Surface finish metrology iss1

178
Surface Finish Metrology © 2000 Taylor Hobson Ltd Centre of Excellence Taylor Hobson Ltd

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Transcript of Surface finish metrology iss1

Page 1: Surface finish metrology iss1

Surface Finish Metrology

© 2000 Taylor Hobson Ltd

Centre of Excellence

Taylor Hobson Ltd

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Contents 1. Why do we need to measure Surface Finish?

2. Measurement Methods

3. Measurement Datums

4. Reproducing the Surface

5. Terminology

6. Filters

7. Parameters

8. Bearing Area (Material Ratio)

9. The Rk Parameter

10. Form Measurement

11. Calibration Methods.

12. Conics and Aspherics.

13. 3D (Areal) Measurement.

14. Drawing Indication.

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Why do we need to measure Surface

Finish?

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Nature of Surfaces

The microstructure of the material

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Nature of Surfaces

The microstructure of the material The action of the cutting tool

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Nature of Surfaces

The microstructure of the material The action of the cutting tool The instability of the cutting tool on the material

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Nature of Surfaces

The microstructure of the material The action of the cutting tool The instability of the cutting tool on the material

Errors in machine tool guideways

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Nature of Surfaces

The microstructure of the material The action of the cutting tool The instability of the cutting tool on the material

Errors in machine tool guideways Deformations due to stress patterns in the component

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Nature of Surfaces

The microstructure of the material The action of the cutting tool The instability of the cutting tool on the material

Errors in machine tool guideways Deformations due to stress patterns in the component

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Unwanted Properties on a Surface

Deep valleys which may be susceptible to crack propagation

Too many peaks which may cause early surface breakdown and wear when in contact with a mating component

Excessive waviness which may cause noise or indicate machining problems

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Wanted Properties on a Surface

Sufficient valleys for oil retention when lubrication is an important factor

Sufficient peaks for retention of paint and adhesives

Sufficient distribution of valleys for formability

Smooth surface profiles for reduced, noise, vibration or high reflectance.

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Why Do We Need to Measure Surface Finish?

Process Control

Predicting Component Behaviour

Monitoring Component Performance

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Why Do We Need to Measure Surface Finish?

The Ideal Situation

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Why Do We Need to Measure Surface Finish?

The Reality - Process Control

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Why Do We Need to Measure Surface Finish?

Predicting Component Behaviour

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Why Do We Need to Measure Surface Finish?

Monitoring Component PerformanceBack to Contents Page

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Measurement Methods

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Measurement Methods

Contact Type Instruments

Non-Contact Type Instruments

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How Do We Measure Surface Finish?

Comparison Plates

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Contact Type Instrument

Measurement Methods

Traverse Direction (X)

Stylus Movement (Z)

Data Point Spacing (X)

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Inductive Type of Transducer

Stylus

Beam

Knife Edge Pivots

Ferrite Slug (Armature)

Coil

Coil

Measurement Methods

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Piezo-Electric Type of Transducer

Stylus

Beam Piezo Element

Measurement Methods

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Laser

PhotoDiode

Laser Type of Transducer

Stylus

Beam

Back to Contents Page

Click Here for Further Information

Measurement Methods

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Measurement Datums

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Skid (surface) Datum

Skid Stylus Movement (Z)

Traverse Direction (X)

Measurement Datums

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Benefits of Using a Skid Datum

• Reduces Effects of Vibration• No Surface Levelling Required • Instrument Portability • Robust Design

Measurement Datums

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Effect of Skid to Stylus Pitch

Actual Height

H1 H2 Apparent Height

Measurement Datums

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Effect of Skid to Stylus Pitch

Resultant Profile P-V = 0µm

P-V = 10µm

Measurement Datums

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Independent Datum

Traverse Unit Datum Traverse Direction

Measurement Datums

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Independent Datum

Traverse Unit Datum

Datum SkidOptical Flat

Traverse Direction

Measurement Datums

Back to Contents Page

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Reproducing the Surface

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Stylus Tip Geometry

2µm

Conisphere Stylus Truncated Pyramid Stylus

2µm

Traverse Direction

Reproducing the Surface

Click Here for Further Information

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Stylus Tip - Effects of Tip Size & Shape

Reproducing the Surface

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Stylus Tip - Flanking

Reproducing the Surface

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Profile produced by Stylus

Stylus Tip

B

BA

A

Stylus Tip - Flanking Back to Contents Page

Reproducing the Surface

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Terminology

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Data PointsTerminology

AliasingSampling Interval

True Signal Aliasing Signal

Click Here for Further Information

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Terminology

Roughness, Waviness & Form

Sample Surface

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Terminology

Roughness, Waviness & Form

Form

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Terminology

Roughness, Waviness & Form

Waviness

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Terminology

Roughness, Waviness & Form

Roughness

Back to Contents Page

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Filters

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Terminology

Filtering-Separates Roughness and Waviness

Surface Interaction

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Filtering Using Graphical TechniquesSampling Length

Filters

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Filters

Form

Sample

Cut-off

Ra,Rq,Rz etc...Roughness Filter

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Filters

Form

Sample

Cut-off

Wa,Wq,Wz etc...Waviness Filter

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Electronic & Digital Filter Types

• ISO 2CR Filter• 2CR PC•Gaussian

Filters

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ISO 2CR Filter

ISO 2CR Filtered Profile

Filters

Unfiltered Profile

Click Here for Further Information

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ISO 2CR Filter Effect

Modified Profile Relative

to Filtered Mean Line

Filters

Mean Line Established By Filter

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2CR PC Filter2CR PC Filtered Profile

Filters

Unfiltered Profile

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ISO 2CR PC Filter

Modified Profile Relative

to Filtered Mean Line

Filters

Mean Line Established By Filter

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Gaussian Filter

Unfiltered Profile

Gaussian Filtered Profile

Filters

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Gaussian Filter

Profile Filter

Sampling Length

X

Z

Unfiltered Profile

Mean LineCut-off

Filters

Click Here for Further Information

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The Effects of Filtering

Unfiltered Profile

Waviness Amplitude = 100µm

Roughness Wavelength = 0.25 mm

Waviness Wavelength = 8.0 mm

Roughness Amplitude = 20µm

Filters

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The Effects of 2CR Roughness Filter

8.0 mm Cut-off filter

Waviness Amplitude = 75µm

Roughness Wavelength = 0.25 mm

Waviness Wavelength = 8.0 mm

Roughness Amplitude = 20µm

Filters

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2.5 mm Cut-off filter

Waviness Amplitude = 24µm

Roughness Wavelength = 0.25 mm

Waviness Wavelength = 8.0 mm

Roughness Amplitude = 20µm

Filters

The Effects of 2CR Roughness Filter

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0.8 mm Cut-off filter

Waviness Amplitude = 2µm

Waviness Wavelength = 8.0 mm

Roughness Amplitude = 20µm Roughness Wavelength

= 0.25 mm

Filters

The Effects of 2CR Roughness Filter

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0.25 mm Cut-off filter

Waviness Amplitude = 0µm

Roughness Amplitude = 15µm Roughness Wavelength

= 0.25 mm

Filters

The Effects of 2CR Roughness Filter

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0.08 mm Cut-off filter

Waviness Amplitude = 0µmRoughness Amplitude

= 4µm Roughness Wavelength = 0.25 mm

Filters

The Effects of 2CR Roughness Filter

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Relationship of Sampling, Assessment & Traverse Length (ISO 2CR)

Sampling Length (Cut-off)

Assessment (Evaluation) Length

Traverse Length

Filters

Run-up Over travel

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Filter Types

• ISO 2CR- 1st 2 Cut-offs discarded• 2CR PC- 1st & Last Cut-offs discarded•Gaussian- Half 1st & Half Last Cut-off Discarded

Filters

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Cut-off Selection

0.8mm Sampling Length (Cut-off)

Filters

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Cut-off Selection

Filters

0.25mm Sampling Length (Cut-off)

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Choosing the Correct Cut-off Value

1.25 mm

Traverse Direction

Filters

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Cut-off Selection Unless otherwise indicated on a drawingthe table above should be used to

determine the cut-off

Filters

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Bandwidth=Ratio of Lc/Ls

Ls

Filters

Back to Contents Page

Lc

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Parameters

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Parameters

Analysis Types

•Roughness - Prefix R•Waviness - Prefix W•Primary - Prefix P

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Parameters

Parameter Types

•Amplitude Parameters defined from Z co-ordinates

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Parameters

• Amplitude Parameters defined from Z co-ordinates• Spacing Parameters defined from X co-ordinates

Parameter Types

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Parameters

• Amplitude Parameters defined from Z co-ordinates• Spacing Parameters defined from X co-ordinates• Hybrid Parameters X & Z co-ordinates

Parameter Types

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Parameters

Amplitude Parameters - Ra Ra

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Parameters

Amplitude Parameters - Limitations of Ra Ra

Ra

Ra

Ra

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Parameters

Amplitude Parameters Rq (RMS) lr=Sampling Length

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Parameters

Amplitude Parameters Rt

ln=Assessment Length lr=Sampling Length

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Parameters

Amplitude Parameters Rp Sampling Length

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Parameters

Amplitude Parameters Rv Sampling Length

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Parameters

Amplitude Parameters Rz

Rz1

Rz2

Rz3 Rz4 Rz5

Rz = Maximum peak to valley in each sample length divided by n sampling lengths

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Parameters

Amplitude Parameters Rz1max, Rp1max & Rv1max

Rz1max

Rp1max

Rv1max

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Parameters

Spacing Parameters HSC (High Spot Count) lr=Sampling Length (Cut-off) ln=Assessment

Length

A=Slice level B= Mean Line

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Parameters

Spacing Parameters HSC (High Spot Count)

Tall narrow peaks Tall narrow peaks tend to work hardentend to work harden

Hardened peaks will eventually Hardened peaks will eventually breakbreakoff and the surface will breakdownoff and the surface will breakdown

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Parameters

Spacing Parameters Rpc (Peak Count)

A=Selectable Bandwidth B= Mean Line

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Parameters

Spacing Parameters Rpc (Peak Count)

Orange Peel Effect Due to Peaks on Sheet Steel Base Peel Effect Due to Peaks on Sheet Steel Base SurfaceSurface

Base Sheet Steel

Painted Surface

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Parameters

Spacing Parameters Sm (Mean Spacing) lr=Sampling Length (Cut-off)

Mean Line

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Parameters

Hybrid Parameters- Rdq (Pdq, Wdq) (Rms Slope)

θ

θθ θ

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Parameters

Hybrid Parameters- Rdq (Pdq, Wdq) (Rms Slope)

Effects of Surface Slopes on vibration & noise

No Vibration/Quiet Low Frequency Rumble

High Frequency Scream

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Parameters

With low surface slopes more light is reflected into the eye and hence has a good appearance

With high surface slopes less light is reflected into the eye and hence has a poor appearance

Back to Contents Page

Hybrid Parameters- Rdq (Pdq, Wdq) (Rms Slope)

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Bearing Area (Material Ratio)

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Bearing Area (Material Ratio)

Hybrid Parameters - Rmr

Upper surface defines run-in characteristics

Valleys define lubrication characteristics

Body of surface defines wear/life characteristics

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Hybrid Parameters - Rmr

Lapping Plate

Bearing Line

ln=Assessment Length

Rmr= a+b+c+d+e x100 ln

Bearing Area (Material Ratio)

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Material Ratio Curve (Rmr) 0 100 %tp(%)

Level p Tp (%) at level p

Bearing Area (Material Ratio)

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0 100 %tp(%)

Level p Tp (%) at level p

Material Ratio Curve (Rmr)

Bearing Area (Material Ratio)

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Material Ratio Curve (Rmr) 0

Level p Tp (%) at level p

tp(%) 100 %

Bearing Area (Material Ratio)

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Amplitude Distribution Curve 0

Level p

Number of Peaks

Bearing Area (Material Ratio)

Click Here for Further Information

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Associated MR Curve Parameters-Rsk (Skew)

Surface with Random Amplitude Distribution- Zero SkewSurface with Random Amplitude

Distribution- Zero Skew

Bearing Area (Material Ratio)

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Associated MR Curve Parameters-Rsk (Skew)

Surface with dominant peaks-Positive Skew

Bearing Area (Material Ratio)

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Associated MR Curve Parameters-Rsk (Skew)

Surface with dominant valleys-negative Skew

Bearing Area (Material Ratio)

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Associated MR Curve Parameters-Rku(Kurtosis)

Rku<3

Rku=3

Rku>3

Back to Contents Page

Bearing Area (Material Ratio)

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The Rk Parameter

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Parameters

Rk Parameter

Surface Interaction

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Material Ratio Curve (Rmr) 0 100 %tp(%)

Bearing Area (Material Ratio)

Material Ratio curveTilted Profile

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Parameters

Mean Line

Unfiltered Real Profile

Rk Parameter

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Parameters

Mean Line

Unfiltered Real Profile after valley suppression

Valleys removed & kept in memory

Rk Parameter

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Parameters

Final Filtered Roughness Profile

Rk Parameter

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Parameters

100 %0 tp(%)

40 %

Rdc

Rk Parameter

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Parameters

100 %0 tp(%)

Rdc

40 %

AB

D

E

F

C

Rk Parameter

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Parameters

C

100 %0 tp(%)

Rdc

40 %

AB

D

E

F

Rk

D1

Mr2Mr1

Rk Parameter

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Parameters

tp(%)

C

100 %0

Rdc

40 %

AB

D

E

F

Rk

D1

Mr2Mr1

Area 1

ECRpk

Area 2

E

D

Rvk

Rk Parameter

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Parameters

100 %0 tp(%)

40 %

Rk

Mr2Mr1

Rpk

Rvk

Rk Parameter

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Parameters

Rk Associated Parameters

• Rk-Core Roughness Depth• Rpk-Reduced Peak Height• Rvk-Reduced Valley Depth

• Mr1-Material Component Relative to Peaks• Mr2-Material Component Relative to Valleys• A1-Material Filled Profile Peak Area• A2-Lubricant Filled Profile Valley Area

Back to Contents Page

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Form Measurement

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Least Squares Line

Form Measurement

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Form Measurement

Straightness (LS Line)

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Form Measurement

Straightness (MZ Line)

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Form Measurement

Least Squares Arc

R=Calculated LS Radius r-r=LS Arc

r r

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Form Measurement

Least Squares Arc - Radius Measurement

t=34.501656mm

r=110mm

l=80mm

l= Measurement Length/2

t= Chordal Heightr= Least Squares Radius

r-t

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Form Measurement

Least Squares Arc - Radius Measurement

t=1.833462mm

r=110mm

l=20mm

l= Measurement Length/2

t= Chordal Heightr= Least Squares Radius

r-t

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Form Measurement

Least Squares Arc - Radius Measurement

t=1.833962mm

r=109.9705mm

l=20mm

l= Measurement Length/2

t= Chordal Heightr= Least Squares Radius

Back to Contents Page

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Calibration Methods

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Calibration Methods

Ball Standard

Traverse Direction

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Software Corrections

Arcuate Errors

dZ

dX

Traverse Direction

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Software Corrections

Stylus Tip Errors

Traverse Direction

Path of Stylus Tip Centre

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Calibration Methods

Ra & Rz Roughness Standards

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Calibration Methods

Ra & Rz Roughness Standards

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Calibration Methods Traverse Direction

2.5µm Step Height

3 Line (Step Height) Standard

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Calibration Methods

3 Line (Step Height) Standard

A=Mean Line

B=Calibration Height

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Calibration Methods

3 Line (Step Height) Standard

A=Level Surface

B=Pt Value

C=Unlevelled Surface

Back to Contents Page

Click Here for Further Information

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Conics & Aspherics

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Conics and Aspherics

Conic Sections

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Conic Constants

Ellipse: K< 0 Sphere: K= 0 Oblate Ellipse: K>0

Conics and Aspherics

Z2 + X2 = 1

R22 R12 Z2 + X2 = 1

R2 R2 Z2 + X2 = 1

R22 R12

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Conic Constants

Hyperbola: K< -1 Parabola: K= -1

Conics and Aspherics

Z2 + X2 = 1

R22 R12

Z = (Ax)2

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What is an Aspheric?

Conventional Spherical Lens

Conics and Aspherics

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What is an Aspheric?

Aspheric Lens

Conics and Aspherics

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Reasons for using an Aspheric

• Reduces Spherical Aberration• Ability to Produce Vari-focal Lenses • Reduction in Lens Size and Weight • Greater Design Freedom

Conics and Aspherics

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How is an Asphere constructed?

Basic Conic Section (Sphere)

Z Axis

X Axis

Conics and Aspherics

Z2 + X2 = 1R2 R2

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How is an Asphere constructed?

Aspheric Polynomial Curve

Z=a8|x|8

Basic Conic Section (Sphere)

Z Axis

X Axis

Conics and Aspherics

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How is an Asphere constructed?

Aspheric Profile

Aspheric Polynomial Curve

Basic Conic Section (Sphere)

Z Axis

X Axis A

B C

Conics and Aspherics

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How is an Asphere constructed?

Aspheric Profile

Aspheric Polynomial Curve

Basic Conic Section (Sphere)

Z Axis

X Axis

A

B

C Aspheric Profile

Aspheric Polynomial Curves

Basic Conic Section

Conics and Aspherics

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Standard Equation for An Aspheric Surface

cx2+a1|x| +a2| x|2 + a3| x|3 … +a20 | x|20Z(x)=

1+ 1-(K+1) c2x2

Where: X is the Radial distance from the Aspheric Axis Z is the corresponding vertical distance

a is the indexed Polynomial Coefficient C is the reciprocal of the Base Radius K is the Conic Constant of the Surface

Conics and Aspherics

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Base Radius of Curvature

Conics and Aspherics

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How Do We Measure an Aspheric Surface?

Optical Flat

Aspheric Axis

Conics and Aspherics

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How Do We Analyse an Aspheric Surface?

Aspheric DataRadius=40.0mm

K= -1A4= 5.3188e-007A6=5.5231e-009A8=-1.6774e-011A10=-6.3352e-

014

Conics and Aspherics

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Aspheric Form FitX Axis

Z Axis

AB

Aspheric Axis

Conics and Aspherics

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Residual Error after Aspheric Form Removal

+Z Axis

-Z Axis

-X Axis

+X Axis

A

Aspheric Axis

Aspheric Axis

Conics and Aspherics

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How Do We Analyse an Aspheric Surface?

Conics and Aspherics

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Aspheric Parameters

Conics and Aspherics

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Aspherics-Further Analysis

Convex Component-Concave Residual Form Error-Increase Base Radius

Conics and Aspherics

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Convex Component-Convex Residual Form Error-Decrease Base Radius

Conics and Aspherics

Aspherics-Further Analysis

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Smallest Rt Value Achieved-True Shape & Base Radius

Conics and Aspherics

Back to Contents PageAspherics-Further Analysis

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3D (Areal) Measurement

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3D Measurement

Advantages of 3D (Areal) over 2D

• Good Visualisation of the Surface• More Statistically Stable

• Better at Detecting & Analysing Defects • Many Methods of Representing the Data

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3D Measurement

Disadvantages of 3D (Areal)

• Longer measurement cycles• Measurement Produces Large Data Files• Mainly Restricted to R & D • Sometimes Visually Subjective

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3D Measurement

Contact Measurement Method

Y Axis Incremental MovementTraverse Direction

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3D Measurement

Non-Contact Measurement Method

Y Axis Incremental Movement

Measurement Axis (X)

Laser CCD Detector

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3D Measurement

Critical Dimensions for 3D Measurement

Profile 1

Profile 2

Z1

Z2

ΔXΔZ

ΔY

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3D Measurement

Data Analysis

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3D Measurement

Levelling the Data

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3D Measurement

Form Removal Cylinder Liner- No Form Removed Cylinder Liner- Form Removed

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3D Measurement

Viewing 3D Data Meshed Axonometric View

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3D Measurement

Viewing 3D Data Photo Simulation View

Pseudo- Colour View

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3D Measurement

Viewing 3D Data Continuous Axonometric View

Contour View

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3D Measurement

3D Filtering

0.8mm

0.8mm

• 0.8mm Gaussian Filter

• ½ Cut-off Lost Top, Bottom Left & Right

Sampling Area

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3D Measurement

3D Parameter Types

• Amplitude• Spatial• Hybrid • Functional

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3D Measurement

3D Amplitude Parameters- Prefix: S

Sa =arithmetic mean of the deviations from the mean plane

Sq =RMS of the mean of the deviations from the mean plane

St =total peak to valley over the sample area

Sp =height of the highest peak to mean plane

Sv =depth of the deepest valley to mean plane

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3D Measurement

3D Spatial Parameters

SPc =peak count between two selectable planes

Sds =density of summits contained in a sampling area

Std =texture direction of the surface

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3D Measurement

3D Hybrid Parameters

SΔq =RMS slope of the surface

Ssc =mean summit curvature of the surface

Sdr =developed interfacial area ratio of the surface

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3D Measurement

3D Functional Parameters

Stp=surface bearing area ratio

Sbi =surface bearing index

Sci =core fluid retention index

Svi =valley fluid retention index

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3D Measurement

Volume/Defect Analysis

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3D Measurement

Step Height Analysis

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Drawing Indication

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Drawing Indication

Conventional Surface Texture Symbol

Graphical Symbols for Surface Texture

6.8

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Requirement for Surface Texture

1

Requirement for Surface Texture, Material Removal Required

2

Requirement for Surface Texture, Material Removal Not Permitted

3

Graphical Symbols for Surface Texture

Drawing Indication

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Graphical Symbols for Surface Texture

Drawing Indication

(d) (e) 3

(c) Turned(a) 0.0025-0.8/Rz

6.8(b) 0.0025-0.8/Ra 2.2

Click Here for Further Information

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Graphical Symbols for Surface Texture

Drawing Indication Fe/Ni 15p cr 0.0025-0.8/Rz 6.8

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Drawing Indication

Bi-Lateral Tolerancing

Graphical Symbols for Surface Texture

U Ra 0.9L Ra 0.3

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Drawing Indication

The 16% Rule (Default Rule)

• No more than 16% of the measured values for an upper limit should exceed the specified value

• No more than 16% of the measured values for a lower limit should be less than the specified value

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Drawing Indication

The MAX Rule

RzMAX 0.9

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End

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