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Thin-Film Structuresfor Photovoltaics

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Cambridge University Press978-1-107-41343-6 - Materials Research Society Symposium Proceedings: Volume 485:Thin-Film Structures for PhotovoltaicsEditors: Eric D. Jones, Juris Kalejs, Rommel Noufi and Bhushan SoporiFrontmatterMore information

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MATERIALS RESEARCH SOCIETYSYMPOSIUM PROCEEDINGS VOLUME 4 8 5

Thin-Film Structuresfor Photovoltaics

Symposium held December 2-5,1997, Boston, Massachusetts, U.S.A.

EDITORS:

Eric D. JonesSondia National Laboratories

Albuquerque, New Mexico, U.S.A.

Juris KalejsASE Americas inc.

BMerica, Massachusetts, U.S.A.

Rommel NoufiNational Renewable Energy Laboratory

Golden, Colorado, U.S.A.

Bhushan SoporiNational Renewable Energy Laboratory

Golden, Colorado, U.S.A.

IMIRIS1Materials Research Society

Warrendale, Pennsylvania






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CONTENTS

Preface xi

Materials Research Society Symposium Proceedings xii

PARTI: SILICON-BASED THIN FILMS

'Development of High-Efficiency Thin-Film PolycrystallineSilicon Solar Cells Using VEST Process 3

T. Ishihara, S. Arimoto, H. Morikawa, Y. Nishimoto, Y. Kawama,A. Takami, S. Hamamoto, Ii. Tiaomoto, and K. Tiamba

Ion-Beam Deposition of Epitaxial Silicon Films 13ti.R. Khan and M. Frey

Surface Morphology of LPE SiGe Layers Grown on (100)SiSubstrates 19

A.M. Sembian, I. Silier, K. Davies, A. Qutjahr, K. Lyutovich,M. Konuma, and F. Banhart

Optical Characterization of Ultrathin Silicon Substrates 25T. Qlobus, S.H. Jones, and T. Digges, Jr.

Plasma Deposition and Interface Control in Low-Temperature Processing of Thin-Film Solar Cells 31

B. Jagannathan and W.A. Anderson

Deposition of Thick Silicon Layers on Glass Substrate forPhotovoltaic Application 37

M. Sarret, T. Mohammed-Brahim, Q. Baudry, D. Briand,and O. Bonnaud

SiGe Thin-Film Structures for Solar Cells 43O. Bremond, A. Daami, A. Laugier, W. Selfert, M. Kittler,J. Poortmans, M. Caymax, K. Said, M. Konuma, A. Qutjahr,and I. Silier

*Nanocrystalline Silicon/Amorphous Silicon DioxideSuperlattices 49

Philippe M. Fauchet, Leonid Tsybeskov, Margit Zacharias,and Karl Hirschman

Si Surface Preparation With Si Beam Irradiation on theGrowth of Ill-V on Si 61

H. Kawanami, K. Baskar, I. Sakata, and T. Sekigawa

*lnvited Paper






Polycrystalline Si Films Fabricated by Low-TemperatureSelective Nucleation and Solid-Phase Epitaxy Process 67

Claudine M. Chen and Harry A. Atwater

Low-Temperature Sputter Deposition of Polycrystal SiliconThin Films 73

Wen-Chang Yeh and Masakiyo Matsumura

Investigations of Oxidation Dependence on Type ofPorous Silicon Near Room Temperature by IsothermalMicrocalorimeter 79

J. Salonen, V-F. Lehto, and E. Laine

Low-Temperature Growth of Crystalline Silicon Thin Filmsby ECR Plasma CVD 83

Licai Wang and H.S. Reehal

Tailored Si Layers on Silicon Oxide Obtained byThermal CVD 89

G. Beaucarne, J. Poortmans, M. Caymax, J. Nijs, and R. Mertens

Grain Enhancement of Polycrystalline Silicon Films Aidedby Optical Excitation 95

B.L. Sopori, W. Chen, J. AUeman, R. Matson, fi.M. Ravindra,and T. Y. Tan

A Thin-Film Silicon Solar Cell: Design and ProcessingApproach 101

Bhushan L. Sopori, Wei Chen, Jamal Madjdpour, and Marta Symko

Atomic-Scale Analysis of the Reactivity of Radicals FromSilane/Hydrogen Plasmas With Silicon Surfaces 107

Shyam Ramalingam, Dimithos Maroudas, and Eray S. Aydil

Photovoltaic Properties of Fullerene (C6o) Thin Films 113E.A. Katz, D. Faiman, S. Goren, S. Shtutina, A. Shames, B. Mishori,and Yoram Shapira

PART II: II-VI-BASED THIN FILMS

A Study of the CdS/Culn(Ga)Se2 Interface in Thin-FilmSolar Cells 121

Kannan Ramanathan, Holm Wiesner, Sally Asher, David Mies,John Webb, James Keane, and Rommel NouFi

Phase and Interface Stability Issues in Chalcopyrite-BasedThin-Film Solar Cells 127

Jean-Francois Quillemoles, Thomas Haalboom, Tilo Godecke,Frank Ernst, and David Cahen

VI






Surface Modification of Cu(ln,Ga)Se2 Thin Films DuringAqueous Oxidation Etch 133

B. Canava, J.F. Quillemoles, D. Lincot, J. Vedel, ti. Ardelean,and F. Malengreau

Characterization of Cu(ln,Ga)Se2/Mo Interface in CIGSSolar Cells 139

S. Hishiwaki, 7Y. Kohara, T. Tiegami, M. nishitani, and T. Wada

In Situ Surface Composition Measurements of CuGaSe2Thin Films 145

P. Fons, A. Yamada, S. Niki, and ti. Oyanagi

Piezoelectric Photoacoustic Spectra in CuGaSe2 Thin FilmsGrown by Molecular-Beam Epitaxy 151

Kenji Yoshino, Daisuke Maruoka, Masakazu Kawahara,Atsuhiko Fukuyama, Kouji Maeda, Paul J. Fons, Shigeru niki,Akimasa Yamada, and Tetsuo Ikari

Metalorganic Chemical Vapor Deposition of CulnSe2From Copper and Indium Diselenocarbamates for SolarCell Devices 157

John McAleese, Paul O'Brien, and David J. Otway

Novel Multilayer Process for CulnSe2 Thin-Film Formationby Rapid Thermal Processing 163

Chih-hung Chang, Billy Stanbery, Augusto Morrone, Albert Davydov,and Tim Anderson

Preparation of High-Quality CulnSe2 Thin Films byMolecular-Beam Epitaxy 169

B.ti. Tseng, S.B. Lin, and D.J. Yang

In Situ Investigation of Cu-ln-Se Reactions by Thin-FilmCalorimetry 173

D. Wolf and Q. Muller

Na Impurity Chemistry in Photovoltaic CIGS Thin Films:An Investigation With Photo- and Auger ElectronSpectroscopies 179

D. W. Fiiles, K. Ramanathan, J. Granata, F. tiasoon, R. Noufi,B.J. Tielsch, and J.E. Fulghum

Room-Temperature Growth of Conducting ZnO Films 1855. Witanachchi, Y. Ying, A.M. Miyawa, and P. Mukherjee

MOCVD as a Technique for the Growth of CdTe/CdSSolar Cells 191

R.A. Berrigan, S.J.C. Irvine, A. Stafford, D. Ellis, and D.J. Cole-Hamilton

Several Efficiency Influencing Factors in CdTe/CdSSolar Cells 197

K. Li, Z.C. Feng, A.T.S. Wee, ti.C. Chou, J.Y. Lin, S. Kamra, K.L. Tan,A. Rohatgi, L. Zhou, and S.F.Y. Li

VII






Sulfur Diffusion in Polycrystalline Thin-Film CdTe Solar Cells 203M.H. Asian, W. Song, J. Tang, D. Mao, R.T. Collins, D.H. Levi,R.K. Ahrenkiel, S.C. Lindstrom, and M.B. Johnson

Effects of Back Contact Treatments on JunctionPhotoluminescence in CdTe/CdS Solar Cells 209

D.H. Levi, L.M. Woods, D.S. Albin, T.A. Gessert, D.W. Mies,A. Swartzlander, D.H. Rose, R.K. Ahrenkiel, and P. Sheldon

Interface Reactions in CdTe Solar Cell Processing 215D. Albin, R. Dhere, A. Swartzlander-Guest, D. Rose, X. Li, D. Levi,D. Piiles, H. Moutinho, R. Matson, and P. Sheldon

PART III: Ill-V-BASED THIN FILMS

Multijunction InGaAs Thermophotovoltaic Devices 223navid S. Fatemi, David M. Wilt, Phillip P. Jenkins, Victor Q. Weizer,and Christopher S. Murray

Detailed Kinetics Modeling of Indium Phosphide Films inMOCVD Reactors 229

Maurizio Masi, Carlo Cavallotti, Guido Radaelli, and S. Carra

The Effect of the Zn Interstitial Defect on the Performanceof p/n InP Solar Cells 235

R.W. Hoffman, Jr., n.S. Fatemi, V.G. Weizer, P. Jenkins, M.A. Stan,S.A. Ringel, R.M. Sieg, D.A. Scheiman, D.M. Wilt, and D.J. Brinker

Very High Hole Concentrations in C-Doped InGaAs UsingNew Sources With APOMVPE 241

A. Tandon and R.M. Cohen

Composition and Structure of Vicinal Ge(100) Surfaces Exposedto Tertiarybutylarsine 247

Shupan Gan, Lian Li, Byung-Kwon Han, and Robert F. Hicks

PART IV: THIN FILMS - GENERAL

Nucleation Studies of ZnS and ZnO Growth by ChemicalBath Deposition (CBD) on the Surface of Glass and TinOxide Coated Glass 255

John McAleese and Paul O'Brien

Deposition of ZnTe Thin Films by Close-SpacedSublimation: Structural and Electrical Studies 261

D.J. Goyal, P.G. Bilurkar, S.K. Thorat, and N.V. Mate

Ultrathin Indium Tin Oxide Films on Various Substrates byPulsed Laser Deposition 267

X. W. Sun, D.H. Kim, and H.S. Kwok

viii






Preparation and Photovoltaic Properties of Tin Sulfide andTin Oxysulfide Thin Films by Spray Pyrolysis Technique 273

Tsuyoshi Kosugi, Kenji Murakami, and Shoji Kaneko

Solution-Grown CdS Thin Films for Solar Ceils 279Jae tieyg Shin, Seung Wook Hyeun, Sung Ho Shin, Jung II Park,and Kwang Ja Park

The Characterization of Chemical Bath Deposited CdS onSingle-Crystal InP Substrates 285

G.M. Riker, M.M. Al-Jassim, and F.S. Hasoon

Spectral Utilization in Thermophotovoltaic Devices 291Marvin B. Clevenger, Christopher S. Murray, and David R. Riley

The Perspectives of High-Rate Low-Frequency a-Si:H FilmsDeposition: Solar Cell Application and Stability Control 297

B.G. Budaguan, A. A. Aivazov, M.M. Meytin, and A.Q. Radosel'sky

The Properties of a-Si:H/c-Si Heterostructures Prepared by55 kHz PECVD for Solar Cell Application 303

B.G. Budaguan, A.A. Aivazov, A.A. Sherchenkov, A.V. Biriukov,V.D. Chernomordic, and J.W. Metselaar

Author Index 309

Subject Index 311






PREFACE

This volume contains written records of many of the paperspresented at the symposium on 'Thin-Film Structures for Photovoltaics,"held December 2-5, as part of the 1997 MRS Fall Meeting in Boston,Massachusetts. The purpose of this symposium was to provide a forumfor the presentation of recent results on all aspects of thin-film researchfor photovoltaic applications.

We wish to thank all authors and attendees of the symposium fortheir stimulating and interesting presentation, and for the resultinginteractions, comments and questions. We gratefully acknowledge theNational Renewable Energy Laboratory and the U.S. Department ofEnergy: EE/RE and OER/BES for their support of this symposium. Finally,we also with to thank the meeting chairs and the MRS staff for assistanceand encouragement.

E. JonesJ. KalejsR. NoufiB. Sopori

April 1998






MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 467— Amorphous and Microcrystalline Silicon Technology—1997, M. Hack,E.A. Schiff, S. Wagner, R. Schropp, I. Shimizu, 1997, ISBN: 1-55899-371-1

Volume 468— Gallium nitride and Related Materials II, C.R. Abernathy, H. Amano,J.C. Zolper, 1997, ISBN: 1-55899-372-X

Volume 469— Defects and Diffusion in Silicon Processing, T. Diaz de la Rubia, S. Coffa,P.A. Stolk, C.S. Rafferty, 1997, ISBN: 1-55899-373-8

Volume 470— Rapid Thermal and Integrated Processing VI, T.J. Riley, J.C. Qelpey,F. Roozeboom, S. Saito, 1998, ISBN: 1-55899-374-6

Volume 471— Flat Panel Display Materials III, R.T. Fulks, Q.N. Parsons, D.E. Slobodin,T.H. Yuzuriha, 1997, ISBN: 1-55899-375-4

Volume 472— Polycrystalline Thin Films—Structure, Texture, Properties and Applications III,S.M. Yalisove, B.L. Adams, J.S. Im, Y. Zhu, F-R. Chen, 1997, ISBN: 1-55899-376-2

Volume 473— Materials Reliability in Microelectronics VII, J.J. Clement, R.R. Keller,K.S. Krisch, J.E. Sanchez, Jr., Z. Suo, 1997, ISBN: 1-55899-377-0

Volume 474— Epitaxial Oxide Thin Films III, D.Q. Schlom, C-B. Eom, M.E. Hawley,CM. Foster, J.S. Speck, 1997, ISBN: 1-55899-378-9

Volume 475— Magnetic Ultrathin Films, Multilayers and Surfaces—1997, J.Q. Tobin,D.D. Chambliss, D. Kubinski, K. Barmak, P. Dederichs, W.J.M. de Jonge,T. Katayama, A. Schuhl, 1997, ISBN: 1-55899-379-7

Volume 476— Low-Dielectric Constant Materials III, C. Case, P. Kohl, T. Kikkawa, W.W. Lee,1998, ISBN: 1-55899-380-0

Volume 477— Science and Technology of Semiconductor Surface Preparation, Q.S. Higashi,M. Hirose, S. Raghavan, S. Verhaverbeke, 1997, ISBN: 1-55899-381-9

Volume 478— Thermoelectric Materials—New Directions and Approaches, T.M. Tritt,M.Q. Kanatzidis, H.B. Lyon, Jr., Q.D. Mahan, 1997, ISBN: 1-55899-382-7

Volume 479— Materials for Optical Limiting II, R. Sutherland, R. Pachter, P. Hood, D. Hagan,K. Lewis, J. Perry, 1997, ISBN: 1-55899- 383-5

Volume 480— Specimen Preparation for Transmission Electron Microscopy of Materials IV,R.M. Anderson, S.D. Walck, 1997, ISBN: 1-55899-384-3

Volume 481— Phase Transformation and Systems Driven Far From Equilibrium, E. Ma,P. Bellon, M. Atzmon, R. Trivedi, 1998, ISBN: 1-55899-386-X

Volume 482— Nitride Semiconductors, F.A. Ponce, S.P. DenBaars, B.K. Meyer, S. Nakamura,S. Strite, 1998, ISBN: 1-55899-387-8

Volume 483— Power Semiconductor Materials and Devices, S.J. Pearton, R.J. Shul,E. Wolfgang, F. Ren, S. Tenconi, 1998, ISBN: 1-55899-388-6

Volume 484— Infrared Applications of Semiconductors II, S. Sivananthan, M.O. Manasreh,R.H. Miles, D.L. McDaniel, Jr., 1998, ISBN: 1-55899-389-4

Volume 485— Thin-Film Structures for Photovoltaics, E.D. Jones, R. Noufi, B.L. Sopori,J. Kalejs, 1998, ISBN: 1-55899-390-8

Volume 486— Materials and Devices for Silicon-Based Optoelectronics, J.E. Cunningham,S. Coffa, A. Polman, R. Soref, 1998, ISBN: 1-55899-391-6

Volume 487— Semiconductors for Room-Temperature Radiation Detector Applications II,R.B. James, T.E. Schlesinger, P. Siffert, M. Cuzin, M. Squillante, W. Dusi,1998, ISBN: 1-55899-392-4






MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 488— Electrical, Optical, and Magnetic Properties of Organic Solid-State MaterialsIV, J.R. Reynolds, A. K-Y. Jen, L.R. Dalton, M.F. Rubner, L.Y. Chiang, 1998,ISBN: 1-55899-393-2

Volume 489— Materials Science of the Cell, B. Mulder, V. Vogel, C. Schmidt, 1998,ISBN: 1-55899-394-0

Volume 490— Semiconductor Process and Device Performance Modeling, J.S. Nelson,CD. Wilson, S.T. Dunham, 1998, ISBN: 1-55899-395-9

Volume 491—Tight-Binding Approach to Computational Materials Science, P.E.A. Turchi,A. Qonis, L. Colombo, 1998, ISBN: 1-55899-396-7

Volume 492— Microscopic Simulation of Interfacial Phenomena in Solids and Liquids,S.R. Phillpot, P.D. Bristowe, D.Q. Stroud, J.R. Smith, 1998, ISBN: 1-55899-397-5

Volume 493— Ferroelectric Thin Films VI, R.E. Treece, R.E. Jones, S.B. Desu, CM. Foster,I.K. Yoo, 1998, ISBN: 1-55899-398-3

Volume 494— Science and Technology of Magnetic Oxides, M. Hundley, J. Nickel, R. Ramesh,Y. Tokura, 1998, ISBN: 1-55899-399-1

Volume 495— Chemical Aspects of Electronic Ceramics Processing, P.N. Kumta, A.F. Hepp,D.N. Beach, J.J. Sullivan, B. Arkles, 1998, ISBN: 1-55899-400-9

Volume 496— Materials for Electrochemical Energy Storage and Conversion II—Batteries,Capacitors and Fuel Cells, D.S. Qinley, D.H. Doughty, T. Takamura, Z. Zhang,B. Scrosati, 1998, ISBN: 1-55899-401-7

Volume 497— Recent Advances in Catalytic Materials, N.M. Rodriguez, S.L. Soled, J. Hrbek,1998, ISBN: 1-55899-402-5

Volume 498— Covalently Bonded Disordered Thin-Film Materials, M.P. Siegal, J.E. Jaskie,W. Milne, D. McKenzie, 1998, ISBN: 1-55899-403-3

Volume 499— High-Pressure Materials Research, R.M. Wentzocovitch, R.J. Hemley,W.J. Nellis, P.Y. Yu, 1998, ISBN: 1-55899-404-1

Volume 500— Electrically Based Microstructural Characterization II, R.A. Qerhardt, M.A. Alim,S.R.Taylor, 1998, ISBN: 1-55899-405-X

Volume 501—Surface-Controlled Nanoscale Materials for High-Added-Value Applications,K.E. Qonsalves, M-I. Baraton, J.X. Chen, J.A. Akkara, 1998, ISBN: 1-55899-406-8

Volume 502— In Situ Process Diagnostics and Intelligent Materials Processing,P.A. Rosenthal, W.M. Duncan, J.A. Woollam, 1998, ISBN: 1-55899-407-6

Volume 503— Nondestructive Characterization of Materials in Aging Systems, R.L. Crane,S.P. Shah, R. Qilmore, J.D. Achenbach, P.T. Khuri-Yakub, T.E. Matikas, 1998,ISBN: 1-55899-408-4

Volume 504— Atomistic Mechanisms in Beam Synthesis and Irradiation of Materials,J .C Barbour, S. Roorda, D. Ila, 1998, ISBN: 1-55899-409-2

Volume 505— Thin-Films—Stresses and Mechanical Properties VII, R.C Cammarata,E.P. Busso, M. Nastasi, W.C Oliver, 1998, ISBN: 1-55899-410-6

Prior Materials Research Society Symposium Proceedings available by contacting Materials Research Society






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