Vacuum Pumps Instrumentation Fittings and Valves LEYBOLD VACUUM

Right-Angle and Straight-Through Valves with Electropneumatic ActuatorDN 10 KF – DN 40 KF

Cat. No.297 20/21/22/23/31/32/33298 20/21/22/23299 21/22/23287 91

GA 06.218/1.02

Operating Instructions

ContentsPage

1 Description . . . . . . . . . . . . . . . . . . . . . . . . . 31.1 Areas of application and general information . 31.2 Supplied equipment . . . . . . . . . . . . . . . . . . . . 51.3 Technical data . . . . . . . . . . . . . . . . . . . . . . . . 61.4 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . 81.5 Notes concerning operation . . . . . . . . . . . . . 101.6 Operating temperatures/bake out

temperatures . . . . . . . . . . . . . . . . . . . . . . . . 10

2 Start up . . . . . . . . . . . . . . . . . . . . . . . . . . . 112.1 Compressed air supply . . . . . . . . . . . . . . . . 112.2 Fitting the pilot valve . . . . . . . . . . . . . . . . . . 112.3 Compressed air connection . . . . . . . . . . . . . 122.4 Supply voltage . . . . . . . . . . . . . . . . . . . . . . . 142.5 Electrical connection . . . . . . . . . . . . . . . . . . 142.6 Opening and closing the valve manually . . . 16

3 Valve position sensor . . . . . . . . . . . . . . . . 18

4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . 194.1 Leybold service . . . . . . . . . . . . . . . . . . . . . . 20

5 Figures and tables . . . . . . . . . . . . . . . . . . . 21

EEC Manufacturer’s Declaration . . . . . . . . 26

Leybold Service

If equipment is returned to Leybold, indicate whether theequipment free of substances damaging to health orwhether it is contaminated.

If it is contaminated also indicate the nature of thehazard. Leybold must return any equipment without a“Declaration of Contamination” to the sender’s address.

Indicates procedures that must be strictlyobserved to prevent hazards to persons.

Indicates procedures that must strictly beobserved to prevent damage to, ordestruction of the equipment.

Figures

The references to figures, e.g. (1/2) consist of the Fig.No. and the item No. in that order.

2

2

Warning

Caution

1 Description1.1 Areas of Application and

General InformationThe DN 10 to DN 40 Leybold KF (small flange) valvesare blocking devices for tubes in vacuum systems.There are two types available: straight-through and right-angle valves.

The supply voltage is selected by choosing a suitablesolenoid pilot valve (see Section 1.4)

All valves are capable of opening and closing againstatmospheric pressure and vacuum, independently of thedirection of the flow. A difference is made betweennormally open and normally closed states of the valves.

A valve which is normally open closes whenapplying the operating voltage andcompressed air.

The operating mode is determined by suitable selectionof one of the pilot valves offered and no changes willhave to be made to the valve.The position of the valve is indicated by an indicator pinon the valve body. This pin is visible when the valve isopen.

The valves are equipped with KF flanges in accordancewith DIN 28 403.The valves may be installed in any orientation.

All valves with pneumatic actuator and electric pilot valveclose when the supply voltage or the compressed airfails.

Also valves which are normally open willclose when the compressed air fails.

When planning to expose the valves toradioactive radiation, please contact usfirst.

All inner parts of the valve which come intocontact with the medium flowing throughthe valve must be protected againstaggressive or corrosive gases andcondensate.

Also in the case of explosion-like pressurebursts, the max. permissible operatingpressure must not be exceeded. The entiresystem must be protected againstexplosions and detonations in aprofessional manner.

3

3

Caution

Warning

Caution

1.1.1 Bellows-Sealed Valves

Elastic bellows are employed in the case of the bellows-sealed valves for sealing against the atmosphere.

Thus only the bellows come into contact with themedium.

Service life of these valves is at least 10,000,000switching cycles.

1.1.2 Elastomer-Sealed Valves

In the case of the elastomer-sealed valves an O-ringsealed and greased slide lock provides the seal againstthe atmosphere.

Service life of this slide lock is over 5,000,000 switchingcycles.

All valves have on their valve body a leak detection hole(7/5).

In the case of the elastomer-sealed valves the O-ringsare exchangeable (see Section 4).

1.1.3 Special Bellows-Sealed Valve

For safety reasons, a special valve has been developedfor increased differential pressures in connection withDOT1) brake fluid.

This valve is equipped with EPDM seals at the valve diskas well as on the housing and has a stronger spring.

EPDM is compatible with brake fluid.

Service life of these valves is at least 10,000,000switching cycles.

Cat. No. 287 91

1) DOT is the abbreviation for: “Department of Transportation”

4

4

1.2 Supplied EquipmentThe KF valves are supplied with an integrated opticalposition indicator.

When supplied, the valves are in the closed state.

The connection flanges are protected by protection capsin order to prevent the flanges from being damaged.

A fully functional valve consists of the valve body withpneumatic actuator and a separate pilot valve includingsolenoid coil.

The available pilot valves and their different supplyvoltages are listed in the table on page 9.

5

5

6

6

Right-angle valve, aluminium,bellows-sealed

DN 10 DN 16 DN 25 DN 40

Right-angle valve, stainlesssteel, bellows-sealed

Right-angle valve, aluminium,O-ring sealed

Straight-through valve,aluminium, bellows-sealed

1.3 Technical Data

DN 10 DN 16 DN 25 DN 40

DN 16 DN 25 DN 40

DN 16 DN 25 DN 40

Power consumption WValid for

Supply voltage V various voltage are possible, see table on page 9

DC: 4.5 W / AC: hold 6 VA / actuate 7.5 VANormal voltages and explosion hazard protection

Operating factor 100 %

Protection IP 65 (DIN 40 050)

Conductance for s-1

molecular flow1,5 2,8 11 30,5 1,5 2,8 11 30,5 3 12 32 2,8 11 30,5 1,6

Material:

Housing Aluminium Stainless steel Aluminium Stainless steel Aluminium

Disk, piston, welding collar Stainless steel

Actuator, compressed aircylinder

Aluminium

Bellows Stainless steel - - Stainless steel

Disk seal,housing seal,valve piston seal

FPM EPDM

Piston seal FPM

Cylinder volume cm3 2.5 2.5 6.5 19 2.5 2.5 6.5 19 2.5 6.5 19 2.5 6.5 19 2.5

Max. permissible operatingpressure for the pilot valve

8 bar

DN 10Special valve for

DOT

7

7

Right-angle valve, aluminium,bellows-sealed

DN 10 DN 16 DN 25 DN 40

Right-angle valve, stainlesssteel, bellows-sealed

Right-angle valve, aluminium,O-ring sealed

Straight-through valve,aluminium, bellows-sealed

DN 10 DN 16 DN 25 DN 40

DN 16 DN 25 DN 40

DN 16 DN 25 DN 40

Actuation times

Opening time ms 30 30 56 120 30 30 56 120 30 56 120 30 56 120 35

Closing time ms 41 41 62 166 41 41 62 166 41 62 166 41 62 166 35

max. stroke frequency min-1 30 25 20 15 30 25 20 15 30 25 20 25 20 15 25

No. of actuations min. 1 · 107 5 · 106 1 · 107

max. bake out temperatures:with pilot valvewithout pilot valve

50 �C120 �C

Pressure difference at the valve disk mbar 2500 4500

max. pressure difference at the valve disk mbar 3500

Leak rate: mbar x l/sHousing / atmosphere

< 1 · 10-9

Leak rate in the direction ofthe atmospheric side during < 1 · 10-9

Weight kg .0.4 0.4 1.1 2.4 0.5 0.55 1.6 3.2 0.4 1.1 2.4 0.6 1.9 4.5 0.45

Cat. Nos. 29720 29721 29722 29723 29820 29821 29822 29823 29731 29732 29733 29921 29922 29923 28791

DN 10Special valve

for DOT

5500

< 1 · 10-8 < 1 · 10-9

8

8

Right-angle valve, aluminium,bellows-sealed

DN 10 DN 16 DN 25 DN 40

Right-angle valve, stainlesssteel, bellows-sealed

Right-angle valve, aluminium,O-ring sealed

Straight-through valve,aluminium, bellows-sealed

DN 10 DN 16 DN 25 DN 40

DN 16 DN 25 DN 40

DN 16 DN 25 DN 40

DN 10Special valve

for DOT

Cat. No. for the accessories(For list of pilot valves, see page 9)

Centering ring, AL/NBR 18321 18326 18327 18328 - - - - 18326 18327 18328 - - - -

Centering ring, stainlesssteel/FPM

- - - - 88321 88346 88347 88348 - - - 88346 88347 88348 -

Clamping ring, 2 parts 18341 18341 18342 18343 18341 18341 18342 18343 18341 18342 18343 18341 18342 18343 -

Clamping ring, 3 parts 88275 88275 88277 88279 88275 88275 88277 88279 88275 88277 88279 88275 88277 88279 88275

Quick clamping ring 18346 18346 18347 18348 18346 18346 18347 18348 18346 18347 18348 18346 18347 18348 -

Ultra sealing disk(Set of 3)

- - - - 88373 88373 88375 88377 - - - 88373 88375 88377 -

Support ring for ultra sealing disk

- - - - 88374 88374 88376 88378 - - - 88374 88376 88378 -

Outside ring for overpressureoperation, stainless steel1)

20007401

20007402

20007404

20007406

20007401

20007402

20007404

20007406

20007402

20007404

20007406

20007402

20007404

20007406

20007401

Centering ring, AL/EPDM1) - - - - - - - - - - - - - - 20007469

1.4 Accessories

Special grease 2,5 ml 070 270 09

1) the numbers in this row must be read as 8-digit numbers.

9

9

*normally closed

Pilot valves (complete) Cat. No.

230 V / 50 - 60 Hz* 280 70

230 V / 50 - 60 Hz, normally open 280 71

110 - 120 V / 50 - 60 Hz* 280 72

24 V / 50 - 60 Hz* 280 73

24 V / DC* 280 74

12 V / DC* 280 75

230 V / 50 Hz Ex protection, incl. 5m long cable* 280 76

24 V / DC Ex protection, incl. 5m long cable* 280 84

24 V / DC normally open 280 85

Solenoid coils (replacements) Cat. No.

230 V / 50 - 60 Hz 280 77

110 120 V / 50 - 60 Hz 280 78

24 V / 50 - 60 Hz 280 79

24 V / DC 280 80

12 V / DC 280 81

230 V / 50 Hz Ex protection, incl. 5 m long cable 280 82

24 V / DC Ex protection, incl. 5m long cable 280 83

Table 1 Pilot valves and solenoid coils, selection table fordifferent voltages and versionsFig. 1 3/2 way pilot valve

normally closedOutput “A” relieved in the “normally closed mode”(standard)

normally openOutput “A” loaded in the “normally open mode”

A

R

A

P

PR

1.4.1 Use up to 2.5 bar

2-part clamping rings + Al/NBR centering rings orstainless steel with FPM O-ring.

1.4.2 Use up to 5 bar

3-part clamping rings + Al/NBR centering rings orstainless steel with FPM O-ring, but with outside ring.

10

10

1.5 Notes ConcerningOperation

The sealing surfaces must be treated with care. It isrecommended to handle the valve with the protectioncaps in place.

The valve must be installed whiledisconnected from the power supply(mains).

During operation you must ensure that nopart of the body can enter into the valve, inparticular when operating the valve at theend of a (open) line.

Remove the protection caps before installing the valve.

The sealing surfaces and the sealing rings must becleaned with a solvent (acetone / alcohol).

Never use any aggressive cleaning agents.

Pneumatically actuated valves may be operated directlyvia the central compressed air supply (note max.operating pressure) or via the pilot valves.

Before installing the compressed air connection or thepilot valve, you must remove the sealing stopper (on theside of the valve housing).

Install the pilot valves as described in Section 2.2.

Provide the electrical connection as described in Section2.5.

1.6 Operating Temperatures/Bake Out Temperatures

The max. ambient temperature for the complete valve(valve with the pilot valve including solenoid coil) is

50 °C.

The valve with the pilot valve (without solenoid coil) may

be heated to 80 °C max.

The valve body without pilot valve and without solenoid

coil may be heated to 120 °C max.

The flange area of the valve may be heated to 150 °Cmax. provided adequate cooling is ensured for the pilotvalve, the solenoid coil and the valve body so that thepermissible temperature limits are not exceeded.

Warning

Caution

11

11

2.2 Fitting the Pilot ValveCheck that the pilot valve is complete (Fig. 2, items 2 to 18)

The outlet for the compressed air fromthe pilot is marked by an “A” on thehousing; the inlet for the compressed airis marked by a “P”.

The reducer (2/3) is screwed into the valve together withthe gasket (2/2) and tightened to 2 Nm max.

Screw the pilot valve (2/4) with the gasket (2/2a) on tothe reducer (connection “A”) and tighten it slightly (1 Nmapprox.)

If possible, the pilot valve should be fitted parallel to theKF valve.

2 Start Up2.1 Compressed Air SupplyThe range of operating pressures for the compressed airspans from 4 to 8 bar.

The tubing for the compressed air must berated for at least 10 bar, and the tubingmust be connected in a professionalmanner.

You must ensure that the max. permissibleoperating pressure can not be exceeded.

The compressed air may be oiled or dry; if required, thecompressed air should be filtered.

The type of compressed air used, should bemaintained from thereon.

Warning

Caution

Caution

12

12

2.3 Compressed AirConnection

The L-type screw joint (2/6) is screwed in at connection“P” on the pilot valve using hollow screw (2/7) and thetwo gaskets (2/5); tighten only slightly.

The compressed air connection has been designed toaccept a compressed air hose having an outsidediameter of 6 mm and an inside diameter of 4 mm.

In order to attach the compressed air hose, the union nut(2/8) is removed from the L-type screw joint and it ispushed over the compressed air hose.

Next, the end of the hose is pushed on to the hosenozzle and secured in place by the union nut.

The union nut is only tightened manually.

Compressed air hoses may be pressurisedat times and must be protected against anymechanical damage.

If required, soap solution may be used to check leak-tightness.

Warning

13

13

1

2

3

2a

4

5

6

5

7

8

9

10

11

12

13

15

14

16

17

18

Fig. 2 Installation of the pilot valve and the compressed air connection

Key to Fig. 21 Right-angle valve2 1/8” gasket2a 5 mm gasket3 Reducer 1/8” / M5 (size 13)4 Pilot valve5 5 mm gasket (2x)6 L-type screw joint7 Hollow screw (size 8)8 Union nut for securing the compressed air hose9 Solenoid coil10 Seal11 Plug insert for solenoid coil12 Plug housing13 Securing screw14 Clamping screw for strain relief15 Disk16 Rubber ring17 Knurled screw18 Corrugated washer

14

14

2.4 Supply VoltageThe supply voltage for the solenoid coil has beenimprinted on the housing of the solenoid coil (2/9).

Check whether the available supply voltageis suitable. It must be equal to the voltageimprinted on the solenoid coil.

2.4.1 Exchanging the solenoid coil

If required, the solenoid coil may be exchanged. For thisloosen knurled nut (2/17) and remove the solenoid coiltogether with the corrugated washer (2/18).

Push the new coil over the pole tube, fit the corrugatedwasher and manually tighten the knurled nut.

Torque for the knurled nut should bebetween 100 and 150 Ncm, whereby thesolenoid coil should still be able to turn.The pole tube must be undamaged.

For the range of available solenoid coils for the varioussupply voltages, please refer to the table on page 9.

2.5 Electrical ConnectionDuring all electrical work ensure that thepower supply lines have reliably beenswitched off. The electrical connectionsmay only be made by an electrician asdefined by VDE 0105 in accordance withthe VDE 0100 guidelines.

A three core mains cable is recommendedfor the power supply connection: 3 x 1mm2.

Unscrew screw (3/4) from the connection plug and pullthe plug off.

Use a narrow screwdriver to force the plug insert (3/6)out through the hole.

The terminals have been assigned as follows:

“1” and “2” = phase, the third connection is provided forthe ground connection and is marked by the ground

symbol .

Push the clamping screw (3/1) as well as the disk and

Caution

Caution

Warning

Caution

the rubber ring (3/2 and 3/3) over the cable.

Pull the cable through the housing of the plug (3/5) andattach it to plug insert (3/6) (see Fig. 4).

Press the plug insert into the housing until it engages.

Provide the strain relief for the cable by tighteningclamping screw (3/1).

Connect the complete connection plug with seal (3/7)and secure it in place with fixing screw (3/4).

15

15

1

2

3

4

567

Fig. 3 Connection plug for electropneumatic KF valves

Key to Fig. 31 Clamping screw at the cable feedthrough2 Disk3 Rubber ring4 Fixing screw5 Plug housing6 Plug insert7 Seal

2.6 Opening and Closing theValve Manually

A slotted screw made of brass is located on the pilotvalve under the solenoid coil.

With the aid of a screwdriver this screw can be used toopen and close the valve manually (see Fig. 8 and 9).

However, the supply of compressed air must beavailable to the valve.

There are two positions:

Position 0 = normal position(Fig. 5) (for operation via the solenoid)

In this position the valve is closed.

Position 1 = valve is open.(Fig. 5)

16

16

Fig. 4 Pin assignments on the plug

1 2 3

Key to Fig. 41 Phase2 Phase

3 Ground

17

17

Fig. 5 Functional diagram of the pilot valve for the “0” position

Fig. 6 Functional diagram for the pilot valve in the “1” position

A

A

P R

P R

18

18

The valve position sensor is of the mechanical type andindicates, by means of a microswitch, the position of thevalve (open/closed) to a central control system.

The terminals are floating.

The optionally available valve position sensor can beordered from Leybold by quoting Cat. No. 287 80.

Separate Operating Instructions GA 06.295 are availablefor this valve position sensor.

When wanting to use non-contact proximity switchesplease contact us first.

3 Valve Position Sensor

3

5

4

1

2

Fig. 7 Right-angle valve with valve position sensor

Key to Fig. 71 Right-angle valve2 Valve position sensor3 Optical valve position indicator4 Electrical connection5 Leak detection hole

19

19

4 MaintenanceAll bellows-sealed and elastomer-sealed valves will notrequire any maintenance within the range of the numberof switching cycles specified.

If none-the-less cleaning of the valves is required, or ifthe gaskets must be exchanged, then the pneumaticassembly must be disassembled.

Before starting with any disassembly workon the valve, disconnect all electricalconnections leading to the valve first. The compressed air connection must bedisconnected.

All sealing surfaces, the bellows and thepiston rod (10/5) must be protected againstdamage.Only use commercially cleaning agents(acetone/alcohol).Only suitably trained personnel mayexchange the gaskets including those in thecompressed air cylinder.

The screws (10/1) for loosening the(pneumatic) valve actuator are tensionedby the closure spring.

The lid on the valve should be opened whilemaintaining a parallel orientation andwithout edging in order to prevent damage.

Unscrew the screws on the top of the valve, remove thelid (10/2) of the valve and also remove the securing ring(10/3).

In order to exchange the gaskets at the valve piston orthe piston rod, the lid of the valve must be attached tothe valve housing again; for this the top screws arescrewed in a few turns.

Now the valve piston (10/4) is carefully lifted to a positionunder the lid by carefully applying some compressed air.

The lid of the valve is disassembled and the piston (10/4)can be pulled off from the piston rod (10/5).

When exchanging gaskets, also those atthe valve disk (10/6), the bottom of thegroove and the flanks of the groove mustnot be damaged.The gaskets must be fitted in such a waythat they are not twisted.After having exchanged the gaskets, theinside volume of the valve should becleaned.

Warning

Caution

Caution

Warning

Caution

4.1 Leybold ServiceIf equipment is returned to Leybold, indicate whether theequipment free of substances damaging to health orwhether it is contaminated.

If it is contaminated also indicate the nature of thehazard. For this you must use a form which has beenprepared by us which we will provide upon request.

A copy of this form is reproduced at the end of theseOperating Instructions: “Declaration of Contamination ofVacuum Instruments and Components”.

Please attach this form to the equipment or enclose itwith the equipment.

This declaration of contamination is required to meetGerman Law and to protect our personnel.

Leybold must return any equipment without a“Declaration of Contamination” to the sender’s address.

The valves must be packaged in such away, that they will not be damaged duringshipping and so that any contaminants arenot released from the package.

20

20

The new gaskets must be greased with special grease(Ref. No. 070 27 009).

Now the piston may be attached to the piston rod againand carefully pressed into the cylinder recess.

Finally the components are fitted in the reverse order asduring the disassembly process.

Warning

21

21

5 Figures and Tables• Since the internal design of the valves isalmost the same for all types, only Fig. 10has been included to assist disassemblyand assembly

• The O-ring sealed stainless steel right-angle valve is not shown in a sectionaldiagram. The inner part corresponds to what isshown in Fig. 10; the dimensions andhousing correspond to those provided inFig. 9.

Notes

22

22

Right-angle valve,aluminium, bellows-sealed

DN 10 DN 16 DN 25 DN 40

10 14 23 38

103 113 142 178

30 40 50 65

12.2 17.2 26.2 41.2

36 36 60 80

G 1/8 “

39.5 39.5 47.5 62

11 21 24 25

30 30 40 55

30 30 40 55

12 22 20.5 25.5

10

110 120 141 162.5

51

20 20 30 45.5

32

4 4 6.25 10

DN mm

h mm

a mm

c mm

d mm

e -

f mm

g mm

k mm

l mm

m mm

n mm

h1, approx. mm

o mm

p mm

b mm

Stroke mm

Fig. 8 Sectional drawing for the aluminium right-angle valve, bellows-sealed with attached pilot valve

n

ob

f

h1

g

DN

a

m

c

a

h

k

l

d

p

c

e x

x = Slotted screw for manual valve operation

23

23

Right-angle valve,stainless steel,bellows-sealed

DN 10 DN 16 DN 25 DN 40

10 14 23 38

103 113 142 178

30 40 50 65

12.2 17.2 26.2 41.2

36 36 60 80

G 1/8 “

39.5 39.5 47.5 62

15 25 29 36.5

16 20 30 45

16 20 30 45

110 120 141 162.5

51

32

4 4 6.25 10

DN mm

h mm

a mm

c mm

d mm

e -

f mm

g mm

k mm

l mm

mh1, approx. mm

o mm

b mm

Stroke mm

Fig. 9 Sectional drawing for the stainless steel angle valve, bellows-sealed with attached pilot valve

o

h

m

l

k

DNc

a

h1

b

f

d

ga

c

e

Closurespring

x

x = Slotted screw for manual valve operation

24

24

Fig. 10 Sectional drawing for the aluminium right-angle valve, O-ring sealed (dimensions are the same as for Fig. 8)

Key to Fig. 101 Top screws2 Lid of the valve3 Securing ring4 Piston5 Piston rod6 Valve disk7 Closure spring

1

2

3

4

5

6

7

25

25

Straight-through valvestainless steelbellows-sealed

DN 16 DN 25 DN 40

14 23 38

106 136 179

40 50 65

17.2 26.2 41.2

36 60 80

G 1/8 “

39.5 47.5 62

3 3 2.5

22 20.5 25.5

4 6.25 10

DN mm

h mm

a mm

c mm

d mm

e -

f mm

g mm

m mm

Stroke mm

Fig. 11 Sectional drawing for the aluminium straight-through valve, bellows-sealed

d

e

f

m

a a

g

DN cp

h

Closurespring

h

Col

ogne

, Ja

nuar

y 2,

199

5

——

——

——

——

——

——

——

——

——

——

Dr.

Röm

er,

Des

ign

Dep

artm

ent

Man

ager

GB

2C

ompo

nent

s, v

alve

s

26

26

We

– Le

ybol

d A

G

– he

rew

ith

decl

are

that

oper

atio

n of

the

inc

ompl

ete

mac

hine

def

ined

belo

w,

is

not

perm

issi

ble

until

it

has

been

dete

rmin

ed t

hat

the

mac

hine

int

o w

hich

thi

sin

com

plet

e m

achi

ne is

to b

e in

stal

led,

mee

ts th

ere

gula

tions

of

the

EE

C D

irect

ive

on M

achi

nery

.

At

the

sam

e tim

e w

e he

rew

ith c

ertif

y co

nfor

mity

with

Low

Vol

tage

Dire

ctiv

e 73

/23/

EW

G.

Des

igna

tion

of t

he p

rodu

cts:

Val

ves

Type

s:R

ight

-ang

le a

nd s

trai

ght-

thro

ugh

valv

es w

ith e

lect

ropn

eum

atic

act

uato

r

•R

ight

-ang

le v

alve

s:

NW

10

to N

W 1

60

•S

trai

ght-

thro

ugh

valv

es:

NW

16

to N

W 4

0

Cat

. N

os.:

297

20,

297

21,

297

22,

297

23

298

20,

298

21,

298

22,

298

23

299

21,

299

22,

299

23

297

31,

297

32,

297

33

297

42

287

24,

287

91,

281

00,

281

01,

281

02

285

00,

285

01

281

10,

281

11,

281

12

Ap

plie

d h

arm

on

ised

sta

nd

ard

s:

• E

N 2

92

• D

IN E

N 6

0 20

4

Ap

plie

d in

tern

atio

nal

sta

nd

ard

s:

• IS

O 9

803

• IS

O 1

609

• IS

O 4

414

Ap

plie

d n

atio

nal

sta

nd

ard

s an

dte

chn

ical

sp

ecif

icat

ion

s:

• D

IN 2

8 40

0

• D

IN 2

8 40

3

• D

IN 2

501

• D

IN 2

8 40

4

• D

IN 2

4 55

8

LHK.GB.0002.01.01.95

EE

C M

anu

fact

ure

r’s

Dec

lara

tio

nin

the

sens

e of

the

Dire

ctiv

e on

Mac

hine

ry 8

9/39

2/E

WG

, Ann

ex II

b

Col

ogne

, Ja

nuar

y 2,

199

5

——

——

——

——

——

——

——

——

——

——

Dr.

Got

thar

dt,

Bus

ines

s A

rea

Man

ager

GB

C

ompo

nent

s, v

alve

s

27

27

1.80

.5.6

38.0

2.02

F

R/C

D

09.9

5

Prin

ted

in G

erm

any

on c

hlor

ine-

free

ble

ache

d pa

per

LEYBOLD AGVakuumBonner Straße 498 (Bayenthal)D-50968 KölnTelefon: (0221) 347-0Telefax: (0221) 347-1250