The Digital Silicon Photomultiplier - Principle of Operation and...

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The Digital Silicon Photomultiplier – Principle of Operation and Intrinsic Detector Performance Thomas Frach, Member, IEEE, Gordian Prescher, Carsten Degenhardt, Rik de Gruyter, Anja Schmitz, and Rob Ballizany Abstract—We developed a fully digital implementation of the Silicon Photomultiplier. The sensor is based on a single photon avalanche photodiode (SPAD) integrated in a standard CMOS process. Photons are detected directly by sensing the voltage at the SPAD anode using a dedicated cell electronics block next to each diode. This block also contains active quenching and recharge circuits as well as a one bit memory for the selective inhibit of detector cells. A balanced trigger network is used to propagate the trigger signal from all cells to the integrated time- to-digital converter (TDC). Photons are detected and counted as digital signals, thus making the sensor less susceptible to temperature variations and electronic noise. The integration with CMOS logic has the added benefit of low power consumption and possible integration of data post-processing. In this paper, we discuss the sensor architecture and present first measurements of the technology demonstrator test chip. I. I NTRODUCTION R ECENTLY, the Silicon Photomultiplier (SiPM) gained interest as a potential candidate to replace photomul- tiplier tubes for reasons of ruggedness, compactness and insensitivity to magnetic fields. Other advantages of solid state detectors in general are their low operating voltage, low power consumption and large scale fabrication possibilities. Today, silicon photomultipliers operate in an analog way. The passively-quenched Geiger-mode cells of the SiPM are connected in parallel through a long interconnect, and the resulting output signal is therefore the analog sum of the individual currents of all cells. Hereby, the good intrinsic performance of the SPAD is not fully utilized, as the generated signal is deteriorated by the relatively large parasitics of the on-chip interconnect, the bond wires and the external load. Furthermore, susceptibility to electronic noise and high sensitivity to temperature variations are typical characteristics of the analog SiPM. Also from the system perspective, large scale applications of analog silicon photomultipliers imply some design challenges. In systems comprising several tens of thousands of channels, reading out every single channel can become a difficult task. Usually, a dedicated multichannel mixed-signal ASIC is needed to condition and digitize the silicon photomultiplier output signals. As the single photon response is still in the mV range, the signals can be easily affected by interference, Manuscript received November 13, 2009. The authors are with Philips Digital Photon Counting, Weisshausstrasse 2, 52066 Aachen, Germany (telephone: +49 241 6003 613, e-mail: digitalpho- [email protected], web: www.philips.com/digitalphotoncounting). Fig. 1. Scintillation light detector systems based on the analog (a) and digital (b) silicon photomultiplier. electronic noise or unstable baseline due to high dark count levels, thus rendering single photon trigger impossible. In- terference from the switching digital part into the low-noise analog front-end of the readout ASIC can additionally affect system performance. Differential current-mode logic design can be used to minimize the switching noise in the digital part of the ASIC at the expense of significant increase in power consumption and heat generation. A typical single- channel sensor/readout system based on the analog silicon photomultiplier is shown in Fig. 1(a). The same functionality can be realized in a single chip according to the scheme shown in Fig. 1(b). Here, the SPADs are integrated with conventional CMOS circuits on the same substrate. Each SPAD has its own readout circuit, which also provides means for active quenching and recharging of the SPAD. A one bit memory cell integrated next to the SPAD can be used to selectively enable or disable the respective diode. Each cell, composed of the SPAD itself and the corresponding electronics block, is connected to the time-to-digital converter via a configurable, balanced trigger network. A separate synchronous bus is used to connect each cell to the photon counters to determine the number of detected photons. Eventually, correction look-up tables and other data post-processing could be implemented on the same chip. Also, the bias voltage generation could be fully integrated with the 2009 IEEE Nuclear Science Symposium Conference Record N28-5 9781-4244-3962-1/09/$25.00 ©2009 IEEE 1959

Transcript of The Digital Silicon Photomultiplier - Principle of Operation and...

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The Digital Silicon Photomultiplier –Principle of Operation and Intrinsic Detector

PerformanceThomas Frach, Member, IEEE, Gordian Prescher, Carsten Degenhardt, Rik de Gruyter, Anja Schmitz,

and Rob Ballizany

Abstract—We developed a fully digital implementation of theSilicon Photomultiplier. The sensor is based on a single photonavalanche photodiode (SPAD) integrated in a standard CMOSprocess. Photons are detected directly by sensing the voltage atthe SPAD anode using a dedicated cell electronics block nextto each diode. This block also contains active quenching andrecharge circuits as well as a one bit memory for the selectiveinhibit of detector cells. A balanced trigger network is used topropagate the trigger signal from all cells to the integrated time-to-digital converter (TDC). Photons are detected and countedas digital signals, thus making the sensor less susceptible totemperature variations and electronic noise. The integration withCMOS logic has the added benefit of low power consumption andpossible integration of data post-processing.

In this paper, we discuss the sensor architecture and presentfirst measurements of the technology demonstrator test chip.

I. INTRODUCTION

RECENTLY, the Silicon Photomultiplier (SiPM) gained

interest as a potential candidate to replace photomul-

tiplier tubes for reasons of ruggedness, compactness and

insensitivity to magnetic fields. Other advantages of solid

state detectors in general are their low operating voltage, low

power consumption and large scale fabrication possibilities.

Today, silicon photomultipliers operate in an analog way.

The passively-quenched Geiger-mode cells of the SiPM are

connected in parallel through a long interconnect, and the

resulting output signal is therefore the analog sum of the

individual currents of all cells. Hereby, the good intrinsic

performance of the SPAD is not fully utilized, as the generated

signal is deteriorated by the relatively large parasitics of

the on-chip interconnect, the bond wires and the external

load. Furthermore, susceptibility to electronic noise and high

sensitivity to temperature variations are typical characteristics

of the analog SiPM.

Also from the system perspective, large scale applications of

analog silicon photomultipliers imply some design challenges.

In systems comprising several tens of thousands of channels,

reading out every single channel can become a difficult

task. Usually, a dedicated multichannel mixed-signal ASIC is

needed to condition and digitize the silicon photomultiplier

output signals. As the single photon response is still in the

mV range, the signals can be easily affected by interference,

Manuscript received November 13, 2009.The authors are with Philips Digital Photon Counting, Weisshausstrasse 2,

52066 Aachen, Germany (telephone: +49 241 6003 613, e-mail: [email protected], web: www.philips.com/digitalphotoncounting).

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Fig. 1. Scintillation light detector systems based on the analog (a) and digital(b) silicon photomultiplier.

electronic noise or unstable baseline due to high dark count

levels, thus rendering single photon trigger impossible. In-

terference from the switching digital part into the low-noise

analog front-end of the readout ASIC can additionally affect

system performance. Differential current-mode logic design

can be used to minimize the switching noise in the digital

part of the ASIC at the expense of significant increase in

power consumption and heat generation. A typical single-

channel sensor/readout system based on the analog silicon

photomultiplier is shown in Fig. 1(a).

The same functionality can be realized in a single chip

according to the scheme shown in Fig. 1(b). Here, the SPADs

are integrated with conventional CMOS circuits on the same

substrate. Each SPAD has its own readout circuit, which

also provides means for active quenching and recharging

of the SPAD. A one bit memory cell integrated next to

the SPAD can be used to selectively enable or disable the

respective diode. Each cell, composed of the SPAD itself

and the corresponding electronics block, is connected to the

time-to-digital converter via a configurable, balanced trigger

network. A separate synchronous bus is used to connect each

cell to the photon counters to determine the number of detected

photons. Eventually, correction look-up tables and other data

post-processing could be implemented on the same chip. Also,

the bias voltage generation could be fully integrated with the

2009 IEEE Nuclear Science Symposium Conference Record N28-5

9781-4244-3962-1/09/$25.00 ©2009 IEEE 1959

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Fig. 2. Microphotograph of the test chip.

sensor and a digital feedback control loop could be used to

automatically adapt the bias voltage to the actual value of the

breakdown and excess voltages, making the device insensitive

to temperature drifts and process variations.

II. SENSOR ARCHITECTURE

Like its analog counterparts, digital silicon photomultiplier

pixels consist of arrays of Geiger-mode microcells, each capa-

ble of detecting single photons. Contrary to the conventional

SiPM, however, each cell is capable of detecting and storing

exactly one photon. Upon the detection of a photon, the

avalanche is actively quenched using a dedicated transistor,

and a different transistor is used to quickly recharge the diode

back to its sensitive state. SPAD breakdown results in an

immediate voltage change of approximately the excess voltage

at the anode. The shape of the anode voltage pulse follows an

exponential defined by the capacitance and the inner resistance

of the diode, as long as the quenching transistor is left open.

Upon reaching the inverter threshold, the anode voltage is

forced to the breakdown voltage level by closing the quenching

transistor, thereby stopping the current flow through the diode.

The combination of the diode capacitance and the quenching

transistor feedback ensures proper storage of the information.

The quenching transistor is disconnected and the diode is reset

to sensitive state by a separate recharge transistor.

Each cell provides a fast asynchronous trigger signal and a

slower synchronous data output signal. The trigger signal is

connected to a balanced, low skew trigger network connected

to the on-chip time-to-digital converter (TDC). The trigger

network can be configured to start the TDC at the first

photon or, alternatively, at higher photon levels to reduce the

number of triggers in the case of high pixel dark count rate.

Except for the first photon trigger level, any diode breakdown

is assumed to be a dark count and is automatically reset

if it does not lead to a trigger within 10 to 15 ns from

its occurrence. This embedded refresh logic prevents dark

counts from accumulating and, eventually, reaching the trigger

threshold.

The data output signals of all cells in a column are con-

nected to the same data line and the data is applied to the

data line using a row output enable signal. Then, the acquired

data can be read out by selecting individual rows of the array

one after the other and reading the data lines at the periphery

of the pixel.

To simplify the design of the chip, the pixel is composed of

four identical subpixels, each consisting of an array of 64 × 32

cells. The cell size is 52 μm × 30 μm with 50% fill factor

including the cell electronics. One diode has been omitted in

each subpixel to make space for the trigger logic at the center

of the pixel, thus resulting in 2047 sensitive cells per subpixel.

Each subpixel has periphery logic on two adjacent sides to

control the access to the cell inhibit memory and to provide

the means to readout the data and recharge the diodes. An

integrated time-to-digital converter is connected to the trigger

block at the pixel center via the master trigger line.

A microphotograph of the technology demonstrator test chip

is shown in Fig. 2. The TDC is located at the right hand side

of the pixel array and has a block size of 96 μm × 3300 μm.

We designed diodes with 20, 25 and 30 V nominal break-

down voltage. All measurements presented in this paper were

obtained using a sensor with 25 V nominal breakdown voltage.

The actual bias voltage of the sensor equals the breakdown

voltage plus the 3.3 V excess voltage and is typically in the

28 to 30 V range, as the breakdown voltage of the sensor can

differ from die to die due to process variations.

A. Trigger and Validation Thresholds

As mentioned in the previous section, the main driver

behind subdividing the pixel into subpixels is the complexity

reduction of the full-custom design. As a side-effect, the data

readout time is also reduced by a factor of two, and the imple-

mentation of the various trigger thresholds is simplified. The

trigger thresholds are implemented in fully digital way using

logic operations on the subpixel trigger lines. Assuming that

ST1, ... ST4 are the first-photon trigger signals corresponding

to the subpixels 1, ... 4, the master trigger MT is implemented

using one of these operations:

MT=1 = ST1 ∨ ST2 ∨ ST3 ∨ ST4

MT≥2 = (ST1 ∨ ST2) ∧ (ST3 ∨ ST4)MT≥3 = (ST1 ∨ ST2) ∧ ST3 ∧ ST4

MT≥4 = ST1 ∧ ST2 ∧ ST3 ∧ ST4

(1)

This way, the trigger network can be configured to start

the TDC at the first photon or, alternatively, at ≥ 2, ≥ 3,

≥ 4 photons. The TDC is stopped by the next rising edge of

the system clock, which is used as a global time reference. A

coarse counter connected to the system clock is used to extend

the time measurement interval to 163835 ns.

The implication of this triggering scheme is that, except for

the first photon trigger, the trigger thresholds are statistical

thresholds, as, for MT≥2, the second photon can fall on the

same subpixel as the first photon and so forth. Higher trigger

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READY COLLECT READOUT RESETVALID?

no

yes

5 - 40ns 5 - 2560ns 320ns 10ns

trigger

Fig. 3. Typical acquisition sequence.

levels allow to control the system dead time at the expense of

a slight loss of time resolution. This is especially important in

applications where reduction of the dark count rate by active

sensor cooling is difficult to implement.

A second, higher-level energy-like threshold is implemented

in a similar way to distinguish valid events from dark counts.

The pixel is subdivided into 64 mutually exclusive regions to

allow the adjustment of the validation threshold to up to the

minimum of 64 photons. The validation logic makes use of

the fact that many photons are detected at the very beginning

of the scintillator pulse, thus increasing the probability of the

selected regions to detect a photon. On the other hand, the

probability to detect a dark count event in every selected region

in this short time span is close to zero, as dark count events are

generated independently of each other. The validation signal is

tested at a user-defined time after the trigger has been detected

and a fast pixel reset is issued in case of a dark count event

to minimize sensor dead time.

B. Data Acquisition

A typical data acquisition sequence is shown in Fig. 3.

The pixel state machine starts in the state READY with all

diodes charged above their breakdown voltage and recharge

transistors open. The master trigger starts the acquisition

sequence, forcing the pixel controller to change the state to

VALIDATE. The pixel controller stays in this state for a user-

defined time of 5 to 40 ns. After the validation hold-off timer

expired, the validation signal is checked to determine if the

event is indeed a real light pulse or a dark count. In case of

a dark count generated event, the pixel state machine changes

to RESET to quickly reset the pixel and change back to the

READY state in preparation for the next event.

In case of a real scintillator pulse, the validation threshold is

reached and the state machine changes to the state COLLECT.

While in this state, the pixel waits for the scintillator pulse

to decay. The collection time is user-defined between 5 and

2560 ns. The photons impinging on the sensor are detected and

stored in the cells for later readout. After the expiration of the

timer, the pixel state machine goes to the state READOUT. In

this state, each line of the sensor is selected separately and the

number of photons detected in the line is added to the photon

accumulator. While reading out one line, the preceding line

is recharged to avoid large current surges during the global

reset of the pixel. As the sensor is still sensitive during the

readout, half of the readout time contributes to the collection

time. Finally, the pixel controller goes to the RESET state for

global pixel recharge and TDC reset, and then back to the

READY state.

In the technology demonstrator test chip (Fig. 2), the pixel

state machine has been implemented in an FPGA and the

corrections have been done offline in software. This approach

offered greater flexibility in testing and comparing different

acquisition sequences and simplified the debugging process.

In the final sensor the acquisition controller will be placed

next to the pixel on the same substrate.

C. Saturation Correction

The photon counting capability at low light levels is realized

in the same way as in the analog SiPM, i.e. by spreading the

photons in the light pulse over the cells of the sensor. As

long as there are many more cells than photons, the deviation

from a linear sensor is negligible. At higher photon counts,

however, the saturation cannot be neglected anymore and (2)

can be used to calculate the number of photons detected by a

sensor having Ncells active cells. This equation is valid only

in the case that each cell cannot detect more than one photon

during acquisition, which is the case in the digital silicon

photomultiplier.

Ndetected = Ncells

(1 − e

−P DE·NphotonsNcells

)(2)

Equation (2) can be readily solved for Nphotons, and a look-

up table (LUT) can be used to correct the number of detected

photons for sensor saturation. As the number of active cells

can be different from one pixel to another, one correction LUT

per pixel must be provided. Area permitting, this LUT as well

as the TDC calibration LUT could be integrated on the same

chip, thereby simplifying the overall system architecture.

III. DARK COUNT RATE

The possibility to selectively activate individual cells en-

ables detailed characterization of basic sensor parameters like

the breakdown voltage, sensitivity, time resolution and trigger

network skew, and dark count rate. For example, to measure

the dark counts of a single cell, only the desired cell is enabled

and the trigger level is set to first photon trigger. The dark

count rate can be easily measured by counting the triggers per

second. This procedure can be done for all diodes in the pixel

successively. The result is the dark count rate (DCR) map

as shown in Fig. 4. It is evident that only very few diodes

contribute significantly to the total dark count rate. Switching

these diodes off can significantly reduce the total dark count

rate of the pixel and thereby minimize the system dead time.

Fig. 5 shows the histogram representations of the dark count

rates of all diodes in the pixel at four different temperatures.

The distribution of the dark count rates for most of the diodes

is close to a Gaussian with approximately 90 to 95% of the

diodes having a typical dark count rate close to the average.

Only the remaining 5 to 10% of the diodes show abnormally

high dark count rates due to defects. The average dark count

rate of a good diode at 20 ◦C is approximately 150 cps. This

can be reduced by an order of magnitude by cooling the sensor

to 0 ◦C and, in the extreme case, to less than 1 cps per diode

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Fig. 4. Typical dark count rate map of the sensor.

Fig. 5. DCR histograms of all SPADs in a pixel at different temperatures.

below -45 ◦C. Having the possibility to measured the statistical

distribution of the dark count rates of all individual diodes is

also a powerful tool for process development and monitoring,

as any systematic defect distribution becomes easily detectable

as a deviation from the Gaussian distribution.

The total dark count rate of the pixel is the cumulative sum

of the dark count rate distribution, shown in Fig. 5, starting

at the entry with the lowest dark count rate and ending at the

user-defined maximum. As switching off diodes is equivalent

to loss of sensitive area, the pixel dark count rate can also be

computed as a function of the number of active cells or, in

other words, the resulting relative photon detection efficiency

(PDE) of the pixel. Based on the data from Fig. 5, the total

Fig. 6. Total dark count rate of the sensor at different temperatures.

dark count rate of the pixel for the four different temperatures

is shown in Fig. 6 as a function of the resulting relative PDE.

In this particular pixel, switching off 5% of the cells would

reduce the dark count rate of the pixel by a factor of two.

Higher factors have been observed in other pixels, sometimes

leading to a reduction of the dark count rate by more than an

order of magnitude.

IV. PHOTON DETECTION EFFICIENCY

Photon detection efficiency (PDE) describes the probability

to detect a photon of a certain wavelength. The factor includes

the quantum efficiency of silicon, the avalanche generation

probability, and the fill factor of the sensor. While the quantum

efficiency of silicon is very high in the visible region of the

spectrum, the actual charge collection depends strongly on the

internal design of the avalanche photodiode. The avalanche

generation probability denotes the likelihood of an carrier

attracted into the high-field region of the junction to start an

avalanche eventually leading to the junction breakdown. This

depends on the electric field profile and the carrier type, as

the ionization coefficient for electrons is different from the

one for holes. Finally, the fill factor heavily depends on the

lateral design of the device and the area taken by the cell

electronics. In some applications, the PDE loss due to the fill

factor can be mitigated by using microlenses. However, this is

not possible in typical scintillator crystal readout as the light

emission is more or less isotropic. Therefore, high fill factor

is key to high overall PDE of the sensor. Increasing the cell

size also helps to increase the fill factor at the cost of earlier

saturation of the pixel.

Fig. 7 shows the PDE of the test chip, measured using a

monochromator setup and a calibrated reference diode. First,

the response of the optical system was measured using the

reference diode, and the photon flux at the position of the

sensor was calculated. Subsequently, the reference diode was

replaced with the test chip and the flux was attenuated with

a calibrated neutral density filter. The spectral response of

several individual cells was recorded and corrected for the

dark count background of the diodes. As the individual cells

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Fig. 7. Photon detection efficiency of the sensor at 3.3 V excess voltage.

TABLE IEFFECTIVE PHOTON DETECTION EFFICIENCIES FOR COMMON

SCINTILLATORS.

Scintillator Effective PDE (%) Light yield (photons/keV)

LYSO 25.9 32

CsI(Na) 23.7 41

CsI(Tl) 20.5 54

NaI(Tl) 24.2 38

BGO 24.2 8 - 10

LaBr3(Ce) 9.6 63

of the pixel were measured sequentially, any distortion due to

optical crosstalk was excluded from the measurement. All data

was measured at room temperature, using the nominal excess

voltage of 3.3 V. The measurement range was limited by the

setup to 340 - 720 nm.

Table I lists the expected effective photon detection effi-

ciencies for a number of scintillator materials. The effective

PDE is obtained through the convolution of the device PDE

with the normalized scintillator emission spectrum. The typical

light yield of the scintillator according to [1] is also given in

the table for reference.

V. OPTICAL CROSSTALK

Optical crosstalk is caused by photons generated during the

avalanche discharge of the diode [2]. These photons can initi-

ate a secondary breakdown in one of the neighboring diodes.

The probability of photoemission is directly proportional to

the current density in the high-field region of the junction.

Thus, reducing the current density inside the diode helps to

reduce the optical crosstalk. In the analog SiPM, this typically

leads to the reduction of the gain, thereby reducing the signal

to noise ratio. In the digital SiPM, the current is reduced by

discharging the diode through a dedicated quenching transistor.

Additionally, the crosstalk can be further suppressed by optical

isolation between the diodes.

The flexible sensor architecture enables direct measurements

of the optical crosstalk. The basic idea is to find a diode with

a high dark count rate in a relatively quiet environment. This

Fig. 8. Dark count map used in the randoms correction.

Fig. 9. Optical crosstalk of center cell to its neighbors.

diode can be used as a ’light generator’ to generate optical

crosstalk to its neighbors. Then, the crosstalk can be measured

selectively for all combinations of the ’light generator’ and all

of its neighbors.

To find a suitable generator diode, we first measure the

complete dark count map of the sensor. Subsequently, the

program sorts all diodes according their dark count rates and

checks the dark count rates of the 5× 5 array surrounding the

potential light source. If the dark counts of all its neighbors are

below a user-specified limit, the actual measurement is started.

The measurement starts with the re-acquisition of the dark

counts of the 5× 5 field, as the conditions may have changed

since the measurement of the full pixel DCR map. The dark

counts of the individual diodes are needed later to correct the

measured data for randomly coincident dark counts. The result

of the measurement is shown in Fig. 8.

In a second step, the ’light generator’ diode and one of the

test diodes are activated simultaneously with the trigger level

set to first photon and validating all events. The received data

packets can contain only one or two photons per event. Photon

count = 1 indicates a dark count in one of the two diodes. Pho-

ton count = 2 means either a random coincidence of two dark

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Fig. 10. Histograms of the photon counts for attenuated laser pulses.

counts, or optical crosstalk between the two diodes. The true

rate of optical crosstalk can be determined by subtracting the

expected randomly coincident dark counts using the previously

measured DCR map (Fig. 8). This procedure is carried out for

all diodes of the 5 × 5 test field separately. The resulting

optical crosstalk between the light generator diode and all its

neighbors is shown in Fig. 9.

VI. LASER MEASUREMENTS

A picosecond laser (36 ps FWHM, λ = 410 nm) was used

to characterize the photon counting performance of the test

chip. The defocussed laser beam was attenuated to flux levels

of one to fifty photons per pulse, and one million pulses were

acquired for each attenuator setting. The trigger threshold was

set at the first photon level and all events were validated. The

average number of photons in the pulse for each measurement

is derived from the histograms shown in Fig. 10. The data

was acquired at 3.3 V excess voltage and -20 ◦C to suppress

the dark count offset due to the finite collection time of the

sensor. The measurement was repeated at room temperature

with essentially the same results except for photon fluxes

below ten photons per pulse, where accumulated dark counts

became visible as a fixed offset of the number of detected

photons.

The time resolution for each attenuator setting was obtained

from the same data set. The time resolution as a function of

the mean number of photons in the laser pulse is shown in

the Fig. 11. The time resolution follows the 1/N relationship

predicted by theory [3]. The only exception is the first point,

which shows an improved time resolution. The root cause of

this anomaly is currently being investigated.

The contributions of individual system components to the

time resolution of the sensor were investigated separately at

low and high photon fluxes. The contribution of the TDC to the

time resolution is 20 ps full-width at half-maximum (FWHM).

Under low light flux conditions, the SPAD contributes 54 ps

FWHM mainly due to the avalanche spreading uncertainty.

Negligible jitter but significant systematic skew of 110 ps

FWHM have been found in the trigger network. Manual fine-

Fig. 11. Time resolution at low photon counts.

tuning of the wire lengths is underway to eliminate the trigger

network skew in future designs.

VII. TEMPERATURE SENSITIVITY

One drawback of the analog SiPM is its pronounced

sensitivity to temperature variations. Temperature affects the

ionization coefficients of the electrons and holes in silicon [4].

This leads to a temperature drift of the breakdown voltage of

the diode. Assuming constant biasing conditions, any change

in the breakdown voltage Vbd leads to a proportional change

of the SiPM gain G, according to

G =C (Vbias − Vbd)

q(3)

with C being the diode capacitance including any parasitics,

and q the electron charge.

In the digital SiPM, the voltage level at one of the SPAD

terminals is sensed and digitized by an logic gate. Therefore,

the digital SiPM is insensitive to any change in the breakdown

voltage as long as the switching threshold of the gate is

reached. The remaining drift observed in the digital SiPM is

due to the change in the photon detection efficiency, caused

by the temperature-dependent avalanche initiation probability.

This drift can only be compensated for by adapting the bias

voltage of the device.

One advantage of the digital SiPM is the possibility to

integrate the bias voltage generator on the same die. A variable

bias voltage source could be realized using e.g. a charge pump

circuit. The charge pump, together with a suitable temperature

sensor or direct breakdown voltage measurement circuit would

allow to completely compensate any temperature dependencies

of the photon detection efficiency of the device. It would

also simplify system integration, as the breakdown voltages

of individual devices can differ significantly from each other.

We measured the drift of both PDE and TDC using an

attenuated picosecond laser with approximately 2100 photons

per pulse. The nominal time resolution at this photon count

was 24 ps FWHM. We observed a drift of 0.33% per degree

Celsius in the average number of photons per pulse over a

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Fig. 12. Temperature drift of the mean photon count in the laser pulse.

Fig. 13. Temperature drift of the pulse time stamp.

range of 15 ◦C to 25 ◦C (see Fig. 12). This drift is an order

of magnitude lower compared to the analog silicon photo-

multiplier [5]. As the time-to-digital converter is integrated

next to the SiPM pixel, both the TDC and trigger network are

also affected by any changes in the die temperature. The time

stamp drift has been measured to be 15.3 ps per degree Celsius

(Fig. 13). This drift can be measured and compensated for

using a dedicated electrical SYNC signal, which is intended to

synchronize and calibrate the individual time stamping circuits

in large detectors.

VIII. SCINTILLATOR MEASUREMENTS

The performance of the sensor with scintillators of different

sizes has been measured and published in [5]. As an example,

two 3 mm × 3 mm × 5 mm LYSO scintillator crystals were

measured in coincidence using a 22Na source. The crystals

were wrapped in Teflon tape and mounted to the sensors using

MeltMount. The measurements were done at room temperature

and at the nominal excess voltage of 3.3 V. The energy

resolution was found to be 10.7%, and a coincidence resolving

time of 153 ps for events in the photopeak was measured.

IX. SUMMARY

We have developed a fully digital implementation of the

Silicon Photomultiplier. The device is manufactured in a

high-volume CMOS process and includes the single photon

avalanche photodiodes, the detection and readout circuits as

well as the time-to-digital converter on the same chip. The

sensor is capable of detecting single photons with a time

resolution of 140 ps FWHM. At higher photon counts, the

time resolution of the device increases to 24 ps FWHM.

The device has low temperature dependence and low power

consumption. Measurements using LYSO scintillator crystals

demonstrate the intrinsically good performance of the sensor.

Energy resolution of 10.7% and a coincidence resolving time

of 153 ps FWHM were measured under normal operating

conditions.

One of the benefits of the presented sensor architecture is

its flexibility and extensibility. Depending on the area and

power constraints, advanced data processing can be integrated

on the same die, thereby opening the way to detector-on-

chip designs. Integrated data reduction algorithms and the

possibility to daisy-chain sensors can further simplify the

construction of large-area detector systems. Moreover, the

various configuration options enable the user to optimize the

detector performance for the given operating conditions.

ACKNOWLEDGMENT

The authors thank Dr. Hein Valk of NXP Semiconductors

for many constructive discussions during the process develop-

ment and CMOS integration of the single photon avalanche

photodiode.

REFERENCES

[1] Saint-Gobain Crystals, Physical Properties of Common Inorganic Scin-tillators. Available: http://www.detectors.saint-gobain.com/.

[2] D. Renker and E. Lorenz, ”Advances in solid state photon detectors,”Journal of Instrumentation, vol. 4, no. 4, p. P04004, 2009.

[3] R. F. Post and L. I. Schiff, ”Statistical limitations on the resolving timeof a scintillation counter,” Phys. Rev., vol. 80, p. 1113, 1950.

[4] S. M. Sze, Physics of Semiconductor Devices, 2nd ed. John Wiley &Sons, 1981.

[5] C. Degenhardt et al., ”The digital silicon photomultiplier - A novel sensorfor the detection of scintillation light,” Nuclear Science SymposiumConference Record, J04-1, 2009.

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