Technology Leadership in the Mobility Era Bohr_Intel.pdf · Tri-Gate provides steepest...
Transcript of Technology Leadership in the Mobility Era Bohr_Intel.pdf · Tri-Gate provides steepest...
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Technology Leadership
in the Mobility Era
Mark Bohr Intel Corporation
July 9, 2012
SEMI/Gartner Market Symposium
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1970 1980 1990 2000 2010 2020 2030
nmMicron0.7x every
2 years45nm
22nm32nm
Transistor Scaling
Transistor dimensions scale to improve performance, reduce power and reduce cost per transistor
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0.0001
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um
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um
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90 n
m
65 n
m
45 n
m
32 n
m
22 n
m
14 n
m
Rel
ativ
e
Technology Generation
Gate Delay (CV/I)
SwitchingEnergy(CV2)
Transistor Performance and Power
Classical transistor scaling provided improvements in performance and active power (switching energy)
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0.0001
0.001
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um
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90 n
m
65 n
m
45 n
m
32 n
m
22 n
m
14 n
m
Rel
ativ
e
Technology Generation
Gate Delay (CV/I)
LeakageCurrent
(IOFF)
SwitchingEnergy(CV2)
Transistor Performance and Power
… but at the expense of increased leakage current
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Non-Classical Scaling
Strained Silicon
High-k Metal Gate
Tri-Gate
90 nm 65 nm 45 nm 32 nm 22 nm 2003 2005 2007 2009 2011
Scaling now requires innovations in transistor structure and materials
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um
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1.0
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.70
um
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um
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um
.25
um
.18
um
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um
90 n
m
65 n
m
45 n
m
32 n
m
22 n
m
14 n
m
Rel
ativ
e
Technology Generation
Gate Delay (CV/I)
SwitchingEnergy(CV2)
LeakageCurrent
(IOFF)
Transistor Performance and Power
Transistor scaling now focuses on reducing leakage
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0.0001
0.001
0.01
0.1
1
2.0
um
1.5
um
1.0
um
.70
um
.50
um
.35
um
.25
um
.18
um
.13
um
90 n
m
65 n
m
45 n
m
32 n
m
22 n
m
14 n
m
Rel
ativ
e
Technology Generation
Gate Delay (CV/I)
SwitchingEnergy(CV2)
LeakageCurrent
(IOFF)
Transistor Performance and Power
… and continues to provide improvements in performance and power
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Transistor Performance vs. Leakage
32nm 45nm 1x
0.1x
0.01x
0.001x
65nm 22nm
Low
er T
rans
isto
r Lea
kage
Higher Transistor Performance (Switching Speed)
Transistors now improving on both performance and leakage vectors
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Transistor Performance vs. Leakage
32nm 45nm 1x
0.1x
0.01x
0.001x
65nm 22nm
Low
er T
rans
isto
r Lea
kage
Higher Transistor Performance (Switching Speed)
Laptop UltrabookTM
Tablet
Pocket Device
Server
Desktop
Wider range of transistors to support a wider range of products
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Intel Technology Roadmap
32 nm 22 nm 14 nm
Name: P1268 P1269 P1270 P1271 P1272 P1273
Products: CPU SoC CPU SoC CPU SoC
Intel develops both CPU and SOC versions of each generation
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Intel Technology Roadmap
32 nm 22 nm 14 nm
Name: P1268 P1269 P1270 P1271 P1272 P1273
Products: CPU SoC CPU SoC CPU SoC
Intel develops both CPU and SOC versions of each generation
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Low Power Smartphone Products
Medfield Phone 32 nm Atom Medfield SoC 432 million transistors, 64 mm2
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Low Power Smartphone Products
32 nm SoC Technology
Intel Developer Forum, Sep. 2009
32 nm Atom Medfield SoC 432 million transistors, 64 mm2
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Low Power Smartphone Products
32 nm SoC Technology 32 nm SoC transistors range from high performance to low power
Intel Developer Forum, Sep. 2009
Low
er L
eaka
ge
Higher Performance
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Intel Technology Roadmap
32 nm 22 nm 14 nm
Name: P1268 P1269 P1270 P1271 P1272 P1273
Products: CPU SoC CPU SoC CPU SoC
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Gates Fins
32 nm Planar Transistors
22 nm Tri-Gate Transistors
22 nm generation introduces revolutionary 3-D Tri-Gate transistors
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1E-05
0.0001
0.001
0.01
0.1
1
10
0.0 0.2 0.4 0.6 0.8 1.0
Tri-Gate<80
mV/dec
Gate Voltage (V)
Channel Current
(normalized)
Planar~100
mV/dec
Fully Depleted Device
Tri-Gate transistors are fully depleted devices offering a steeper sub-threshold slope
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1.E-09
1.E-08
1.E-07
1.E-06
1.E-05
1.E-04
1.E-03
1.E-02
-1.0 -0.6 -0.2 0.2 0.6 1.0
Driv
e C
urre
nt (
A/u
m)
VGS (V)
0.80V
SS ~69mV/decDIBL ~46 mV/V
SS ~72mV/decDIBL ~50 mV/V
NMOSPMOS
0.05V
0.80V
0.05V
Lg=26nm
C. Auth, 2012 VLSI
22 nm Tri-Gate I-V Curves
Tri-Gate provides steepest sub-threshold slope and best short channel (DIBL) values of any technology in manufacturing
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0.6
0.8
1.0
1.2
1.4
1.6
1.8
2.0
0.5 0.6 0.7 0.8 0.9 1.0 1.1
22 nm Tri-Gate
32 nmPlanar
-0.2 V
Operating Voltage (V)
Transistor Gate Delay (normalized)
37% Faster
Performance/Power Benefits
Tri-Gate provides an unprecedented 37% speed up at low voltage or 50% active power reduction at same performance
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Reduced Channel Doping
Fully depleted Tri-Gate structure allows for reduced channel doping, providing improved performance and reduced variability
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22 nm Tri-Gate Transistors
Gate Contact
34 nm Fin Height
90 nm Gate Pitch
34 nm Fin Height
8nm Fin
Width
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22 nm Interconnects
Minimum pitch scaled ~0.7x from 32 nm for 2x transistor density
Layer Pitch TM 14 um M8 360 nm M7 320 nm M6 240 nm M5 160 nm M4 112 nm M3 80 nm M2 80 nm M1 90 nm
M8 M7 M6 M5 M4 M3 M2 M1
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0.01
0.1
1
10
180nm130nm 90nm 65nm 45nm 32nm 22nm
SR
AM
Cel
l Siz
e (u
m2 )
Technology Node
0.092 um2
0.5x per generation
SRAM Cells
0.092 um2 and 0.108 um2 SRAM cells optimized for density and power/performance
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162Mb SRAM array 0.108 um2 cell size
>1800 dies
-10C 95C
E. Karl, 2012 ISSCC
SRAM Array VMIN
0.60V medium active VMIN for low power applications
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22 nm Ivy Bridge Processor
4 Cores + Integrated Graphics 1.4 Billion Transistors, 160 mm2
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22 nm Defect Density Trend
Defect Density(cm-2)
2007 2008 2009 2010 2011 2012 2013
~2 year
22 nm defect density now at low levels for volume manufacturing
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22 nm Manufacturing Fabs
D1C Oregon
Fab 12 Arizona Fab 32 Arizona Fab 28 Israel
D1D Oregon
In production 2Q‘12
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Intel Technology Roadmap
32 nm 22 nm 14 nm
Name: P1268 P1269 P1270 P1271 P1272 P1273
Products: CPU SoC CPU SoC CPU SoC
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CPU vs. SoC Technology Comparison
CPU (P1270) SoC (P1271) Similarities Tri-Gate Structure Same Same Tight Transistor Pitch Same Same Dense SRAM Cell Same Same Lower Level Interconnects Same Same Fab Process Equipment Same Same
Differences Logic Transistors High Speed Low Leakage I/O Transistors Std Voltage Std and High Voltage Upper Level Interconnects High Speed Dense Precision Passives None R, C and L
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8-11 Layer Stacks
Metal I/O Trans Voltage
1.8V Thick Gate
1.2V Low Power
Passives
Precision Resistor
MIM Capacitor
High Q Inductor
Logic Transistor
Std Performance
Low Power
High Performance
Ultra Low Power
Embedded Memory
High Dense SRAM
Low Voltage SRAM
High Speed SRAM
HD OTP e-Fuse
3.3V Thick Gate
22 nm SoC Technology Features
22 nm SoC technology offers a rich menu of feature options
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Transistor Performance vs. Leakage
32nm 45nm 1x
0.1x
0.01x
0.001x
65nm 22nm
Low
er T
rans
isto
r Lea
kage
Higher Transistor Performance (Switching Speed)
22 nm SoC technology offers a wide range of transistors
High Perf.
Std Perf.
Low Power
Ultra Low Power
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22 nm SoC Interconnect Options
Range of SoC interconnect options for low cost or high density
Layer A B C TM 14 14 14 um M10 - - 360 nm M9 - 360 360 nm M8 360 240 160 nm M7 240 160 108 nm M6 160 108 80 nm M5 108 80 80 nm M4 80 80 80 nm M3 80 80 80 nm M2 80 80 80 nm M1 90 90 90 nm
TM
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GrapheneIII-V 3-D
MaterialsSynthesis
Dense Memory
EUV
Interconnects NanowiresPhotonics
Innovation Enabled Technology Pipeline
Future options subject to change
32 nm 22 nm 14 nm 10 nm 7 nm 5 nm 2009 2011 2013 2015+
Manufacturing Development Research
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Advantage of an Integrated Device Manufacturer
Packaging Masks
Process
Design Tools
Product
Manufacturing
Design for Manufacturing Co-Optimized Process+Product
Rapid Yield Learning Early Product Ramp
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Conclusion
• Transistor scaling continues to provide improvements in performance, power and cost, but now with greater focus on active and leakage power reduction
• Scaling no longer follows a “traditional’” path and requires continued innovations in materials and structures
• A highly integrated approach is needed to successfully bring innovative technologies from the research phase to high volume manufacturing
• Low power System-on-Chip technologies are increasingly important to support the wide range of features needed on mobile computing devices