Two-Modulator Generalized Ellipsometry: Theory—erratum
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Two-modulator generalized ellipsometry: theory—erratum Gerald E. Jellison, Jr. and Frank A. Modine In a previous publication Jellison and Modine, Appl. Opt. 36, 8190 – 8198 1997, three points of information were presented inaccurately. These inaccuracies are corrected here. © 2003 Optical Society of America OCIS codes: 120.2310, 120.6200, 230.5440, 260.1180, 260.2130, 260.5430. The signs in the Eqs. 16, 21, and 23 of Ref. 1 needed to be corrected. This results in the following equations. 1. Change the sign of the I Y0X1 term in Eqs. 16a–16d. Case I: m0 45° and m1 45° M I dc 0s I Y0 I X0 1s I Y1 0s1s I Y0Y1 1s I X0Y1 I X1 0s I Y0X1 I X0X1 . (16a) Case II: m0 45° and m1 0°, 90° M I dc 0s I Y0 I X0 1c I Y1 0s1c I Y0Y1 1c I X0Y1 I X1 0s I Y0X1 I X0X1 . (16b) Case III: m0 0°, 90°; m1 45° M I dc 0c I Y0 I X0 1s I Y1 0c1s I Y0Y1 1s I X0Y1 I X1 0c I Y0X1 I X0X1 . (16c) Case IV: m0 0°, 90°; m1 0°, 90° M I dc 0c I Y0 I X0 1c I Y1 0c1c I Y0Y1 1c I X0Y1 I X1 0c I Y0X1 I X0X1 . (16d) 2. Change the sign of the imaginary component of the matrix A Eq. 21 resulting in A 1 0 0 1 1 0 0 1 0 1 1 0 0 i i 0 . (21) 3. Change the sign of 2 and 2 in Eqs. 23l and 23n, resulting in 2 D2 C sp S ps S sp C ps , (23l) 2 D2 CS ps SC ps . (23n) The authors thank R. W. Collins, Chi Chen, and Ilsin An at Pennsylvania State University for bring- ing changes 2 and 3 to our attention. Reference 1. G. E. Jellison, Jr. and F. A. Modine, “Two-modulator general- ized ellipsometry: theory,” Appl. Opt. 36, 8190 – 8198 1997. The authors are with Condensed Matter Sciences Division, Oak Ridge National Laboratory, Building 3025, MS 6030, P.O. Box 2008, Oak Ridge, Tennessee 37831-6030. G. E. Jellison’s e-mail address is [email protected]. Received 6 March 2003. 0003-693503193765-01$15.000 © 2003 Optical Society of America 1 July 2003 Vol. 42, No. 19 APPLIED OPTICS 3765
Transcript of Two-Modulator Generalized Ellipsometry: Theory—erratum
Two-modulator generalized ellipsometry:theory—erratum
Gerald E. Jellison, Jr. and Frank A. Modine
In a previous publication �Jellison and Modine, Appl. Opt. 36, 8190–8198 �1997��, three points ofinformation were presented inaccurately. These inaccuracies are corrected here. © 2003 OpticalSociety of America
OCIS codes: 120.2310, 120.6200, 230.5440, 260.1180, 260.2130, 260.5430.
The signs in the Eqs. �16�, �21�, and �23� of Ref. 1needed to be corrected. This results in the followingequations.
1. Change the sign of the IY0X1 term in Eqs.�16a�–�16d�.
Case I: �m0 � �45° and �m1 � �45°
M � �Idc �0sIY0 � IX0
�1sIY1 �0s1sIY0Y1 � �1sIX0Y1
� � � �
IX1 �0sIY0X1 � IX0X1
� . (16a)
Case II: �m0 � �45° and �m1 � 0°, 90°
M � �Idc �0sIY0 � IX0
� � � �
�1cIY1 �0s1cIY0Y1 � �1cIX0Y1
IX1 �0sIY0X1 � IX0X1
� . (16b)
Case III: �m0 � 0°, 90°; �m1 � �45°
M � �Idc � �0cIY0 IX0
�1sIY1 � �0c1sIY0Y1 �1sIX0Y1
� � � �
IX1 � �0cIY0X1 IX0X1
� . (16c)
The authors are with Condensed Matter Sciences Division, OakRidge National Laboratory, Building 3025, MS 6030, P.O. Box2008, Oak Ridge, Tennessee 37831-6030. G. E. Jellison’s e-mailaddress is [email protected].
Received 6 March 2003.0003-6935�03�193765-01$15.00�0
© 2003 Optical Society of AmericaCase IV: �m0 � 0°, 90°; �m1 � 0°, 90°
M � �Idc � �0cIY0 IX0
� � � �
�1cIY1 � �0c1cIY0Y1 �1cIX0Y1
IX1 � �0cIY0X1 IX0X1
� . (16d)
2. Change the sign of the imaginary component ofthe matrix A �Eq. �21�� resulting in
A � �1 0 0 11 0 0 10 1 1 00 i i 0
� . (21)
3. Change the sign of 2 and �2 in Eqs. �23l� and�23n�, resulting in
2 � �D�2��CspSps � SspCps�, (23l)
�2 � �D�2��CSps � SCps�. (23n)
The authors thank R. W. Collins, Chi Chen, andIlsin An at Pennsylvania State University for bring-ing changes 2 and 3 to our attention.
Reference1. G. E. Jellison, Jr. and F. A. Modine, “Two-modulator general-
ized ellipsometry: theory,” Appl. Opt. 36, 8190–8198 �1997�.
1 July 2003 � Vol. 42, No. 19 � APPLIED OPTICS 3765
