भारत सरकार/ GOVERNMENT OF INDIA

अंतररक्ष विभाग/ DEPARTMENT OF SPACE

भारतीय अंतररक्ष विज्ञान एिं प्रौद्योवगकी संस्थान/INDIAN INSTITUTE OF SPACE SCIENCE & TECHNOLOGY

क्रय एि ंभंडार विभाग / PURCHASE & STORES DEPARTMENT

िवियमिा पी ..ओ , वतरुिनंतपुरम 695 547/ VALIAMALA P.O, THIRUVANANTHAPURAM 695 547,

केरि, भारत/ KERALA, INDIA Ph No.:0471-2568451/615 Tele Fax:0471-2568406/ E-mail : purchase@iist.ac.in

वनविदा आमंत्रण / INVITATION TO TENDER

Date : 06.03.2020 Tender Due on : 23.04.2020 at 14.00 Hrs Tender opening on: 24.04.2020 at 10.30 Hrs

Dear Sirs,

Sealed tenders are invited from accredited manufacturers / suppliers / agents for the supply,

installation & demonstration of the following equipment:

Sl. No.

Tender No.

Item Description Qty/ Nos.

Cost of Tender

(Rs.) 1.

2019007662 SPUTTERING UNIT

Supply and installation of manually operable Sputtering Unit

with following specification :

VACUUM CHAMBER

Arrangement for Mounting Planar Magnetron

Sputtering Cathodes in a ‘SPUTTER UP/DOWN’

configuration

All SS304 or better construction with

Complete DC/RF compatible structure

Electro-polished from inside

Glass window for plasma viewing 1no.(Approx.

150mm Dia suitable to view fully inside the chamber).

Helium leak tested for leak rates better than 1x10-

9Torr lit/sec.

Provision of following ports:

- Gas Inlet Port (1no).

- Air Inlet Port (1no).

- Ports for Rough and High Vacuum Pumping

(1no).

- Port for Vacuum Gauges (2nos).

- Central port for Ion source (1no).

- Suitable port for fixing Magnetron and future

further addition number of dummy port also

required (1 no)

All Stainless Steel Inner Removable shields 1set

01

No.

500+GST @12% (560/-)

VACUUM CHARACTERISTICS

Ultimate Vacuum [In Clean and Dry System

in120min]:Atmosphere to 5x10-7

mbar or better

Pump DownTime:30minutes for Atm.to<5x10-5

mbar

during routine Sputtering

Process pressure [During Sputtering]:1x10-3

mbar

[typical] VACUUM PUMPING SYSTEM

Rotary Pump Oil free dry pump

Turbomolecular Pump

M/s. Pfeiffer

Or Edward or Equivalent

make Turbo Molecular

pump having compatible

pumping speed. To

achieve vacuum better

than 3 ×10 -6

mbar within

60 minutes of chamber

pumpdown

VACUUM LINES & VALVES

RoughingValve

ElectropneumaticallyOpe

rated

Micro-

switchforOPEN/CLOSEi

ndicationandFeedback

RoughingValveinterlocke

dwithChamberPressure

Backing Valve

Electro-pneumatically

Operated

Micro-switch for

OPEN/CLOSE indication

and Feedback

High Vacuum Valve

SS Gate type

Valve(which can be

suitable for Throtteling

while sputtering process)

Electro-pneumatically

Operated Micro switch

for OPEN/CLOSE

indication and Feedback

Interlocked with chamber

Vent Valve

Chamber Vent Valve

Straight Through/Right

Angle Valve

Electro-pneumatically

Operated

Micro-switch for open

indication and Feedback

Bronze Filter at Inlet to

avoid Dust in rush

VACUUM MEASURING GAUGES (PFEIFFER or

Equivalent)

Must be corrosion resistant, with high accuracy over the specified

range

Digital High Pressure Pirani gauge

Cold Cathode Gauge

Gauge Controller with digital display with set point control

VACUUM PLUMBINGLINES

All SS Hoses and ISO Standard Fitting. Electrically inter-

lockable valves to avoid accidental opening by operators.

GASFLOW MANIFOLD

a) Mass Flow Controllers(Make: ALICAT/ BRONKHORST/

AALBORG or EQUIVALENT)

Argon– 200sccm [max] (1no.)

Oxygen–100 sccm [max] (1no.)

b) Control Electronics with set point control and digital

display of Flow rate in sccm

c) Gas Inlet Valve (Isolation) -1no.

Electro pneumatically Operated

Micro-switch for OPEN indication and interlock

d) Gas Mixing Chamber and all SS Tubing with Swagelock

compatible fitting

e)Additional 2 or 3 Feed through required for other gases

POWER SUPPLY

RF power supply

RF Generator with

AutoMatching Network

RF Power:300Watts

(BARTHEL, Germany or

Seren, USA or

equivalent) Power supply

to Magnetron cables

should be original from

power supply

manufactures.

Pulsed DC power supply

Power: 1.5 kW or higher

0-500mA or better

Direct Digital indication

of Cathode Voltage and

Plasma

Operation in Pulsed DC

Mode

Pulse Frequency:1-

30KHz or better

,DutyCycle:20%-90%or

better

Active Arc Suppression

Circuitry.

Power supply to

Magnetron cables should

be original from power

supply manufactures

MAGNETRON CATHODE ASSEMBLY

3"Magnetron cathodes assembly in Sputter Up/Down

configuration (2nos.)

Confocalmountinggeometry(placement)toconcentricallyfaces

ubstrateholder

RF/DC/Pulsed DC compatible

Integrated gas inlet assembly to provide uniform erosion

High Target utilization

All Stainless-Steel Integrated Shutter Assembly [Electro-

pneumatic/motor based]

Micro-switch arrangement for Target identification for Power

Supply

Water Flow Switch Interlock for each Magnetron.

TARGET, SUBSTRATE, SHUTTER & WORK HOLDER

Source target (To be quoted as

optional item)

Au, Cr, Pt, Pd, Ti, Ni,

ZnO, WO3, TiO2,In2O3

Sputter system should be

able sputter the

aforementioned materials

Source Shutter

Electrically

pneumatically source

shutter with rotary shaft

seal to cover the

deposition source

Co-sputtering required (1

RF and 1 DC at the same

time)

Rotary Work Holder

Should accommodate

substrate up to 50mm or

more

Provision to hold

multiple numbers of

smaller substrates of

irregular shapes.

Type of rotation

Rotary drive mechanism

for the substrate holder

with variable speed of

approximately 0-20 rpm

Substrate heating system

High Vacuum

Compatible Heater

Thyristorized Heater

Power Controller

PID Controller with

Digital Display of

substrate temperature

from 25-600C[1C] or

higher

FILM THICKNESS MONITOR

Requirements

1 No of Thickness

monitor (in-situ) with

water cooled front load

sensor, oscillator and

cables

CONTROL ELECTRONICS

Complete based Automation with the following Facilities:

System Mimic with Status Indication of Each

Subsystem

Recipe programming, Storage and Recall Facility

Operation in the following Modes:

AUTO Mode with Recipe Programming

COMMISSIONING MODE [Manual Mode with

safety Interlocks]

HOUSING CABINET

Requirements

Suitable Chamber

Support Frame

All interlocks for safety

operation

overload

protection

interlock

failure

Preventer.

FABRICATION PROCEDURE AND QUALITY CONTROL

MEASURES

Requirements

All the SS

components and sub-

assemblies should be

electro polished

All the components,

sub-assemblies and

final unit are leak

tested using MSLD to

an individual leak rate

of 1 x 10-9

mbar. ltrs /

sec. approximately

Necessary arrangements

for Glow discharge

cleaning of

substratebefore thermal

evaporation. It should

have Power Supply

with Arc Suppression

Facility and vacuum

interlockwith Digital

panel meter

WATER CHILLER

Requirements

Water chiller unit of

capacity of approx. 0.5

TR (Reputed make)

AIR COMPRESSOR

Requirements

Air compressor

(Noiseless) of suitable

storage tank with

pressure regulator and

fittings.

SAFETY AND INTERLOCKS

Requirements

Necessary safety devices

and interlocks should be

provided for the entire

unit for operator’s safety.

OTHER REQUIREMENTS

Warranty

Minimum three (03)

years comprehensive

warranty of the

Instrument from date of

satisfactory installation

and commissioning. In

case any part or whole of

the instrument is found

defective during the

warranty period or more,

then the same must be

replaced/ repaired free of

cost. Necessary

certificate in this regard

should be furnished by

the selected

firm/company/vendor. In

case of malfunction of the

equipment, the supplier

should provide onsite

services throughout the

warranty period or more.

Training

Training should be

provided to the User on

operation, maintenance

and safe handling of the

machine along with

trouble shooting features

during installation

Installation

Installation and

demonstration of the

equipment should be

done free of cost by the

vendor within 3 weeks

after receipt of the item at

IIST.

Performance

Certificate

Vendor has to submit

performance letter or

Purchase Order proof

from the client for having

supplied atleast 2 such 3”

Magnetron

Optional Item

1. 3 years AMC

after warranty

2. Switching

between Manual

to Automatic

requirements

3. Needle valve in

case of manual

control of

Argon/other

gases as an

option

4. Crystal for

thickness

monitors

5. Vendor has to

quote respective

consumables for

smooth

performance of

the evaporation.

Commercial terms and Conditions Tender No. 201900766201 dated 06.03.2020

1. SPECIAL INSTRUCTIONS TO TENDERERS

1.1 The bidder is required to submit quotation for the entire scope in a sealed cover super scribing the Tender

No. 201900766201 Due on 23.04.2020 and submit immediately but not later than the due date mentioned against

each tender. If the tender is received after the due date and time, the same shall be summarily rejected.

1.2 The cost of tender Rs. 560/- shall be submitted along with Technical & Commercial bid by Demand Draft

drawn in favour of the Sr. Accounts Officer, IIST and payable at State Bank of India, Valiamala

Trivandrum-695 547. In case the Demand Draft is not enclosed with the quotation, the bid shall be

summarily rejected.

1.3 Payment: Our normal payment term shall be E-Transfer against Sight Draft or 80% Letter of Credit against

dispatch documents and balance 20% within 30 days after receipt, installation and acceptance of the item for

imports and within 30 days after supply/installation and acceptance for indigenous respectively.

1.4 The installation, commissioning & demonstration of equipment to be done at our campus, Valiamala,

Thiruvananthapuram-695 547. All pre-requisites such as foundation drawing, grouting and any

consumables needed for carrying out the installation, if applicable, shall be separately mentioned in the

technical bid.

1.5 Delivery terms shall be Ex-works/F.O.B/F.C.A for imports & F.O.R, Valiamala for indigenous.

1.6 For import cargoes, the purchase order shall be drawn directly to the foreign supplier through agents in India. We

have our own freight forwarder and customs clearance at Trivandrum shall be done by us.

1.7 All duties and taxes, if applicable shall be quoted separately.

1.8 Accreditation documents such as current income tax/sales tax clearance certificate, clientele list with previous

experience in the similar lines of supply must be provided with documentary evidence), Performance Certificate,

authorization for import, after sales support in India etc. shall be explained in detail with proof.

1.9 Earnest Money Deposit (EMD):- Interest free EMD to ensure the earnestness of the vendor in the participation of

the procurement process to the tune of Rs. 1,50,000/- ( Rupees One lakh and Fifty Thousand only) by Demand

Draft drawn in favour of the Sr. Accounts Officer, IIST, Valiamala, Trivandrum may be enclosed with Technical &

Commercial bid sealed cover. The EMD will be refunded to the unsuccessful tenderers within 30 days after

placement of Purchase Order. EMD will be forfeited in case the vendor withdrawn from the quotation. The tender

not accompanied with EMD shall be treated as invalid tender and summarily rejected. For direct offers from NSIC,

MSMEs, etc. EMD is not applicable.

1.10 Security Deposit:- Interest free Security Deposit @ 10% of the basic value of Purchase Order shall be payable by

successful vendor for satisfactory execution of the Purchase Order.

1.11 Performance Bank Guarantee: 10% of basic order value shall be submitted by the Vendor for Warranty obligation

(36+2 Months).

1.12 These items are required for our research purpose, we are eligible for integrated Tax (rate) vide Govt. of India,

ministry of Finance (Department of revenue) Notification No. 47/2017 dtd 14.11.2017 (Inter-State Supplies),

45/2017 dtd 14.11.2017 (Intra-State Supplies) hence, we should pay 5% GST/IGST only against production of a

certificate to the supplier from the Head of the Institution certifying that said goods are required for research

purpose only. Hence please quote accordingly.

1.13 Customs Duty : We have been exempted from payment of Customs Duty vide Notification No. 51/96 dated

23.07.1996 and amended by Notification No. 93/96 dated 11.12.1996 and 24/2007 dated 01.03.2007.

1.14 Liquidated Damages: The period of completion indicated shall be the essence of the contract. In the event of

delayed date of delivery & Installation, the liquidated damages @ 0.5% per week or part thereof subject to a

maximum of 10% of the contract value shall be recovered. The delivery date / Completion date to be mentioned in

PO is for delivery, customs clearance, inland transportation, installation and commissioning. That means the

commissioning should be completed before the delivery date / Completion date.

1.15 Force Majeure: During the continuance of the contract, should a part or whole of the items covered by this

contract be delayed in delivery due to reasons of force majeure condition which shall include lockouts, strikes,

riots, civil commotions, fire, flood, windstorm, explosion, labour disturbance, act of any Govt. or any agency,

juditional action, sabotage act of civil disobedience, act of public enemy, technical failure, accidents, acts of God

and war, stoppage of deliveries by Govt. etc, each party undertakes to advise the other as soon as it becomes a

way of the circumstance of such force majeure, so that action under the provisions of this contract can be

mutually reviewed and agreed upon between contractor and IIST. If the force majeure condition extended over a

period of six months, both the parties of the contract shall mutually discussed and arrived at an agreement for the

continuation/ termination of the contract forthwith.

1.16 Arbitration: Dispute if any shall be settled mutually, failing which, it will be referred to a one-man arbitrator

appointed by Director, IIST in accordance with the Arbitration and Conciliation Act, 1996 and any

alteration/modifications thereof, whose decision shall be final and binding on both the parties

1.17 IIST reserves the right to either accept/reject any tender/s without assigning any reason/s whatsoever.

2. Terms & Conditions of Tender Form No. DOS PM:20, Form No. DOS PM:22 & Form No. DOS PM:23 as per attachment.

Sd/-

(M.B Subash Chandran) Dy. Registrar –Gr I

For and on behalf of Director, IIST