Vacuum at the ESRF - KIT · upstream net2 net3 net4 net5 net6 net7 net8 net9 net10 net11 net12...
Transcript of Vacuum at the ESRF - KIT · upstream net2 net3 net4 net5 net6 net7 net8 net9 net10 net11 net12...
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Vacuum at the ESRF
H.P. Marques - 64th IUVSTA Workshop – Leinsweiler 2011
current activities that benefit from simulation models
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Vacuum at the ESRF
• Overview of the ESRF• Vacuum group activities• MC simulation for Coating• Time based MC simulation for pressure bursts• Cell pressure profile simulation
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Vacuum at the ESRF
• The ESRF in numbers
• 3rd generation synchrotron • 6 GeV e-
• 845 m long• 32 cells• 35 active beam lines
• For a uniform filling mode• 200 mA beam current• Average pressure < 10-9 mbar • Beam life time 50-60 h dominated by Tousheck scattering
~200h due residual gas scattering
• 120 000L/s pumping speed installed
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Vacuum at the ESRF
• ESRF Vacuum Group
• Vacuum diagnostic tools and interlocking systems• Vacuum systems dimensioning and simulation
• for the beam lines users and the accelerator complex
• Vacuum chambers coatings (NEG, Gold, TiN)• Vacuum measurements
• Pumping speed• Pressure gauges calibration• Photo desorption• Thermal desorption (outgassing)• NEG coating characterization
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Sputtering Simulation
0
0,5
1
1,5
2
2,5
-40 -30 -20 -10 0 10 20 30 40
Thic
knes
s (u
m)
Distance to center (mm)
Sputering from 3 cathodes at (-19, 0, 19 mm) at 5e-8mbar 50mA.h/m
Gold
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Sputtering Simulation Results
0
0,5
1
1,5
2
2,5
-40 -30 -20 -10 0 10 20 30 40
Thic
knes
s (u
m)
Distance to center (mm)
Gold cathodes (-16, 16 mm)
05000100001500020000250003000035000
‐40 ‐30 ‐20 ‐10 0 10 20 30 40
N. Pa
rticles
Distance to center (mm)
Vanadium sputtering from 3 cathodes at (‐19, 0, 19 mm)
5.00E‐02
1.00E‐02
5.00E‐03
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Sputtering Simulation Issues
0
2000
4000
6000
8000
10000
12000
14000
16000
18000
-30 -20 -10 0 10 20 30
N. P
artic
les
Distance from center (mm)
2e-3
1e-2
8e-2
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Pressure Bursts
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Simulation of a pressure burst in an ID
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Electrical circuit equivalent
{C}
R21
Res2
{NEG}
NEG1
{Q}I1ISRC
GND
GND
{C}
R12
Res2{C}
R22
Res2
{NEG}
NEG2
{Q}I2ISRC
GND
GND
{C}
R13
Res2{C}
R23
Res2
{NEG}
NEG3
{Q}I3ISRC
GND
GND
{C}
R14
Res2{C}
R24
Res2
{NEG}
NEG4
{Q}I4ISRC
GND
GND
{C}
R15
Res2{C}
R25
Res2
{NEG}
NEG5
{Q}I5ISRC
GND
GND
{C}
R16
Res2{C}
R26
Res2
{NEG}
NEG6
{Q}I6ISRC
GND
GND
{C}
R17
Res2{C}
R27
Res2
{NEG}
NEG7
{Q}I7ISRC
GND
GND
{C}
R18
Res2{C}
R28
Res2
{NEG}
NEG8
{Q}I8ISRC
GND
GND
{C}
R19
Res2{C}
R29
Res2
{NEG}
NEG9
{Q}I9ISRC
GND
GND
{C}
R10
Res2{C}
R20
Res2
{NEG}
NEG10
{Q}I10ISRC
GND
GND
{C}
R111
Res2{C}
R211
Res2
{NEG}
NEG11
{Q}I11ISRC
GND
GND
{C}
R112
Res2
{NEG}
NEG12
{Q}I12ISRC
GND
GND
PUMP182L/s
PUMP282L/s
GND
GND
NET2 NET3 NET4 NET5 NET6 NET7
NET8 NET9 NET10 NET11 NET12 NET13
NET14
NET1
NET7b{C}
R11
Res2
{C}
R212
Res2
CV6000 Chamber250mm sections
{V}
V1
{V}
V2
{V}
V3
{V}
V4
{V}
V5
{V}
V6
{V}
V7
{V}
V8
{V}
V9
{V}
V10
{V}
V11
{V}
V12
I?IPULSE
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Spice results
0,00E+00
5,00E-06
1,00E-05
1,50E-05
2,00E-05
2,50E-05
0 250 750 1250 1750 2250 2750 3250 3750 4250 4750 5250 5750 6000
Pres
sure
(mba
r)
Length (cm)
0.2
0.4
0.6
0.8
1
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Cell 30
upstream
downstream
Upstream
upstream downstream
CV6000
upstream
downstream
Downstream
upstreamdownstream
CV3
upstream
downstream
CV4
upstream
downstream
CV5
upstream
downstream
CV6
upstreamdownstream
CV7
upstream
downstream
CV8
upstream
downstream
CV9
upstream
downstream
CV10
upstreamdownstream
CV11
upstream
downstream
CV12
upstream
downstream
CV13
upstreamdownstream
CV14
upstreamdownstream
CV15
CV15CV12CV11CV10CV8CV5CV4CV3CV6000
CV3
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CV 3GND
{2/50}
CV3_R2
Res2
{506*Q_ss*T+0.256*Qx_CV3}CV3_Q1ISRC
GND
CV3_1
{2/50}
CV3_R1
Res2
0.57
CV3_V1
upstreamdownstream
{1/200}
CV3_Pump1
{1/239}
CV3_C_pump1
GND
{2/10.6}
CV3_R4
Res2
{3062*Q_ss*T+1.550*Qx_CV3}CV3_Q2ISRC
GND
CV3_2
{2/10.6}
CV3_R3
Res2
3.5
CV3_V2{1/75}
CV3_Pump2
{1/239}
CV3_C_pump2
GND
{2/13.8}
CV3_R6
Res2
{2300*Q_ss*T+1.164*Qx_CV3}CV3_Q3ISRC
CV3_3
{2/13.8}
CV3_R5
Res2
GND
2.6
CV3_V3
GND GND
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Difficult shapes
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Simulated pressure profile (no beam)
1E-12
1E-11
1E-10
1E-09
1E-08
upst
ream net2
net3
net4
net5
net6
net7
net8
net9
net1
0ne
t11
net1
2ne
t13
dow
nstre
amcv
3_1
cv3_
2cv
3_3
cv4_
1cv
4_2
cv5_
1cv
5_2
cv5_
3cv
6cv
7cv
8_1
cv8_
2cv
8_3
cv9
cv10
_1cv
10_2
cv10
_3cv
11_1
cv11
_2cv
12_1
cv12
_2cv
12_3
cv13
cv14
cv15
_1cv
15_2
cv15
_3
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Cell 30
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Cell 30 Pressure Profile (no beam)
1,0E-11
1,0E-10
1,0E-09
1,0E-08
ip1 ip3 ip5 ip6 ip7 ip8 ip9 ip10 ip11 ip12
Pres
sure
(mba
r)
Ion pump reference
Exp
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Cell 30 Pressure Profile (no beam)
1,0E-11
1,0E-10
1,0E-09
1,0E-08
ip1 ip3 ip5 ip6 ip7 ip8 ip9 ip10 ip11 ip12
Pres
sure
(mba
r)
Ion pump reference
Exp
Sim
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Cell 18 Pressure Profile (no beam)
1,0E-11
1,0E-10
1,0E-09
1,0E-08
IP1 IP2 IP3 IP4 IP5 IP6 IP7 IP8 IP9 IP10 IP11 IP12
Pres
sure
(mba
r)
Ion pump reference
Exp
Sim
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Adding beam effects
• Thermal load
• Beam mode / Current
• Photo desorption
• Conditioning
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Thermal load
0
10
20
30
40
50
60
70
80
90
Tem
pera
ture
°C
no beam
7/8 + 1
7/8 + 1
16 bunch
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Filling modes
0,0E+00
5,0E-10
1,0E-09
1,5E-09
2,0E-09
2,5E-09
3,0E-09
3,5E-09
IP1 IP2 IP3 IP4 IP5 IP6 IP7 IP8 IP9 IP10 IP11 IP12
Pres
sure
(mba
r)
Ion pump reference
no beam
7/8 + 1
7/8 + 1
16 bunch
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Adding photo desorption
1,0E-07
1,0E-06
1,0E-05
1,0E-04
1,0E-03
1,0E-02
1,0E-01
1,0E+18 1,0E+19 1,0E+20 1,0E+21 1,0E+22 1,0E+23 1,0E+24
(m
ol/p
h)
D' (ph/m)
Bak
eout
Act
ivat
ion
5h @
180°
c
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Usual procedure for new machines
• Estimate total photon flow
• 90% stopped in the absorbers and 10% lost to chamber walls
• Using a PSD yield of 1×10-6 mol/ph to estimate a total gas load
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Cell 30 pressure profile simulation
• It is difficult to make these simulation work in a machine that has been in service for long.
• Nevertheless it may be helpful to have a reference to which to compare against real data
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ESRF users demands
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ESRF users demands
Chamber surface area:25000 cm2
1×10-11 mbar/L/cm2
Q = 2.5 ×10-7 mbar/L !
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Summary
• Vacuum modeling is fundamental to the services provided by the vacuum group.
• No single tool, or technique, can provide all the answers to the demands of ESRF accelerator and its users
• To model the accelerator vacuum profile, knowledge of surface outgassing, specially in dynamic conditions, seems more important than a accurate model of the vacuum system