuring Systems M-4 QV Apex SERIES 363 — CNC Vision Measuring System M-5 QV STREAM PLUS SERIES 363 — CNC Vision

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Vision Measuring Systems

Vision Measuring Systems

M

Quick Vision WLI

INDEX Vision Measuring SystemsQuick Scope SERIES 359 — CNC / Manual Vision Measuring System

M-2

Quick Image SERIES 361 — Non-contact 2-D Vision Measuring System

M-3

Quick Vision ELF Compact CNC Vision Measuring Systems

M-4

QV Apex SERIES 363 — CNC Vision Measuring System M-5

QV STREAM PLUS SERIES 363 — CNC Vision Measuring System

M-6

QV Hyper SERIES 363 — High accuracy CNC Vision Measuring System

M-7

QV HYBRID TYPE1, TYPE4 SERIES 365 — CNC Vision Measuring System equipped with a non-contact displacement sensor

M-8

Quick Vision WLI SERIES 363 — CNC Video Measuring System with White Light Interferometry

M-9

ULTRA QV SERIES 363 — Ultra-high Accuracy CNC Vision Measuring System

M-10

UMAP Vision System TYPE2 SERIES 364 — Micro Form Measuring System

M-11

QV ACCEL SERIES 363 — Large Format CNC Vision Measuring System

M-12

Quick Vision with Touch Trigger Probe M-13

Accessories for Quick Vision M-14

OPTI-FIX Kits — Modular clamping system for vision measuring systems

M-15,16, 17

Quick Guide to Precision Measuring Instruments M-18,19

QI-A2010C

QVH4 606

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QS-L2010ZB

QS250Z

FEATURES: CNC model•Surface,contourandfiber-opticringlight

illumination options enables users to configuretheQSlightingtomeetavarietyofmeasurement needs.

•Powerful,Windows® based QSPAK software is easy to use and offers a wide spectrum of measuring and analysis capabilities.

•Functionsincludezoom,auto-focus,measurement playback, one-click edge detection, graphic display, 48 different macros and a pattern matching function for several common part features.

•Thestagecanbecontrolledbymouseorthrough the optional multi-function control box.

Quick ScopeSERIES 359 — CNC / Manual Vision Measuring System

FEATURES: Manual model•Excellentsurfaceobservationmodelfora

wide variety of workpieces.•0.1µmresolutionand150mmZ-axisrange.•Powerzoomenableseasyandfast

magnificationchange.•Fineilluminationcapabilityenableslighting

changestomatchworkpiecerequirements.•Thequickreleasesystemonthestage

enablesinstantswitchingbetweencoarsemovementandfinemovement.

•QuickNavigationfunctionenablestheusertorepeatmeasurementsquickly.

SPECIFICATIONSModel No. QS250ZRange X-axis 8” / 200mm

Y-axis 10” / 250mmZ-axis 4” / 100mm

Resolution 0.1µmScale type Linear encoderMeasuring accuracy (at 20°C)* XY:(2.5+6L/1000)µm,Z:(5+6L/1000)µmMagnification Objective 0.5X-3.5Xzoom

On monitor 20X - 137XImage detecting unit Color CCD cameraIllumination Surface:co-axiallight,fiber-opticringlight

Contour: stage lightStageglasssize 10.6 x 12.2” / 269 x 311mmMax. workpiece height 4.3” / 110mmMax. stage loading 22 lbs / 10kgDimensions (W x D x H), Mass 18.3 x 32 x 26” / 465 x 815 x 663mm, 167 lbs / 76kg

*Whenusing2.5Xobjectiveorthezoomlensin2.5Xmagnification(Magnificationonmonitor:105X),L=Measuringlength(mm)

Model No. QS-L2010ZB QS-L3017ZB QS-L4020ZBRange(X-axis/Y-axis/Z-axis) 8” x 4” x 6” / 200 x 100 x 150mm 12" x 6.7" x 6" / 300 x 170 x 150mm 15.7" x 8" X 6" / 400 x 200 x 150mmResolution 0.1µmScale type Linear encoderMeasuring accuracy (at 20°C and3.0xmagnification)

XY:(2.5+20L/1000)µmZ:(5+40L/1000)µm

Image detecting unit 1/2" 3 MP Color CMOS camera Illumination (Halogen) Surface:co-axiallight,fiber-opticringlightContour,stagelightStageglasssize 9.84 x 5.91"(250 x 150 mm) 14.57 x 9.45"(370 x 240 mm) 17.32 x 9.45"(440 x 240 mm)Max. workpiece height 6” / 150mmMax. stage loading 22 lbs / 10 kg 44 lbs / 20 kg 33 lbs / 15 kgDimensions (W x D x H) 25" x 30" x 28" / 624 x 769 x 722 mm 27" x 33" x 36" / 682 x 837 x 916 mm 30" x 33" x 37" / 757 x 837 x 930 mmMass (Main Unit) 158.7 lbs / 72 kg 308.6 lbs /140 kg 321.9 lbs / 146 kg

SPECIFICATIONS

QSLMagnification

Zoom Mag. 0.75x 0.98x 1.28x 1.5x 2.25x 3x 3.75x 5.25xOn monitor 30x 39x 51x 60x 89x 119x 149x 208xFOV (mm) 8.8 x 6.6 6.8 x 5.1 5.2x3.9 4.4x3.3 2.9x2.2 2.2x1.6 1.7x1.3 1.2x0.9

Zoom Lens Magnifications

QS 250Magnification

Zoom Mag. .5x .05x .85x 1.0x 1.5x 2.0x 2.5x 3.5xOn monitor 20x 25x 34x 39x 59x 78x 98x 137xFOV (mm) 8.8 x 6.6 6.8 x 5.1 5.2x3.9 4.4x3.3 2.9x2.2 2.2x1.6 1.7x1.3 1.2x0.9

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Quick ImageSERIES 361 — Non-contact 2-D Vision Measuring System

Quick Image is a new concept in 2-D vision measuring instruments. It provides unique features for improving measurement efficiency.

QI-A2010C

FEATURES•Longfocaldepthandwidefieldofview•Telecentricopticalsystem•3Mega-pixelcolorCCDcamera•LargequadrantLEDringlight•Singleclickmeasurementexecution•Displaysmeasurementresultsonvideo

window•Orientationofpartisautomatically

detected.

SPECIFICATIONSModel QI-A1010C QI-B1010C QI-A2010C QI-B2010C QI-A2017C QI-B2017C QI-A3017C QI-B3017C QI-A4020C QI-B4020CRange X, Y-axis 4 x 4” / 100 x 100mm 8 x 4” / 200 x 100mm 8 x 7” / 200 x 170mm 12 x 7” / 300 x 170mm 16 x 8” / 400 x 200mm

Z-axis 4” / 100mm 4” / 100mm 4” / 100mm 4” / 100mm 4” / 100mm

Measuring mode High-resolution mode and Normal mode

Accuracy Within the screen QI-Amodels:±5µm(high-resolutionmode),±8µm(normalmode) QI-Bmodels:±2.7µm(high-resolutionmode),±4µm(normalmode)

E1XY ±(3.5+0.02L)µmL=measuringlength(mm)

Repeatability within the screen (±2s) QI-Amodels:±1µm(high-resolutionmode),±2µm(normalmode) QI-Bmodels:±0.7µm(high-resolutionmode),±1µm(normalmode)

CCD camera 3 Megapixel, 1/2 inch color CCD camera

Optical system Magnification* 0.2X 0.5X 0.2X 0.5X 0.2X 0.5X 0.2X 0.5X 0.2X 0.5X

Working distance 3.5” / 90mm

Depth of focus High-resolution mode: ±0.6mm (±0.6mm), Normal mode: ±11mm (±1.8mm) ( ): QI-B models

Illumination Contour 4 4 4 4 4

Surface 4 4 4 4 4

4-quadrant LED 4 4 4 4 4

Stageglasssize 6.7 x 6.7”/170 x 170mm 9.5 x 6.4”/242 x 140mm 10.2 x 9.1”/260 x 230mm 14.2 x 9.1”/360 x 230mm 17.3 x 9.1”/440 x 232mm

Max. stage loading 22 lbs / 10kg 44 lbs / 20kg 33 lbs / 15kg

Mass 154 lbs / 70kg 163 lbs / 74kg 308 lbs / 140kg 326 lbs / 148kg 340 lbs / 154kg

*Double telecentric system

Image-space telecentric lens

Object-space telecentric lens

Color camera

Workpiece to be measured

Double-telecentric optics enable highly efficient measurement with a wide field of viewBatchmeasurementwithawideviewfield1.259”x0.945”(32x24mm)realizedusinga0.2Xmagnificationmodelcansubstantiallyimprovemeasurementefficiency.Witha0.5Xmagnificationmodel,dimensionsof very small workpieces and stepped workpieces can be easily measured.

Actualimageacquiredwitha0.5Xmagnificationmodel

Actualimageacquiredwitha0.2Xmagnificationmodel

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FEATURES•Controller-integrated compact size

design This series is appropriate for installation at a small site because of its light weight and space saving design.

Quick Vision ELFCompact CNC Vision Measuring Systems

•Small body packed full of functions This series offers various types of machines equipped with the PRL illuminator and power turret. Also, the laser auto-focus unit can be installed, as a factory option.

•The highest performance/cost ratio of the Quick Vision series

QV-ELF202PRO

Laser Auto Focus (LAF) Function*Mitutoyo offers models featuring the LAF system which enables high-speed focusing. *Available on the PRO model. (Factory installed option)

Touch SystemThe QV Touch system is available on all the QV ELF, QV Apex and QV Accel models as a factory option. All systems include probe, calibration articles and installed software.

Programmable Ring Light (PRL)Finecontrolofobliquityanddirectionprovidesilluminationoptimalformeasurement.Obliquitycanbearbitrarilysetintherangefrom30°to80°.Thistypeofilluminationiseffectiveforenhancingtheedgeofinclinedsurfacesorverysmallsteps.Illuminationcanbecontrolledindependentlyineverydirection,frontandback,rightandleft.Measurementwithedgeenhancementispossiblebyformingashadowbylightingfromonlyonedirection.

Workpiecesurface

Parabolic mirror

Toroidal mirror

Four-quadrant LED light

30° 60° 80°

1Xtubelensx2.5XobjectiveViewfield:2.5x1.88mm

2Xtubelensx2.5XobjectiveViewfield:1.25x0.94mm

6Xtubelensx2.5XobjectiveViewfield:0.41x0.31mm

Programmable Power Turret (PPT)Thethreetubelensselectionprovidesthreemagnificationlevelswiththesameobjectivelens.Replacementobjectivelensesallowawiderangeofmagnificationstosupportavarietyofmeasurements.

(Factory installed option)

SPECIFICATIONSName Quick Vision - ELF

ModelNo. QV-E202 QV-E202 (ISO 10360-7)

MeasuringRange

X-axis 9.84”/250mm

Y-Axis 7.87”/200mm

Z-Axis 7.87”/200mm

Resolution/scaleunit 0.1µm/reflective-typelinearencoder

CCDcamera B&W

IlluminationUnit(LED)

Surface WhiteLED

Contour WhiteLED

ProgrammableRingLight WhiteLED

Max.DriveSpeed(X/Y/Z-axis) 200mm/s

Measuringaccuracy*

E1X,E1Y (2+3L/1000)µmE1Z (3+5L/1000)µm

EU,MPE(ISO10360-7:2011) — 3.5+5.5L/1000,3.5+6.0L/1000**PF2D,MPE(ISO10360-7:2011) — 2.7µm

MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)

Stageglasssize 12.28x10.59”(312x269mm)

Maximumstageloading 33lbs.(15kg)

Dimensionsofmainunit(IncludingMachineStand) 33.35”x23.07”x60.16”(847x586x1528mm)

Massofmainunit(IncludingMachineStand) 595lbs.(270kg)

*Themeasuringaccuracydefinedunderthefollowingconditions:ProgrammablePowerTurret:2xPosition;ObjectiveLens:2.5x(HRorSL);L=Dimensionbetweentwoarbitrarypoints(mm)**Accuracy3.5+5.5L/1000for20±2°C;Accuracy3.5+6.0L/1000from18to23°C

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QV ApexSERIES 363 — CNC Vision Measuring System

QV Apex302PRO

QV Apex606PRO

Optional Accessories: Refer to page M-14.

Image Multi-AutoFocusThe optimal focus can be selected for each surface texture and measuredfeature,realizinghighreproducibility and reliable edge detection.

Edge focus

Patternfocus

Surface focus

Optional Index table*Automaticmulti-planemeasurementispossiblewiththeoptionalindextable.RefertopageM-14formoredetails.*NotavailablewithQVACCELmodels

Programmable Ring Light (PRL)Finecontrolofobliquityanddirectionprovidesilluminationoptimalformeasurement.Obliquitycanbearbitrarilysetintherangefrom30°to80°.Thistypeofilluminationiseffectiveforenhancingtheedgeofinclinedsurfacesorverysmallsteps.Illuminationcanbecontrolledindependentlyineverydirection,frontandback,rightandleft.Measurementwithedgeenhancementispossiblebyformingashadowbylightingfromonlyonedirection.

Workpiecesurface

Parabolic mirror

Toroidal mirror

Four-quadrant LED light

30° 60° 80°

Name Quick Vision Apex

ModelNo.

QV Apex 302 PRO QV Apex 404 PRO QV Apex 606 PROQV Apex 302 (ISO10360-7)

QV Apex 404 (ISO10360-7)

QV Apex 606 (ISO10360-7)

QV Apex 302 (w/TAF) QV Apex 404 (w/TAF) QV Apex 606 (w/TAF)

MeasuringRange

X-axis 11.81”/300mm 15.75”/400mm 23.62”/600mmY-Axis 7.87”/200mm 15.75”/400mm 25.59”/650mmZ-Axis 7.87”/200mm 9.84”/250mm 9.84”/250mm

Resolution/scaleunit 0.1µm/reflective-typelinearencoderResolutionZscaleusingTrackingAutofocus (TAF) 0.3µm

CCDcamera B&W

IlluminationUnit(LED)

Surface WhiteLEDContour WhiteLED

ProgrammableRingLight WhiteLEDMax.DriveSpeed

X/YAxis 300mm/s 400mm/sZ-Axis 300mm/s 300mm/s

Measuringaccuracy*

E1X,E1Y (1.5+3L/1000)µmE1Z (1.5+4L/1000)µmE2XY (2+4L/1000)µm

EU,MPE(ISO10360-7:2011) 3+5.5L/1000,3+6L/1000**PF2D,MPE(ISO10360-7:2011) 2.3µm

MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)

Stageglasssize 15.71”x10.67”(399x271mm)

19.41”x10.67”(493x551mm)

27.44”x29.84”(697x758mm)

Maximumstageloading 44lbs.(20kg) 88lbs.(40kg) 110lbs.(50kg)

Dimensionsofmainunit 37.44”x33.82”x41.06”(951x859x1043mm)

55.39”x40.43”x54.37”(1407x1027x1381mm)

78.15”x51.54”x61.81”(1985x1309x1570mm)

Massofmainunit(IncludingMachineStand) 794lbs.(360kg) 1276lbs.(579kg) 3197lbs.(1450kg)

*Themeasuringaccuracydefinedunderthefollowingconditions:ProgrammablePowerTurret:2xPosition;ObjectiveLens:2.5x(HRorSL);L=Dimensionbetweentwoarbitrarypoints(mm)**Accuracy3.5+5.5L/1000for20±2°C,Accuracy3+6L/1000from18to23°C

SPECIFICATIONS

Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochan-gesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.

Tracking Auto Focus (TAF)AFprinciple Objectivecoaxialautofocusing(knifeedgemethod)Suitableobjectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x

Trackingrange*2 6.3mm 6.3mm 1mm 1mm 0.25mm(±3.15mm) (±3.15mm) (±0.5mm) (±0.5mm) (±0.125mm)

Spotdiameter*3 5.2µm 8.0µm 2.1µm 3.1µm 1.5µmLasersource Semiconductorlaser(peakwavelength:690nm)Laserpower 0.9mWLasersafety Class2(JISC6802:2011,EN/IEC60825-1:2007)*2Variesaccordingtoworkpiecesurfacetextureandreflectance.*3Thesearedesignvalues.

Parfocal

Parfocal

Surface of workpiece

Automatic Z-axis tracking Objectives

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Dichroicmirrors

Collimator lens array

High-density mounting of ultra-high intensity LED elements

LEDelements

Reflectionmirrors

Stage

Synthetic cyan

Mirror-2 Mirror-1

Dichroicmirrors

Collimator lens array

Blue LED

Green LED

Red LEDMoves & processesimages continuously

Camera

(Flash & Capture) (Flash & Capture) (Flash & Capture) (Flash & Capture)

Camera

Non-stop Vision MeasurementExtreme Improvement in Throughput*Conventionalvisionmeasuringsystemsendlesslyrepeatthecycleofstagedisplacement,stagestop,measurement,stagestartandstagedisplacementagain.Thismodeofoperationisafundamentallimitationonimprovingmeasurementthroughput.Incontrast,theQuickVisionStreamsystemusesaninnovativeimagecapturetechniquethatavoidstheneedtorepeatedlystopthestagesomeasurementcanbecontinuous,butmeasuringaccuracyisretained.Eliminatingthetimeneededtoaccelerate,decelerateandthenholdthestagemotionlesswhileameasurementismadeachievesanextremeimprovementinproductivity.

Measurement Throughput Comparison between QV STREAM and the Conventional SystemSTREAMPLUSseries:morethan5timesfaster*ComparisonofmeasurementthroughputusingaMitutoyosampleworkpiece

withthatofMitutoyoconventionalsystems

STREAM ModeThemeasurementmodeofanon-stopvisionmeasuringsystemisreferredtoastheSTREAMmode.

Newly Developed Stroboscopic Illumination SystemThedevelopmentofahigh-intensityLEDflashilluminatorhasmadenon-stopvisionmeasurementpossible.Attheprecisemomentthestagereachesameasurementpointtheilluminatorcreatesanextremelyshort,high-intensityflashthateffectivelyfreezesallmotion.Theilluminatorturnsonandoffsofastthatnoimagebluroccursandtheimageiscapturedinfullandaccuratedetail.Thisinnovativedesigntakesfulladvantageofhigh-density,high-intensityLEDarraysaidedbycollimatinglensesanddichroicmirrorstoproduceultrabright,directionalandefficientillumination.

QV STREAM PLUSSERIES 363 — CNC Vision Measuring System

QV STREAM PLUS 606

FEATURES

Name Quick Vision Stream Plus

ModelNo. QV Stream Plus 302 PRO QV Stream Plus 404 PRO QV Stream Plus 606 PROQV Stream Plus 302 (w/TAF) QV Stream Plus 404 (w/TAF) QV Stream Plus 606 (w/TAF)

MeasuringRange

X-axis 11.81”/300mm 15.75”/400mm 23.62”/600mm

Y-Axis 7.87”/200mm 15.75”/400mm 25.59”/650mm

Z-Axis 7.87”/200mm 9.84”/250mm 9.84”/250mm

Resolution/scaleunit 0.1µm/reflective-typelinearencoderResolutionZscaleusingTrackingAutofocus(TAF) 0.3µm

CCDcamera B&W,ProgressiveScanningCCD

IlluminationUnit(C:Continuous;S:Stroboscopic;PRL:ProgrammableRingLight)

Surface(C) Red,Green,Blue&White(LED)

Surface(S) Blue(LED)

Contour(C) Blue(LED)

Contour(S) Blue(LED)

PRL(C) Red,Green,Blue&White(LED)

PRL(S) Blue(LED)

Max.DriveSpeed X/Y/ZAxis 300mm/s

Measuringaccuracy*

E1X,E1Y (1.5+3L/1000)µm

E1Z (1.5+4L/1000)µm

E2XY (2+4L/1000)µm

MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)

Stageglasssize 15.71”x10.67”(399x271mm)

19.41”x10.67”(493x551mm)

27.44”x29.84”(697x758mm)

Maximumstageloading 44lbs.(20kg) 88lbs.(40kg) 110lbs.(50kg)

Dimensionsofmainunit 37.44”x33.82”x41.06”(951x859x1043mm)

55.39”x40.43”x54.37”(1407x1027x1381mm)

78.15”x51.54”x61.81”(1985x1309x1570mm)

Massofmainunit(IncludingMachineStand) 794lbs.(360kg) 1276lbs.(579kg) 3197lbs.(1450kg)

*Themeasuringaccuracydefinedunderthefollowingconditions:ProgrammablePowerTurret:2xPosition;ObjectiveLens:2.5x(HRorSL);L=Dimensionbetweentwoarbitrarypoints(mm)

SPECIFICATIONS

Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochan-gesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.

Parfocal

Parfocal

Surface of workpiece

Automatic Z-axis tracking Objectives

Tracking Auto Focus (TAF)AFprinciple Objectivecoaxialautofocusing(knifeedgemethod)Suitableobjectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x

Trackingrange*2 6.3mm 6.3mm 1mm 1mm 0.25mm(±3.15mm) (±3.15mm) (±0.5mm) (±0.5mm) (±0.125mm)

Spotdiameter*3 5.2µm 8.0µm 2.1µm 3.1µm 1.5µmLasersource Semiconductorlaser(peakwavelength:690nm)Laserpower 0.9mWLasersafety Class2(JISC6802:2011,EN/IEC60825-1:2007)*2Variesaccordingtoworkpiecesurfacetextureandreflectance.*3Thesearedesignvalues.

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SPECIFICATIONS

QV HyperSERIES 363 — High accuracy CNC Vision Measuring System

Hyper QV404PRO

Name Quick Vision HyperModel No. QV Hyper 302 PRO QV Hyper 404 PRO QV Hyper 606 PRO

QV Hyper 302 (ISO10360-7) QV Hyper 404 (ISO10360-7) QV Hyper 606 (ISO10360-7)

QV Hyper 302 (w/TAF) QV Hyper 404 (w/TAF) QV Hyper 606 (w/TAF)

MeasuringRange

X-axis 11.81”/300mm 15.75”/400mm 23.62”/600mm

Y-Axis 7.87”/200mm 15.75”/400mm 25.59”/650mm

Z-Axis 7.87”/200mm 9.84”/250mm 9.84”/250mm

Resolution/scaleunit 0.02µm/reflective-typelinearencoder

ResolutionZscaleusingTrackingAutofocus(TAF) 0.26µm

CCDcamera B&W

IlluminationUnit(LED)

Surface WhiteLED

Contour WhiteLED

ProgrammableRingLight WhiteLED

Max.DriveSpeed X/Y/Z-Axis 200mm/s

Measuringaccuracy*

E1X,E1Y (0.8+2L/1000)µmE1Z (1.5+2L/1000)µmE2XY (1.4+3L/1000)µm

EU,MPE(ISO10360-7:2011) 2.5+4L/1000,2.5+4.5L/1000**PF2D,MPE(ISO10360-7:2011) 1.7µm

MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)

Stageglasssize 15.71”x10.67”(399x271mm) 19.41”x10.67”(493x551mm) 27.44”x29.84”(697x758mm)

Maximumstageloading 44lbs.(20kg) 88lbs.(40kg) 110lbs.(50kg)

Dimensionsofmainunit 37.44”x33.82”x41.06”(951x859x1043mm)

55.39”x40.43”x54.37”(1407x1027x1381mm)

78.15”x51.54”x61.81”(1985x1309x1570mm)

Massofmainunit(IncludingMachineStand) 794lbs.(360kg) 1276lbs.(579kg) 3197lbs.(1450kg)

Image Multi-AutoFocusThe optimal focus can be selected for each surface texture and measuredfeature,realizinghighreproducibility and reliable edge detection.

Edge focus

Patternfocus

Surface focus

Programmable Ring Light (PRL)Finecontrolofobliquityanddirectionprovidesilluminationoptimalformeasurement.Obliquitycanbearbitrarilysetintherangefrom30°to80°.Thistypeofilluminationiseffectiveforenhancingtheedgeofinclinedsurfacesorverysmallsteps.Illuminationcanbecontrolledindependentlyineverydirection,frontandback,rightandleft.Measurementwithedgeenhancementispossiblebyformingashadowbylightingfromonlyonedirection.

Workpiecesurface

Parabolic mirror

Toroidal mirror

Four-quadrant LED light

30° 60° 80°

*Themeasuringaccuracydefinedunderthefollowingconditions:ProgrammablePowerTurret:2xPosition;ObjectiveLens:2.5x(HRorSL);L=Dimensionbetweentwoarbitrarypoints(mm)**Accuracy2.5+4L/1000for20±2°C,Accuracy2.5+4.5L/1000from18to23°C

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CLASS 1 LASER PRODUCT

Quick Vision Hybrid 302 Quick Vision Hybrid 404 Quick Vision Hybrid 606

Apex / Hyper/ STREAM PLUS

QVH Apex 302 QV Hyper 302 QVH Apex 404 QV Hyper 404 QVH Apex 606 QV Hyper 606

QV Apex 302 (ISO10360-7)

QV Hyper 302 (ISO10360-7)

QVH Apex 404 (ISO10360-7)

QV Hyper 404 (ISO10360-7)

QVH Apex 606 (ISO10360-7)

QV Hyper 606 (ISO10360-7)

QVH STREAM 302 QVH STREAM 404 QVH STREAM 606

MeasuringRange(XxYxZ)

Vision 11.81”x7.87”x7.87”(300x200x200mm) 15.75”x15.75”x9.84”(400x400x250mm) 23.62”x25.59”x9.84”(600x650x250mm)Non-contactdisplacementsensor

TYPE1 7.09”x7.87”x7.87”(180×200×200mm) 11.02”x15.75”x9.84”(280×400×250mm) 18.90”x25.59”x9.84”(480×650×250mm)

TYPE4*1 6.92”x7.87”x7.87”(176×200×200mm) 10.87”x15.75”x9.84”(276×400×250mm) 18.74”x25.59”x9.84”(476×650×250mm)

Measuringaccuracy

(Vision)*2*3

E1X,E1Y (1.5+3L/1000)µm (0.8+2L/1000)µm (1.5+3L/1000)µm (0.8+2L/1000)µm (1.5+3L/1000)µm (0.8+2L/1000)µm

E1Z (1.5+4L/1000)µm (1.5+2L/1000)µm (1.5+4L/1000)µm (1.5+2L/1000)µm (1.5+4L/1000)µm (1.5+2L/1000)µm

E2XY (2.0+4L/1000)µm (1.4+3L/1000)µm (2.0+4L/1000)µm (1.4+3L/1000)µm (2.0+4L/1000)µm (1.4+3L/1000)µm(Displacementsensor)*2*3 E1Z (1.5+4L/1000)µm (1.5+2L/1000)µm (1.5+4L/1000)µm (1.5+2L/1000)µm (1.5+4L/1000)µm (1.5+2L/1000)µm

(ISO10360-7:2011)

EU,MPE

3+5.5L/1000*4

3+6.0L/1000*52.5+4L/1000*4

2.5+4.5L/1000*53+5.5L/1000*43+6.0L/1000*5

2.5+4L/1000*42.5+4.5L/1000*5

3+5.5L/1000*4

3+6.0L/1000*52.5+4L/1000*4

2.5+4.5L/1000*5

PF2D,MPE 2.3µm 1.7µm 2.3µm 1.7µm 2.3µm 1.7µm

ScaleResolution 0.1µm 0.02µm 0.1µm 0.02µm 0.1µm 0.02µm

Max.DriveSpeed X/Y/ZAxis 300mm/s 200mm/s 300mm/s 200mm/s 300mm/s 200mm/s

Stageglasssize 15.71”x10.67”(399x271mm) 19.41”x10.67”(493x551mm) 27.44”x29.84”(697x758mm)

Maximumstageloading 44lbs.(20kg) 88lbs.(40kg) 110lbs.(50kg)

Dimensionsofmainunit 37.44”x33.82”x41.06”(951x859x1043mm)

55.39”x40.43”x54.37”(1407x1027x1381mm)

78.15”x51.54”x61.81”(1985x1309x1570mm)

Massofmainunit(IncludingMachineStand) 794lbs.(360kg) 1276lbs.(579kg) 3197lbs.(1450kg)

ACCEL QVH ACCEL808 QVH ACCEL 1010 QVH ACCEL 1212 QVH ACCEL 1517

MeasuringRange(XxYxZ)

Vision 31.50x31.50x5.91”(800x800x150mm)

39.37x39.37x5.91”(1000x1000x150mm)

49.21x49.21x3.94”(1250x1250x100mm)

59.06X68.90X3.94”(1500x1750x100mm)

Non-contactdisplacementsensor

TYPE1 26.77x31.50x5.91”(680x800x150mm)

34.65x39.37x5.91”(880x1000x150mm)

44.49X49.21X3.94”(1130x1250x100mm)

54.33x68.90x3.94”(1380x1750x100mm)

Measuringaccuracy

(Vision)*2*3

E1X,E1Y (1.5+3L/1000)µm (2.2+3L/1000)µm

E1Z (1.5+4L/1000)µm (2.5+5L/1000)µm

E2XY (2.5+4L/1000)µm (3.5+4L/1000)µm(Displacementsensor)*2*3 E1Z (2.5+4L/1000)µm (3.5+5L/1000)µm

ScaleResolution 0.1µm

Max.DriveSpeed

X/YAxis 400mm/s 300mm/s

ZAxis 150mm/s 150mm/s

Stageglasssize 34.76”x37.72”(883x958mm)

46.69”x46.69”(1186x1186mm)

56.69”x56.69”(1440x1440mm)

67.48”x77.48”(1714x1968mm)

Maximumstageloading 22lbs.(10kg) 66lbs.(30kg)

Dimensionsofmainunit 58.07”x73.23”x62.13”(1475x1860x1578mm)

75.28”x84.29”x63.11”(1912x2141x1603mm)

85.28”x93.31”x61.18”(2166x2370x1554mm)

96.06”x114.09”x61.18”(2440x2898x1554mm)

Massofmainunit 4519lbs.(2050kg) 6504lbs.(2950kg) 7937lbs.(3600kg) 9921lbs.(4500kg)

Common Specifications QV Apex QV Hyper QV Accel QV Stream

CCDcamera Black&White Black&White;ProgressiveScanning

MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)

GuideMethod LinearMotionHardBearingIllumination(CatalogPageNumberReference) M-5 M-7 M-12 M-6

Photodiodea

Pinhole(front)

Holo-scale

Objective

Workpiecesurface

Pinhole(rear)

Photodiodeb

Laser source

QV HYBRID TYPE1, TYPE4SERIES 365 — CNC Vision Measuring System equipped with a non-contact displacement sensor

FEATURES: Hybrid Type1•Thefocusingpointmethodminimizesthedifferenceinthe

measuringfacereflectanceandrealizinghighmeasurementreproducibility.

•Thedoublepinholemethod(lessdirectivity)isemployedasthemeasurementprinciple.

VisionheadLaserhead

FEATURESThe Quick Vision Hybrid is an advanced machine which allows vision measurement with both a CCD camera and high-speed scanning by applying a vision measurement unit in parallel with a non-contact displacement sensor.

SPECIFICATIONSQVH4 606

Type 4 Displacement Sensor

•Enables detection of high inclination angles for both mirror and diffused Surfaces.

•The automatic lighting adjustment function allows for high accuracy measurements.

•Thickness measurement of thin and transparent objects suchasfilm.

FEATURES: Hybrid Type 4

Non-contact displacement sensor

Vision head

Safety precautions regarding laser autofocus system (factory-installed option)This product uses a low-power visible laser (690nm) for measurement. The laser is a CLASS 1 EN/IEC60825-1 (2007) device. A warning and explanation label, as shown above, is attached to the product as appropriate.

*1TYPE4isnotsupportedbyQVHSTREAM*2L=arbitrarymeasuringlength(mm)*3InspectedbyMitutoyostandard*4Accuracyfor20±2°C*5Accuracyfrom18to23°C

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QV objective WLI objective

ProjectedimageusingtheQuickVision

measurementsensor

ProjectedimageusingtheWLI

measurementsensor

Applicationviewofnanohole

Applicationviewofsurfacetrace

depth

depth

diameter

width

QV-FORMPAK2Danalysis

Regionofinterestevaluation

3-dimensionaltopographicalresult,dataofmicro-circuit

QVWLI25xobjective

QVWLI10xobjective

QVWLI5xobjective

Quick Vision WLISERIES 363 — CNC Video Measuring System with White Light interferometry

QV Hyper WLI 302 QV Hyper WLI 404 QV Hyper WLI 606QV Hyper WLI 302

(ISO10360-7)QV Hyper WLI 404

(ISO10360-7)QV Hyper WLI 606

(ISO10360-7)

Measuringrange(X×Y×Z)

Visionmeasuringarea 11.81”x7.87”x7.48”(300×200×190mm)

15.75”x1575”x9.45”(400×400×240mm)

23.62”x25.59”x8.66”(600×650×220mm)

WLImeasuringarea*1 8.46”x7.87”x7.48”(215×200×190mm)

12.40”x15.75”x9.44”(315×400×240mm)

20.58”x25.59”x8.66”(515×650×220mm)

WLI optical head unit

Viewfield(H×V) 5Xlens:approx.0.64x0.48mm/10Xlens:approx.0.32×0.24mm/25Xlens:approx.0.13×0.10mm

Illumination Co-axialLight Halogen

Repeatability 2s ≤.08µm

Z-axisscanningrange*2 170µmVision optical head unitMagnificationchangesystem ProgrammablePowerTurret1X-2X-6X)

Imagedetectionmethod B&WCCDcamera

Illumination

Co-axialLight WhiteLED

TransmittedLight WhiteLED

Programmableringlight WhiteLED

Measuringaccuracy

E1X,E1Y (0.8+2L/1000)µmE1Z (1.5+2L/1000)µmE2XY (1.4+3L/1000)µm

EU,MPE(ISO10360-7:2011) 2.5+4L/1000

PF2D,MPE(ISO10360-7:2011) 1.7µmMain unitResolution 0.01µmMax.stageloading 33lbs.(15kg) 55lbs.(25kg) 77lbs.(35kg)Guidancesystem LinearMotionHardBearing

Dimensions(W×D×H) 33.82”x37.40”x63.23”(859×950×1606mm)

40.43”x55.39”x70.11”(1027×1407×1781mm)

51.54”x78.15”x70.55”(1309×1985×1792mm)

Mass(vibrationisolatorstandincluded) Approx.1080lbs.(490kg) Approx.2557lbs.(1160kg) Approx.2275lbs.(1031kg)

SPECIFICATIONS

*1:WLIheadmovable.rangeMeasurementof3DformswithWLIwillbewithinoneviewfield.*2:Instandardmode.Applicabletomax.200µmbymodifyingscanpitch.

•QVWLIalonecanmeasurecoordinatesand dimensions and assess micro-3D forms without contact.

•Thismachineisahighaccuracy,dual-headvision measuring system equipped with a white light interferometer.

•Thewhitelightinterferometerusesa high aspect ratio to accurately measure shapes.

•Thestandardvisionmeasuringfunctioncan continuously perform coordinate, dimension and 3D shape measuring without interruption.

•Thelargeworkstageaccuratelyhandleslarge-sizedworkpiecessuchasaPCB.

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ULTRA QVSERIES 363 — Ultra-high Accuracy CNC Vision Measuring System

FEATURES•Minimizesstraightnesserrorsthroughthe

use of a precision air-bearing linear guide system.

•Utilizesa0.01µmresolutionglassscalemanufactured at an ultra-precision facility located eleven meters underground.

ULTRA QV404 PRO

•Minimizesaccuracyfluctuationagainstthermal change through the use of virtually zerothermalexpansionglassscales.

•Optimizesthemechanicalstructureofthemain unit in Finite Element Method analysis.

•Stabilizesthegeometricalaccuracy (i.e. straightness of each axis and

perpendicularity) to lessen thermal effects.

Model No.QUICK VISION ULTRA 404 PRO QUICK VISION ULTRA 404 PRO

w/ TAFQUICK VISION ULTRA 404 PRO

(ISO10360-7:2011)QUICK VISION ULTRA 404 PRO

w/ TAF (ISO10360-7:2011)Range XxYxZ 16”x16”x8”(400x400x200mm)

Magnificationchangesystem Programmablepowerturret(selectablefromamongmagnificationsof1X,2X,and6X)

Resolution/Scaleunit 0.01µm/LinearEncoder*4

ResolutionofZ-ScalewhenusingTAF – 0.25µmHigh-sensitivityCCDCamera B&W

Illumination(PRL:ProgrammableRingLight)

Surface HalogenContour HalogenPRL Halogen

Accuracy*1(20˚C±0.2˚C)

E1XY (0.25+L/1000)µmE1Z(50mmstroke)*2 (1.0+2L/1000)µmE1Z(Fullstroke) (1.5+2L/1000)µmE2XYplane (0.5+2L/1000)µmEU,MPE(ISO10360-7:2011) 1.3+3L/1000,1.3+3.5L/1000*5

PF2D,MPE(ISO10360-7:2011) 1.0µm

Accuracyassuranceenvironments*3

Temperaturerange 20±0.2˚CTemperaturevariation 0.5˚C/1HTemperaturegradient 1˚C/m

Repeatabilitywithinthevisualfield 3s=0.2µmRepeatabilityofauto-focus s=0.4µmStageglasssize 19.4”x21.7”(493x551mm)Max.stageloading 88lb(40kg)Dimensions(WxDxH) 46”x68”x75.2”(1172x1735x1910mm)Mass 4464lb(2025kg)Usedairpressure 0.4MPa*6

Suppliedairflowrate 150L/min*7

SPECIFICATIONS

TheUltraQuickVisionisequippedwithacrystallizedglassscalehavingaresolutionof0.01µmandlinearexpansioncoefficientof±0.02x10-6/K.ThisvirtuallyzerothermalexpansionmeanstheUltraQuickVisioncanminimizeaccuracyfluctuationresultingfromthermalchanges.Ultra-precisionmanufactureelevenmetersunderground

Standardglassscale

Ultra-highaccuracycrystallizedglassscalewithvirtuallyzerothermalexpansion

Ultrasonic micro probe, UMAPTheultrasonicmicroprobe(UMAP)hastheabilitytosensetheamplitudevariabilityinamicroareaandtheoptionalcontactpoints(15to300µmdiameter)offeralargerangeofhighaccuracymeasurementmeetingawidevarietyofspecifications.*Factoryorderedoption

Self-Suction Air PadIfanormalairpadisusedfortheYaxis,itisnecessarytoincreasethemassoftheworkstagetoobtainappropriaterigidity.ULTRAQV(QuickVision)employsaspecialairpadcalledaself-suctiontypethatfloatstheairpadwithcompressedairandalsogeneratesanabsorptionpowerwithavacuumzoneprovidedundernegativepressureatthecenterofthepad.ThisachievesgreaterY-axisrigidityandstageweightreductionconcurrently,thusenablingstablestagedrive.

Compressedair Compressedair

GuideplaneAirpad

Vacuumsuctionregion

Suction

ULTRAQVemployshigh-reliabilityballscrewsinthefloatingmechanism.Thisfloatingmechanismwillminimizetheerrorduetoaxialfluctuationthatadverselyaffectskineticperformancesuchasstraightnessandimprovethedrivingspeed.

Ball Screw Floating Mechanism

Servomotor

Floating Mechanism

Nut

Ball Screw

Guide Block

Pulse Generator

Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochan-gesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.

Parfocal

Parfocal

Surface of workpiece

Automatic Z-axis tracking Objectives

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Application example

HYPER UMAP Vision System 302 TYPE2

ULTRA UMAP Vision System 404 TYPE2

Contour measurement of a ø0.125 hole

Measuring form of micro gear teeth

UMAP Vision System TYPE2SERIES 364 — Micro Form Measuring System

UMAP101Stylus

UMAP103Stylus

2mm

ø30 µm

ø100 µm

ø30 µm

16m

m

ø300 µm

ø15 µm

ø300 µm

ø70 µm

10m

m

ø100 µm

0.2m

m

ø15 µm

UMAP110Stylus

UMAP130Stylus

UMAP107Stylus

5mm

ø70 µm

Detection signal after workpiece contact

AmplitudeStylus

Workpiece

Duration

Detection signal before workpiece contact

Amplitude Amplitude reductionStylus

Workpiece

Duration

Detection of surface principle

①�In this drawing, the stylus is vibrating with a micro amplitude. When it does not come into contact with the workpiece as shown, the vibration state is maintained.

②�As the stylus comes into contact with the workpiece surface the vibration amplitude decreases as the contact increases. When the decreasing amplitude falls below a certain level, a touch-trigger signal is generated.

•Ultrasonicmicroprobe,UMAP Theultrasonicmicroprobe(UMAP)hastheabilitytosensetheamplitudevariabilityina

microareaandtheoptionalcontactpoints(15to300µmdiameter)offeralargerangeofhighaccuracymeasurementmeetingawidevarietyofspecifications.

•Bothhigh-accuracysophisticatednon-contactandcontactmeasurementcapabilities with one machine

ThisunitincludestheUMAPandthenon-contacttypevisionhead.Untilnow,itwasdifficulttomeasureminuteareas,butitisnowpossibletodobothcontactandnon-contactmeasurementonasingleplatform.

SPECIFICATIONS TYPE2

Hyper UMAP302 ULTRA UMAP404

Measuringrange(commontovisionandUMAP)

X-axis×Y-axis 7.28x7.87”(185×200mm) 11.22x15.75”(285×400mm)

Z-axis6.89”(175mm):UMAP101/1037.07”(180mm):UMAP107/110

7.28”(185mm):UMAP130

Measuringaccuracy(Vision)

E1X,E1Y(0.8+2L /1000)µm (0.25+L /1000)µm

E1Z (1.5+2L /1000)µm

RepeatabilityUMAP101/103/107 s =0.1µm s =0.08µm

UMAP110/130 s =0.15µm s =0.12µm

Microprobe,UMAP

FEATURES

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FEATURESMoving-bridge type structure Designed with primary focus on measurementefficiency,themachineadoptsa more rigid construction and drives the X and Y axes at 400mm/s (QV ACCEL808, ACCEL1010).

QV ACCELSERIES 363 — Large Format CNC Vision Measuring System

QV ACCEL1212PRO

QV ACCEL808PRO

The moving-bridge type structure also eliminates the need for a moving stage. Thisfacilitatesamoresimplifieddesignoftheworkpiecefixture,resultinginasignificantreductionintheman-hoursrequiredforfixturefabricationandinspection.

SPECIFICATIONSModel No. QV ACCEL808PRO QV ACCEL1010PRO QV ACCEL1212PRO QV ACCEL1517PRORange X-axis 32” / 800mm 40” / 1000mm 50” / 1250mm 60” / 1500mm

Y-axis 32” / 800mm 40” / 1000mm 50” / 1250mm 70” / 1750mmZ-axis 6” / 150mm 6” / 150mm 4” / 100mm 4” / 100mm

Resolution 0.1µmResolutionofZscalewhenusing TAF 0.3µm

High-sensitivity CCD camera B&WAccuracy* E1XY (1.5+3L/1000)µm (2.2+3L/1000)µm

E1Z (1.5+4L/1000)µm (2.5+5L/1000)µmE2XY (2.5+4L/1000)µm (3.5+4L/1000)µm

Max. drive speed X/Y-axis 400mm/s 300mm/sZ-axis 150mm/s 150mm/s

Illumination(PRL: Programmable Ring Light)

Surface LED, whiteContour LED, whitePRL LED, white (4 divisions)

Magnificationchangesystem Programmable power turret (1X, 2x, 6x)Stageglasssize 34.8” x 37.7”

883 x 958mm46.7” x 46.7”

1186 x 1186mm56.7” x 56.7”

1440 x 1440mm67.5” x 77.5”

1714 x 1968mmDimensions (W x D x H) 58 x 67.5 x 62”

1475x1716x1578mm75.3 x 82 x 63”

1912x2086x1603mm85.3 x 92 x 61”

2166x2340 x1554mm96 x 113 x 61”

2440 x 2868 x 1554mmMax stage loading 22 lbs / 10kg 66.1 lbs / 30kg 66.1 lbs / 30kg 66.1 lbs / 30kgMass 5666 lbs / 2570kg 6504 lbs / 2950kg 7937 lbs / 3600kg 9921 lbs / 4500kg

* Themeasuringaccuracyisdefinedatthefollowingconditions,Programmablepowerturret:1X,Objectivelens:2.5X(HRorSL), L=Dimensionbetweentwoarbitrarypoints(mm)

Image Multi-AutoFocusThe optimal focus can be selected for each surface texture and measuredfeature,realizinghighreproducibility and reliable edge detection.

Edge focus

Patternfocus

Surface focus

Programmable Ring Light (PRL)Finecontrolofobliquityanddirectionprovidesilluminationoptimalformeasurement.Obliquitycanbearbitrarilysetintherangefrom30°to80°.Thistypeofilluminationiseffectiveforenhancingtheedgeofinclinedsurfacesorverysmallsteps.Illuminationcanbecontrolledindependentlyineverydirection,backandforth,rightandleft.Measurementwithedgeenhancementispossiblebyformingashadowbylightingfromonlyonedirection.

Workpiecesurface

Parabolic mirror

Toroidal mirror

Four-quadrant LED light

30° 60° 80°

Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochangesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.

Parfocal

Parfocal

Surface of workpiece

Automatic Z-axis tracking Objectives

Tracking Auto Focus (TAF)AFprinciple Objectivecoaxialautofocusing(knifeedgemethod)

Suitableobjectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x

Trackingrange*26.3mm 6.3mm 1mm 1mm 0.25mm

(±3.15mm) (±3.15mm) (±0.5mm) (±0.5mm) (±0.125mm)

Spotdiameter*3 5.2µm 8.0µm 2.1µm 3.1µm 1.5µm

Lasersource Semiconductorlaser(peakwavelength:690nm)

Laserpower 0.9mW

Lasersafety Class2(JISC6802:2011,EN/IEC60825-1:2007)*2Variesaccordingtoworkpiecesurfacetextureandreflectance.*3Thesearedesignvalues.

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Non-contact and contact measurement with one machineQVtouchprobeunitenablesbothvisionmeasurementandtouchprobemeasurement.

3D workpiece measurementMeasuresthree-dimensionalworkpiecessuchasmoldedproducts,resinmoldedproducts,machinedproducts,andmore.

Module change rack availableEasilychangebetweenvisionandtouchprobemeasurementautomaticallywithamodulechangerack.

Specifications with Touch Probe Option

Masterball

Calibrationblock

Module change rack, MCR20

PH6

TP20

Quick Vision with Touch Trigger Probe

Safety precautions regarding laser autofocus system (factory-installed option)This product uses a low-power visible laser (690nm) for measurement. The laser is a CLASS 1 EN/IEC60825-1 (2007) device. A warning and explanation label, as shown above, is attached to the product as appropriate.

QV TP ELFQV TP Apex302Hyper QV TP302

QV TP Apex404Hyper QV TP404

QV TP Apex606Hyper QV TP606

Measuringrange*1(X×Y×Z)

Vision 250×200×200mm 300×200×200mm 400×400×250mm 600×650×250mmTouchProbe 184×200×200mm 234×200×200mm 334×400×250mm 534×650×250mm

Measuringaccuracy*2(Touchprobe) E1X, E1Y, E1Z (2.4+3L/1000)µm QVTPApex:(1.8+3L/1000)µm

HyperQVTP:(1.7+3L/1000)µm

QV TP ACCEL 808 QV TP ACCEL 1010 QV TP ACCEL 1212 QV TP ACCEL 1517

Measuringrange*1(X×Y×Z)

Vision 800×800×150mm 1000×1000×150mm 1250×1250×100mm 1500×1750×100mmTouchProbe 734×800×150mm 934×1000×150mm 1184×1250×100mm 1434×1750×100mm

Measuringaccuracy*2(Touchprobe) E1X, E1Y, E1Z (1.8+3L/1000)µm (3+4L/1000)µm (6+7L/1000)µm

*1:Whenamodulechangerack,amasterball,andacalibrationringaremounted,themeasurementrangesaresmallerthanthoseinthetable.OtherspecificationsarethesameasthoseofQVELF,QVApex,HyperQV,andQVACCEL. Pleasecontactoursalesofficeformoredetails.

*2:InspectedbyMitutoyostandard.L=lengthbetweentwoarbitrarypoints(mm)

Objective QV2.5X HRMeasurement principle Double pinhole methodLaser spot diameter 3µmRepeatability s =0.4µm

Laser Auto Focus* (Factory-installed option)The system can be equipped with a Laser Auto Focus unit that allows a stable, high-speed height measurement during high-speed travel. This unit provides stable measurement results with minimum dependence on surface inclination since the double pinhole method is adopted in the detection system.*Factory ordered option

Detector a

Pinhole

Objective

Detector b

Pinhole

Lens

Half mirror

Coaxial laser auto-focus

Example: Height of leads from a QFP package

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Objectivemag.

Turretlensmag.

Monitormag.

ViewField

0.5X 1X 16X 12.54x9.402X 32X 6.27x4.706X 96X 2.09x1.56

1X 1X 32X 6.27x4.702X 64X 3.13x2.356X 192X 1.04x0.78

2.5X 1X 80X 2.50x1.882X 160X 1.25x0.946X 480X 0.41x0.31

5X 1X 160X 1.25x0.942X 320X 0.62x0.476X 960X 0.20x0.15

10X 1X 320X 0.62x0.472X 640X 0.31x0.236X 1920X 0.10x0.07

25X 1X 800X 0.25x0.182X 1600X 0.12x0.096X 4800X 0.04x0.03

Accessories for Quick Vision

QV-Index Head* Automaticmulti-planemeasurementispossiblewiththeoptionalindextable.

Max. workpiece diameter 5.51” / 140mmMax. workpiece mass 4.41 lbs / 2kgMin. rotation angle 0.1°Positioning accuracy ±0.5°Max. rotation speed 10rpm

Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochan-gesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.

Parfocal

Parfocal

Surface of workpiece

Automatic Z-axis tracking Objectives

Tracking Auto Focus (TAF)AFprinciple Objectivecoaxialautofocusing(knifeedgemethod)Suitableobjectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x

Trackingrange*2 6.3mm 6.3mm 1mm 1mm 0.25mm(±3.15mm) (±3.15mm) (±0.5mm) (±0.5mm) (±0.125mm)

Spotdiameter*3 5.2µm 8.0µm 2.1µm 3.1µm 1.5µmLasersource Semiconductorlaser(peakwavelength:690nm)Laserpower 0.9mWLasersafety Class2(JISC6802:2011,EN/IEC60825-1:2007)*2Variesaccordingtoworkpiecesurfacetextureandreflectance.*3Thesearedesignvalues.

Capable of Supporting ISO10360-7 Guaranteed AccuracySomemodelsintheQuickVisionSeriessupporttheISO10360-7guaranteedaccuracyspecifications.ContactMitutoyofordetailsonapplicablemodels.Guaranteed accuracies•Lengthmeasurementerror EU,MPE

•Probingerror PF2D,MPE

LengthmeasurementerrorE

Objective † Objective Order No. Working

distanceQV-SL0.5X 02AKT199 30.5mmQV-HR1X 02AKT250 40.6mmQV-SL1X 02ALA150 52.5mmQV-HR2.5X 02AKT300 40.6mmQV-SL2.5X 02ALA170 60mmQV-5X 02ALA420 33.5mmQV-10XHR 02AKT650 20mmQV-25X 02ALG020 13mm

Themonitormagnificationandfieldofviewvaluesare for the PRO machine.QV-10X, QV-25X: Depending on a workpiece of illuminationmaybeinsufficientataturretlensmagnificationof2Xand6X.QV-25X: The PRL illumination is restricted in its usable position.

Calibration glass chartNo. 02AKN020 † A calibration chart is used to compensate forthepixelsizeoftheCCDchip,autofocusaccuracy and the optical axis offset at each magnificationofthevariablemagnificationunit (PPT).

Compensation chartNo. 02AKU400* A compensation chart is used to decrease optical distortion and errors caused by difference of the pattern & texture on the workpiece surface.

Multi-Function Control Box

Emergency-stopbutton

4-digitstatusLED

VariablespeedcontrolPFF (Points from Focus)MitutoyodevelopedopticaldatacollectionmethodthatstitchesimagestogetherwithhighresolutionZaxisdata.

Collect an image stack during vertical (Z)

motion of the camera

For each pixel, local contrast measure

is calculated

The Z coordinates of the contrast peak gives the location

of surface at that point

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M-15

OPTI-FIX Kits

Themodularopti-fixclampingsystemhasbeendevelopedespeciallyforopticalcoordinatemeasuringsystems.

Opti-fixguaranteessafepartfixturingduringmeasurement.Thisfunctionalconfigurationalsomakesmultiplepartmeasurementsconsiderablyeasier.

Inordertoreduceerrantreflectionsoflightingsystemsandambientlighteffectstoaminimum,allimportantconstructionelementsareanodizedinflat-blackormatfinish.

Modular clamping system for vision measuring systems

Forthemountingofthebasicelementsontoastageglasstherearedifferentfasteningtypesavailable.

Theopti-fixsystemallowsforaquickandeasysolutionofvarioustasksusingonlyafewcomponents.Incaseofmeasuringmethodsusingreflectedaswellastransmittedlightformeasurementofcubic,rotationallysymmetricalandflatworkpieces,theuseofopti-fixisapracticalsolution.

Furthermore,thespringclipsandcenteringpinsareintegratedintothesystemtoallowfortactilemeasuring.Opti-fixofferstheuseralargenumberofconfigurationsforpartfixing,fromclampingtweezersforminiaturepartstoaprecisionviceforlargeparts.

(Fasteningbrackets,vacuumplatesormagneticholdersformountingtheclampingsystemonthemeasuringmachine,canbeorderedseparately.)

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M-16

16 parts, for construction of a simple rail system with a length of 250 mm, for fixing parts with simple part geometry.

26 parts, for construction of a basic frame with the dimensions of 200 mm x 100 mm, for fixing parts with simple part geometry.

23 parts, for construction of a basic frame with the dimensions of 250 mm x 200 mm, for fixing parts that are rotationally symmetric with and without center holes.

OPTI-FIX KitsOpti-Set Start

K551056

K551057

K551058

Opti-Set Basic

Opti-Set Rotation

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M-17

51 parts, for construction of a basic frame with the dimensions of 400 mm x 250 mm, for fixing parts with slightly more complex part geometry.

115 parts, for construction of a basic frame with the dimensions of 400 mm x 250 mm, and for fixing parts with complex part geometry. The fixing of parts with a rotational part geometry is also available.

18 parts, with locating and clamping elements, included adaptor plates for adaptation to the basic frame of the rail system.

OPTI-FIX KitsOpti-Set Advanced

K551059

K550298

Opti-Set Professional

Opti-Set Round

K551060

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M-18

Vision Measuring MachinesQuick Guide to Precision Measuring Instruments

Detecting/measuring edges in the XY plane

Gray

scale 255

127

0

(1) (2) (3)Tool position

Tool

244 241 220 193 97 76 67 52 53 53243 242 220 195 94 73 66 54 53 55244 246 220 195 94 75 64 56 51 50

■Vision MeasurementVisionmeasuringmachinesmainlyprovidethefollowingprocessingcapabilities.

■ Edge detection

■ Auto focusingFocusing and Z measurement

■ Pattern recognitionAlignment, positioning, and checking the presence of a feature

Animageiscomprisedofaregulararrayofpixels,similartotheprocessthatproducesaprintedimagepictureonfineplottingpaperwitheachsquaresolid-filled.

■Gray ScaleAPCstoresanimageafterinternallyconvertingittonumericvalues.Anumericvalueisassignedtoeachpixelofanimage.Imagequalityvariesdependingonhowmanylevelsofgrayscalearedefinedbythenumericvalues.ThePCprovidestwotypesofgrayscale:two-levelandmulti-level.Thepixelsinanimageareusuallydisplayedasthe256-levelgrayscale.

Pixelsinanimagebrighterthanagivenlevelaredisplayedaswhiteandallotherpixelsaredisplayedasblack.

Eachpixelisdisplayedasoneof256levelsbetweenblackandwhite.Thisallowshigh-fidelityimagestobedisplayed.

■Difference in Image QualityDifferencebetween2-leveland256-levelgray-scaleimages

Sampleimagedisplayedin2-levelgrayscale Sampleimagedisplayedin256-levelgrayscale

■Variation in Image Depending on Threshold Level

Thesethreepicturesarethesameimagedisplayedas2-levelgrayscaleatdifferentslicelevels(thresholdlevels).Ina2-levelgray-scaleimage,differentimagesareprovidedasshownaboveduetoadifferenceinslicelevel.Therefore,the2-levelgrayscaleisnotusedforhigh-precisionvisionmeasurementsincenumericvalueswillchangedependingonthethresholdlevelthatisset.

■Dimensional MeasurementAnimageconsistsofpixels.Ifthenumberofpixelsinasectiontobemeasurediscountedandismultipliedbythesizeofapixel,thenthesectioncanbeconvertedtoanumericvalueinlength.Forexample,assumethatthetotalnumberofpixelsinthelateralsizeofasquareworkpieceis300pixelsasshowninthefigurebelow.Ifapixelsizeis10µmunderaspecificimagingmagnification,thetotallengthoftheworkpieceisgivenby10µmx300pixels=3000µm=3mm.

■Edge DetectionHowtoactuallydetectaworkpieceedgeinanimageisdescribedusingthefollowingmonochromepictureasanexample.Edgedetectionisperformedwithinagivendomain.Asymbolwhichvisuallydefinesthisdomainisreferredtoasatool.Multipletoolsareprovidedtosuitvariousworkpiecegeometriesormeasurementdata.

Theedgedetectionsystemscanswithinthetoolareaasshowninthefigureatleftanddetectstheboundarybetweenlightandshade.

Exampleofnumericvaluesassignedtopixelsonthetool

(1)Scanstartposition(2)Edgedetectionposition(3)Scanendposition

1

0

255

127

0

2-levelgray scale

White

Gray

Black

Multi-levelgray scale

White

Gray

Black

300 pixels 10µm

480

pixe

ls

CCD camera lens

Video signal

Amplifier

High-speed A/D converter Frame grabber

Display screen

PC

640 pixels

■Image Storage

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M-19

■High-resolution Measurement

Toincreasetheaccuracyinedgedetection,sub-pixelimageprocessingisused.Anedgeisdetectedbydetermininganinterpolationcurvefromadjacentpixeldataasshownbelow.Asaresult,itallowsmeasurementwitharesolutionhigherthan1pixel.

■Measurement along Multiple Portions of an Image

LargefeaturesthatcannotbecontainedononescreenhavetobemeasuredbypreciselycontrollingthepositionoftheCCDsensorandstagesoastolocateeachreferencepointwithinindividualimages.Bythismeansthesystemcanmeasureevenalargecircle,asshownbelow,bydetectingtheedgewhilemovingthestageacrossvariouspartsoftheperiphery.

■Composite Coordinates of a Point

MeasuringmachinestagepositionM=(Mx,My,Mz)

Detectededgeposition(fromthecenterofvision)V=(Vx,Vy)

Actual coordinates are given by X = (Mx + Vx), Y = (My + Vy), and Z = Mz, respectively.

Sincemeasurementisperformedwhileindividualmeasuredpositionsarestored,thesystemcanmeasuredimensionsthatcannotbeincludedinonescreen.

■Principle of Auto FocusingThesystemcanperformXY-planemeasurement,butcannotperformheightmeasurementusingonlytheCCDcameraimage.ThesystemiscommonlyprovidedwiththeAutoFocus(AF)mechanismforheightmeasurement.ThefollowingexplainstheAFmechanismthatusesacommonimage,althoughsomesystemsmayuseanAFlaser.

TheAFsystemanalyzesanimagewhilemovingtheCCDupanddownintheZaxis.Intheanalysisofimagecontrast,animageinsharpfocuswillshowapeakcontrastandoneoutoffocuswillshowalowcontrast.Therefore,theheightatwhichtheimagecontrastpeaksisthejust-in-focusheight.

■Variation in Contrast Depending on the Focus ConditionEdgecontrastislowduetoout-of-focusedges.

Edgecontrastishighduetosharp,in-focusedges.

Gray

scale

Tool position Gray

scale

Tool position

When enlarged...

A position the system recognizes as an edge may be in error by up to one pixel width using normal image processing. This will prevent the execution of high-resolution measurement.

M

Mz

My

Mx

Vx

VyV

Machine coordinate system Vision coordinate system

CCD

Z coordinate

In-focus height

Contrast

High High

Low Low

Contrast in the scanning direction Contrast in the scanning direction

Gray

scale

Gray

scale

Tool position

Tool position

Image signal without sub-pixel processing

Image signal with sub-pixel processing

The image signal profile approaches an analog waveform like this.

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WarrantiesMitutoyo America Corporation warrants all of its products sold and shipped in the United States and Canada for one year from the date of shipment to the original purchaser. The description as shown below is not a warranty by itself and is for general information only. For warranty termsandconditionsastheypertaintoaspecificproduct,contacttheMitutoyoAmericaCorporationservicecenter.

MitutoyoAmericaCorporationwarrantstheproductsandsoftwareitmanufacturesandsellsdirectlyorthroughanauthorizeddistributor,iftheproduct or software is in the possession of the original purchaser. Except for software, Mitutoyo America Corporation will, at its option, repair or replace any part or parts which upon examination are found to be defective in workmanship or material, provided the product is returned to Mitutoyo America Corporation and the purchaser can prove that the product has been used and maintained and, where applicable, installed in accordance with Mitutoyo America Corporation instructions and has not been subject to abuse. For software, Mitutoyo America Corporation will replace defective media or make a warranted program operate or replace the program with a functionally equivalent program as warranted, provided there is satisfactory documentation that the software has been installed, used, and maintained in accordance with Mitutoyo America Corporation instructions in the User Manual and provided further that the customer can satisfactorily show that a defect exists.

MitutoyoAmericaCorporationdoesnotacceptliabilityorresponsibilityforrepairs,additions,ormodificationsmadetotheproduct,includingthose made by others, without Mitutoyo America Corporation’s written consent.

The warranties Mitutoyo America Corporation provides do not adversely affect Mitutoyo America Corporation’s right to modify or change the designofproducts,withoutnotice,includinganyofitsspecificationsormaterials.

Export ComplianceAll products in this catalog are subject to the Foreign Exchange and Foreign Trade Control laws of Japan, US Export Administration Regulations (EAR) or the Canadian Export and Import Permits Act. Re-export or relocation of any of these products may require prior approval by an appropriate governing authority. If a purchased product is exported or re-exported, even if it is not considered a regulated item by a governing authority, Mitutoyo would like to be made aware, as the customer service available for that product may be affected. If you have any questions, please consultyourlocalMitutoyosalesoffice.

Safety CautionCarefullyreadthespecificationsandfunctionsinthiscatalogbeforeselectingproducts.Safety may be compromised if you use products for purposes other than those stated here.Feel free to contact your nearest Mitutoyo sales center if you wish to use a product for other purposes or in a special environment.

Appearance and SpecificationsAppearanceandspecificationsaresubjecttochangewithoutpriornoticeforproductimprovement.The product names in this catalog are registered trademarks or trademarks of Mitutoyo or their respective companies.

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