Update on Micro Channel Cooling

Collaboration Meeting 08.12.2009, G. Nüßle

Outline

• Micro channel clamp system• Microchannel cooling test stand• Next Steps

Micro Channel Clamps - Concept• Silicon wafer is clamped between (red) metal blocks• Seal material is present between blocks and wafer• 2 blue plates are sufficiently rigid to ensure homogeneous force distribution on the wafer• Micro channels are fed via grooves inside the red blocks

Micro Channel Clamps - Design

• First design for test configuration to validate the clamp concept• The round holes in the transparent blocks connect the external cooling circuit

to internal grooves• These longitudinal grooves feed the micro channels in the silicon wafer

Clamps: single compression testSetup:• 2 identical blocks top and bottom• Seal: 2mm silicone foam• Test object: 0.5mm thick Si wafer

Result:• Reached compression force of more

than 10kN without failure• Seal is compressed to less than 50%

of its original thickness

Conclusion:• Seal is too soft, danger of contact

metal to silicon

Clamps: parallel compression and pressure test

Setup:• 2 identical blocks on the bottom• 2 identical blocks on top• Seals: 1.6mm NBR• Seals have openings in the center resembling

the grooves in the blocks • One block connected to N2 bottle for pressure

test

Results:• Reached compression force of more than 10kN

and 15 bar pressure without failure• Seal compression not visible

Conclusion:• Seal hardness is good• Parallel compression with possible

Clamps: parallel compression and pressure test

Comments:• Pressure caused an outward force on the seal

of ~200N• Conservative approach with a friction

coefficient of 0.2 asks for a compression force of 200N/0.2 = 1kN to keep the seal in place

• A vertical displacement of the seal is not visible

Micro Channel Cooling Test Stand• 3d design for instrumentation and piping is finalized• Most components have arrived• Rack has been mounted• Arrival of the booster pump is estimated for mid-

December• Pump for C6F14 cooling unit is being installed

•3d design has been finalized•Most components have arrived•Missing: booster pump

Test stand PID

Next steps

• Build micro channel clamps prototype• Investigate leak tightness of clamp system• Test the micro channels with gas and liquid• Build up test stand