Total Pressure Measurement - Plasmadiam · Hot Cathode Ionization Vacuum Gauges The pressure range...

Total Pressure Measurement

Vacuum Sensors

Display and control unit

Accessories

5

Contents

Hot Cathode Ionization Vacuum Sensorss Page 5-7 to 5-14

Cold Cathode Ionization Vacuum Sensors Page 5-15 to 5-17

Heat Loss Vacuum Sensors Page 5-18 to 5-25

Capacitance Diaphragm Sensors Page 5-26 to 5-30

Introduction Page 5-3 to 5-6

Relative Pressure Sensors Page 5-31 to 5-33

Display and Control Units Page 5-34 to 5-39

Contamination Protection Page 5-39

Cables Page 5-40 to 5-41

5

5-2 www.vacom-vacuum.com

http://www.vacom-vacuum.com

www.vacom-vacuum.com 5-3

5


IntroductionFor all types of vacuum applications VACOM offers reliable total pressure sensors covering a wide pressure range from atmosphere to XHV. This catalogue introduces VACOM’s own, technologically leading products that can be used out-of-the-box or adapted in a customer specific version. The following chapter provides an overview of VACOM-selected sensors for total pressure measurement as well as suitable controllers. Used to determine the absolute pressure in almost every application. For more detailed information about vacuum gauges please do not hesitate to contact our technical support team.

Pressure Units1 Pa = 0.01 mbar = 0.0075 Torr1 mbar = 100 Pa = 1 hPa = 0.75 Torr1 Torr = 1 mmHg = 133 Pa = 1.33 mbar

1 micron = 1 mTorr = 0.133 Pa = 1.33E-3 mbar1 psi = 6895 Pa = 69 mbar = 51.7 Torr1 atm = 760 Torr = 1013 hPa = 1013 mbar = 14.7 psi

Measuring Principles for Total Pressure Instruments and Typical Measurement Ranges

Vacuum Pressure Ranges

Custom made (ionization, heat loss)

Pressure range Absolut pressure in mbar Molecules per cm3 Mean free pathAtmosphere 1013 2,7 · 10-19 68 nm

Rough Vacuum 1013 …1 1019 … 1016 0,1 … 100 µm

Medium Vacuum 1 … 10-3 1016 … 1013 0,1 … 100 mm

High Vacuum (HV) 10-3 … 10-7 1013 … 109 0,1 … 1000 m

Ultra high Vacuum (UHV) 10-7 … 10-11 109 … 105 1 km … 104 km

Extreme Ultra high Vacuum (XHV) < 10-11 < 105 > 104 km

Extreme/Ultra high vacuum High vacuum Medium/Rough vacuum

10-12 10-10 10-8 10-6 10-4 10-2 100 102

Ionization (Hot Cathode Ionization, Cold Cathode Ionization)

Wide range (ionization and heat loss)

Membrane (capacitance, piezo)

Heat loss (Pirani, Thermocouple)

Bourdon

mbar

www.vacom-vacuum.com5-4

5


Selection Criteria for Vacuum Gauges

Measurement range

Measurementaccuracy

Measurement conditions

Measurement results

Measurement principles

Reproducibility Response time

Process media Process environment Bakeout capability

Display Process control Signal transmission

Measurement rangeWhich method offers an appropriate measurement range?Is one single method sufficient or is it necessary to combine different methods? Are combination gauges suitable?

Accuracy, reproducibility, and response timeWhat accuracy does the vacuum application require?Which method offers a sufficient precision?Which reproducibility and response time of the sensor is necessary?

Composition of the measured process mediaAre correction factors for gas-type dependent measurements relevant/known? Is the gas composition variable?

Process and environmental conditionsWhich gases and conditions is the sensor exposed to?(Gas: corrosive, hazardous, oxidizing/reductive, etc.; Conditions: contaminated areas, particle-rich environment, low/high temperatu-res, high voltages, strong magnetic fields, electric discharges, fast pressure rise or surge pressures, etc.)Is a protection of the inlet port necessary, by means of a baffle, a valve, a bent tube etc.?Which other requirements must the sensor of choice meet? (Protection against contaminants and water; mechanical strength; climatic and geographical conditions; ionizing radiation; etc.)Is the examined gas mixture flammable? Are explosion-proof gauges required?

Bakeout capabilityWhat temperature limit is required for the gauge and the cable?Need temperature sensitive parts to be removable? Do temperature sensitive parts need to bee removable?

DisplayIs a pressure display required?If yes, is a an active sensor with integrated display useful or is a separate display unit needed?

Process control, data loggingWhat type of communication interface (analog, RS232, profibus, …) is needed?How many setpoints are necessary?

Signal transmissionWhich type of signal (analog/digital) needs to be transmitted over which cable length and in which quality?


5


Order information and compatibilities

Order code example:

1 S: Sensors | E: Electronics | C: Complete2 0: none | R: RS232 | 3A: Analog + RS232 | A: Analog3 SDM= Setpoint (S: yes, 0: no) | Display (D: yes, 0: no) | Membrane (M: yes, 0: no)4 S1: Slot 1 (0, A or H) | S2: Slot 2 (0, A or H) | S3: Slot 3 (0, A or H)

A: Active module | H: Hot cathode sensor module | 0: free Module area

Product range - Control units - Examples - Sensors1 - Examples - Length Old name

CABLE VAX BARIONBPS 3M, 5M, 10M, 15M

CABLE VAX BARIONBPE 3M, 5M, 10M, 15M

CABLE MVC3 BARIONBPE 3M, 5M, 10M, 15M BATL, BSL

CABLE VAX LAH 3M, 5M, 10M, 15M

CABLE VMG LAH 3M, 5M, 10M, 15M

CABLE VAX ANYGAS 3M, 5M, 10M, 15M

CABLE VMG ANYGAS 3M, 5M, 10M, 15M

CABLE VAX PIRANISD0 3M, 5M, 10M, 15M SSL

CABLE VMG PIRANISD0 3M, 5M, 10M, 15M SSL+Adapter

CABLE VAX PIRANIS00 3M, 5M, 10M, 15M LSL

CABLE VMG PIRANIS00 3M, 5M, 10M, 15M LSL+Adapter

CABLE VAX MEMBRAN 3M, 5M, 10M, 15M CSL

CABLE VMG MEMBRAN 3M, 5M, 10M, 15M CSL+Adapter

CABLE VAX COLD 3M, 5M, 10M, 15M LSL

CABLE VMG COLD 3M, 5M, 10M, 15M LSL+Adapter

CABLE PIRANIC PIRANI000 3M, 5M, 10M, 15M CB421

1 BARIONBPS: BARION basic II, BARION pro II, BARION smart(F) BARIONBPE: BARION basic, pro, extended LAH: BARION atm(II), BARION HV, VaX linkB ANYGAS: Anygas

PIRANISD0: Pirani sensors of the type SD0PIRANIS00: Piranisen sensors of the type S00 MEMBRAN: Diaphragm sensorsCOLD: ColdPIRANI000: Pirani sensors of the type 000

BARION - EXTENDED - S - 0 - CF40

Product range - Product type - Characteristic - Interface2 - Size of flange

BARION

BASICII, PROII, EXTENDED S 0 CF40

ATMII, HV S,E,C 0, A3 CF40, CF16, KF16, KF25

VaX linkB E A3

VaX S1S2S34 E SBU35

COLDION BASIC, PRO, EXTENDED S 0 CF40

ANYGAS BASIC C 0 KF16, NPT18, NPT14

RFM CU or 316 S 0, A KF16, G14

SWITCHNPN5V or PNPV,

NPN20MA or PNP20MA

C A SL14, VCR,14

MEMBRAN 10TORR25 C A3 CF16R, KF16, 12, VCR8

THERM 20 or 1 S 0 KF25, KF16, NPT18

PIRANI SDM3 or 000 C 0, A, 3A KF16, KF25, NPT18, 12

COLD P C A CF40, KF40, KF25


5


Total pressure instruments – Made by VACOM®

As our partners you can benefit from our long-term experience. Our well established product line is distinguished through its high accu-racy, robustness, safety, quality, and long life-time as well as through its user-friendliness in various industrial and research processes.

We are happy to customize our devices according to your specific requirements.

In general, it is essential to decide if an active (also called transmitter) or a passive one should be used. The transmitter is a gauge with integrated measuring and control electronics. It provides standardized analog voltage (e.g. 0…10 V), current (e.g. 4…20 mA) or digital output signals (e.g., via RS232, Profibus DP). BARION® atm II is one example of transmitters. A passive gauge consists only of one sensor head. The power supply and data processing is provided by an external controller. The advantage of using a passive sensor is the possibility to use higher operating temperatures in applications, where bake-outs cannot be avoided. BARION® pro II is an example of the passive gauge.

An exact definition of the measured value is important since most gauges measure the absolute pressure. These sensor suit well in applications and processes dependent on the ambient pressure such as valves opening only when there is no pressure gradient.

Selection Criteria for Vacuum Gauges


5

Product OverviewTo facilitate your search for the right vacuum gauge, the sensors in this chapter are arranged according to their measurement principle. Each sensor group is introduced with a small description of the physical processes that are used for the pressure determination.

* Membrane: There are different device version with 3/4 pressure decade reliable.

Compatibility Measurement range (10n mbar / 10n+2 Pa / 10n Torr) Control units

Sensors n= -12 -11 -10 -9 -8 -7 -6 -5 -4 -3 -2 -1 0 1 2 3

VM

G

CU

-100

VaX

Vac

uum

Exp

lore

r

VaX

link

B

BARION® basic II P

BARION® pro II P

BARION® extended P

BARION® smart P

BARION® smartF P

BARION® move P

BARION® atm II A

BARION® HV A

COLDION® basic A

COLDION® pro A

COLDION® extended A

COLD A

RFM M

SWITCH A

ANYGAS A

MEMBRAN* A

PIRANI A

THERM (Thermocouple) P

www.vacom-vacuum.com

5

5-8

Hot Cathode Ionization Vacuum Gauges

With decreasing absolute pressure levels it is difficult to measure the pressure as force per area unit. The force differences become so small that they are no longer resolvable. A very practical but indirect method of measuring high vacuum is the "counting" of gas particles. Thus, the particle number density n (gas density) is determined, which is proportional to the gas pressure p according to the relation p=nkT.

The idea is to ionize the gas, since ions can be easily detected with a collector electrode. Therefore, electrons are accelerated to cause collision ionizations. This is possible in a wide pressure range from medium up to extreme high vacuum, where the particles have a sufficiently high mean free path. Regarding the generation of ions, there are two different types of ionization vacuum gauges:

Hot cathode: Thermal emission from a hot cathode generates electrons. Those leave the filament because their thermal energy ishigher than the characteristic work function of the filament material (or coating).

Alternative method: Gas discharge in a cold cathode, see section cold cathode ionization vacuum gauges.

The electron emission from the cathode is restricted to a constant current Ie, e.g. 1 mA. The cathode is brought to a temperature of 1500° C releasing several watt of electrical power in form of heat. This heat causes electrons to leave the metal. The electrons accele-rate to an anode grid where most electrons pass through and ionize the gas inside the grid (Fig. 2). The ions are directed towards the collector and neutralized there. The neutralization generates a current Ic, which can be measured. The collector current is proportional to the particle number density, hence to the pressure (Fig. 3). The fundamental equation for hot cathode gauges is

p = Ic / (Ie x S)

with S describing the sensitivity of the gauge (i.e. the ion detection rate). It has to be taken into account that the sensitivity depends on the gas composition as well, due to the different ionization probabilities for different chemical species.

Measurement Principle

Fig. 1: Functional principle of a hot cathode gauge Fig. 1: Typical Ic(p) curve of a hot cathode gauge


5

5-9


The pressure range of a hot cathode, where the pressure is proportional to the collector current, is limited. Depending on the design of the gauge the upper limit varies between 0.1 mbar and 10-4 mbar (Fig. 3). This constraint is imposed by space-charge effects and a small mean free path of the electrons. The lower limit ranges between 10-8 mbar and 10-13 mbar, since the collector current contains a residual component which cannot be totally eliminated. The residual current sums up the contribution from various effects (Fig. 4). The so called x-ray limit is generally used as a synonym for the residual current in hot-cathode pressure gauges (Fig. 3).

Fig. 3: Physical effects in a hot cathode (schematic, plan view with cylindrical anode grid)

Physical Effects, Limiting Factors

Contributions to the collector current:

Measurement 1. Gas phase ion current. (The current is proportional to

the particle-number density, hence to the pressure.)

Error effects (not proportional to pressure)2. X-ray effect

(Bremsstrahlung from an electron impact on the anodewith following photoemission at the collector)

3. Electron stimulated desorption (ESD) from particles atthe anode (local pressure increase)

4. Outgassing of heated sensor parts(local pressure increase)

5. Inverse x-ray effect(Bremsstrahlung generated by electron bombardmentof the anode; following photoemission of electrons fromthe outer wall; electron absorption at the collector, i.e.inverse to the x-ray effect)

Hot cathode gauges are available in various designs (see below). They offer high stability, accuracy, and reproducibility. However, the sensitivity is influenced by several factors:

their changes which affect the electron trajectories (e.g. external magnetic fields, geometrical changes of the electrodes or thesurrounding wall – especially for nude gauges);

contamination of electrodes, e.g. by material from the vacuum system

gas type (specific ionization probabilities can be considered with a gas type correction factor).

The lower range of hot cathode gauges is limited by the residual current. Therefore, the measurement has an increasingly large uncertainty if the pressure is smaller than 3 to 4 times the x-ray limit (Fig. 3).

The life time of the hot cathode gauge is usually limited by the contamination from the vacuum system or by the depletion of the filament coating layer. For coating applications it is recommended to use a baffle in order to slow down the contamination process. Under harsh industrial conditions (e.g. sputtering processes at relatively high pressures), problematic glow discharges or electric flashovers between the electrodes can occur. In those cases, grids or baffles help to protect the sensor from charge carriers and electromagnetic fields.

The established iridium-cathodes with yttrium oxide coating are stable in oxygen environments (air intrusion) and demonstrate a very high life time. Most hot cathode gauges have a second cathode, in case the first one breaks down.

Application


5

5-10


Types of Hot Cathode Gauges

Bayard-Alpert (BA)Since 1950, gauges are built according to the BA principle with various designs: with a stainless steel case (advantage: stable sensitivity); as a nude gauge and as a glass gauge (traditional design, has hardly been used in the past).

X-ray limit: between 3E-11 and 1E-9 mbarUpper limit: between 1E-2 and 0.1 mbar

Cathode(Filaments)+30 V

Ioniccollector 0 V

Anode grid+180 V

Fig. 4: Bayard-Alpert hot cathode gauge

Bayard-Alpert sensor with X-ray effect compensation(BARION® extended)The innovative design of the Bayard-Alpert gauge reduces the residual current by two orders of magnitude. This is achieved by controlled use of negative x-ray effects and optimized outgassing properties.

Lower limit: 5E-12 mbarUpper limit: 1E-2 mbar.

Hot Cathode Ionization Vacuum Sensors

BARION basic II / pro II

Passive Hot Cathode Sensor

Technical dataMeasurement principle hot cathode ionization (Bayard-Alpert)Measurement range 1E-9...1 Pa | 1E-11...1E-2 mbar | 7.5E-12...7.5E-3 TorrAccuracy BARION® basic II:± 20 % (1e-8...1e-2 mbar)

BARION® proc II:± 10 % (1e-8...1e-2 mbar)Reproducibility BARION® basic II:± 10 % (1e-8...1e-2 mbar)

BARION® pro II:± 5 % (1e-8...1e-2 mbar)Gas dependent pressure display yesVacuum connection DN40CFBakeout temperature 200°C (in operation with VaX and cable)

150°C at chamber flange (in operation with VaX linkB)Operating temperature 200 °C (in operation with VaX and cable)

50 °C (in operation with VaX linkB)Filaments 2 x yttria coated iridiumMaterials in vacuum BARION basic II: SS, W, Au, Y2O3 on Ir, glass, Ag

BARION pro II: SS, W, Au, Y2O3 on Ir, glass, Ag, CUWeight BARION® basic II:0.3 kg

BARION® pro II:1 kg (flange dependent)Mounting position anyElectrical connector VACOM special plug (11 pins)Dimensions BARION® basic II:D x H: 70 x 70

BARION® pro II:D x H: 70 x 91Scope of delivery sensor

Compatible withDisplay and control units VaX Vacuum Explorer, VaX linkBGauge cable CABLE-VAX-BARIONBPS-X (X: cable lenght in m)

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBARION-BASICII-S-0-CF40 BARION® basic IIBARION-PROII-S-0-CF40 BARION® pro II

Excellent accuracy and reproducibilityLow heat input < 6WReplaceable filaments

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBARION-FILAMENT-SINGLE replacement filament for BARION®

txtAbstand

txtAbstand

txtAbstand

5




BARION extended

Passive sensor, medium vacuum to UHV

Technical dataMeasurement range BARION® extended: 5E-10... 1 Pa | 5E-12…1E-2 mbar | 3.7E-

12...7.5E-3 TorrMeasurement principles hot cathode ionization (Bayard-Alpert)Accuracy ± 10 % of reading (1E-8…1E-2 mbar)Reproducibility ± 5 % of reading (1E-8…1E-3 mbar)Vacuum connection DN40CFBakeout temperature max. 400 °C (without cable)Filaments (cathodes) 2 x yttria coated iridiumMaterials in vacuum BARION® extended: stainless steel, W, Au, Y2O3 on Ir, glass

ceramics, Ag-coated Cu, MoScope of delivery sensor, manual

Compatible withDisplay and control units MVC-3 B0/BMGauge cable BATLX (X: cable lenght in m)

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBARION-EXTENDED-S-0-CF40 BARION® extended

Low heat input < 6WExcellent reproducibilityBARION<sup>®</sup> extended: Extended measurement range down to 5E-12 mbar

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parFILAMENT-BARION dual replacement filament, V form, CU40 gasket

txtAbstand

txtAbstand

txtAbstand

5

5-12www.vacom-vacuum.com



BARION® smart / smartF

Passive wide range sensor (hot cathode and Pirani)

Technical dataMeasurement principle hot cathode ionization (Bayard-Alpert) & heat conduction (Pirani)Measurement range 1e-9...1e5 Pa | 1e-11...1000 mbar | 7.5e-12...750 TorrAccuracy ± 10 % (1e-8...1e-2 mbar

± 25 % (1e-2...10 mbar & for 25°C at flange)Reproducibility ± 5 % of reading (1e-8...1e-2 mbar)Gas-type dependent pressuredisplay

yes

Vacuum connection BARION® smartF: DN40CFBARION® smart: KF16 / KF 25 / CF40

Bakeout temperature 200°C (in operation with VaX + cable)150°C at chamber flange (in operation with VaX linkB)

Operating temperature 200°C (in operation with VaX + cable)50°C (in operation with VaX linkB)

Filaments BARION® smartF: 2x yttria coated iridium (replaceable)BARION smart: 2x yttria coated iridium (non replaceable)

Materials in vacuum SS, W, Au, Y2O3 on Ir, glass, Ag, Pt, CUWeight BARION smartF: 1 kg

BARION smart: ca. 0.5 kg (flange dependent)Mounting position any for < 10 mbar, position-dependent for > 10 mbar (see manual)Electrical connector VACOM special plug (11 pins)Mounting position anyDimensions BARION® smartF: D x H: 70 x 91

BARION smart: D x H: max. 70 x 97 (flange dependent)Scope of delivery sensor

Compatible withDisplay and control unit VaX Vacuum Explorer, VaX linkBGauge cable CABLE-VAX-BARIONBPS-X (X: cable lenght in m)

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBARION-SMARTF-S-0-CF40 BARION® smartF, DN40CFBARION-SMART-S-0-KF16 BARION® smart, DN16KFBARION-SMART-S-0-KF25 BARION® smart, DN25KFBARION-SMART-S-0-CF40 BARION® smart, DN40CF

Innovative in-situ bakeable wide range sensorTransducer (VaX linkB) or conventional cable usage (VaX) possibleLow heat load < 6 W

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBARION-FILAMENT-SINGLE Ersatzfilament für BARION®

txtAbstand

txtAbstand

txtAbstand

5




BARION HV / atm II

Hot Cathode (HV) and Pirani (atm) sensors with on top electronics

Technical dataMeasurement principle BARION® HV: hot cathode ionization (Bayard-Alpert)

BARION® atm II: hot cathode ionization (Bayard-Alpert) & heatconduction (Pirani)

Measurement range BARION® HV: 5E-8...1 Pa | 5E-10...1E-2 mbar | 3.75E-10...7.5E-3TorrBARION® atm II: 5e-8...1e5 Pa | 5e-10...1000 mbar | 3.75e-10...750Torr

Accuracy BARION® HV: ± 10 % (1e-8 ... 1e-2 mbar)BARION® atm II: ± 10 % (1e-8 ... 1e-2 mbar)

± 25 % (1e-2 ... 10 mbar)Reproducibility ± 5 % (1 · 10-8 to 1 · 10-2 mbar)Gas dependent pressure display yesVacuum connection KF16 / KF 25 / CF41Bakeout temperature 150°C at chamber flangeOperating temperature 10…50°CFilaments 2x yttria coated iridium (not replacable)Materials in vacuum BARION® HV: SS, W, Au, Y2O3 auf Ir, glass, Ag, CU

BARION® atm II: SS, W, Au, Y2O3 auf Ir, glass, Ag, Pt, CUWeight ca. 570 g (flange dependent)Mounting position any for < 10 mbar, position-dependent for > 10 mbar

(see manual)Dimensions 122x73x66 mm (WxHxD)Voltage supply 24 V +/-10%, 24 WInterfaces data I/O: D-Sub, 9 pin (female) with RS232, analog (0…10 V, 0…20

mA, 4…20 mA)Type of protection IP 40Set points 1x relais (floating, max. 30 V/0.5 A

1x open collector (OC) (max. 30 V/ 0.5 A)Scope of delivery sensor, plug power supplyAccompanying software VACOM Vacuum measurement & Demonstration program (VVD)

CompatibleDisplay and control unit VaX Vacuum Explorer, VMGCable CABLE-VAX-LAH-X, CABLE-VMG-LAH-X

(X: cable lenght in m)

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Length [mm]Travel length [mm]lbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBARION-HV-C-3A-KF16 DN16KFBARION-HV-C-3A-KF25 DN25KFBARION-HV-C-3A-CF40 DN40CFBARION-ATMII-C-3A-KF16 DN16KFBARION-ATMII-C-3A-KF25 DN25KFBARION-ATMII-C-3A-CF40 DN40CF

Excellent reliability (accuracy and reproducibility) in prozess releted pressure range 1e-8...10 mbarEasy usability and maintenance because of intelligent safety precautions and plug`n play replacementsRobust standard Bayard-Alpert design with low outer dimensions

Replacement sensor/ - electronics

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBARION-HV-S-X X = flange: KF16 / KF 25 / CF40BARION-ATMII-S-X X = flange: KF16 / KF 25 / CF40BARION-HV-E-3ABARION-ATMII-E-3A

txtAbstand

txtAbstand

txtAbstand

5




5

5-15

Cold Cathode Ionization Vacuum Gauges

Determination of the particle-number density of a gas through gas discharge

In a cold cathode, the gas is ionized by collisions with electrons in the measurement volume, moving in crossed electric and magnetic fields in spiral paths. If a high voltage potential is applied between cathode and anode, all charged particles are accelerated towards the the corresponding electrode. During this process, other molecules can be ionized through inelastic collisions and secondary electrons can be generated. The accelerated particles initiate the gas discharge. The ionization of the residual gas is mainly achieved via electron ionization. Therefore, it is important to preserve those electrons in order to increase the ionization probability and to assure the discharge as long as possible, especially at low pressures. This is achieved with the additional external magnetic field.

As shown in figure 8, a Penning cell contains two parallel cathodes with a ring anode between them. A strong permanent magnet encloses the cell. The magnetic field lines point perpendicular to the electric field vector and have typical strength of 100 up to 200 mT. The voltage difference between the cathodes and the anode is around 2 kV. In this configuration the potential energy surface reaches a saddle point in the middle of the anode ring, where all electrostatic forces are nearly cancelled out. Electrons are emitted from the cathode and accelerate towards the ring anode. As soon as one component of the velocity vector is perpendicular to the magnetic field, the Lorentz force holds the electron on a spiral trajectory inside the anode, where the ionization occurs.

Fig. 8: Schematic sketch of a cold cathode gauge (Penning type).

Cathodes

Anode ringS

N

Positive charged ions follow the electric field to the cathode. The impact of the ions generates a discharge current that can be measured. Ions are influenced by the magnetic field only slightly because of their high mass as compared to electrons. The correlation between the pressure and the discharge current is described by p=const·Im, where m varies between 1 and 1.4 depending on the design of the gauge. Hence, the discharge current is proportional to the pressure over a wide range. The ionization energy and the ionization probability are typically different for different atoms and molecules. Therefore, pressure measurement with cold cathodes is gas-type dependent.

Typically, cold cathodes are used for pressure ranges below 10-3 mbar. Starting with this pressure the mean free path length is sufficient to keep the recombination probability low and the power needed for their operation reasonable. The lower pressure limit is given by the smallest detectable ion current, which is typically reached if the pressure drops to 10-11 mbar. Another physical bound-ary is the ceasing of the plasma-discharge in the cell, which can be to some extent prevented by improving the sensor geometry. Another type of cold-cathode ionization vacuum gauges, are magnetrons or inverted magnetrons. For more detailed descriptions of their principle the reader is referred to the literature, however, the physical principle of their operation is similar to the Penning cell.


Cold Cathode Ionization Vacuum Sensors

COLDION® basic/pro/extended

Passive Sensor, COLDION®

Technical dataMeasurement range COLDION® basic: 1E-7...0.01 Pa | 1E-9...1E-4 mbar |

7.5E-10…7.5E-5 TorrCOLDION® pro: 1E-9...0.01 Pa | 1E-11...1E-4 mbar |7.5E-12…7.5E-5 TorrCOLDION® extended: 5E-10 ...0,01 Pa | 5E-12...1E-4 mbar |3.8E-12…7.5E-5 Torr

Measurement principle Penning dischargeAccuracy 30 % of readingVoltage in operation Max. 5 kVPower consumption Max. 200 µAPower consumption Max. 1.25 WMaterials in vacuum stainless steel, Al, Al2O3, ZrVacuum connection DN40CFIgnition time 1 < 10 s at p > 5E-9 mbarOperating temperature basic: 0...80 °C,

pro/extended: 0...200 °CBakeout temperature basic: temporary 165 °C

pro/extended:max. 200 °C in operation / with cable connectedmax. 250 °C without high voltage cable at gaugemax. 400 °C without iron yoke, magnets and HV-cable

Weight 2,5 kgScope of delivery sensor, manual

Compatible withDisplay and control units COLDION® CU-100

Order code lbl11parlbl12parlbl13parlbl14parDescription Length [mm]Travel length [mm]lbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCOLDION-BASIC-S-0-CF40 cold cathode for high vacuumCOLDION-PRO-S-0-CF40 cold cathode for high vacuumCOLDION-EXTENDED-S-0-CF40 cold cathode for extrem high vacuum

Reliable and long-term stable pressure measurementVery short ignition times even in extreme high vacuumExtremely low magnetic field

txtAbstand

txtAbstandtxtAbstandCompatible displays and controllers

5



Cold Cathode Ionization Vacuum Sensors

Inverted Magnetron / Pirani

Wide Range Sensor consisting of cold cathode and Pirani

Technical dataMeasurement range 5E-7...1E+5 Pa | 5E-9…1000 mbar | 3.8E-9…750 TorrMeasurement principles cold cathode ionization (inverted Magnetron);

heat loss (Pirani)Accuracy ± 30 % of reading(1E-8...100 mbar)Reproducibility ± 5 % of reading (1E-8...100 mbar)Analog outputs log-linear, 0…10.5 V, 0.6 V / pressure decadeTemperature range (operation) 5…55 °CBakeout temperature max. 150 °C (without electronics and magnet)Mounting position anyIonization sensor auto on/off on (< 1E-2 mbar), off (> 1E-2 mbar)Heat loss vacuum sensor tungsten, constantly activeMaterials in vacuum stainless steel, ceramics, FKM 75, Mo, Ni, Au, WProtection category IP 40Power supply 15…30 V DC (< 2 W)Electrical connectors RJ45 (DC in, analog out, status)Scope of delivery sensor

Compatible withDisplay and control units VaX Vacuum Explorer, VMGGauge cable CABLE-VAX-COLD-X,CABLE-VMG-COLD-X (X: Kabellänge in m)

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionTravel length [mm]lbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCOLD-P-C-A-KF25 Inv. Magnetron + Pirani DN25KFCOLD-P-C-A-KF40 Inv. Magnetron + Pirani DN40KFCOLD-P-C-A-CF40 Inv. Magnetron + Pirani DN40CF

Simple wide range sensor for continous measurement between atmosphere and UHVPermanent pressure monitoring with the Pirani sensor

txtAbstand


5




5

5-18

Heat Loss Vacuum Gauges

Use the pressure-dependent heat transfer properties of the gas for the pressure measurement

Heat conduction is another characteristic feature of gases which is closely related to the particle density. The thermal energy is transferred by molecule collisions. The efficiency of the transfer depends on the mean free path length of the particles. At a certain pressure range, the thermal conductivity is proportional to the pressure, but disturbing effects such as heat flow, thermal radiation, heat conduction from the contacts, etc. are to be expected.

Fig. 10: Cut through a Pirani vacuum gauge

The basic concept of a Pirani vacuum gauge relies on a thin wire (Fig. 10) heated to a constant temperature, which is significantly higher than the temperature of the surrounding gas in the vacuum. The wire (typical diameter: 5 - 25 µm; length between 50 and 100 mm) transfers the heat to the gas and is simultaneously part of an electrical circuit, for example of a Wheatstone bridge. The pressure dependent temperature can be derived from the monitored wire resistance. The actual parameter (the electric power that is required for the temperature stabilization) is pressure-dependent due to the proportionality of the thermal conductivity of a gas to the pressure.

With a Wheatstone bridge, which is used for temperature stabilization, the difference between the heater voltage and a defined reference voltage can be measured at the same time. The difference between the actual and the reference voltage is adjusted to zero at a pressure value, where heat conduction does not play a role anymore. This calibration mainly eliminates the unwanted effects of heat radiation and thermal conduction at connector pins of the wire. In general, the reference voltage corresponds with the heating voltage that has to be applied when the pressure in the system is far below the lower measuring limit.

Advantages of the Pirani vacuum gauge are the wide measuring range from 10-4 mbar up to atmospheric pressure, as well as the high accuracy of ±10 % in a range below 1 mbar.

≈ 400 K

Heat loss



5

5-19

Heat Loss Vacuum Gauges

Since the thermal conductivity of a gas is also a function of the average speed of the molecules and thus a function of the molar mass of the gas, thermal conductivity vacuum gauges measure the pressure dependent on the gas type. Therefore, the display is usually calibrated for nitrogen and air. Other gases like argon or helium will lead to a pressure reading significantly different from the real pressure (Fig. 11). For example, chamber venting with argon can generate a slight overpressure in the chamber which cannot be displayed by a Pirani gauge.

Fig. 11: Pressure display of a Pirani vacuum gauge with various gas types.

Furthermore, it is essential to ensure the installation of the vacuum gauge in the correct mounting position and to follow the manufacturer's instructions. The reason for this is that in pressure ranges is 10 mbar gas convection increases and the movement is influenced by gravitational forces. Figure 12 schematically shows the displayed pressure for different installation positions of the Pirani sensor. Improvements in accuracy in the range of 500-1300 mbar are obtained with convection Pirani sensors in which the housing wall temperature is also measured in a similar way as the Pirani filament. This compensates not only the variations in the heat loss caused by varying conditions; it also improves the accuracy up to 2 % via the regulation of the convection and the defined mounting position.

Fig. 12: The influence of the mounting position on the measuring signal in the convection range

Low-priced versions of heat-loss vacuum gauges are thermocouples. Those heat the wire with a constant power and determine its temperature. An advantage of this setup is the simple design. However, thermocouples are limited in their measuring range and their accuracy.


Heat Loss Vacuum Sensors

Passive Convection-Enhanced Pirani Sensor

Passive gauge with convection enhancement (depending on position), ATM to medium vacuum

Technical dataMeasurement range 1,3E-2...1,33E5 Pa | 1,33E-4...1333 mbar | 1E-4...1000 TorrMeasurement principles heat loss (Pirani) convection enhancedAccuracy (typically) ± 2 % of reading (500...1000 mbar)

± 10 % of reading (1E-3...500 mbar)Temperature range (operation) 0...50 °CBakeout temperature max. 150 °C (without cable)Mounting position horizontal (recommended)Heat loss vacuum sensor gold plated tungsten wireMaterials in vacuum Au on W, stainless steel, glass, Ni, PTFEHousing stainless steel with plastic housingElectrical connectors special plug connectorScope of delivery sensor

Compatible withGauge cable see control units

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection HTravel length [mm]lbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPIRANI-000-S-0-NPT18 1/8” NPT / 1/2” tube 25.4PIRANI-000-S-0-KF16 DN16KF 33PIRANI-000-S-0-KF25 DN25KF 33PIRANI-000-S-0-CF16 DN16CF 27.4PIRANI-000-S-0-CF40 DN40CF 21.6

Improved accuracy compared to standard Pirani sensors due to convection enhancement andimproved temperature compensationShort response timeReplaceable without previous calibration

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCK431-01 mating connector for PIRANI-000-S without cable

txtAbstand


5




Active Convection-Enhanced Pirani Sensor

Active gauge with convection enhancement (depending on position), ATM to medium vacuum, analogoutput, digital display, setpoint

Technical dataMeasurement range 1,3E-2...1,33E5 Pa | 1,33E-4...1333 mbar | 1E-4...1000 TorrMeasurement principles heat loss (Pirani) convection enhancedResolution 0.01 Pa | 1E-4 mbar | 1E-4 TorrAccuracy (typically) ± 2 % of reading (500...1000 mbar)

± 10 % of reading (1E-3...500 mbar)Units bar / mbar (torr version on request)Display LED, 2- to 3-digit, redAnalog outputs a) non-linear 0.375...5.659 V, or

b) log-linear 1...8 V (1 V / pressure decade)Process control relais 1 relais (SPDT), 30 V DC / 1 ATemperature range (operation) 0...40 °CBakeout temperature max. 70 °CMounting position horizontal (recommended)Heat loss vacuum sensor gold plated tungsten wireMaterials in vacuum Au on W, stainless steel, glass, Ni, PTFEHousing stainless steel with plastic housingPower supply 11...30 V DC (< 5 W)Electrical connectors SUB-D 9 pin (DC in, analog out, relais, relais disable)Scope of delivery sensor

Compatible withDisplay and control units VaX Vacuum Explorer, VMGGauge cable CABLE-VAX-PIRANI-SD0-X, CABLE-VMG-PIRANI-SD0-X


Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Analog output Hlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPIRANI-SD0-C-A-KF16 DN16KF log-linear 33PIRANI-SD0-C-A-CF16 DN16CF log-linear 37

Improved accuracy to standard Pirani sensors due to convection enhancement and temperaturecompensationShort response timeSet point und adjustment programmable

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parSUPPLY-PIRANI-SD0 Power supply 100-230 V AC (EU)/ 12 V DC (D-Sub 9)BATTERY-PIRANI-SD battery adapter for 2 x 9 V block (D-Sub 9 pin.)

txtAbstand

txtAbstand


5




Active Convection-Enhanced Pirani Sensor

Active gauge with convection enhancement (depending on position), ATM to medium vacuum, analogoutput, digital display, serial setpoints

Technical dataMeasurement range 1,3E-2...1,33E5 Pa | 1,33E-4...1333 mbar | 1E-4...1000 TorrMeasurement principles heat loss (Pirani) convection enhancedResolution 0.01 Pa | 1E-4 mbar | 1E-4 TorrAccuracy (typically) ± 2 % of reading (500...1000 mbar)

± 10 % of reading (1E-3...500 mbar)Units Pa, mbar, Torr (adjustable)Display graphic LCD (illuminated), 2 to 4 digitsAnalog outputs adjustable:

non-linear 0.375...5.659 V linear 0...10 V (scaleable) log-linear 1...8 V (1 V / pressure decade)

Process control relais 2 relais (SPDT), 30 V DC / 1 AOperating elements 4 front keysInterfaces RS232 and RS485Temperature range (operation) 0...40 °CBakeout temperature max. 150 °C (with dismantled electronics)Mounting position horizontal (recommended)Heat loss vacuum sensor gold plated tungsten wireMaterials in vacuum Au on W, stainless steel, glass, Ni, PTFE (polyimide instead PTFE

on request)Power supply 11...30 V DC (< 5 W)Electrical connectors SUB-D 9-pin (DC in, analog1+2, relay1, relay disable),

SUB-D 15-pin (DC in, analog1, relay1+2, relay disable, RS232,RS485)

Scope of delivery sensor

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection H Hlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPIRANI-SD0-C-3A-KF16 DN16KF 30PIRANI-SD0-C-3A-CF16 DN16CF 34

Detachable electronics, replaceable sensor tubeAnalog output configurable

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parSUPPLY-PIRANI-SD0 Power supply 100-230 V AC (EU)/ 12 V DC (D-Sub 9)BATTERY-PIRANI-SD0 battery adapter for 2 x 9 V block (D-Sub 9 pin.)

txtAbstand

txtAbstand

txtAbstand

5




Pirani Sensor

Active gauge, ATM to medium vacuum, analog output, optional setpoints

Technical dataMeasurement range 0.05...1E+5 Pa | 5E-4…1000 mbar | 3.8E-4…750 TorrMeasurement principles heat loss (Pirani), temperature compensatedResolution 1 % of readingAccuracy ± 15 % of reading (1E-3…100 mbar)

± 50 % of reading (< 1E-3 mbar; > 100 mbar)Reproducibility 2 % of reading (1E-3…100 mbar)Response time 80 msAnalog outputs log-linear, 1.9…10 VProcess control relais 2 relais, 30 V DC / 0,5 A (optional)Temperature range (operation) 5...60 °CBakeout temperature Max. 80 °C at flange (horizontal position)

Max. 250 °C at flange (CF with long tube only)Mounting position anyHeat loss vacuum sensor tungsten (TTR 91, 91 S), nickel (TTR 96 S)Materials in vacuum stainless steel, glass, Ni, NiFe, W or Ni optionalProtection category IP40Power supply 14...30 V DC ( 1 W)Electrical connectors RJ45 (DC in, analog out, optional relais)Scope of delivery sensor

Compatible withConnectable sensors VaX Vacuum Explorer, VMGGauge cable CABLE-VMG-PIRANI-S00-X, CABLE-VAX-PIRANI-S00-X


Order code lbl11parlbl12parlbl13parlbl14parVacuum connection H Hlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPIRANI-000-C-A-KF16 DN16KF 15PIRANI-000-C-A-CF16R DN16CF-R 14PIRANI-000-C-A-CF16RL DN16CF-R long 115PIRANI-000-C-A-NPT18 1/8" NPT 29PIRANI-S00-C-A-KF16 DN16KF 15PIRANI-S00-C-A-CF16R DN16CF-R 14PIRANI-S00-C-A-CF16RL DN16CF-R long 115PIRANI-S00-C-A-NPT18 1/8" NPT 29

Robust against overpressure up to approx. 5 barReplaceable sensor unitShared push-button for adjustment of ATM and HV


5




Pirani Sensor

Active gauge, ATM to medium vacuum, analog output, optional: digital display, setpoints, profibus

Technical dataMeasurement range 0.05...1,5E+5 Pa | 5E-4…1500 mbar | 3.8E-4…1125 TorrMeasurement principles heat loss (Pirani); diaphragm (Al2O3, capacitive, absolute pressure)

(both temperature-compensated)Accuracy ± 50 % of reading (5E-4...1E-3 mbar)

± 15 % of reading (1E-3...100 mbar)± 5 % of reading (100…950 mbar)± 2.5 % of reading (950…1050 mbar)

Reproducibility ± 2 % of reading (1E-3…1100 mbar)Units optional mbar, Pa, torr, micron (adjustable)Display optional LCD (graphic)Response time < 30 msAnalog outputs log-linear, 0...10,23 V, 1.286 V / pressure decadeProcess control relais optional: 2 relais, 30 V DC / < 0.3 ATemperature range (operation) 10...50 °CBakeout temperature max. 80 °C at flange (horizontal position)Mounting position anyHeat loss vacuum sensor tungsten, constantly activeMaterials in vacuum stainless steel, W, Al2O3, glass, Ni, NiFe, SnAgVacuum connection DN16KF (others on request)Protection category IP40Power supply 15...30 V DC (< 3 W)Electrical connectors RJ45 (DC in, analog out, optional relais), optional SUB-D 9 pin

(Profibus)Scope of delivery sensor

Compatible withDisplay and control units VaX Vacuum Explorer, VMGGauge cable CABLE-VMG-PIRANI-S00-X, CABLE-VAX-PIRANI-S00-X


Order code lbl11parlbl12parlbl13parlbl14parOptions HHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPIRANI-00M-C-A-KF16PIRANI-0DM-C-A-KF16 displayPIRANI-S0M-C-A-KF16 2 set pointsPIRANI-SDM-C-A-KF16 2 set points, display

Improved accuracy at rough vacuum compared to standard Pirani gaugesGas type independent measurement from 10 … 1500 mbarMixed output signal of Pirani and diaphragm sensor from 1 … 10 mbarReplaceable sensor unit


5




Thermocouple Sensors

Passive sensors, rough and medium vacuum

Technical dataMeasurement range THERM-20: 0.01...20 Torr

THERM-1: 1...1000 mTorrMeasurement principles heat loss (thermocouple)Most sensitive area THERM-20: 0.2...5 Torr

THERM-1: 10...200 mTorrAccuracy see control unitsTemperature range (operation) 5…50 °CMounting position anyMaterials in vacuum steel nickel-plated, stainless steel, glass, nobel metalElectrical connectors special plug connectorScope of delivery sensor

Compatible withDisplay and control unitsGauge cable CABLE-THERM-THERMOC

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection HHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parTHERM-20-S-0-NPT18 1/8" NPTTHERM-1-S-0-NPT18 1/8" NPTTHERM-1-S-0-KF16 DN16KFTHERM-1-S-0-KF25 DN25KF

Corrosion resistantTemperature compensatedSensors are matched and without adjustment replaceable

txtAbstand

txtAbstand


5




5

5-26

Capacitance Diaphragm Gauges

Capacitively determine the deflection of an elastic membrane

Diaphragm vacuum gauges are particularly suitable for gas type independent pressure measurements from atmosphere up to high vacuum. They measure the elastic deformation (Δs) of a membrane, which is a result of different forces acting on different sides of the membrane (Fig. 13).

Fig. 13: Principle of a capacitance diaphragm vacuum gauge. The recipient has the pressure p1.

The capacitance diaphragm vacuum gauge measures the relative pressure. A reference volume in the gauge is evacuated to a defined value p2, p2 being much smaller than the smallest pressure that has to be measured in the recipient p1. Thus, a total pressure measurement takes place with a negligible error, given by the residual pressure p2.

In the capacitance diaphragm vacuum gauge the pressure sensible membrane acts as one of the electrodes of a capacitor. The deformation (Δs) as a function of the pressure difference causes a change in its capacity, which can be directly and accurately mea-sured. The membranes are manufactured either out of stainless steel with a small thermal expansion coefficient or out of metal coated ceramics. In practice, ceramic based membranes have proven to be less sensitive to thermal temperature fluctuations and zero point stable due to improved relaxivity. Furthermore, they offer improved corrosion resistance and can be used under harsh conditions. The membrane should be insensitive to length changes triggered by temperature variations, since this could affect the measurement. The thickness of the membrane is a crucial factor determining the smallest measurable pressure. Typically, a membrane with a given thickness can cover a pressure range of approximately 4 decades.

The accuracy can be improved by temperature-stabilized sensors that are regulated at 45° C constantly. Thus, the influence of the tem-perature on the measurement results is minimized. The advantage of the capacitance diaphragm vacuum gauge is the independence on the gas type, a high accuracy (typically 0.2 % of the measured value) as well as the resistance against corrosive gases.


Diaphragm sensor

ANYGAS

Medium and rough sensor

Technical dataMeasurement principle piezoresistive diaphragmMeasurement range 100...1e5 Pa | 1...1000 mbar | 7.5e-1...750 TorrAccuracy ± 1,5 % FSSGas dependent pressure display noVacuum connection DN16KF, G 1 / 8, 1 / 4 NPTBakeout temperature 120 °COperating temperature temperature compensated: -20 to +85 °CMaterial in vacuum stainless steelWeight 100 gMounting position anyElectrical connector SAL M12x1, 5 pinDimensions max. 34x96 (DxH) (flange dependent)Scope of delivery sensor

Compatible withDisplay and control unit VaX Vacuum Explorer, VMGGauge cable CABLE-VMG-ANYGAS-X, CABLE-VAX-ANYGAS-X


Order code lbl11parlbl12parlbl13parlbl14parDescription HHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parANYGAS-BASIC-C-0-KF16 with KF connectionANYGAS-BASIC-C-0-NPT14 with 1/4 NPT connectionANYGAS-BASIC-C-0-G18 with G 1/8 connection

Stainless steel diaphragmTemperature compensatedShort response time

txtAbstand


5



Diaphragm sensor

Capacitive Membrane Sensor, temperature compensated

Universal sensor with aluminum oxide diaphragm for gas-type independent measurement

Technical dataMeasurement range MEMBRAN-10TORR: 0.67...1333 Pa | 6.7E-3...13 mbar | 5E-3...10

TorrMEMBRAN-100TORR: 6.7...1.3E+4 Pa | 6.7E-2...133 mbar | 5E-2...100 TorrMEMBRAN-1000TORR: 67...1.3E+5 Pa | 0.67...1333 mbar |0.5...1000 Torr

Accuracy 1% of readingVacuum connection DN16KFAnalog voltage 0-10 V linearElectrical connector FCC, 8 pinOperating temperature 10-50°C

Compatible withDisplay and control units VaX Vacuum Explorer, VMGGauge cable CABLE-VMG-MEMBRAN-X, CABLE-VAX-MEMBRAN-X

Order code lbl11parlbl12parlbl13parlbl14parDescriptionHHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parMEMBRAN-1000TORR25-C-A-KF16MEMBRAN-100TORR25-C-A-KF16MEMBRAN-10TORR25-C-A-KF16

Corrosion resistant, applicable for corrosive processesCompact capacitance sensorImproved lomg-term stability and reduceddiaphragm reset time

txtAbstand


5



Diaphragm sensor

Capacitive Membrane Sensor, temperature compensated

Active gauge, ATM to medium vacuum, ceramic diaphragm, analog output, serial interface

Technical dataMeasurement range 5 versions:

13.3 Pa | 0.133 mbar | 0.1 Torr (1E-5…0.1 Torr); 133 Pa | 1.33 mbar | 1 Torr (1E-4…1 Torr); 1330 Pa | 13.3 mbar | 10 Torr (1E-3…10 Torr); 1.33E+4 Pa | 133 mbar | 100 Torr (0.01…100 Torr); 1.33E+5 Pa | 1330 mbar | 1000 Torr (0.1…1000 Torr)

Measurement principles diaphragm (Al2O3, capacitive, absolute pressure, temperaturecompensated)

Temperature control (optional) 45°C, 100°C, 160°C, 200°CResolution 0.003 % F.S. (Full Scale)Accuracy 0.2 % of reading;

0,5 % (for 0,1 Torr version)Response time 30 msAnalog outputs linear, 0...10 V DCInterfaces RS232-CTemperature range (operation) 5...50 °CBakeout temperature max. 110 °C at flangeMaterials in vacuum Al2O3, stainless steel 316L, glass ceramics solder,

AgTiCu hard solder, Vacon 70Protection category IP30Power supply 14…30 V DC (< 1 W)Electrical connectors SUB-D 15 pin (DC in, analog out, RS232)Scope of delivery sensor

Compatible withDisplay and control units VMG, VaX Vacuum ExplorerGauge cable CABLE-VMG-MEMBRAN-X, CABLE-VAX-MEMBRAN-X

(X: cable lenghte in m)

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Measurement rangeHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parMEMBRAN-1TORR25-C-3A-12 1/2" tube 1 TorrMEMBRAN-10TORR25-C-3A-12 1/2" tube 10 TorrMEMBRAN-100TORR25-C-3A-12 1/2" tube 100 TorrMEMBRAN-1000TORR25-C-3A-12 1/2" tube 1000 TorrMEMBRAN-1TORR25-C-3A-CF16R DN16CF-R 1 TorrMEMBRAN-10TORR25-C-3A-CF16R DN16CF-R 10 TorrMEMBRAN-100TORR25-C-3A-CF16R DN16CF-R 100 TorrMEMBRAN-1000TORR25-C-3A-CF16R DN16CF-R 1000 TorrMEMBRAN-1TORR25-C-3A-KF16 DN16KF 1 TorrMEMBRAN-10TORR25-C-3A-KF16 DN16KF 10 TorrMEMBRAN-100TORR25-C-3A-KF16 DN16KF 100 TorrMEMBRAN-1000TORR25-C-3A-KF16 DN16KF 1000 TorrMEMBRAN-1TORR25-C-3A-VCR8 VCR8 1 TorrMEMBRAN-10TORR25-C-3A-VCR8 VCR8 10 TorrMEMBRAN-100TORR25-C-3A-VCR8 VCR8 100 TorrMEMBRAN-1000TORR25-C-3A-VCR8 VCR8 1000 Torr

For temperature controlled versions replace 25 to 45, 100, 160 or 200. Fortemperature controlled versions slightly different specifications are possible

Multi-purpose sensor with aluminum oxide diaphragm for gas type independent measurementCorrosion resistant, suitabel for corrosive processesImproved long-term stability and reduced diaphragm reset time

Picture similaretxtAbstand

txtAbstand


5



Diaphragm sensor

Capacitance Diaphragm Sensors

Battery-operated sensor, ATM to rough vacuum, ceramic diaphragm, ATEX version on request

Technical dataMeasurement range 1...1080 hPa | 1...1080 mbar | 1...810 TorrMeasurement principles diaphragm (Al2O3, capacitive, absolute pressure)Accuracy < ± 1 hPa ±1 digit | < ± 1 mbar ±1 digit | < ± 0.75 Torr ±1 digitTemperature coefficient < ± 0.07 hPa / K | < ± 0.07 mbar / K | < ± 0.05 Torr / KMeasurement rate automatically, 3 s, 1 s, 1/3 sUnits mbar, hPa, Torr (switchable)Display LCD, digital and analogTemperature range (operation) 10...60 °CMedium termperature max. 80 °C at pressure transducerMaterials in vacuum aluminum oxide, stainless steel, chemically resistant fluorelastomer,

PBT / PPSHousing plasticsPower supply internal lithium battery, 9 V, 1.2 AhVacuum connection flange DN16KF with screwable, staged hose clip DN6/DN10Scope of delivery sensor, battery

Order code lbl11parlbl12parlbl13parlbl14parDescriptionMeasurement rangeHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parMEMBRAN-810TORR25-C-0-KF16 StandardMEMBRAN-810TORR25-C-0-KF16-ATEX ATEX version

Gas type independent measurementCorrosion resistant ceramic diaphragmSplash proof

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVB-612220 replacement battery 9 V lithium 1.2 Ah

txtAbstand

txtAbstand

txtAbstand

5



5


Relative Pressure Gauges

Determination of the deformation of an elastic tube

Pressure is the force, acting on unit area. In many cases, applying a force leads to a deformation of the object under study. The resulting deformation can be measured and is proportional to the applied force (Hooke's law). Hence, the deformation can be used to determine the pressure. This deformation is especially significant in the upper pressure range (up to atmosphere conditions).

In the simplest case (e.g. Bourdon gauge), the deformation of a metal ring is directly displayed on a stamped scale. This type of gauge measures the relative pressure (relative to the atmospheric pressure). Thus, the upper limit of the scale corresponds to 1000 mbar. Taking this value as the absolute pressure would yield in a high systematic error due to oscillation of the atmospheric pressure.

Fig. 14: Bourdon gauge. The mechanical deformation of a metal ring is directly transferred to a scale via a lever system

Piezo-resistive determination of the deflection of an elastic membrane

Piezo-resistive diaphragm vacuum gauges can achieve higher accuracy than Bourdon gauges. They work similar to the ca-pacitive diaphragm vacuum gauges: the pressure is derived from the mechanical deformation of a membrane measured with a piezo-resistive element. The specific resistivity of the piezo element depends on the deflection of the membrane and thus it provides information about the pressure difference on both sides of the membrane. The accuracy of the pressure determination is typically around 0.5 % FS, i.e. the useable measurement range is about 3 decades.

Regular piezo-resistive diaphragm vacuum gauges have a full scale deflection between 1300 and 1500 mbar (slightly above atmospheric pressure). The long-term and temperature stability as well as the resolution are slightly lower than the ones of capacitive diaphragm vacuum gauges. However, piezo-resistive diaphragm vacuum gauges are considerably cheaper.

Lever system

Pointer

Bourdon gauge

Measurement Principle Bourdon Gauge

Piezo-Resistive Diaphragm Vacuum Gauges

Relative Pressure Sensors


Standard and stainless steel version (corrosion resistant), ATM to rough vacuum

Technical dataMeasurement range < 10...1020 mbar on the absolute pressure scaleMeasurement principles Bourdon-tube sensor, relative pressureUnits mbarTemperature range (operation) -40…+60 °CMedium termperature RFM: max. 60 °C

RFMC: max. 200 °CMaterials in vacuum RFM: RFM-CU

RFMC: RFM-316Housing RFM: plastics (black), dimension 80 or 63 mm

RFMC: stainless steel, dimension 63 mmProtection category RFMC: IP 65Scope of delivery sensor

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection Hlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parRFM-CU-S-0-G14 RFM, standard G 1/4" BRFM-CU-S-0-KF16 RFM, standard DN16KFRFM-316-S-0-G14 RFM, stainless steel G 1/4" BRFM-316-S-0-KF16 RFM, stainless steel DN16KF

Visual control of prevacuum pipes and evacuation processesRelative pressure sensor with absolute pressure scale (1000 mbar = ATM)Two versions: RFM (standard) and RFMC (corrosion resistant)

StandardtxtAbstand

txtAbstand

RFM-I Bourdon Sensor with Analog Output

Stainless steel version (corrosion resistant), ATM to rough vacuum, linear analog output

Technical dataMeasurement range < 10...1020 mbar on the absolute pressure scaleMeasurement principles Bourdon-tube sensor, relative pressure with precision swiveling

angle sensor at needle shaft (contact-free)Units mbarAnalog outputs linear, 4…20 mA, two-wireTemperature range (operation) -40…+60 °CMedium termperature max. 100 °CMaterials in vacuum stainless steel 316LHousing stainless steel, nominal size 63 mmProtection category IP 54Power supply 12…30 V DC, max. 1 WElectrical connectors cable, 2 m, free ends (DC in, analog output)Scope of delivery sensor

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parRFM-316-S-A-G14 RFM-I, stainless steel, analog output G 1/4 " BRFM-316-S-A-KF16 RFM-I, stainless steel, analog output DN16KF

Visual monitoring of prevacuum lines and evacuation processesA non-contact electronic rotary position sensor converts the position of the needle into a 4…20 mAanalog output signalRelative pressure sensor with absolute pressure scale (1000 mbar = ATM)

txtAbstand

txtAbstand

5




SWITCH Digital Precision Pressure Switch Module

Piezoresisitive pressure determination (relative)

Technical dataMeasurement range -100…+100 kPa | -1…+1 bar (referred to air pressure)Measurement principles diaphragm (stainless steel, piezoresistive, relative pressure)Resolution 0.1 kPa | 1 mbarAccuracy display: ± 2 % of ultimate value max. ± 1 position

analog output: ± 2.5 % of ultimate valueReproducibility set points: ± 0,2 % of end value max. ± 1 positionResponse time max. 2.5 ms (with deactivated anti chatter function)Units kPa, bar, psi, mmHg, inHg, kgf/cm² (adjustable)

version …-M: kPa (not adjustable)Display LED, 3½-digit, red; one status-LED per switch outputAnalog output linear: 4…20 mA or 1…5 VProcess control relais NPN or PNP open collector (N.C.), 2 outputs;

NPN: max. 28 V DC / 80 mA; PNP: max. 80 mA, max. 1 VOperating elements 3 front keys (UP / SET / DOWN)Temperature range (operation) 0…50 °CBakeout temperature max. 180 °CLeak rate 1E-10 Pa·m3/s | 1E-9 mbar·l/s | 7.5E-10 Torr·l/sMaterials in vacuum stainless steel 304 and ASTM630Housing plasticsProtection category IP65Power supply 12…24 V DC, max. 45 mA (without load)Electrical connectors 5 pins, oil-resistant cable (DC in, analog I/O, transistors)Scope of delivery pressure switch incl. connecting cable 2 m

Order code lblblblb

Vacuum connection Analogoutput

Seit point lblblblblblblb

SWITCH-NPN5V-C-A-VCR14 1/4" VCR 1 … 5 V 2 x NPN N.C.SWITCH-NPN20MA-C-A-VCR14 1/4" VCR 4 … 20 mA 2 x NPN N.C.SWITCH-PNP5V-C-A-VCR14 1/4" VCR 1 … 5 V 2 x PNP N.C.SWITCH-PNP20MA-C-A-VCR14 1/4" VCR 4 … 20 mA 2 x PNP N.C.SWITCH-NPN5V-C-A-SL14 1/4" Swagelok 1 … 5 V 2 x NPN N.C.SWITCH-NPN20MA-C-A-SL14 1/4" Swagelok 4 … 20 mA 2 x NPN N.C.SWITCH-PNP5V-C-A-SL14 1/4" Swagelok 1 … 5 V 2 x PNP N.C.SWITCH-PNP20MA-C-A-SL14 1/4" Swagelok 4 … 20 mA 2 x PNP N.C.

Stainless steel diaphragm for gas type independent measurementTransistor outputs with the adjustable setpoints, switchable output-modes (inverted or not-inverted),and further options "hysteresis mode" or "window comparator mode"Auto reference is used to adjust the transistor setpoints in the case of strong fluctuations of thepressure source

txtAbstand

txtAbstand

txtAbstand

5



Display and control units

VaX linkB

Electronics for passive BARION® sensors

Technical dataMeasurement range 5e-8...1e5 Pa | 5e-10...1000 mbar | 3.75e-10...750 TorrUnit mbar, Pa, Torr (switchable)Measurement rate max. 2 / sInterfaces data I/O: D-Sub, 9 pin with RS232, analog (0…10 V, 0…20 mA,

4…20 mA)sensor control: special connector for Barion® sensors, 11 pin

Operating temperature 10…50 °CHousing / dimensions 73x84x66 mm (WxHxD)Weight 300 gType of protection IP40Power supply 24 V +/-10%, 24 WSet points 1x relais (floating, max. 30 V/0.5 A

1x open collector (OC) (max. 30 V/ 0.5 A)Upgrade via firmware yesAccompanying software VACOM Vacuum measurement & Demonstration program (VVD)Scope of delivery device, power supply

Compatible withDisplay and control unit VaX, VMGSensors passive sensors: BARION® basic II, BARION® pro II, BARION®

smart, BARION® smartFCable CABLE-VAX-LAH-X, CABLE-VMG-LAH-X (X: cable lenght in m)

Order code lbl11parlbl12parlbl13parlbl14parDescription Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVAX-LINKB-E-3A Electronic for BARION® series

From passive (conventional) to active (transducer) gauge – with VaX linkBCompatible to all new passive BARION<sup>®</sup> sensorsCompact and robust design

txtAbstandtxtAbstandCompatible displays and controllers5




Vacuum Explorer VaX

Multichannel controller with innovative operating concept

Technical dataDisplay and operation smartphone or tabletdisplay range 3e-10…1.5e5 Pa / 3e-12…1500 mbar / 2.3e-12…1125 TorrUnits Pa, mbar, Torr (adjustable)Number of module positions 3Compatible modules max. 3x hot cathode module up for one passive BARION® sensor

max. 3x active sensor module up for 3 active sensorsfreely combined

Number of channels max. 9 (3x active sensor module)Measurement rate/ display rate max. 2 / s (adjustable)Interfaces back: 1 x RJ45 (RS485 and RS232), 1 x power supply,

front: 1 x USB-data transfer (USB-B),1 x USB charging (USB-A),hot cathode module (back): 1x D-Sub mixed for passive BARION®-gauges (11 pins)active sensor module (back): 3 x RJ45 for active sensors

Operating temperature 10…50°CHousing / dimensions 19" rack: 3 HE, 21 TE, 106x128x202 mm (WxHxD)Weight ca. 2 kg (dependent on the modules)Type of protection IP40Power supply 24 V +/-10%, 100 WUpgrade via firmware yesAccompanying software VACOM® App, VACOM Vacuum measurement & Demonstration

program (VVD)Scope of delivery device, power supply incl. power cable (type F, others on request)

Compatible withSensors passive sensors: BARION® basic II, BARION® pro II, BARION®

smart, BARION® smartFactive sensors: VaX linkB (electronics for sensors of the BARION®series), BARION® atm II, BARION® HV, Cold-P, Anygas, PIRANI-XXX-C-X, MEMBRAN-1XXX25-X (X - all available versions)

Gauge cable passive sensors:CABLE-VAX-BARIONBPS-Xactive sensors: CABLE-VAX-LAH-X, CABLE-VAX-ANYGAS-X,CABLE-VAX-PIRANI-SD0-X, CABLE-VAX-PIRANI-S00-X, CABLE-VAX-MEMBRAN-X (X: cable length in m)

Order code lbl11parlbl12parlbl13parlbl14parDescription Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVAX-E-XXX-XBU35 control unit for BARION® series

Operates 9 vacuum sensors simultaneouslyMobile pressure display – wirelessInnovative operation via VACOM-AppModular design that fits your applicationOne controller for all VACOM sensors


5




VMG

Display and control unit for analoge and digitale sensor

Technical dataNumber of measurementchannels

2 (1x analog, 1x digital)

display range 1E-10…1E+3 mbarDisplay graphic LCD: current pressure / 60min history / 24h historyUnits mbar, Pa, Torr (switchable)Interfaces RS232Process control relais 2 reed switch contact (30 V DC / 1 A)needed power supply 24 V DC ±10 % (max. 24 W)Operating elements 4 front keysTemperature range 0...40 °CScope of delivery device, power supply (EU)

Compatible withWide range sensor VACOM, digital: BARION® atm, BARION® atm II, BARION® HV,

VaX linkBVACOM, analog: ANYGASother: digital: MEMBRAN-xxTORRanalog: MEMBRAN-xxTORR, PIRANI-000-C, PIRANI-SD0-C-A

Cable CABLE-VMG-XXX-X (X: cable lenght in m)

Order code lbl11parlbl12parlbl13parlbl14parDescription Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVMG Display and control unit

txtAbstand

COLDION® CU-100

Display and control unit with an attached cable for one cold cathode ionization gauge

Technical datadisplay range 1E-10...0.01 Pa | 1E-12...1E-4 mbar | 7.5E-13...1E-4 TorrDisplay graphic LCD; current value / pressure gradient

1 hour / 24 hoursUnits mbar, Pa, Torr (switchable)Voltage in operation Max. 5 kVPower consumption < 15 WProtection category IP40Set points 3 (configured independently) 30 V DC / 1 AOperating elements 4 capacitive front keysTemperature range 0...40 °CAnalog output 0..10 V oder 0…20 mA / 4..20 mAInterfaces RS232, Profibus (optional), other fieldbus on requestPower supply 24 V DC ±10 % (max. 24 W)Scope of delivery device, gauge cable, power supply (EU)

Compatible withMeasurement devices COLDION® basic

COLDION® proCOLDION® extended

Order code lbl11parlbl12parlbl13parlbl14parCable length [m]Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCOLDION-CU-100-3M 3COLDION-CU-100-5M 5COLDION-CU-100-10M 10

Other cable length on request.

txtAbstand

5




Control unit for PIRANI-000-S heat conduction sensor

Display and control unit for a passive convection Pirani sensor PIRANI-000-S

Technical dataConnectable sensors PIRANI-000-SNumber of channels 1Measurement range 0.01...1,33E+5 Pa | 1E-4...1333 mbar | 1E-4...1000 TorrResolution 0.01 Pa | 1E-4 mbar | 1E-4 TorrUnits mbar, Pa, Torr (adjustable)Display graphic LCD (illuminated), 2 to 4 digitsDisplay units 0.5 sAnalog outputs adjustable:

non-linear 0.375...5.659 V linear 0...10 V (scaleable) log-linear 1...8 V (1 V / pressure decade)

Process control relais 2 relais (SPDT), 1 A max. at 30 VInterfaces RS232 and RS485Temperature range (operation) 0...40 °CHousing aluminum, 1/8 DIN, for panel installationPower supply 100...240 VAC (50/60 Hz) oder 12...30 V DC (ca. 4.5 W)Electrical connectors IEC plug (AC), 2-pin clamp (DC in),

SUB-D 9-pin (sensor), SUB-D 9-pin (analog/serial I/O),6-pin clamp (relais)

Scope of delivery controller, power cable 1.5 m (EU)(please order sensor and measuring cable separately)

Order code lbl11parlbl12parlbl13parlbl14parDescription Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPIRANI-C for PIRANI-000-S

Measurement range 7 pressure decadesAll functions and sensor adjustment programmable via 4 front keys (menu-driven)Analog output configurable

Cable for the connection of passive pirani sensors to PIRANI-C

Order code lbl11parlbl12parlbl13parlbl14parLength [m]lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-PIRANI-C-PIRANI-3M 3CABLE-PIRANI-C-PIRANI-7M 7.5CABLE-PIRANI-C-PIRANI-15M 15SUPPLY-PIRANI-C

txtAbstand

txtAbstand

txtAbstand

5




Control Unit for Thermocouples

Device containing measurement and control for a passive thermocouple sensor THERM-1, THERM-20

Technical dataConnectable sensors Serie THERM-20 (20 Torr) oder Serie THERM-1 (1000 mTorr)Number of channels 1Measurement range THERM-C-20: 0.01...20 Torr

THERM-C-1: 1...1000 mTorrAccuracy THERM-C-20: ±(30 % of reading + 0.02 Torr)

THERM-C-20: ±(15 % of reading + 1 mTorr)Temperature coefficient THERM-C-20: ±(1 % of reading + 2 mTorr) / °C

THERM-C-20: ±(1 % of reading + 0.2 mTorr) / °CUnits THERM-C-20: Torr

THERM-C-1: mTorrDisplay LED, 3-digit, greenTemperature range (operation) 5...50 °CHousing plastics, 1/8 DIN, for panel installationPower supply 4,5...5,3 V DC, 155 mAElectrical connectors clamped connection (DC in, sensor)Scope of delivery control unit, power supply 90...240 V AC (US) / 5 V DC,

with 2 m cable, 2.5 m measuring cable (other lengths on request),please order sensors separately

Order code lbl11parlbl12parlbl13parlbl14parDescription Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par55-288DV4 DIGITAL VT-4 (20 Torr)55-288DV6 DIGITAL VT-6 (1000 mTorr)

X= vacuum connection

Adjustment of zero points and ATM via 2 rotary potentiometers at the front of the deviceCalibrier reference (NIST traceable) availableTwo versions with different measurment ranges (VT-4 und VT-6)

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par12-01-165 UK plug adapter for power supply12-01-164 EU plug adapter for power supply

txtAbstand

txtAbstand

txtAbstand

5



Contamination control

Lamella baffle

Lamella baffle

Technical dataMax. bakeout temperature stainless steel: 250 °C

FKM: 150 °C (temporary 200 °C)Mounting position sensor preferably vertical and above baffleMaterials in vacuum stainless steel (1.4301, 1.4310), FKM (KF versions only)

Order code lbl11parlbl12parlbl13parlbl14parFlange Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBAFFLE-KF25 DN25KFBAFFLE-CF40 DNCF40

Please enclose "-CRP" on the order code for clean room compatible packaging.Other flange dimensions (KF or CF) on request.

Increases the life time of hot cathode measuring cells in critical applications by many timesProtects the total pressure sensors against harmful effects from the vacuum systemEffective barrier against particles, vapor, charge carriers and electromagnetic fieldsUsed in the flange connection between sensor and chamberEasy cleaning (demountable), thereby long-time usability

txtAbstand

txtAbstand

5



Cable

Sensor cable

Cable for the connection of one BARION basic II/pro II/smart(F) to VaX

Order code lbl11parlbl12parlbl13parlbl14parApplicationAnalog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-VAX-BARIONBPS-X

Standard length are 3 m, 5 m, 10 m, 15 m

Sensor plug: 11-pins, gold plated spring contacts, stainless steel body, PTFE insulatorController plug: D-Sub with mixed pins, 11-pinsCable insulation: FEPBakeout temperature: max. 200 °CBending radius static: min. 110 mm (at 25°C)Bending radius dynamic: min. 150 mm (at 25 °C)

Cable for the connection of one BARION® atm/ atm II/ HV & VaX linkB to a display unit

Order code lbl11parlbl12parlbl13parlbl14parApplication Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-VAX-LAH-X VaX Vacuum ExplorerCABLE-VMG-LAH-X VMG


Cable for the connection of one ANYGAS to a display unit

Order code lbl11parlbl12parlbl13parlbl14parApplication Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-VAX-ANYGAS-X VaX Vacuum ExplorerCABLE-VMG-ANYGAS-X VMG via CABLE-VMG-ADAPTER


Cable for the connection of active membrane sensors without display to a display unit

Order code lbl11parlbl12parlbl13parlbl14parApplication Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-VAX-MEMBRAN-X VaX Vacuum ExplorerCABLE-VMG-MEMBRAN-X VMG via CABLE-VMG-ADAPTER


Cable for the connection of active Pirani sensors with display via adapter (CABLE-VMG-ADAPTER) to adisplay unit

Order code lbl11parlbl12parlbl13parlbl14parApplication Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-VAX-PIRANI-SD0-X VaX Vacuum ExplorerCABLE-VMG-PIRANI-SD0-X VMG via CABLE-VMG-ADAPTER


Cable for the connection of active Pirani sensors without display to a display unit

Order code lbl11parlbl12parlbl13parlbl14parApplication Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-VAX-PIRANI-S00-X VaX Vacuum ExplorerCABLE-VMG-PIRANI-S00-X VMG via CABLE-VMG-ADAPTER


5



Cable

Sensor cable

Cable for the connection of one COLD sensor to a display unit

Order code lbl11parlbl12parlbl13parlbl14parApplication Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-VAX-COLD-X VaX Vacuum ExplorerCABLE-VMG-COLD-X VMG via CABLE-VMG-ADAPTER


Cable for the connection of passice Pirani sensors to PIRANI-C

Order code lbl11parlbl12parlbl13parlbl14parApplicationAnalog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-PIRANIC-PIRANI-000-X

Standard length are 3 m, 7.5 m, 15 m

Cable for the connection of one BARION® extended to MVC3-B0 or MVC3-BM

Order code lbl11parlbl12parlbl13parlbl14parApplicationAnalog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBATLX-O


Gauge plug: gold plated spring contacts, PTFE insulator, aluminum body (dia. 40 mm)Controller plug: D-Sub with mixed pins (male)Cable insulation: PTFEBakeout temperature: 250 °C max.

Cable for the connection of VaX to PC

Order code lbl11parlbl12parlbl13parlbl14parApplication Analog outputSeit pointlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCABLE-VAX-PC-RS232-X RJ45 on D-Sub 9 pin, RS232CABLE-VAX-PC-RS485-X RJ45 on USB-A, RS485CABLE-VAX-PC-USB-1.8M USB-B on USB-A


5



Total Pressure Measurement - Plasmadiam · Hot Cathode Ionization Vacuum Gauges The pressure range...

Documents

Transcript of Total Pressure Measurement - Plasmadiam · Hot Cathode Ionization Vacuum Gauges The pressure range...