Vibration Energy Harvesting - NiPS) Lab · 02/07/2014 - bridge collapse at FIAT source: microstrain...

MEMS/NEMS scale vibration energy harvesting

NiPS Summer School

July 14-18th, 2014

Perugia, Italy

Francesco Cottone

NiPS lab, Physics Dep., Università di Perugia

francesco.cottone at unipg.it

1

Outline

• MEMS- to NEMS-based energy harvesters and potential applications

• Micro/nanoscale energy harvesters: scaling issues

• Nonlinear and frequency-up conversion approaches

• Conclusions

2

MEMS- to NEMS-based harvesting devices and potential applications

Medical applications

3

Internet of Things (IoT)

Body powered

pacemaker

Nanomedicine

source: www.google.com

Military/Aerospace

source: microstrain02/07/2014 - bridge collapse at FIAT factory @ Belo Horizonte (Brazil)(source: Corriere della sera)

Structural Monitoring

https://www.youtube.com/watch?v=F11M7978n7c

University of Illinois and

University of Arizona.

https://www.youtube.com/watch?v=F11M7978n7c


MEMS-based drug delivery systems

4

Bohm S. et al. 2000

Body-powered oximeter

Leonov, V., & Vullers, R. J. (2009).

D. Tran, Stanford Univ. 2007

Heart powered pacemakerA 1mm-20mg nanorobot flying at

1 m/s requires F ~ 4 microN and

P ~ 41 uW.

The input power for a 20mg

robotic fly is 10 – 100 uW

depending on many factors: air

friction, aerodynamic efficiency

etc.

Micro-robot for remote

monitoring

A. Freitas Jr., Nanomedicine, Landes Bioscience, 1999

Pacemaker consumption is

around 40uW.

Beating heart could produce

200uW of power from heat

differentials, physiological

pressures, and flows and

movements, such as blood

flow


MEMS-based energy harvesting devices

5

Chang. MIT 2013

Jeon et al. 2005

EM generator, Miao et al. 2006

Time

Le, C. P., Halvorsen 2012

Cottone F., Basset P. ESIEE Paris 2013-14 Mitcheson 2005 (UK)

Electrostatic generator 20Hz 2.5uW @ 1g

D. Briand, EPFL 2010

M. Marzencki 2008 – TIMA Lab (France)

Khalil Najafi 2011 Univ. Michigan

2005 2015


NEMS-based energy harvesting devices

6

ZnO nanowires Wang, Georgia Tech (2005)

ZnO nanowires –Xu F. (2010) tensile stress test

Chen, X. et al (2010) Nano letters0,6 V – 30nW

Cha, S. (2010). Sound-driven piezoelectric nanowire-based nanogenerators. Advanced materials

Qi, Yi, 2011 Nano LettersPZT Nanoribbons

Virus-directed BaTiO3 nanogenerator

Jeong, C. et al (2013). ACS nano,

Time

2005 2015

7

Objective : 100 µW/cm3 of power density

Temporary storage

and conditioning electrinics:

• Ultra capacitors

• Rechargeable Batteries

Energy harvesting system:

• piezoelectric,

• electromagentic,

• electrostatic,

• magnetostrictive

Sensor node and

transceiver

Mechanical vibrations

Microscale kinetic harvesters: scaling issues

Who’s the best for MEMS/NEMS ?

Technique Advantages Drawbacks

Piezoelectric • high output voltages • well adapted for

miniaturization• high coupling in single crystal• no external voltage source

needed

• expensive• small coupling for

piezoelectric thin films • large load optimal

impedance required (MΩ)• Fatigue effect

Electrostatic • suited for MEMS integration• good output voltage (2-10V)• possiblity of tuning

electromechanical coupling• Long-lasting

• need of external bias voltage• relatively low power density

at small scale

Electromagnetic • good for low frequencies (5-100Hz)

• no external voltage source needed

• suitable to drive low impedances

• inefficient at MEMS scales: low magnetic field, micro-magnets manufacturing issues

• large mass displacement required.

8

First order power calculus with William and Yates model

9


k

Transducer as an electrical damper

F(t)=mÿ

xdm

m

y

de

Motion equation

( ) ( ) ( ) ( ) ( )m emx t d d x t kx t my t 0( ) sin( )f t my Y t

Inertial force

2

022

2

( ) sin( )

( )e m

x t Y t

d dk

m m

Steady state solution

setting dT =dm+de the total damping coefficient, the phase angle is given by

1

2tan Td

k m

/n k m and the natural frequency

2

2 2

( )( )

( ) 2 ( )xf

e m n n

XH

Y i

By introducing the damping ratio, namely T=(e+m)=dT/2mn, the position transfer fuction is expressed by

First order power calculus with William and Yates model

3

3 2

0

22 2

1 2( )

e

n

e

e m

n n

m Y

P

that is

At resonance, that is =n , the maximum power is given by

3 2 2 4 2

0

2 24( ) 2( )

e n e ne

e m e m

m Y m d YP

d d

or with acceleration amplitude A0=n2Y0.

for a particular transduction mechanism forced at natural frequency n, the power can be maximized from the equation

2

24 ( )

eel

n m e

m AP

Max power when the condition e=m is verified

10

The instantaneous dissipated power by electrical damping is given by

2

0

1( ) ( )

2

x

T

dP t F t dx d x

dt

The velocity is obtained by the first derivative of steady state amplitude

2

0

2 2 2,

(1 ) (2( ) )e m

r YX

r r



11

3 322 2

2

2

0.32( / 4) 0.32( / 4)

4 ( ) 816

si mo si moeel

n m e n m

n m

si

lwh l lwh lm AP A A

E hC

l

PIEZOELECTRIC MATERIALS COMPARISON

22n n

E hC

l

Boudaryconditions C1

doubly clamped 1,03

cantilever 0,162h

w

l3

3

hk Ew

l

Boudaryconditions Uniform load xsi Point load xsi

doubly clamped 32 16

cantilever 0,67 0,2530.32 0.32( / 4)eff beam tip si sim m m lwh l

At max power condition e=m

By assuming

1

0.01

/ 200

/ 4

m

A g

h l

w l

2 4/ 800 0.32 64

16

200

si moel

n m

si

P A lE

C


12

MEMS-VEHs


h

w

l

By assuming1

0.01

/ 200

/ 4

m

A g

h l

w l

NEMS-VEHs


13

MEMS-VEHsNEMS-VEHs


h

w

l

By assuming1

0.01

/ 200

/ 4

m

A g

h l

w l


14


h

w

l

By assuming1

0.01

/ 200

/ 4

m

A g

h l

w l

Alex Zettl, California Univ. 2010 AFM cantilever

Piezoelectric conversionMaterial properties example

22 3131

11 33

.

. E T

El energy dk

Mech energy s

Electromechanical Coupling is an adimensional factor that provides the effectiveness of a piezoelectric material. IT’s defined as the ratio between the mechanical energy converted and the electric energy input or the electric energy converted per mechanical energy input

15

Characteristic PZT-5H BaTiO3 PVDF AlN(thin film)

d33 (10-10 C/N) 593 149 -33 5,1

d31 (10-10 C/N) -274 78 23 -3,41

k33 0,75 0,48 0,15 0,3

k31 0,39 0,21 0,12 0,23

𝜀𝑟 3400 1700 12 10,5

Strain-charge Stress-charge


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Mitcheson, P. D., E. M. Yeatman, et al. (2008).

Bandwidth figure of merit

Frequency range within which the output power is less than 1 dBbelow its maximum value

Galchev et al. (2011)


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Galchev et al. (2011)

Bandwidth figure of merit

Frequency range within which the output power is less than 1 dBbelow its maximum value

Mitcheson, P. D., E. M. Yeatman, et al. (2008).

At micro/nano scale direct force generators are much more efficient because not limited by the inertial mass!!!

RL

Transducer

k

i

F(t)

zRL d

m

fe

k

i

Transducer

F(t)=mÿ

zd

m

fe

y

18

( )

( )

L

L c i L c

dU zmz dz V my

dz

V V z

( )( )

( )

L

L c i L c

dU zmz dz V F t

dz

V V z


Power fluxes

RL

Transducer

k

i

F(t)

zRL d

m

fe

k

i

Transducer

F(t)=mÿ

zd

m

fe

y

19

3( )mP t my z l z ( ) ( ) ( )mP t F t z t


2 ( )( )L

dU zmzz dz z V z F t z

dz

Problems at micro- to nano-scale

• Narrow bandwidth

• Non-adaptation to variable vibration sources

• High resonant frequency at micro/nano-scale

• Poor piezoelectric coefficient

Main limits of inertial resonant VEHs

At 20% off the resonance

the power falls by 80-90%

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Nonlinear MEMS electrostatic kinetic energy harvester

Basset, P., Galayko, D., Cottone, F., Guillemet, R., Blokhina, E., Marty, F., & Bourouina, T. (2014). Journal of Micromechanics and Microengineering

24(3), 035001

Cottone, F., Basset, P., Guillemet, R., Galayko, D., Marty, F., & Bourouina, T. (2013). 2013 Transducers & Eurosensors.

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Guilllemet, R., Basset, P., Galayko, D., Cottone, F., Marty, F., & Bourouina, T. (2013).

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on (pp. 817-820): IEEE.

𝑘𝑠𝑝

𝑘𝑠𝑡

𝑔0

𝑚𝑠

𝑅𝐿

𝑉0

𝑑

Mathematical modeling

2 2

2 2

( ),a i

d x dx dU x d ym c c m

dt dt dx dt

0( ) ,L

dR C V V U

dt

2 2

0 lim

2 2

0 lim

1 1( ) , for

2 2( )

1 1( ) ( ) , for

2 2

sp

sp st

k x C x U x x

U x

k k x C x U x x

0 0

0 0

2 21( ) ln ln ,

2par f f

d x hr d x hrC x C N l

r d x d x

Governing equations

22


𝑘𝑠𝑝

𝑘𝑠𝑡

𝑔0

𝑚𝑠

𝑅𝐿

𝑉0

𝑑

Mathematical modeling

2 2

0 lim

2 2

0 lim

1 1( ) , for

2 2( )

1 1( ) ( ) , for

2 2

sp

sp st

k x C x U x x

U x

k k x C x U x x

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Electrostatic generators

F. Cottone, P. Basset Université Paris-Est, ESIEE Paris,

Silicon MEMS-based electrostatic harvesters.

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Cottone, F., Basset, P., Guillemet, R., Galayko, D., Marty, F., & Bourouina, T. (2013).

Transducers & Eurosensors.

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Basset, P., Galayko, D., Cottone, F., Guillemet, R., Blokhina, E., Marty, F., &

Bourouina, T. (2014). JMM 24(3), 035001.

Conclusionso Many potential applications are waiting for powerful MEMS/NEMS

harvesting system to enable self-powering features

o Inertial vibration energy harvesters are very limited at small scale -> direct force piezoelectric/electrostatic devices are more efficient at nanoscale

o Design challenges

o Materials with high electromechanical coupling,

o Cheap miniaturization/fabrication processes

o Very efficient conditioning electronics

o In general the specific application decides if one or many micro-VEH are the best choice with respect to one macro-scale VEH

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Research activities done in collaboration with

2013

2011

2008

2010

Thank you

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Vibration Energy Harvesting - NiPS) Lab · 02/07/2014 - bridge collapse at FIAT source: microstrain...

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