Interpretation of Soil and Water Tests for Salt-related Problems
Summary of Sensor Quality Tests List of Problems
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March 17, 2003 March 17, 2003 Catania, Meeting ST - Catania, Meeting ST - CMS CMS CMS Sensor Quality CMS Sensor Quality Frank Hartmann – University of Frank Hartmann – University of Karlsruhe Karlsruhe 1 Summary of Sensor Quality Summary of Sensor Quality Tests Tests List of Problems List of Problems F. Hartmann, CMS Tracker Collaboration
description
Summary of Sensor Quality Tests List of Problems. F. Hartmann, CMS Tracker Collaboration. Total Number of Sensor Delivered. *Passing CMS QTC tests February 14, 2003. Summary of Quality Tests. Restrict summary and discussion to sensors delivered after - PowerPoint PPT Presentation
Transcript of Summary of Sensor Quality Tests List of Problems
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
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Summary of Sensor Quality TestsSummary of Sensor Quality Tests
List of ProblemsList of Problems
F. Hartmann, CMS Tracker Collaboration
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Total Number of Sensor DeliveredTotal Number of Sensor Delivered
Type Received Measured Rejected Accepted*
OB2 1407 1399 535 846
OB1 224 223 99 124
W5A 53 53 17 36
W5B 33 12 3 9
W6A 45 45 27 18
W6B 28 14 4 10
W7A 32 20 2 18
W7B 12 12 1 11
*Passing CMS QTC testsFebruary 14, 2003
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Summary of Quality TestsSummary of Quality Tests
Restrict summary and discussion to sensors delivered after December 1, 2002 (introduction of new QA steps):187 OB2 32 W7A20 W5B 12 W7B21 W6B
261 Sensors in total
Measured Accepted Rej. Optic. Rej. IV Rej. strips
246 219 5 9 17
89% 2% 3.7% 7%
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Sensors to be rejectedSensors to be rejectedSensors measured in Vienna: 32 ST Data:sensor ID optical I_450(µA) Vbreak Vdepl Nr.of I_450(µA) Nr. of
bad strips Ileak Pinholes Cac Rpoly bad strips Pinholes Cac Rpoly
30211322292717 18 3 2 14 2 3 330211422292910 7 5 2 data not available30211322412101 105 8.75
Sensors measured in Perugia: 12730210420383204 chip
30210421850212 20.7 450 2.5630210421850214 16.72 450 2.3430210422066323 17.2 7 1 3 5 1.02 5 3 230210422068004 6 4 2 2 230210422302724 6 1 5 0 030210423860203 9 3 9 data not available30210423860204 8 3 2 6 data not available30210423860213 6 2 6 data not available30210423860215 12 2 12 data not available30210423860224 8 1 8 data not available30210423860508 24.04 data not available30210423860521 9 1 2 8 data not available30210423860522 9 4 2 5 1 data not available30210423863921received broken data not available30210423863922 6 1 1 5 data not available30210423974210 chip data not available
Sensors measured in Karlsruhe: 2730211023185021 C30211023752820 C30211023752823 26.089 185.99 6 5 2 1 2 data not available
Sensors measured in Pisa not included.
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Checklist for Pre-Series QualificationChecklist for Pre-Series Qualification
Pre-series completed
Not yet
Delivery procedure ST resumed with e-mail notification, still some inconsistencies
Bar code o.k.
Data format o.k., several files missing
Mask design Correct for all sensorsW7B test structure wrong
QTC IV problem, scratches, number of bad Cac
PQC o.k., assuming ST applies Flatband Voltage cut at 10 V
Longtime test o.k.
p-irradiation o.k.
n-irradiation o.k.
Bonding test o.k., 2 batches needed cleaning ?
% accepted sensors ~ 90 %Goal of qualification not yet reached.
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Optical Inspection IOptical Inspection IQuality of cut edges has significantly improved. Still some sensors outside specifications (last delivery). Further improvement needed.
1342
m
1464 m
549
m
20383204Back view
Still 4 rejects out of 261
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Optical Inspection IIOptical Inspection IIMany scratches on the surface of almost all sensors:
In many cases no electrical failure.In other cases broken or shorted aluminium lines !
Where and how are these scratches introduced ?Can these scratches be avoided with new scheme skipping IV after cutting? Agreed to try on 1000 OB2 sensors.But then we are even more concerned about cutting defects effecting the IV performance. (On single strip basis & and on overall performance!)
23412513
23412505
bad Cac short23412517
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Bad Cac valuesBad Cac values
Two cases:
• Bad Cac values correlated with scratches. (shorts & opens)
• One batch (4 sensors):All sensors having hundreds of too low Cac values.
AUTOMATIC Cac CAPACITORS MEASUREMENT Is this or will this be introduced ????
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IV problem - breakdown IIV problem - breakdown I
Limit
Correlation observed: Sensors with higher leakage current have strips with high leakage current ANDstrips with high leakage current are often in areas with scratches!
Example of W7A, W7B & W6A, W6B sensors:
0 100 200 300 400 500 60010-8
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89101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111
A
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CDEFG
HIJKLMNOPQRSTUVWXY
ZAAABACAD
AEAFAGAHAIAJAKALAMANAOAPAQARASATAUAVAWAXAYAZBABBBCBDBEBFBGBHBIBJBKBLBMBNBOBPBQBRBSBTBUBVBWBXBYBZCACBCCCDCECFCGCHCICJCKCLCMCNCOCPCQCRCSCTCUCVCWCXCYCZDADBDCDDDEDFDG
a
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cdefg
hi jklmnop
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vwxyzaaabacadaeafagahaiajakalamanaoapaqarasatauavawaxayazbabbbcbdbebfbgbhbibjbkblbmbnbobpbqbrbsbtbubvbwbxbybzcacbcccdcecfcgchcicjckclcmcncocpcqcrcsctcucvcwcxcyczdadbdcdddedfdg 30211023185001
30211023185002 30211023185005 30211023185009 30211023185010 30211023185017 30211023185022 30211023752801 30211023752802 30211023752805 30211023752806 30211023752810 30211023752813 30211023752814 30211023752817 30211023752818
1 30211023752821A 30211023752822a 30211023752823
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IV problem - breakdown IIIV problem - breakdown II
longtime
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30211322292720_1
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30211322292518_2
30211322292518_3
Time dependence observed for some sensors.Important to agree on test procedure.
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Same IV up to “soft strip breakdown”
0 100 200 300 400 500 6001E-8
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ST Karlsruhe
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bias voltage [V]
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Leaky strips -- scratches
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Hints
• Almost each high IV sensor has a few „high leaky“ strips! • Σ leaky strips ~ IV ( few strips drive IV)• EACH leaky strip is scratched ! – not all scratched strips are leaky• Clear correlation between IV and leaky strips and scratches on
sensors observed!• No IV-breaks on Minisensors! different handling ! Scratch test:
– Scratchtest on minisensors to reproduce effect• Needle• Pencil (2B)• screwdriver
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Scratches on minisensor
„Soft“ scratches with probe needle
Carbon residues of pencil
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Deep scratches on minisensor
„Not-so-SOFT“ scratcheswith screwdriver
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0 100 200 300 400 500 6000,00E+000
2,00E-008
4,00E-008
6,00E-008
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1,20E-007
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undamaged small scratch with needle deep scratch with needle scratched with pencil 2B scratched with screwdriver
curr
en
t [A
]
bias voltage [V]
x3
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1E-10
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strip 5 (not damaged) strip 8 strip 9 strip 10 strip 11 strip 13
stri
p c
urr
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t [A
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bias voltage [V]
x70
Total current Single strip current
Global IV and Individual strip IV
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0 5 10 15 20 25 301E-10
1E-9
1E-8
undamaged small scratch with needle deep scratch with needle scratched with pencil 2B scratched with screwdriver
curr
en
t [A
]
strip number
A few single strips show high leakage current!
Undamaged minisensor @ 400V:Ileak ~ 0,2nA x 192 strips ~ 35nAIV ~ 38nA
Damaged minisensor @ 400V: Ileak damaged strips ~ 55nA Ileak all ~ 100nA IV ~ 120nA
Strip scan (Current)
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Idiel on scratched Minisensor
0 5 10 15 20 25 30
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1E-12
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strip number
Effect is located in the Al layer, above the oxide! CMS sensors have metal strip overhang!!!Scratches remove the overhang and introduce pointlike defects
No pinholes created!
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Scratch on bias & guard (minisensor)
0 200 400 600 800 10000,0
5,0x10-9
1,0x10-8
No scratch on minisensor
Tot
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akag
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Voltage [V]
0 200 400 600 800 1000-1,0x10-5
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Scracht on bias and guard Exploded view
Tot
al le
akag
e cu
rren
t [A
]
Voltage [V]
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Preliminary field simulations (with ISE TCAD)
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Solution!?!Scratches -obviously happening very late in the
measuring procedure at ST- are critical!Avoiding scratches will certainly improve
the yield with respect to CaC (strip failure) , leaky strips (strip failure) and to global IV!
BUTThere is no guarantee, that avoiding scratches solves
ALL problems!Is it enough to skip the IV after cutting?????
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Update Contact PersonsUpdate Contact Persons
CMS STGeneral M. Krammer G. Fallica Technical M. Krammer G. Valvo Mask Design E. Focardi G. Valvo Contract and Payment M. Mannelli G. Di Stefano Schedule A. Cattai G. MendolaShipments M. Krammer G. KaueraufData Files
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CMS Tracker collaboration has to produce ~15000 silicon detector modules until end of 2004.
We need to procure 19000 ST sensors in 2 years production time. During full production only samples of sensors can be tested by CMS.We have to relay on Quality Control by ST !
Acceptance limit on sensor failure is max 1% !
Due to delays in pre-series production the time schedule is very tight and we have to compress the module production.
CMS Module ProductionCMS Module Production
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Example of a CMS ModuleExample of a CMS Module
A module consists of 2 sensors, electronic hybrid, 4-6 APV chips, pitch adapter, carbon frame, etc.
For many sensors: The first test of silicon sensor after ST quality control is on an assembled module. Replacement of single sensors is basically impossible!
The present failure rate of 10% is not acceptable
20% of all modules would fail!
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• Strip failure: Add. measurements by CMS– CaC AUTOMATIC Cac CAPACITORS MEASUREMENT!?!
– Leaky Strips (scratches only??)
• IV (scratches only??)
• Optical inspection has to be improved!
• Some improvements in the shipping logistic needed!
• Acceptance rate must be increased to 99% – Otherwise sensor failure will be detected about 1 year later
(2 sensors assembled together with electronics and mechan. parts)
SummarySummary
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Strip leakage current
0 100 200 300 400 50010-10
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30211223296114 30211223296121 30211223296122 30211223296123 30211223296124 30211223972807 30211223972812 30211223972816 30211223972822
Leak
age
Cur
rent
[A
]
strip number
0 100 200 300 400 500 600 70010-12
10-11
10-10
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10-5
10-4
234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950
515253545556575859606162636465
6667686970717273747576777879808182838485
8687888990919293949596979899100101102103104105106107108109110
111
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124125126127128129130131132133134135136
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414415416417418419420421422423424425426427428429
430
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30211023185001 30211023185002 30211023185005 30211023185009 30211023185010 30211023185017 30211023185022 30211023752801 30211023752802 30211023752805 30211023752806 30211023752810 30211023752813 30211023752814 30211023752817 30211023752818
1 30211023752821A 30211023752822a 30211023752823
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