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Energy Challenges and Energy-Saving Opportunities for Semiconductor Manufacturing Industry J. M. Tsao and S.C. Hu Department of Air-Conditioning and Refrigeration Engineering National Taipei University of Technology Taipei, Taiwan ROC

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E n e rgy Challenges and Energy-Saving Opportunities for Semiconductor Manufacturing Industry

J. M. Tsao and S.C. HuDepartment of Air-Conditioning and Refrigeration Engineering

National Taipei University of TechnologyTaipei, Taiwan ROC

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