Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance...
Transcript of Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance...
![Page 1: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/1.jpg)
Dr. Ahmed H. Madian-VLSI 1
Very Large Scale Integration (VLSI)
Dr. Ahmed H. [email protected]
Lecture 3
![Page 2: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/2.jpg)
Dr. Ahmed H. Madian-VLSI 2
Contents
Wiring tracks Latch-up Circuit characterization & performance
Resistance estimation Capacitance estimation Inductance estimation
Delay estimation Simple RC model Penfield-Rubenstein Model
Delay minimization techniques Transistor sizing Distributed drivers Large driver
Wiring techniques
![Page 3: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/3.jpg)
Dr. Ahmed H. Madian-VLSI 3
Circuit characterization & performance
Resistance estimation
Capacitance estimation
Inductance estimation
![Page 4: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/4.jpg)
4
Parastic Elements
So far, we’ve concentrated on getting circuit elements that we want for digital design
Transistors
Wires
Parasitics - occur whether we want them or not
Capacitors
Resistors
Transistors (bipolar and FET)
![Page 5: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/5.jpg)
Dr. Ahmed H. Madian-VLSI 5
Resistance estimation
Resistance of uniform slab can be given as,
Where = resistivity
t= thickness
l= conductor length
w=conductor width
or,
Rs is the sheet resistance /
ohmsw
l
tR .
ohmsw
lRR s .
I
l
t
w
![Page 6: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/6.jpg)
Dr. Ahmed H. Madian-VLSI 6
Resistance estimation (cont.)
Resistance of certain layers
Rs (/)Material
0.03metal
15100Poly
80Diffusion p
35Diffusion n
24Silicide
1K 5KN-well
![Page 7: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/7.jpg)
Dr. Ahmed H. Madian-VLSI 7
Resistance estimation
For MOSFET channel resistance
Rchannel = RSheet (L/W)
where Rsheet = 1/µCOX(Vgs-Vt)
For P and n channels
Rsheet = 1000 ->30,000 /
N+ N +L
channel
L
W
![Page 8: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/8.jpg)
Dr. Ahmed H. Madian-VLSI 8
Resistance estimation (cont.) Resistance of non rectangular regions
W1
W2
W2
W1
W2
W1
L
Ratio = 2L/(L+2W1)
L
W
Ratio =L/W Ratio =L/W
W2
W1
L
Ratio =W1/W2
W2 W2
W1
W1
Ratio =W2/W1
![Page 9: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/9.jpg)
9
Resistance Depends on resistivity of material (Rho)
Sheet resistance Rs = /t
Resistance R = Rs * L / W
Corner approximation - count a corner as half a square
Corner (1/2 Square)
Corner (1/2 Square) 1/2 Square
Corner (1/2 Square)
1/2 Square
Example:
R = Rs(poly) * 13 + 2*(1/2) + 3*(1/2) squares
R = 4Ω/sq * 15.5 squares = 62Ω
![Page 10: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/10.jpg)
Dr. Ahmed H. Madian-VLSI 10
Inverter resistance estimation
CMOS inverter (no static current)
Switching current
VDD
Vin
VGS
VOUT = VDSIL
IDS
MP
MN
Vin Vout
VDD
Rs,p (L/W)
Rs,n (L/W)
351025
1
,,max
,,
max
DDDD
nsps
DD
nsps
DD
total
DD
VV
RR
VI
WLfor
W
LR
W
LR
V
R
VI
+
+
+
35.
2
maxDDV
VIlosspowerswitching DD
![Page 11: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/11.jpg)
Dr. Ahmed H. Madian-VLSI 11
Circuit characterization & performance
Resistance estimation
Capacitance estimation
Transistor capacitance
Routing capacitance
Inductance estimation
Delay estimation
![Page 12: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/12.jpg)
Dr. Ahmed H. Madian-VLSI 12
Capacitance estimation
The dynamic response of MOS systems strongly depends on the parasitic capacitances associated with the MOS device. The total load capacitance on the output of a CMOS gate is the sum of: gate capacitance (of other inputs connected to out)
diffusion capacitance (of drain/source regions)
routing capacitances (output to other inputs)
gate
drain
source
substrate
CGD
CGS CSB
CDB
CGB
![Page 13: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/13.jpg)
13
Capacitance (1/2)
Transistors
Depends on area of transistor gate
Depends on physical materials, thickness of insulator
Given for a specific process as Cg
Diffusion to substrate
Side-wall capacitance - capacitance from periphery
bottom-wall capacitance - capacitance to substrate
Given for a specific process as Cdiff,bot, Cdiff,side
Dr. Ahmed H. Madian-VLSI
![Page 14: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/14.jpg)
14
Capacitance (2/2)
Metal to substrate
Parallel plate capacitance is dominant
Need to account for fringing, too
Poly to substrate
Parallel plate plus fringing, like metal
don’t confuse poly over substrate with gate capacitance
Also important: capacitance between conductors
Metal1-Metal1
Metal1-Metal2
Dr. Ahmed H. Madian-VLSI
![Page 15: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/15.jpg)
Dr. Ahmed H. Madian-VLSI 15
Capacitance estimation (cont.)
Gate capacitance
Diffusion capacitance
Routing capacitance
Cdiff >Cpoly>Cm1>Cm2
n+substrate
gate
insulatorCgate
Cdiff.
gate
n+substrate
Metal layer
Crouting
![Page 16: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/16.jpg)
Dr. Ahmed H. Madian-VLSI 16
Capacitance estimation
In general, capacitance could be calculated using
d
A
d
AC ro ...
oxro
areaunit Cd
C .
/ d
![Page 17: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/17.jpg)
Dr. Ahmed H. Madian-VLSI 17
Gate Capacitance
Cg = Cgs + Cgd + Cgb
![Page 18: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/18.jpg)
Dr. Ahmed H. Madian-VLSI 18
Capacitance estimation (cont.)
Diffusion capacitance (source/drain)Source
Diffusion
Area
Drain
Diffusion
Area
b
a
Gate
insulatorCJP
Side wall capacitance
CJa
area capacitance
PCACC sidewallsdAreaddiffs .. ,,, +
Where A = area and p = perimeters
![Page 19: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/19.jpg)
Dr. Ahmed H. Madian-VLSI 19
Routing capacitance
single conductor capacitance
multiple conductor capacitance
![Page 20: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/20.jpg)
Dr. Ahmed H. Madian-VLSI 20
Capacitance estimation (cont.)
Metal 1
substrate
Fringing capacitance
+++
+
2222
1ln
22
t
h
t
h
t
hh
tw
Ctotal
Routing capacitance: a) single conductor capacitance
w h
t
Half cylinders
![Page 21: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/21.jpg)
Dr. Ahmed H. Madian-VLSI 21
Capacitance estimation (cont.)
Metal 2
Metal 1
substrate
C12
C2
C1
C1C2
C12
Metal 2Metal 1Vin
Vout
122
12.CC
CVV inout
+
Routing capacitance: b) multiple conductor capacitance
![Page 22: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/22.jpg)
Dr. Ahmed H. Madian-VLSI 22
Multilayer capacitance calculations
Example: given the layout shown in the figure calculate the
total capacitance at source and gate given that:
Cmetal/Area = 0.025µF/µm2
Cpoly/Area = 0.045µF/µm2
CGate/A = 0.7 fF/µm2
Cd,a/A = 0.33fF/µm2
Cd,side/L = 2.6fF/µm
= 5.1µm
100
3 CM
4
4
2
3
2
44 2
CMP
CP1
Cgate
CP1
![Page 23: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/23.jpg)
Dr. Ahmed H. Madian-VLSI 23
Solution
100
3 CM
4
4
2
3
2
44 2
CMP
CP1
Cgate
CP1
Source capacitance
CS,diff = Cd,A . A + Cd,side walls . P
A = 4 * 3 = 12 2
P = 2*(4 + 3)=14
So, CS, diff = 0.33* 12 2+2.6* 14 =63.51fF
Cs
S D
G
CG
CD
![Page 24: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/24.jpg)
Dr. Ahmed H. Madian-VLSI 24
Solution (cont.)100
3 CM
4
4
2
3
2
44 2
CMP
CP1
Cgate
CP1
Gate capacitance
CG,total = CM + CMP+CP1+CG+CP2
CM = 0.025 * 100*3 =7.52
CMP = 0.045 * 4* 4 = 0.722
CP1 = 0.045 * 2* 2 = 0.182
CP2 = 0.045 * 2* 2 = 0.182
CG = 0.7 * 2* 3 = 4.22 CM CMP CP1 Cgate CP1
![Page 25: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/25.jpg)
25
Example Problems -Parasitic Calculation (1/10)
poly
metal1
ndiff
Rmetal1=?
Cmetal1=?
Rpoly=?
Cpoly=?
Rndiff=?
Cndiff=?
1=0.25µm
30
Dr. Ahmed H. Madian-VLSI
![Page 26: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/26.jpg)
26
Example Problems -Parasitic Calculation (2/10)
poly
metal1
ndiff
1=0.25µm
30
Rmetal1 = (30 / 3) * 0.08Ω/o = 0.8Ω
Cmetal1 = (30 * 0.25µm/) * (3 * 0.25µm/) * 0.04fF/µm2 +
(30 + 3 + 30 + 3) * 0.25µm/ * 0.09fF/µm
= 0.225fF + 1.485fF
= 1.71fF
Dr. Ahmed H. Madian-VLSI
![Page 27: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/27.jpg)
27
Example Problems -Parasitic Calculation (3/10)
poly
metal1
ndiff
1=0.25µm
30
Rndiff = (11 / 3) * 2Ω/o = 7.33Ω
Cndiff = (11 * 0.25µm/) * (3 * 0.25µm/) * 0.6fF/µm2 +
(11 + 3 + 11 + 3) * 0.25µm/ * 0.2fF/µm
= 1.24fF + 1.4fF
= 2.64fF
Dr. Ahmed H. Madian-VLSI
![Page 28: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/28.jpg)
28
Example Problems -Parasitic Calculation (4/10)
poly
metal1
ndiff
1=0.25µm
30
Rpoly = ((3 / 2) + 1/2o + (8 / 2)) * 4Ω/o = 24Ω
Cpoly = ( ((3 * 0.25µm/) * (2 * 0.25µm/)) +
((10 * 0.25µm/) * (2 * 0.25µm/))) * 0.09fF/µm2 +
(5 + 10 + 2 + 8 + 3 + 2) * 0.25µm/ * 0.04fF/µm
= 0.15fF + 0.3fF
= 0.45fF
Corner approx.
1/2o
Dr. Ahmed H. Madian-VLSI
![Page 29: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/29.jpg)
29
Example Problems -Parasitic Calculation (5/10)
poly
metal1
ndiff
1=0.25µm
30
Rmetal1=0.8Ω
Cmetal1= 1.71fF
Rndiff=7.33Ω
Cndiff= 2.64fF
Rpoly=24Ω
Cpoly= 0.45fF
Dr. Ahmed H. Madian-VLSI
![Page 30: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/30.jpg)
30
Example Problems -Parasitic Calculation (6/10)
A
1=0.25µm
What are the parasitic capacitances visible from point “A”?
Dr. Ahmed H. Madian-VLSI
![Page 31: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/31.jpg)
31
Example Problems -Parasitic Calculation (7/10)
A
1=0.25µm
What are the parasitic capacitances visible from point “A”?
Cpoly = (6 * 0.25µm/) * (2 * 0.25µm/) * 0.09fF/µm2 +
(6 + 2 + 6 + 2) * 0.25µm/ * 0.04fF/µm
= 0.675fF + 0.16fF
= 0.84fF
Dr. Ahmed H. Madian-VLSI
![Page 32: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/32.jpg)
32
Example Problems -Parasitic Calculation (8/10)
A
1=0.25µm
What are the parasitic capacitances visible from point “A”?
Cgate = (3 * 0.25µm/) * (2 * 0.25µm/) * 0.9fF/µm2
= 0.34fF
Remember: use Cg, not Cpoly for transistor gates!
Dr. Ahmed H. Madian-VLSI
![Page 33: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/33.jpg)
33
Example Problems -Parasitic Calculation (9/10)
A
1=0.25µm
What are the parasitic capacitances visible from point “A”?
Coverhang = (2 * 0.25µm/) * (2 * 0.25µm/) * 0.09fF/µm2 +
(2 + 2 + 2 + 2) * 0.25µm/ * 0.04fF/µm
= 0.0225fF + 0.08fF
= 0.1fF
Dr. Ahmed H. Madian-VLSI
![Page 34: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/34.jpg)
34
A
1=0.25µm
What are the parasitic capacitances visible from point “A”?
Example Problems -Parasitic Calculation (10/10)
Dr. Ahmed H. Madian-VLSI
![Page 35: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/35.jpg)
Dr. Ahmed H. Madian-VLSI 35
Contents
Wiring tracks Latch-up Circuit characterization & performance Resistance estimation Capacitance estimation Inductance estimation Delay estimation
Simple RC model Penfield-Rubenstein Model
Delay minimization techniques Transistor sizing Distributed drivers Large driver
Wiring techniques
![Page 36: Very Large Scale Integration (VLSI) · Dr. Ahmed H. Madian-VLSI 22 Multilayer capacitance calculations Example: given the layout shown in the figure calculate the total capacitance](https://reader036.fdocuments.in/reader036/viewer/2022071217/604a5b6e8a5a62235c69df2a/html5/thumbnails/36.jpg)
Dr. Ahmed H. Madian-VLSI 36
Inductance estimation Inductance is normally small but as the process shrink on-chip inductance must be
taken into account.
Bond-wire inductance can cause deleterious effects in large, high speed I/O buffers.
The inductance of bonding wires and the pins on packages could be calculated by,
+
d
h
w
hL
48ln
2
substrate
h
W
Design techniques to overcome this problem:
separate power pins for I/O pads and chip core
multiple power and ground pins
careful selection of the position of the power and
ground pins on the package
adding decoupling capacitances on the board
increase the rise and fall times
use advanced package technologies (SMD, etc)