The CVD diamond booklet - Diamond · PDF fileThe CVD diamond booklet Page 2 CVD Diamond wafers...

28
The CVD diamond booklet The CVD diamond booklet The CVD diamond booklet The CVD diamond booklet available at: www.diamond-materials.com/download

Transcript of The CVD diamond booklet - Diamond · PDF fileThe CVD diamond booklet Page 2 CVD Diamond wafers...

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

available at: www.diamond-materials.com/download

Content

1.1.1.1. General properties of diamondGeneral properties of diamondGeneral properties of diamondGeneral properties of diamond ................................................................................................................................................ 3333

2.2.2.2. Optical Optical Optical Optical PropertiesPropertiesPropertiesProperties .................................................................................................................................................................................................................................... 5555 Optical transparency ....................................................... 5 Absorption coefficient at 10.6 µm ................................. 6

Refractive index: n vs. λ .................................................. 7 Refractive index: nd vs. T ................................................ 8 Refractive index: Thermal coefficient ............................ 9 X-ray absorption ........................................................... 10 THz dielectric properties ............................................... 11 Optical specifications of Diamond Materials ............... 12

Surface finish, optical coatings and mounting ........ 13

3.3.3.3. Thermal PropertiesThermal PropertiesThermal PropertiesThermal Properties .................................................................................................................................................................................................................... 14141414 Thermal conductivity .................................................... 14 Thermal conductivity vs. T ............................................ 15 Specific heat vs. T .......................................................... 16 Thermal expansion ........................................................ 17 Thermal specifications of Diamond Materials ............. 18

4.4.4.4. Mechanical PropertiesMechanical PropertiesMechanical PropertiesMechanical Properties ................................................................................................................................................................................................ 19191919 Vickers-Hardness ........................................................... 19 Mechanical specifications of Diamond Materials ........ 20

5.5.5.5. Examples of CVD diamond appliExamples of CVD diamond appliExamples of CVD diamond appliExamples of CVD diamond applicationscationscationscations .................................................................................... 21212121

6.6.6.6. Useful formulaUseful formulaUseful formulaUseful formula ................................................................................................................................................................................................................................................ 24242424 Bowing of a circular disk under pressure..................... 24 Thickness requirements ................................................ 24

Contact Diamond MaterialsContact Diamond MaterialsContact Diamond MaterialsContact Diamond Materials ........................................................................................................................................................................................ 25252525

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 1

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 2

CVD Diamond wafers prepared by Microwave Plasma CVD: boron doped disk (blue), optical grade diamond, mechanical grade, unpolished disk

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 3

1.1.1.1. General properties of diamondGeneral properties of diamondGeneral properties of diamondGeneral properties of diamond

The most important properties of CVD diamond are the

• unsurpassed hardness

• extremely high thermal conductivity (>1800 W/mK, five times that of copper)

• broad band optical transparency

• extremely chemically inert: Not affected by any acid or other chemicals

• Graphitization only at very high temperatures (T > 700°C in an oxygen containing and 1500°C in an inert atmosphere)

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 4

*highest value of all solid materials

PropertyPropertyPropertyProperty ValueValueValueValue

Vickers hardness* 10,000 kg/mm2

Young's modulus* 1050 GPa

Poisson's ratio 0.1

Density 3.515 g/cm3

Atom density* 1.77×1023 1/cm3

Thermal expansion coefficient 1.0×10-6/K @300K

Sound velocity* 17,500 m/s

Friction coefficient 0.1

Specific heat @ 20°C 0.502 J/gK

Debye temperature* 1860±10K

Bandgap 5.45 eV

Resistivity 1013 - 1016 cm

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 5

2.2.2.2. Optical PropertiesOptical PropertiesOptical PropertiesOptical Properties

Optical transparency

1 10 1000

10

20

30

40

50

60

70

80

Tra

nsm

issi

on

(%

)

Wavelength (µm)

Optical transparency of CVD diamond In the UV, Visible, IR and far IR

The spectrum has not been corrected for reflection losses

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 6

Absorption coefficient at 10.6 µm

9.0 9.5 10.0 10.5 11.00.08

0.09

0.10

0.11

0.12

0.13

0.14

Ab

sorp

tio

n c

oeff

. (c

m-1)

Wavelength (µm)

Absorption coefficient of CVD diamond as measured by laser calorimetry.

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 7

Refractive index: n vs. λ

1 10 1002.35

2.40

2.45

2.50

Re

fract

ive i

nd

ex

Wavelength (µm)

The spectral variation of n is described by the Sellmeier equation:1

1106

3356.4

175

3306.0222

2

222

2

+−

+−

=nmx

x

nmx

xn

where x is the wavelength in nm

1 Peter, F. (1923), Z Phys, 15, pp 358–368

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 8

Refractive index: nd vs. T

0 200 400 600 800 1000

0

2

4

6

8

10

12

14

16

∆n

d/n

d (

10

-3)

Temperature (°C)

Variation of nd with temperature Patterson et al.2

our data measured at 633 nm wavelength

2 M.J. Pattersonet et al., Electrochem. Soc. Proc. 95-4, 503 (1995)

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 9

Refractive index: Thermal coefficient

-200 0 200 400 600 800

0.0

1.0

2.0

3.0

4.0

5.0

dn

/dT (

10

-5/K

)

Temperature (°C)

Thermal coefficient of the refractive index

Measured by laser refraction of a diamond prism

Measured with laser interferometry Fontanella et al.3

3 J. Fontanella et al., Appl. Opt. 16, 2949 (1977)

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 10

X-ray absorption

0 10 20 30 40 501E-5

1E-4

1E-3

0.01

0.1

1

Tin

Lead

Titanium

Beryllium

Diamond

Ab

sorp

tio

n C

oeff

icie

nt

(1/µ

m)

Energy (keV)

X-ray absorption coefficient of various materials. Data from http://www.photcoef.com

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 11

THz dielectric properties

0.5 1.0 1.5 2.0 2.5 3.0 3.5-20

-15

-10

-5

0

5

10

15

2010 20 30 40 50 60 70 80 90 100 110

10 20 30 40 50 60 70 80 90 100 1100.0

0.5

1.0

1.5

2.0

2.5

3.00.5 1.0 1.5 2.0 2.5 3.0 3.5

CVD Diamond

Absorp

tion C

oeff

icie

nt

[cm

-1]

Frequency [THz]

Wavenumbers [cm-1]

Refr

active I

ndex

Wavenumbers [cm-1]

data from Peter Uhd Jepsen, University of Freiburg

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 12

Optical specifications of Diamond Materials

The core competences of Diamond Materials include the manufacturing of high purity CVD diamond disks with properties approaching those of perfect natural diamond crystals.

PropertyPropertyPropertyProperty ValueValueValueValue

Transmission 225nm to far IR , > 70% @ 10µm

Refractive index 2.38 @ 10µm, 2.41 @ 500nm

Absorption coefficient ≤ 0.10 cm-1 @ 10µm

Bandgap 5.45 eV

Tensile strength (0.5mm thick)

Nucleation surface in tension 600 MPa

Growth surface in tension 400 MPa

Loss tangent (tanδ @140 GHz) < 2.0×10-5

Dielectric constant 5.7

Properties of optical grade CVD-diamond by Diamond Materials

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 13

Surface finish, optical coatings and mounting

PropertyPropertyPropertyProperty ValueValueValueValue

Dimensions

Thickness 10 - 2000 µm

Diameter up to 100 mm

Surface finish

Shape flat, spherical (convex & concave)

Roughness < 5 nm*

Flatness 1 fringe/cm*

Wedge 0 – 1°*

Antireflection Coatings (visible and infrared)

Spec. Transmission at 10.6 µm >98.6 %

Wavefront distortion

< 4 fringes at 633 nm over 30 mm*

Mounting

Diamond windows mounted e.g. in UHV flanges (bakeable at 250°C, vacuum tight < 10-10 mbar l/s)*

*specifications available upon request

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 14

3.3.3.3. Thermal PropertiesThermal PropertiesThermal PropertiesThermal Properties

Thermal conductivity

0

500

1000

1500

2000

Sap

ph

ire

Sil

ico

n

AlN

Co

pp

er

CV

D D

iam

on

d

Th

erm

al C

on

du

ctiv

ity (

W/m

K)

Material

The thermal conductivity of diamond in comparison to other materials.

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 15

Thermal conductivity vs. T

-200 -100 0 100 200 300

0

500

1000

1500

2000

2500

3000

3500

4000

4500

5000

5500

Th

erm

al

Co

nd

uct

ivit

y (

W/m

K)

Temperature (°C)

Thermal conductivity of CVD diamond vs. temperature

CVD diamond Theory

Copper

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 16

Specific heat vs. T

50 100 150 200 250 300 350 400 450 5001E-5

1E-4

1E-3

0.01

0.1

1

Sp

eci

fic

heat

(kJ/

Kg

K)

Temperature (K)

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 17

Thermal expansion

0 100 200 300 400 5000.5

1.0

1.5

2.0

2.5

3.0

3.5

4.0

Th

erm

al Exp

an

sio

n (

10

-6/K

)

Temperature (°C)

Thermal expansion vs. temperature

High quality CVD diamond Medium quality CVD diamond Values recommended by Slack4

4 G.A. Slack and S.F. Bartram, J. Appl. Phys. 46, 89 (1975)

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 18

Thermal specifications of Diamond Materials

Optimized CVD-diamond as provided by Diamond Materials reaches a thermal conductivity of up to 2000 W/mK e.g. it exceeds that of copper by a factor of five. In contrast to metals, where heat is conducted by electrons, lattice vibrations are responsible for the high thermal conductivity of diamond.

PropertyPropertyPropertyProperty ValueValueValueValue

Thermal conductivity

@300 K

> 1200 W/mK* > 1500 W/mK*

> 1800 W/mK*

Thermal expansion coefficient

@300 K 1.0 +/- 0.1 × 10-6/K

@700 K 4.4 +/- 0.1 × 10-6/K

Specific heat @ 20°C 0.502 J/gK

Debye temperature 1860±10K

* various thermal grades are available upon request

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 19

4.4.4.4. Mechanical PropertiesMechanical PropertiesMechanical PropertiesMechanical Properties

Vickers-Hardness

0

2000

4000

6000

8000

10000

Talc

Gyp

sum

Calc

ite

Flu

ori

te

Ap

tite

Co

run

du

m

To

paz

Qu

art

z

Ort

ho

cals

e

CV

D D

iam

on

d

Vic

kers

-Hard

ne

ss (

kg

/mm

2)

Material

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 20

Mechanical specifications of Diamond Materials

CVD diamond manufactured by Diamond Materials exhibits an exceptional wear resistance and a low coefficient of friction. Highly demanding applications such as cutting tools, surgical knives and wear resistant components have been demonstrated.

PropertyPropertyPropertyProperty ValueValueValueValue

Vickers hardness 10,000 kg/mm2

Young's modulus 1050 GPa

Poisson's ratio 0.1

Thermal expansion coefficient 1.0×10-6/K @300K

Tensile strength (0.5mm thick)

Nucleation surface in tension 1100 MPa

Growth surface in tension 500 MPa

Density 3.515 g/cm3

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 21

5.5.5.5. Examples of CVD diamond applicationsExamples of CVD diamond applicationsExamples of CVD diamond applicationsExamples of CVD diamond applications

CVD diamond window beam splitter for space application

CVD diamond UHV window

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 22

Ultra-high precision diamond balls

CVD diamond laser windows for high-power CO2 lasers

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 23

CVD diamond wafers (80 mm Ø)

High-power X-ray window

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 24

6.6.6.6. Useful formulaUseful formulaUseful formulaUseful formula

Bowing of a circular disk under pressure5

( )ν

ν

+

+=

164

5Pr

4

Swss

Swcl

64

1Pr

4= )1(12

2

3

ν−=

ElS

where w = central deflection (ss = simply supported, cl = clamped), E = Young’s modulus, L = thickness, P = pressure, v = Poisson ratio, r = radius

Thickness requirements6

For flat windows, the minimum thickness as determined by pressure-induced fracture is given by

f/σsfpSDL ∆= 554.0

where L = minimum thickness, σf = mechanical strength, ∆p = pressure difference, D = diameter, Ssf = safety factor

Typically mechanical strength values are in the 2000-400 MPa range depending on thickness. As a rule of thumb the minimum thickness is 1.7 % of the free diameter (one bar pressure difference, Ssf = 4).

5 Warren C. Young, “Roark’s Formulas for Stress & Strain”, McGraw-Hill, New York (1989) 6 C.A. Klein, SPIE 1624, 475 (1992)

The CVD diamond bookletThe CVD diamond bookletThe CVD diamond bookletThe CVD diamond booklet

Page 25

Contact Diamond MaterialsContact Diamond MaterialsContact Diamond MaterialsContact Diamond Materials

Contact persons: Dr. Christoph Wild Dr. Eckhard Wörner

Internet: www.diamond-materials.com

E-mail: [email protected]

Telefon: +49 (0)761 600 6554

Fax: +49 (0)761 600 6553 Address: Diamond Materials GmbH Hans-Bunte-Str. 19 79108 Freiburg Germany

Images © Diamond Materials / Fraunhofer IAF This booklet may be freely distributed provided that it is unaltered and that no charge is made and this copyright notice is retained.