Various EL/PL imaging-based analysis methods

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Transcript of Various EL/PL imaging-based analysis methods

CIGSa-SiSi Organic

Multicrystal Si (156 mm × 156 mm)

Resolution(pixels)

Approx.2 seconds

Measurementtime

Approx.40 minutes

Approx.11 hours

39 × 39 156 × 156

Carrier lifetimemapping

Conventional method(μPSD)

5 μs

4 μs

3 μs

2 μs

1 μs

0 μs

An example of mappingby PL method

Various EL/PL imaging-based analysis methods

EL and PL imaging from wafer to moduleEL and PL imaging from wafer to module

PV Imaging System

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The EPLi is an EL/PL imaging system for PV, which evaluates the intensity and distribution of EL (electroluminescence) and PL (photoluminescence) images by using various high-sensitivity cameras and measurement software.

Material /crystalline failure ObstaclesThin-film defect

Process failureGrid/finger failureCracks

EL method

ELimage

PLimageMulticrystalline Si cell Multicrystalline Si as-cut wafer

PL method

Si

Process failures

Cracks

Material and crystalline failures are visible.

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Single crystal Si (156 mm × 156 mm)

Development Si carrier lifetime mapping

Carrier lifetime mapping can be calculated from a PL image. As compared with the conventional technique

(μPCD method), it's much faster and delivers high-resolution measurements.

Development Series resistance (Rs) mapping

512 × 512

Series resistance mapping can be calculated from an EL/PL image. A high-resistivity area inducing decay in the fill factor can be detected with ease.

CIGS

Si a-Si

Organic

2

Si

CIGS

Total area and intensity of extrinsic defects

Thermal imaging analysis

Measuring PL lifetime related to conversion efficiency

Localization of wiring fault, shunts, abnormal resistanceCorresponds to macroimaging (for cell and panel) and microimaging

EL imaging PL imagingThermal imaging Si material defects depend on crystal growth condition and quality

Physical defects like a crack

CIGSa-SiSi OrganicCIGSa-SiSi Organic

In the case of a good cell, thermal image reflects contact status of PN junction

Hot spots correspond to shunt points on the EL/PL image

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0 015 15.2 15.4 15.614.814.614.414.214

Conversion Efficiency [%]

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This method can extract extrinsic deficienciesthat correlate to conversion efficiency as shown

in the graph above.

The intrinsic deficiencies like lattice defects and the extrinsic deficiencies like cracks can be distinguished clearly at a glance.

Multipoint measurement with motorized stage

Sample A(High efficiency)

Sample B(Low efficiency)

PL lifetime of CIGS test piece

Development

Spectroscopic EL image

EL image

Extrinsic defects:Dark area

Intrinsic defects:Bright area

CIGS PL lifetime measurement

Spectroscopic EL method / Correlation betweendefects and conversion efficiency

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Software, cameras, options

Options

125 mm × 125 mm, 156 mm × 156 mm

3 busbars max. (position adjustable)

+15 ˚C to +100 ˚C

Ink method (manual operation)

Specifications

* Please consult us about other cell sizes that the probing unit can accommodate.

EL/PL intensity distribution image

EL/PL image operation (four arithmetic operations)

Measurement protocol management

Analysis functions (intensity profile, histogram, calculation, etc.)

Imaging window Analysis window

Measurement software

Probing unit(For crystalline Si cell)

Sample stage for temperature control

Marking function

Cell size*

Probing bar

Temperature range

Method

EM-CCD camera

400 nm to 1100 nm

1024 (H) × 1024 (V)

50 mm × 50 mm to 200 mm × 200 mm

170 mm × 170 mm to 200 mm × 200 mm

Cooled InGaAs camera

900 nm to 1550 nm

640 (H) × 512 (V)

50 mm × 63 mm to 210 mm × 168 mm

210 mm × 168 mm

Imaging station

System control

EL imaging

PL imaging

0 V to 20 V / 0 A to 18 A*

Exposure time, focus, filter, etc.

Bias control for EL measurement

Capable of control

Excitation light source control for PL measurement (The number of light sources: 2 max.)

Enables open/short PL imaging

Class 1 (as system: laser safety circuit integrated)

Wavelength range

Pixel number

Field of view

Power supply for EL detection

Detector control

Power supply control

Switching forward/reverse bias

Excitation light source

PL measurement

Laser class

*Please consult us about other model of power supply options.

Cooled InGaAs cameraEM-CCD camera

Probing unit

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Use a high-sensitivity infrared detector (InSb) to analyze temperature characteristics of solar cells/modules and localize failure points indicating abnormal temperature. The thermal lock-in function is valuable to reduce ambient noise so that even small temperature variations can be detected.

PV photoemission and PV thermal analysis

Localize leakage points by photoemission analysis

PV Emission Microscope System CIGS

Si a-Si

Organic

Capture electroluminescence and leak emissions caused by defects in solar cells using a cooled CCD camera (Si-CCD camera and cooled InGaAs camera are optional.), and localize the precise failure point by superimposing a microscope image onto the emission image.

Localize leakage points by photoemission analysis

Lens specifications

CIGS

Si a-Si

Organic

Option

Micro lens 0.8×

M plan NIR 5×

M plan NIR 20×

M plan NIR 50×

M plan NIR 100×

Lens

16.64 × 16.64

2.6 × 2.6

0.65 × 0.65

0.26 × 0.26

0.13 × 0.13

Field of view (mm)

VoidAbnormal

shape

Leak position near wiring is detected by finding leakage emission at high magnification.

XS-TEM at emission spot location(Sample prepared by FIB)

For cell observation With microscope

Crack/physical defect detection

Leak and wiring fault detection

*The product in above image is designed for 450 mm × 450 mm sample size. The system size can be customized depending on sample size and stage size.

Features

Si-CCD camera: It is more sensitive than standard cooled-CCD cameras to detect low-light emission in a short time.Cooled InGaAs camera (Peltier-cooling type): It is the best camera for analyzing compound solar cells with emission wavelength longer than 1100 nm.

Principle of thermal lock-in

Lock-in measurements are performed while modulated bias voltage is applied to the device under test (DUT). By detecting the signals only in that modulation frequency, a high S/N measurement is obtained while eliminating noise components.

Image Integrationon corresponding timing

Localize shorts by temperature characteristic analysis

PV Thermal Imaging SystemLocalize shorts by temperature characteristic analysis

C-CCD Camera

EL image Phase image

Detects thermal defect points that cannot be detected byEL imaging technique.

Pinpoints wiring short, shunts and dislocation failure points

Measurement of temperature distribution on solar cells

Features Detector specifications

*The product in above image is designed for 290 mm × 250 mm sample size. The system size can be customized depending on sample size and stage size.

Detector

Spectral response range

Effective number of pixels

Cooling method

InSb

3.7 μm to 5.2 μm

320 × 240

Stirling cycle cooling

Noise equivalent temperature difference (NETD) < 25 mK (30 ˚C [typ.] /hour)

InSb Camera

Detection of junction leakage emissions from multicrystallineSi solar cells (with reverse bias)

Detection example of defect positions by thermal emission

Image acquisition

Bias power modulation

Heat phenomenaon the DUT

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Chemical compound thin-film evaluation

Compact Near Infrared Fluorescence LifetimeMeasurement System C12132Specifications

*In terms of SiO2

**VLSI Standards-compliant

***Standard deviation when a 400 nm thick SiO2 film is measured.

Spectral photometry systems for solar devices and materials

Features

Wavelength: 650 nm to 1400 nm

Enable the measurement of multiple points and of integrating a microscope (Option)

Features

Thickness measurement of semiconductor films for thin-film solar cells, as well as thickness of organic films

Real-time measurement and non-destructive measurement of thin films

Fluorescence spectrum and PL lifetime measurement data of CIGS thin film.

Chemical compound thin-film evaluation

C12132

532 nm

Approx. 30 mW (532 nm)

< 1.3 ns

Approx. 15 kHz

2.5 ns to 50 μs / full scale

Approx. 200 ps to 5 μs

512 ch, 1024 ch, 2048 ch, 4096 ch

< 1.5 ns (Full width at half maximum)

Windows 7 or more

Measurement time range

Measurement lifetime

Time axis channel

Total time resolution

Analysis function

Type number

Excitation light(YAG Laser)

650 nm to 1400 nm

Type number

Measurement film thickness range*

Measurement accuracy**

Reproducibility***

C11627

20 nm to 50 μm

± 0.4 %

0.02 nm

C11295

20 nm to 100 μm

CIGS Organic

Compact Near Infrared FluorescenceLifetime Measurement System

Thickness measurement of thin-films in solar cells

Optical NanoGauge Series CIGS

Si a-Si

Organic

Specifications

Optical NanoGauge C11627

Multipoint NanogaugeC11295

Real-time simultaneousmeasurements of sample

thickness to maximumof 15 points

Real-time multipoint measurement allows simultaneous measurements in multiple chambers and multipoint measurements on the thin film surface.

For multipoint measurement

Excitation light wavelength

Output

Pulse width

Repetition rate

Measurement wavelength range

Low efficiencyMedium efficiency

High efficiency

PL spectrum

There is very little difference betweenPL intensities of ''Medium efficiency''

and ''Low efficiency''.

The PL lifetimes clearly showdependency of the conversion efficiency.

PL lifetime

Detectors(PMT)

Thickness measurement of thin-films in solar cells

Film thickness measurement of TiO2 based transparent conductive filmData courtesy of Prof. Takahiro Wada, Ryukoku University

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Absolute PL Quantum Yield SpectrometerQuantaurus-QY

Absolute PL Quantum Yield Measurement SystemC9920-02G, -03G

Type number

PL measurement wavelength range

Excitation wavelength

Bandwidth

Excitation spot size

Sample holder

Connector tube diameter for nitrogen gas flow

C9920-02

250 nm to 800 nm

FWHM 10 nm or less

Data courtesy of NARA INSTITUTE of SCIENCE and TECHNOLOGY, Dr. H. Yamada

Specifications

A wide lineup of spectrophotometric systems optimized for solar device evaluation!

This figure shows fluorescence quantum yields for benzoporphycenes, which are promising materials for organic solar cells. Benzoporphycenes synthesized by the retro-Diels-Alder reactions show strong fluorescence, while the precursors are nonfluorescent.

Features

Excitation wavelength dependency on quantum yield

PL excitation spectrum

Simple and intuitive handling

Compact unit and quick measurement (Quantaurus-QY)

Benzoporphycenes (BPc) are constitutional isomers of benzoporphyrins. They are promising materials for PDT, PVC applications, and so on. BPcs are prepared from their soluble precursors by retro-Diels-Alder reaction in solution or as a film. The fluorescence quantum yields drastically changed from 0 % to 40 % by the conversion from precursors to BPcs. They are also promising latent fluorescent materials.

φ8 mm

Thin film (16 mm × 10 mm × 1 mm, quartz substrate)

Solution (12.5 mm × 12.5 mm × 140 mm cuvette: option)

Powder (φ17 mm Petri dish: option)

Outer diameter 4 mm, inner diameter 2.5 mm (in integrating sphere)

300 nm to 950 nm

C9920-02G

250 nm to 950 nm

2 nm to 5 nm

C9920-03

375 nm to 800 nm

FWHM 10 nm or less

C9920-03G

375 nm to 1100 nm

2 nm to 5 nm

400 nm to 1100 nm

D. Kuzuhara , 15,10060 (2009)et al. Chem. Eur. J.

Absolute quantum yield measurement of organic solar cell materials

Absolute PL Quantum Yield Measurement System Organic

Absolute quantum yield measurement of organic solar cell materials

Peak wavelengths measurement EL, PL spectrumPhotonic Multichannel Analyzer

CIGS

Si a-Si

Organic

Peak wavelengths measurement EL, PL spectrum

Photonic Multichannel Analyzer PMA-12

Specifications

Features

Reflectance and transmittance of amorphous silicon

Real-time measurement of PL spectrum of solar devices

PMA-12 Series

19 ms to 64 s

1024 ch

< 9 nm

256 ch

Type number

Photodetector

Measurement wavelength range (nm)

Spectral resolution (FWHM)

Exposure time

Number of sensor channels

C10027-01

200 nm to 950 nm

< 2 nm

C10027-02

350 nm to 1100 nm

< 2.5 nm

C10028-01

900 nm to1650 nm

5 ms to 64 s

C10028-02

1600 nm to 2350 nm

5 ms to 50 ms

Back-thinned CCDlinear image sensor

InGaAslinear image sensor

EL spectrum data of multicrystalline Si solar cell7

Cat. No. SSYS0008E08FEB/2012 HPKCreated in Japan

HAMAMATSU PHOTONICS K.K.HAMAMATSU PHOTONICS K.K., Systems Division812 Joko-cho, Higashi-ku, Hamamatsu City, 431-3196, Japan, Telephone: (81)53-431-0124, Fax: (81)53-435-1574, E-mail: [email protected].: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected]: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected]: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: [email protected] Europe: Hamamatsu Photonics Norden AB: Thorshamnsgatan 35 16440 kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected]: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: [email protected]: HAMAMATSU PHOTONICS (CHINA) Co., Ltd.: 1201 Tower B, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected]

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Specifications and external appearance are subject to change without notice.

© 2012 Hamamatsu Photonics K.K.

EPLi is trademark of Hamamatsu Photonics K.K. (EU, Japan, U.S.A.)Quantaurus-QY is trademark of Hamamatsu Photonics K.K. (Japan)Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers.

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