Transcending Digital Processing - NMI · Single Sided Fan-out or Fan-In ... design rules and...

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© BPA Consulting Ltd. 3D Embedded Packaging - Transcending Digital Processing Packaging in a Post Moore's World Nick Pearne / Bill Burr BPA Consulting, Ltd. Dorset House, Kingston Road Surrey

Transcript of Transcending Digital Processing - NMI · Single Sided Fan-out or Fan-In ... design rules and...

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© BPA Consulting Ltd.

3D Embedded Packaging -Transcending Digital Processing

Packaging in a Post Moore's World

Nick Pearne / Bill BurrBPA Consulting, Ltd.

Dorset House, Kingston RoadSurrey

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Computing Systems Evolution

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Generations of Integrated Circuits

● 1st- Small Scale Integration (SSI)– 3 to 30 transistors/chip. Early 1960s

● 2nd- Medium Scale Integration (MSI)– 30 to 300 transistors/chip. Late 1960s

● 3rd- Large Scale Integration (LSI)– 300 to 3,000 transistors/chip. Mid 1970s

● 4th- Very Large Scale Integration (VLSI)– more than 3,000 transistors/chip. Early 1980s

● 5th- Ultra Large Scale Integration (ULSI)– more than one million transistors/chip. Mid 1980s

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Quad NAND Device64 transistors

"VLSI" Device750,000 transistors

"ULSI" GPU with integrated memory450 million transistors

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

The World is Flat

● The Silicon Fabrication Process has been essentially planar- buildup of conductive and insulating layers onto and into the silicon wafer

● This planarity has determined the form factor for subsequent levels of packaging & interconnection

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Size + Complexity

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300 mm

2010: 32nm Quad-Core Processor(758 million transistors)

200 mm

100 mm

1971: 10µm 4 bit Processor(2300 transistors)

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

The Digital World- What Could Be Achieved

● Calculator- Accounts at home● PC- Desktop publishing, computer graphics, e-mail, World

Wide Web, Video Games● Laptop/Notebook- Computing and communications "on the

go"● CD Player- the cutting edge of Digital Sound

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

The Great Bit Race

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source: Karl Rupp

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Then Came the Mobile 'Phone

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Systems Integration in the Cell PhoneSystems Integration in the Cell Phone

Source : H.Ueda JEITASource : H.Ueda JEITA source: JEITA

Systems Integration in the Cellular Phone

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

A Business- Open to Human Interaction

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Processor in Your Pocket

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Diversification- the New Dimension

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● "Processing"

● "Experience"

source: ITRS

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Where The Rubber Hits the Road

● "Processing"– active devices– more transistors per unit

area = higher cost– 3D packaging = higher

interconnect complexity

● "Experience"– actives, passives, MEMS,

power, RF– non-digital functions =

mixed component types– mixed signals / RF =

layout, floorplan, parastics issues

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source: Chipworks

source: Georgia Tech PRC

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Putting it All Together

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source: OKI Semiconductor

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

What is "Embedding"..?

● Embedding uses the space within an organic substrate for active and passive components

● Typically <400 embedded connections● Embedding requires a new business model,

integrating component, substrate, and assembly operations: the "Organic Fab"

● Components are embedded inside an organic substrate (PCB core) by combination of:– Component placement/bonding– Component encapsulation/embedding– Substrate buildup (lamination)– Circuitization– Final Finishing/Singulation/Test

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What is Embedded Component?

Embedding uses the space within an organicsubstrate for active and passive components

AT&S is amongst the leading chip embeddingproviders – others in Europe; Japan; Korea; Taiwan

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | GSF 2012, Shanghai

Typically < 400 embedded connections

Component Assembly Lamination Structuring

HDI/Sequential MLB

source: AT&S, BPA Archives

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

The Integration Advantage- "Organic Fab"

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300mm Wafer

● Almost 4X the carrier area for structuring / interconnection / finishing processes

source: AT&S, BPA Archives

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Embedding Options

● Single Sided Fan-out or Fan-In● Adjust semiconductor footprint through

design rules and redistribution layers

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"Wafer Level" Packages

Aluminum or CuRedistribution Line

Active Silicon

Solder Terminal

Passivation Layers

"Board Embedded" Packages

Component�Level�Reliability

Criteria :Appearance�:�no�void,�no�delamination:Circuit�resistance�change�:�less�than�20%�from�T=0

Test�Vehicle�� PKG�Size:�5.15�x�5.15�mmStructure:�4PI,�0.5mm�pitich with�98�I/O

Board�Level�Reliability

Pass-40deg.C�<->125deg.C

(Ramp�rate�controlled)

1000�cyclesThermal�Cycle

Pass1500G�!30!Board�Drop

ResultConditionsItem

Test ResultsEvaluation�board�layout Bump�allocation

Evaluated�connections�of�peripheral�bumps�(weakest�parts)�

Connection reliability evaluation on a rigid mother board

source: STATSChipPac

● "Via" Type● "Pad" Type

source: TransSiP

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Fan-In Wafer Level RDL for Ease of Die Embedding

1) Eases large panel dieplacement requirements.

2) Relaxes laser via tolerancerequirements.

3) Lowest cost option for finest interconnects (highest density).

4) Provides corrosion barrier for embedded integrated circuits.

5) Higher overall yields!!

© BPA Consulting Ltd.

3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Ways to Skin the Cat- 1

● "Via Connection"

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2

3. Definitions

3.1 Technology of device embedded substrate

There are two types of device embedded substrates, one type is to mound active and/or passive device on a base

substrate and covered by organic resin and the other is to form device on a substrate and then covered by organic resin.

The device embedded substrate also includes composite type substrates which consist of mass produced inorganic

ceramic including LTCC (low temperature co-fired ceramics) substrates (hereafter they are called just ceramics) on which

passive devices are embedded as shown in Figure 4, and the other type as shown in Figure 5 where the ceramic substrate

is used as a base on which active and passive devices are mounted and the entire body is covered by organic resin,

however, details of inorganic ceramics are not specified in this document. Such a ceramic is treated just handled as a

base of a device embedded module.

Classification of device embedding is given in Table 1. Active devices include bare die, wafer-level package (WLP), BGA,

LGA, and QFN. Passive devices include chip component, complex chip component like an array and integrated passive

device (IPD). Module and MEMS are embedded onto the substrate after packaging and molding into module and MEMS.

The component formed during substrate formation is not covered in this document but also included in Table 1. There are

two types of formed passive component embedding, one is to form passive components using thick film or thick film

technology on the base of silicon or compound semiconductor and/or on the stacked chip at the wafer level or on

package-on-package (PoP), and the there is to use sheet-type passive device on an organic substrate first and then other

devices are embedded.

Figure. 2 Completed device embedded substrate (pad connection)

Figure 3 Completed device embedded substrate (via connection)

Embedded devicePattern formation

Pattern formationLayer connection (via)

Layer connection

(via)

Com

ple

ted d

evic

e e

mbedded b

oard

Solder resist

Solder resist

Embedded devicePattern formation

Pattern formationLayer connection (via)

Layer connection

(via)

Com

ple

ted d

evic

e e

mbedded b

oard

Solder resist

Solder resist

Cu plated viaCu plated connectionEmbedded with terminals upward

Base

Active device

Solder resist

Cu plated viaCu plated connectionEmbedded with terminals upward

Base

Active device

Solder resist

Pro + compatible with industry standard LVH

(laser via hole) buildup processes + On-chip design rules (40µ pads/100µ

pitch)

Con - copper plating required on devices-

additional cost - registration is an issue - no wiring on encapsulating layer

EIPC Summer Conference Milan, Italy, September 13th & 14th, 2012

Lars Böttcher, System Integration & Interconnection Technologies [email protected]

© Fraunhofer IZM

Development of embedding technology

printed resistor

printed capacitor

discrete resistor

discrete capacitor

embedded chip

1970 1995 2000 2005 2012

first patent

Concepts Î Research Î Collaboration Projects Î Industrialization

HIDING DIES

History of Embedding

source: FlipChip

source: Fraunhofer IZM

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Ways to Skin the Cat- 2● "Pad Connection"

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2

3. Definitions

3.1 Technology of device embedded substrate

There are two types of device embedded substrates, one type is to mound active and/or passive device on a base

substrate and covered by organic resin and the other is to form device on a substrate and then covered by organic resin.

The device embedded substrate also includes composite type substrates which consist of mass produced inorganic

ceramic including LTCC (low temperature co-fired ceramics) substrates (hereafter they are called just ceramics) on which

passive devices are embedded as shown in Figure 4, and the other type as shown in Figure 5 where the ceramic substrate

is used as a base on which active and passive devices are mounted and the entire body is covered by organic resin,

however, details of inorganic ceramics are not specified in this document. Such a ceramic is treated just handled as a

base of a device embedded module.

Classification of device embedding is given in Table 1. Active devices include bare die, wafer-level package (WLP), BGA,

LGA, and QFN. Passive devices include chip component, complex chip component like an array and integrated passive

device (IPD). Module and MEMS are embedded onto the substrate after packaging and molding into module and MEMS.

The component formed during substrate formation is not covered in this document but also included in Table 1. There are

two types of formed passive component embedding, one is to form passive components using thick film or thick film

technology on the base of silicon or compound semiconductor and/or on the stacked chip at the wafer level or on

package-on-package (PoP), and the there is to use sheet-type passive device on an organic substrate first and then other

devices are embedded.

Figure. 2 Completed device embedded substrate (pad connection)

Figure 3 Completed device embedded substrate (via connection)

Embedded devicePattern formation

Pattern formationLayer connection (via)

Layer connection

(via)

Co

mple

ted

devic

e e

mb

edde

d b

oa

rd

Solder resist

Solder resist

Embedded devicePattern formation

Pattern formationLayer connection (via)

Layer connection

(via)

Co

mple

ted

devic

e e

mb

edde

d b

oa

rd

Solder resist

Solder resist

Cu plated viaCu plated connectionEmbedded with terminals upward

Base

Active device

Solder resist

Cu plated viaCu plated connectionEmbedded with terminals upward

Base

Active device

Solder resist

Pro + standard components and assembly

processes used (solder / conductive adhesive)- no added cost

+ pad-to-device registration issues confined to well-known assembly issues and tolerances

+ hybrid processes (conductive post / LVH) can be used for maximum flexibility

+ wiring channels available in encapsulating layer(s)

Con + most solutions are proprietary or derivatives

of proprietary technologies (ALIVH, B2iT) + Density for conductive post solution limited to

0.2mm pitch

Embedded WLCSP- Camera module

© 2011 Dai Nippon Printing Co.,Ltd. All Rights Reserved.14

CONFIDENTIAL

Embedded passives into main board (about 250pcs)

Embedded BEmbedded B22itit Application (Mother board) Application (Mother board)

t0.33mm

Max

Structure䠖12LayerThickness䠖t=0.96mm

SSD Motherboard- 250 embedded passives

source: DNP

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

The Integration Imperative● Footprint Reduction (Miniaturisation)● Integration (Ease of Use)● Reliability● Performance● Time to Market

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Option 1:Integrated Packaging + Anylayer MLB => significant form factor reduction

Option 2:Integrated Packaging + Standard HDI MLB => reduced ramp risk, reduced cost, some form factor reductionStandard PWB

Complex SoC on interposer

Discrete component packages- supply chain flexibility but complex BOM and PWB interconnectShort product lifecycle can't

tolerate SoC development leadtime

source: AT&S, BPA Archives

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

Mounting and Interconnection Options

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Table 3 Jisso mounting and interconnection of device embedded substrate

Interconnection Jisso mounting Device

Process Interconnection Structure

Wire bonding Wire melt-connection Die bonding Chip

Flip-chip bonding Metal bonding

Contact connection

Metal bonding

Contact

Wafer level

packaging (WLP)

Reflow

Polymer bonding

Soldering

Conductive paste

Package Reflow

Polymer bonding

Soldering

Conductive paste

Soldering

Conductive paste

Rectangular chip Reflow

Polymer bonding

Soldering

Conductive paste

Rod-type chip Reflow

Polymer bonding

Soldering

Conductive paste

Soldering

Conductive paste

Module Reflow

Polymer bonding

Soldering

Conductive paste

Pad bonding

Mounting

MEMS Reflow

Polymer bonding

Soldering

Conductive paste

Soldering

Conductive paste

Chip Via connection Copper plating

Conductive paste

Die bonding

Wafer level

package (WLP)

Via connection Copper plating

Conductive paste

Package Via connection Copper plating

Conductive paste

Copper plating

Conductive paste

Rectangular chip Via connection Copper plating

Conductive paste

Rod-type chip Via connection Copper plating

Conductive paste

Module Via connection Copper plating

Conductive paste

Via bonding

Mounting

MEMS Via connection Copper plating

Conductive paste

Copper plating

Conductive paste

Note: Shape and surface treatment of terminals of embedding device should be agreed between user and supplier of the

device.

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Table 3 Jisso mounting and interconnection of device embedded substrate

Interconnection Jisso mounting Device

Process Interconnection Structure

Wire bonding Wire melt-connection Die bonding Chip

Flip-chip bonding Metal bonding

Contact connection

Metal bonding

Contact

Wafer level

packaging (WLP)

Reflow

Polymer bonding

Soldering

Conductive paste

Package Reflow

Polymer bonding

Soldering

Conductive paste

Soldering

Conductive paste

Rectangular chip Reflow

Polymer bonding

Soldering

Conductive paste

Rod-type chip Reflow

Polymer bonding

Soldering

Conductive paste

Soldering

Conductive paste

Module Reflow

Polymer bonding

Soldering

Conductive paste

Pad bonding

Mounting

MEMS Reflow

Polymer bonding

Soldering

Conductive paste

Soldering

Conductive paste

Chip Via connection Copper plating

Conductive paste

Die bonding

Wafer level

package (WLP)

Via connection Copper plating

Conductive paste

Package Via connection Copper plating

Conductive paste

Copper plating

Conductive paste

Rectangular chip Via connection Copper plating

Conductive paste

Rod-type chip Via connection Copper plating

Conductive paste

Module Via connection Copper plating

Conductive paste

Via bonding

Mounting

MEMS Via connection Copper plating

Conductive paste

Copper plating

Conductive paste

Note: Shape and surface treatment of terminals of embedding device should be agreed between user and supplier of the

device.

Mounting MethodMounting Method

source: JPCA

● Pad Bonding– multiple connection options– supports components of different thicknesses

● Via Bonding– compatible with industry standard processes– potentially higher I/O densities

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

3D Embedded SiP

● Supports multiple device types: actives, discrete passives

● Off-the-shelf components can be used (WLP, CSP) ensuring industry-standard depth / breadth of supply

● ALP (Anylayer post) connections enable maximum layout flexibility and wiring density

● Overall cost advantage compared to Via processes

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0

100

200

300

400

Conventional ALP SiP LVH SiP

PWBProcessComponent

source: TransSiP

Comparative Production Cost and Assembly: 250 embedded passive components

Rel

ativ

e C

ost,

%

source: Fujikura

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"

● Many ways to approach the challenge

● Key Drivers-– integration– codesign– reliability– cost– time to market

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Achieving "More than Moore"- the 3rd Dimension

source: SPIL

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3D Embedding: Beyond Digital

"Packaging in a Post Moore's World"23

Thank you for your attention!