Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure...

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Transcript of Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure...

Page 1: Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure 2: Microphotograph of fabricated accelerometer the DETF structure to the lever arm
Page 2: Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure 2: Microphotograph of fabricated accelerometer the DETF structure to the lever arm
Page 3: Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure 2: Microphotograph of fabricated accelerometer the DETF structure to the lever arm
Page 4: Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure 2: Microphotograph of fabricated accelerometer the DETF structure to the lever arm