SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle •...

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SuperKEKB Status SuperKEKB Status and and SOI Pixel R&D SOI Pixel R&D Masashi Hazumi Masashi Hazumi (KEK) (KEK) March 21, 2007 Seminar at LPHE, EPF-Lausanne

Transcript of SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle •...

Page 1: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

SuperKEKB Status SuperKEKB Status and and

SOI Pixel R&DSOI Pixel R&D

Masashi Hazumi Masashi Hazumi (KEK)(KEK)

March 21, 2007Seminar at LPHE, EPF-Lausanne

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Part IPart IPart ISuperKEKB StatusSuperKEKB StatusSuperKEKB Status

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SuperKEKB overviewSuperKEKB overviewPeak luminosity : 8 × 1035/cm2/s (~50 × present world record from KEKB)Integrated luminosity: 50/ab (~100 × present world record from KEKB)

Peak luminosity : 8 × 1035/cm2/s (~50 × present world record from KEKB)Integrated luminosity: 50/ab (~100 × present world record from KEKB)

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Peak Luminosity History and ProspectsPeak Luminosity History and Prospects 8x1035

Major upgradeor KEKB(SuperKEKB)

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SuperKEKB chronicleSuperKEKB chronicle

•• 2001: Activity started2001: Activity started•• 20042004

–– SuperKEKB LoI (276 authors)SuperKEKB LoI (276 authors)–– Physics part posted on Physics part posted on hephep--ex (hepex (hep--ex/0406071)ex/0406071)

•• 20052005–– First budget request from KEK (First budget request from KEK (““gaisangaisan”” request) to MEXTrequest) to MEXT

•• 20062006–– Target luminosity doubled: 4 x 10Target luminosity doubled: 4 x 103535 8 x 108 x 103535

–– JAHEP JAHEP ““Prospects for Elementary Particle PhysicsProspects for Elementary Particle Physics””•• KEKB major upgrade as part of JAHEP master planKEKB major upgrade as part of JAHEP master plan

•• 20072007–– Crab cavities installed, under detailed evaluationCrab cavities installed, under detailed evaluation–– Update of SuperKEKB physics part in preparationUpdate of SuperKEKB physics part in preparation–– Starting detector optimization studiesStarting detector optimization studies

Wor

ksho

ps, c

onfe

renc

es

http://www.jahep.org/hec/doc/jahep_tenbou_eng_final.pdf

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SuperKEKB chronicleSuperKEKB chronicle

•• 20072007–– Crab cavities installed, under detailed evaluationCrab cavities installed, under detailed evaluation–– Update of SuperKEKB physics part in preparationUpdate of SuperKEKB physics part in preparation–– Starting detector optimization studiesStarting detector optimization studies

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KEKB colliding bunchesKEKB colliding bunches

50 billion electrons70 billion positrons

7 mm

2.3 µm

1.3 degree

Each bunch collides 100 thousand times/second

1284 bunches in each ring

Smallest beam size in the world in ring colliders

Finite crossing angle

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BeamBeam--beam parameterbeam parameterSimulation by K. Ohmi

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Crab crossing schemeCrab crossing scheme

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Crab Cavity in He Vessel (3D)Crab Cavity in He Vessel (3D)

Support Rod

Jacket Type Main He vesselSUS316L

Jacket Type Sub He vessel

Coaxial Coupler (Nb)

Stub Support

Crab Cavity CellNotch Filter

Support PipeTuning Rod

RF Absorber

Extract TM010, TE111 ModeFrequency Tuning

Input Coupler

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Installation into KEKBInstallation into KEKBCrab Cavity for LERCrab Cavity for LER

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Crab Cavities in the Nikko SectionCrab Cavities in the Nikko Section(1 cavity per ring)(1 cavity per ring)

LER HER

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Crab CrossingCrab Crossing

IPIP

beam beam

crabcavity

crabcavity

bunch tailbunch head

crabcavity

1 cavity per ring 2 cavities per ring

orbits of bunch head and tail

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HER LER

Crab OFF

Crab ON

H. Ikeda, et al.

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Specific LuminositySpecific Luminosity

Crab Crossing

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Horizontal OffsetHorizontal Offset

K. Ohmi, 2007/3/5 report

・H offset must be less than 40 µm.・H offset is now adjusted by a feedback to keep the horizontal beam-beam parameter.・More intelligent feedback under consideration.

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Summary of crab cavity commissioning statusSummary of crab cavity commissioning statusand nearand near--future plansfuture plans

• We have already achieved the vertical beam-beam tune shift parameter of 0.08 in HER, which is higher than our record 0.064 with a correction of the geometric gain.

• Continue machine tuning at low currents [75mA(LER)/50mA(HER), 51 bunches] till advantage of crab crossing is more clearly observed (~1 month)

• Higher currents for physics runs.

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SuperKEKB chronicleSuperKEKB chronicle

•• 20072007–– Crab cavities installed, under detailed evaluationCrab cavities installed, under detailed evaluation–– Update of SuperKEKB physics part in preparationUpdate of SuperKEKB physics part in preparation–– Starting detector optimization studiesStarting detector optimization studies

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Grand questions in flavor physicsGrand questions in flavor physics

•• Why three generations ?Why three generations ?•• Why masses and mixing parameters with strange patterns ?Why masses and mixing parameters with strange patterns ?•• Why did antimatter disappear in the early universe ?Why did antimatter disappear in the early universe ?•• ......

•• The Standard Model (SM) does not give answersThe Standard Model (SM) does not give answers–– Profound principles (of Gauge, Relativity, Quantum)Profound principles (of Gauge, Relativity, Quantum)–– However, However, ““Flavor PrincipleFlavor Principle”” is missingis missing

•• These exciting questions will remain unanswered even if SUSY is These exciting questions will remain unanswered even if SUSY is found at LHC.found at LHC.

Long-term step-by-step approach for precision measurements in flavor physics is necessary to answer these grand questions.Long-term step-by-step approach for precision measurements in flavor physics is necessary to answer these grand questions.

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Vud Vus

Vcd Vcs

Quark Flavor PhysicsQuark Flavor Physics

Vub

Vcb+

Beyond CKM

Vtb dark flavor ?

Vtd VtsCabibbo-Kobayashi-Maskawa matrix

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Super precise measurements at SuperKEKBSuper precise measurements at SuperKEKB

If If ““dark flavordark flavor”” discovereddiscovered

Direct detection of new Direct detection of new phyiscsphyiscs in the flavor sectorin the flavor sector

Measurements of TeV new physics parameters (if TeV new Measurements of TeV new physics parameters (if TeV new particles found at LHC)particles found at LHC)

If If ““dark flavordark flavor”” not discoverednot discovered

New Physics below 1TeV severely constrained even New Physics below 1TeV severely constrained even assuming Minimal Flavor Violation (MFV)assuming Minimal Flavor Violation (MFV)

Strongly suggest some Strongly suggest some ““flavor principleflavor principle”” that suppresses that suppresses FCNC. Some scenarios can even be ruled out.FCNC. Some scenarios can even be ruled out.

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Examples of physics studies at SuperKEKBExamples of physics studies at SuperKEKB

1.1. Are there new CPAre there new CP--violating phases ?violating phases ?2.2. Are there new rightAre there new right--handed currents ?handed currents ?3.3. Are there effects from new Higgs fields ?Are there effects from new Higgs fields ?4.4. Are there new flavor violation ?Are there new flavor violation ?5.5. Is there new flavor symmetry to explain the Is there new flavor symmetry to explain the

CKM hierarchy ?CKM hierarchy ?

1) tCPV in B0 φK0, η’K0, KsKsKs2) tCPV in B0 Ksπ0γ3) B τν, µν, Dτν4) τ µγ5) Unitarity triangle with O(1)% precision

1) tCPV in B0 φK0, η’K0, KsKsKs2) tCPV in B0 Ksπ0γ3) B τν, µν, Dτν4) τ µγ5) Unitarity triangle with O(1)% precision

tCPV:time-dependentCP Violation

Key measurements to answer questions above.Unique at an e+e- B factory (difficult at a hadron machine)

Page 24: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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New CP Violation in b New CP Violation in b ss

tota

l err

ors (

incl

. sys

tem

atic

err

ors)

2.6σ (2006) from sin2φ1

SM prediction

B B φφKK00, , ηη’’KK00, , KsKsKsKsKsKs projection projection for SuperKEKBfor SuperKEKB

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Allowed region in SUSYAllowed region in SUSY

(Caution: This fig. does not take into accountSUSY breakdownat large mass. Used forillustration purpose only

•• Mass reach in general is much higher than Mass reach in general is much higher than O(TeVO(TeV).).

Page 26: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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SuperKEKB Projection for B SuperKEKB Projection for B KsKsππ00γγand other b and other b s(d)s(d)γγ modesmodes

Possible deviation from SMO(1): Warped extra dim.O(1): L-R symmetric modelO(0.1): SUSY SU(5)

b

b

Lsγ

Rsγ

mb

mb

msms

δS=0.1 @ 5/ab 3.3/ab

Vertex detector with a larger radius prefered

SM expectationS ~ −2ms/mb×sin2φ1

NP with differentchiral structure makesa large difference

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B B τντν resultsresults

Belle Hadronic tag

First evidence, 3.5 σBellePRL97, 251802 (2006).

Constraint on charged Higgs

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BB τντν: Future Prospect: Future Prospect

Charged Higgs Mass Reach (95.5%CL exclusion @ tanβ=30)

Only exp. error(∆Vub=0%, ∆fB=0%)

∆Vub=5%, ∆fB=5%

∆Vub=2.5%, ∆fB=2.5%

Mas

s Re

ach

(GeV

)

Luminsoity(ab-1)

50ab-1

Page 29: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Full Reconstruction MethodFull Reconstruction Method

• Fully reconstruct one of the B’s to tag– B production– B flavor/charge– B momentum

Equivalent to“single B meson beam” !Equivalent to“single B meson beam” !

Υ(4S)

e−(8GeV)

e+(3.5GeV)

B

full (0.1~0.3%)reconstructionB Dπ etc.

Decays of interestsB Xu l ν,B K ν νB Dτν, τν

Powerful tools for B decays w/ neutrinos

Page 30: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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BB µνµν ((eeν)ν)

• Precise B τ ν/µ ν data provide lepton universality test.– Higgs effect itself is universal. RH

τν = RHµν

– Good probe to distinguish NP models.SM

Br(τν)=1.6x10-4

Br(µν)=7.1x10-7

Br(eν)=1.7x10-11

Luminosity (ab-1)

Sign

ific

ance

~50 events @ 5ab-1~500 events @ 50ab-1

3σ at 1.6ab-1

5σ at 4.3ab-1

good discovery channelat an early stage of SuperKEKB

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B B D D τ ν:τ ν: HH±± SensistivitySensistivity

Similar to B τν

5ab-1

∆FF=15%50ab-1

∆FF=5%

• H-b-u vertex by B τ ν• H-b-c vertex by B Dτν• H-b-t vertex by LHC

direct search.

• H-b-u vertex by B τ ν• H-b-c vertex by B Dτν• H-b-t vertex by LHC

direct search.

Very nice universality testfor Higgs-quark couplings

Page 32: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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LFV in LFV in ττ decays and SUSY GUTdecays and SUSY GUTGoto-Okada-Shindo-Tanaka 2006

•• Br~O(10Br~O(10--99) at Super ) at Super B factoryB factory

10-9

10-8

10-7

10-6

10-5

10-3

10-2

10-1

1 10Luminosity (ab-1)

Acc

essi

ble

B.R

.

1997

2006

2018

CLEO

B factories(Belle, BaBar)

Super B factory

τ→µγτ→µητ→µµµ

mSUGRA+seesaw

SUSY+SO(10)

SM+seesaw

SUSY+Higgs

Page 33: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Flavor symmetry ?Flavor symmetry ?

Many proposals, not conclusive at the moment.(Observed pattern consistent with many models)

• Example: Q6 (with SUSY)– 9 independent parameters to

describe 10 observables (6 quark masses + 4 CKM parameters)

• Example: Q6 (with SUSY)– 9 independent parameters to

describe 10 observables (6 quark masses + 4 CKM parameters)

Babu-Kubo 2004

1% “spot”

Testable (falsifiable) if sufficient precision obtained !Precise φ3 measurements may play an essential role tobe free from theory uncertainties

Testable (falsifiable) if sufficient precision obtained !Precise φ3 measurements may play an essential role tobe free from theory uncertainties

Page 34: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Unitarity Triangle Fit (50/ab)Unitarity Triangle Fit (50/ab)

Page 35: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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B B ππππ will be golden againwill be golden again

S(B0 π0π0)with externalphoton conversion

50/abNew !

8-fold 2-fold ambiguity

Page 36: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Other studies included in the physics bookOther studies included in the physics book

•• Charm (D mixing etc.)Charm (D mixing etc.)•• Bs physics on Upsilon(5S)Bs physics on Upsilon(5S)•• Upsilon physics (incl. dark matter search)Upsilon physics (incl. dark matter search)•• ElectoweakElectoweak physicsphysics•• Charmed hadronsCharmed hadrons

•• Improved theory descriptionsImproved theory descriptions–– taking recent exp. results into account (e.g. Bs mixing)taking recent exp. results into account (e.g. Bs mixing)

Page 37: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Physics at Super B Factory: SummaryPhysics at Super B Factory: Summary

Elucidation of the pattern of flavor symmetry breaking(highly experiment-driven, seeking a new hypothesis on flavor)Elucidation of the pattern of flavor symmetry breaking(highly experiment-driven, seeking a new hypothesis on flavor)

•• Effects of TeV new physics Effects of TeV new physics deviations from SMdeviations from SM•• LFV and new source of CPVLFV and new source of CPV•• Hidden flavor symmetry and its breaking Hidden flavor symmetry and its breaking

10-9

10-8

10-7

10-6

10-5

10-3

10-2

10-1

1 10Luminosity (ab-1)

Acc

essi

ble

B.R

.1997

2006

2018

CLEO

B factories(Belle, BaBar)

Super B factory

τ→µγτ→µητ→µµµ

mSUGRA+seesaw

SUSY+SO(10)

SM+seesaw

SUSY+Higgs

ObservableObservable ∆∆S(BS(B φφKK00)) S(BS(B KsKsππ00γγ)) M(H+)M(H+) ττ LFVLFV UT fitUT fit

ReachReach 0.030.03 0.030.03 ~500GeV~500GeV O(10O(10--99)) O(1)%O(1)%

(~100TeV w/o suppression)

Page 39: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Integrated Luminosity Projection for SuperKEKBIntegrated Luminosity Projection for SuperKEKB

100 × current statistics !

Page 40: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

Part IIPart IIPart IISOI Pixel R&DSOI Pixel R&DSOI Pixel R&D

Page 41: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

41Silicon-On-Insulator

Page 42: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Advantages of SOIAdvantages of SOI

Page 43: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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• SOI is regarded as the mainstream technology in industry in the near future. Rapid progress anticipated.

Page 44: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Financial Support by KEK Detector Technology Project

SOIPIX collaboratorsSOIPIX collaboratorsSOIPIX collaboratorsKEK Detector Technology Project : [SOIPIX Group]

Y. Arai*, Y. Ikegami, H. Ushiroda,Y. Unno, O. Tajima, T. Tsuboyama,S. Terada, M. Hazumi, H. IkedaA,K. HaraB, H. IshinoC, T. KawasakiD, H. MiyakeE, G. VarnerF, E. MartinF, H. TajimaG, M. OhnoH, K. FukudaH, H. HayashiH, H. KomatsubaraH, J. IdaH

KEK、JAXAA, U. TsukubaB, TITC,Niigata U.D, Osaka U.E, U. HawaiiF, SLACG, OKI Elec. Ind. Co.H(*)—contact person

Y. Arai*, Y. Ikegami, H. Ushiroda,Y. Unno, O. Tajima, T. Tsuboyama,S. Terada, M. Hazumi, H. IkedaA,K. HaraB, H. IshinoC, T. KawasakiD, H. MiyakeE, G. VarnerF, E. MartinF, H. TajimaG, M. OhnoH, K. FukudaH, H. HayashiH, H. KomatsubaraH, J. IdaH

KEK、JAXAA, U. TsukubaB, TITC,Niigata U.D, Osaka U.E, U. HawaiiF, SLACG, OKI Elec. Ind. Co.H(*)—contact person

Page 50: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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List of 2005 TEGList of 2005 TEGList of 2005 TEGNameName

AMPTEGAMPTEG Preamp, Time over threshold, Preamp, Time over threshold, comparator, active feed back etc.comparator, active feed back etc.

RADTEGRADTEG Pixel, transistor, ring oscillatorPixel, transistor, ring oscillator

PIXTEGPIXTEG 32x32 pixel array with readout32x32 pixel array with readout

STRIPTEGSTRIPTEG Short strip sensorShort strip sensor

HAWAIITEGHAWAIITEG Hard XHard X--ray ray comptoncompton polarimeterpolarimeter

Our fullyOur fully--Depleted CMOS SOI TEG is fabricated by Depleted CMOS SOI TEG is fabricated by OKI Electric Industry Co. Ltd. OKI Electric Industry Co. Ltd. -- commercial technology with 150nm rulecommercial technology with 150nm rule

Page 51: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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CMOS Active Pixel Sensor Type20 µm x 20 µm32 x 32 pixels

Pixel TEGPixel TEGPixel TEG

Page 52: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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6"φ MPW wafer

2.5 mm (chip)2.5 mm (chip)

20 µm(pixel)

Window for Light Illumination(5.4 x 5.4 um2)

Window for Light Illumination(5.4 x 5.4 um2)

p+ junctionp+ junction

Storage Capacitance(100 fF)Storage Capacitance(100 fF)

Pixel LayoutPixel LayoutPixel Layout

Page 53: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Pixel first signal!Pixel first signal!Pixel first signal! Weak Light

Strong Light

No Light

No Light

The ramp up speed depends on the light intensity.

The ramp up speed depends on the light intensity.

•• VVbackback=5V=5V•• FlashlightFlashlight

Reset-Integrate-Readout

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Plastic Mask

Laser (670 nm)Vdet = 10 V

Exposure Time = 7 µs

Photo ImagePhoto ImagePhoto Image•• 32x32 image view with 670nm 32x32 image view with 670nm

Laser and plastic mask Laser and plastic mask

Page 55: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted
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Pixel I-V characteristicPixel IPixel I--V characteristicV characteristic

Breakdown:~100VBreakdown:~100V

Hot Spot observed with infrared camera

corner of the bias ringI = 40 µA, T = 1 min

Smooth the corner and move the ring inward for the new submission.

Page 57: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted
Page 58: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Summary for MPW 1Summary for MPW 1

•• Signal observed from pixels as expectedSignal observed from pixels as expected–– beta source, IR laserbeta source, IR laser

•• First successful imaging First successful imaging •• Issues for the next round identifiedIssues for the next round identified

–– Breakdown voltageBreakdown voltage–– BackgateBackgate problemproblem

TCAD studies for improvements

Page 59: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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WhatWhat’’s TCAD ?s TCAD ?

•• TCADTCAD ==Technology Computer Aided DesignTechnology Computer Aided Design–– Process simulationProcess simulation–– Device simulationDevice simulation

•• Finer design rule Finer design rule more more complicated processes, longer complicated processes, longer development time development time

•• TCAD can reduce development TCAD can reduce development time drastically and is time drastically and is necessary necessary for for semiconductor semiconductor manufacturing todaymanufacturing today

•• Why not for detector R&D !Why not for detector R&D !

LSI Manufacturing

LSI Manufacturing

Real Virtual

Specifications

SpecificationsSpecifications

Function designFunction design

Logic designLogic design

Circuit designCircuit design

Layout designLayout design

Mask fabricationMask fabrication

Device productionDevice production PrototypingPrototyping

Process dataProcess data

CharacterizationCharacterization

Device dataDevice data

TCAD

Processsimulation

Processsimulation

Devicesimulation

Devicesimulation

~3mon.

Page 60: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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TCAD tools used in our studiesTCAD tools used in our studies

•• ENEXSS (Environment for NExt Simulation System)ENEXSS (Environment for NExt Simulation System)•• Developed by Selete (Semiconductor Leading Edge Technologies, Developed by Selete (Semiconductor Leading Edge Technologies,

http://www.selete.co.jp/http://www.selete.co.jp/))

•• Full 3D process/device simulation !Full 3D process/device simulation !

•• Silvaco Silvaco TCADTCAD•• ATHENAATHENA ((Process simulationProcess simulation)): 2D simulation: 2D simulation•• ATLASATLAS ((Device simulation): 2D or 3D simulationDevice simulation): 2D or 3D simulation

ENEXSS example) 3D device simulation for SOI

gate

drainBOX

SOI NMOS

α particleinjection

source

source current

Page 61: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Breakdown voltage simulationBreakdown voltage simulation

~-92Vsimulated depth= 130µm

ENEXSS3D process/device simulation

Page 62: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Breakdown voltage simulationBreakdown voltage simulationwith different configurationswith different configurations

** Simulation with smaller pixels: lower breakdown voltagesthan the previous case

90°120° 135°

150°

−100V−70V−45V −65V

dodecagon shape for the new submission

Page 63: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Implantation energyImplantation energy

Higher implantation energy Higher implantation energy for the new submission for the new submission

Vbreak (V)

0

20

40

60

80

100

120

140

160

0 50 100 150 200

N+ implantation energy (KeV)

Bre

akd

own v

oltage

(v)

N+ implantation energy (a.u.)

Page 64: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Choice of implantation ionChoice of implantation ion

Brekdown voltage = +88.5V Brekdown voltage = +102.4V

2µm

Ion #1 Ion #2

2µm

Boron goes deeper; effectively same as higher beam energy

Ion #1 Ion #2 for the new submission

Page 65: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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P+ implantation to reduce back gate effectP+ implantation to reduce back gate effect

-0.4

-0.3

-0.2

-0.1

0

0.1

0.2

0.3

0.4

0.5-

20

-1

6

-1

2

-8

-4 0 4 8

12

16

20

Vts0(V)

VB (V)

Thre

shol

d vo

ltage

(V)

Backbias (V)-20 -10 0 +10 +20

ENEXSS TCADAdditional p+ implantation (with voltage fixed at 0V or with some “anti-bias”) should help reduce the back gate effect.

Page 66: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

Will be delivered soon.

Page 67: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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SOIPIX: SummarySOIPIX: Summary•• New R&D for SOI pixel detectors is activeNew R&D for SOI pixel detectors is active•• Encouraging results from first MPWEncouraging results from first MPW

–– first pixel signals with beta source, IR laserfirst pixel signals with beta source, IR laser–– First successful imaging First successful imaging

•• Issues for the next round identified. TCAD studies were Issues for the next round identified. TCAD studies were performed to proposal improved designs.performed to proposal improved designs.–– Breakdown voltageBreakdown voltage–– BackgateBackgate problemproblem

•• No showstopper so farNo showstopper so far•• The 2The 2ndnd MPW will be completed soon.MPW will be completed soon.

–– Various designs, more usersVarious designs, more users–– 11stst ““largelarge”” sensor (1cm x 1cm)sensor (1cm x 1cm)

Page 69: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

Backup SlidesBackup SlidesBackup Slides

Page 70: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

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Present flavor physics in one pagePresent flavor physics in one page

Low-energy Effective Field Theory (EFT)*

Elucidation of the pattern of flavor symmetry breaking(highly experiment-driven, seeking a new hypothesis on flavor)Elucidation of the pattern of flavor symmetry breaking(highly experiment-driven, seeking a new hypothesis on flavor)

U(3)5 flavor symmetry broken by LYukawa

L, B “accidentally” conserved CP broken

No “flavor principle”parameters in LYukawa (mixings, masses) determined experimentally

Mysterious pattern in CKM/masses

Hidden flavor symmetry ?

U(3)U(3)55 flavor symmetry broken by flavor symmetry broken by LLYukawaYukawa

LL, , BB ““accidentallyaccidentally”” conserved conserved CPCP brokenbroken

No No ““flavor principleflavor principle””parameters in parameters in LLYukawaYukawa (mixings, (mixings, masses) determined masses) determined experimentally experimentally

Mysterious pattern in Mysterious pattern in CKM/massesCKM/masses

Hidden flavor symmetry ? Hidden flavor symmetry ?

*[e.g. D’Ambrosio-Giudice-Isidori-Strumia 2002]

New Physics (Λ: cut-off energy)

Λ/4π < O(1) TeV to resolve Higgs quadratic divergence

Sizable effects in flavor sector allowed (“no effect” is extraordinary)Fruitful synergy with energy frontier

Violation of L, B, CP (not protected by any principle) expected

can be discovered (with luck) “at any time”

Λ/Λ/44ππ < O(1) TeV to resolve Higgs < O(1) TeV to resolve Higgs quadratic divergencequadratic divergence

Sizable effects in flavor sector allowed Sizable effects in flavor sector allowed ((““no effectno effect”” is extraordinary)is extraordinary)Fruitful synergy with energy frontier Fruitful synergy with energy frontier

Violation of Violation of LL, , BB, , CPCP (not protected by (not protected by any principle) expected any principle) expected

can be discovered (with luck) can be discovered (with luck) ““at any at any timetime””

~

Page 71: SuperKEKB Status and SOI Pixel R&Dseminar/extern/hazumi21Mar07.pdf · 6 SuperKEKB chronicle • 2001: Activity started • 2004 – SuperKEKB LoI (276 authors) – Physics part posted

http://www.jahep.org/hec/doc/jahep_tenbou_eng_final.pdf

(An excerpt)

....

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