TEXMEMS VII The 18 mm2 Classroom v2 - TTU · Nano Tech Center SUMMiT V Process 2.0 µm SacOx3 (CMP)...

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Nano Nano Tech Tech Center Center The 18 mm The 18 mm 2 2 Classroom Classroom T. Dallas, J. Berg, & R. Gale

Transcript of TEXMEMS VII The 18 mm2 Classroom v2 - TTU · Nano Tech Center SUMMiT V Process 2.0 µm SacOx3 (CMP)...

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The 18 mmThe 18 mm22

ClassroomClassroomT. Dallas, J. Berg, & R. Gale

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Thesis & OutlineThesis & Outline• Implementation and initial outcomes

regarding the incorporation of Sandia’s SUMMiT V MEMS design, visualization, and fabrication into the MEMS curriculum at Texas Tech University.

1. TTU MEMS Curriculum2. SUMMiT V & University Alliance Program3. Results – Spring 20054. Conclusions

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MEMS @ TTUMEMS @ TTU

• NSF Combined Research and Curriculum Development Grant (Fall 2000)– Lab based Classes in EE/ME/Phys

• Humidity Sensor• Accelerometer• PDMS Microfluidics• DNA Sensor-on-a-Chip

– Lecture and Simulation Based– Simulation Based– Design (SUMMiT V) & Simulation Based– Design (SUMMiT V), Simulation, & Testing

MEMS IMEMS IIMEMS III

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University Alliance ProgramUniversity Alliance Program

• Site license for up to 50 seats of SUMMiT™ design and visualization software for use in the lab or classroom by course participants– Sandia Advanced MEMS Design Tools and access to Sandia's

remote design rule checker – Sandia 2D-3D Visualizer Tools & 3D Geometry Modeler for

SUMMiT™ design • Instructional materials from all of Sandia's MEMS Short Courses

– Sandia MEMS Introductory Short Course – Sandia MEMS Advanced Design Short Course – Sandia MEMS Reliability Short Course

• Training and technical support for the university Superuser– Sandia MEMS Introductory Short Course – Sandia MEMS Advanced Design Short Course

• UA members will receive released parts. $5000

source: http://www.sandia.gov/mstc/education/alliance/

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MEMS II/III Spring 2005MEMS II/III Spring 2005

• What should we build?• What can we build?• What can we design and/or simulate in

the time allotted (~3 months)?• What will the students get out of all of

this?

?? Pertinent Questions ??

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Henry Ford & SUMMiT VHenry Ford & SUMMiT V

“Any customer can have a car painted any color that he wants so long as it is black.” – H. Ford

“You can use any material you want as long as it is polysilicon.” - Sandia

“You can use any polySi thickness you want as long as poly1 is 1.0 microns, Poly2 is 1.5 microns, etc.” - Sandia

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SUMMiT V ProcessSUMMiT V Process

2.0 µm SacOx3 (CMP)0.4 µm Dimple3 gap

PECVD

0.3 µm MMpoly0

1.5 µm MMpoly20.3 µm SacOx2

Substrate 6 inch wafer, <100>, n-type-

LPCVD

LPCVD

2.0 m sacox4 (CMP)2.0 mm sacox4 (CMP)

2.0 µm SacOx1

0.5 µm Dimple1 gap

0.80 µm Silicon Nitride0.63 µm Thermal SiO2

1.0 µm MMpoly1

2.25 µm MMpoly3

2.25 µm MMpoly4LPCVD

0.2 µm Dimple4 gapPECVD 2.0 µm SacOx4 (CMP)

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A starting place: Prior ArtA starting place: Prior Art

• Literature search to see what has been published using SUMMiT V.

• Other polysilicon devices.• New ideas.

Students were initially responsible for …

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The ToolsThe Tools

• AutoCAD• Sandia plug-ins

– Design Tools– Standard Parts Library– 2D Visualizer– 3D Visualizer– Design Rule Checker

• ANSYS

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TTU 18 mmTTU 18 mm22 Module DesignModule DesignSpring 2005Spring 2005

2.82 mm

6.34 mm

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NonNon--simulated Designssimulated Designs

• smallTime (microClock)– First student design

• microChain– Modified and enhanced version of

previous work by Sandia• microAFM

– Prototype XY stage– Pseudo AFM cantilever arm and tip

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smallTimesmallTime

• TRA driven• High gearing ratio

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smallTimesmallTime

Phillip Beverly – Session 4: Thursday 1:20pm

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smallTimesmallTime

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µµAFMAFM

Phillip Beverly – Session 4: Thursday 1:20pm

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µµAFMAFM--Tip AssemblyTip Assembly

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µµAFMAFM--TipTip

One SUMMiT V anti-stiction dimple

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SEM of SEM of µµAFM & AFM & µµClockClock

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µµChainChain

Shad Holt – Session 1 (Wiggins Room): Wednesday 12:00pm

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Chain, Sprocket and GuideChain, Sprocket and Guide

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Chain TensionerChain Tensioner

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SEM of SEM of µµChainChain

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Simulated DesignsSimulated Designs: : µµMirrorsMirrorsTorsionArray

Piston Array

Analog control beyond snap down voltage?

B. Kawade – Session 1 (Wiggins Room): Wednesday 11:40pmJordan Berg – Session 2 (Wiggins Room): Wednesday 1:50pm

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Torsion Torsion µµMicromirror ArrayMicromirror ArrayMirror dimensions:• Pitch: 32 µm• Size: 25 µm x 25 µm @ poly3• Spring length: 400 µmPerformance• Analog translation: 0.36 µm• Analog rotation: 8°• Voltage: 50 V

Mechanical stop

Hinge/Mirror

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ANSYS Modeling of MirrorANSYS Modeling of Mirror

Line Model

Drive And Auxiliary Electrodes

Top View

Meshed Model

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SEM of MirrorsSEM of MirrorsTorsion

Piston

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OutcomesOutcomes• Students learned a lot about MEMS design,

simulation, and processing• Won design competition

– more importantly: design was fabricated and we now are in the process of testing the devices.

• Devices will benefit research – journal articles• Start of recurring process for MEMS class

activities• Generated interest in next class of students

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ConclusionsConclusions

• Students motivated by contest• Students motivated by tie-in to own

research• Students discover difficulty in design• Fabricated devices will allow

testing/characterization by subsequent classes

• “Curriculum” can be tailored to each students needs and interests.

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AcknowledgementsAcknowledgements

• MEMS II/III Students – Spring 2005– Phillip Beverly, Shad Holt, Meetul Goyal, Erika Washington,

Balasaheb Kawade, Vinayak Raja, Ananth Krishnan, Yeong-Jer Chen, Ranjith Podival, Shashikant Shrimali

– Lu Tian and Jongsin Yun (Imaging and Electronics)

• TTU TLTC Grant• NSF ECS #0326218• Sandia MESA Group