SU-8 SI 20130709-cm · 2013. 10. 11. · SU-8_SI_20130709-cm Author: Shu Yang Created Date:...
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Supplementary Information Guided wrinkling in swollen, pre-patterned photoresist thin films with crosslinking gradient Chi-Mon Chen, Jason C Reed and Shu Yang Department of Materials Science and Engineering, University of Pennsylvania 3231 Walnut Street, Philadelphia, PA 19104 (USA) E-mail: [email protected] Electronic Supplementary Material (ESI) for Soft Matter This journal is © The Royal Society of Chemistry 2013
Transcript of SU-8 SI 20130709-cm · 2013. 10. 11. · SU-8_SI_20130709-cm Author: Shu Yang Created Date:...
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Supplementary Information
Guided wrinkling in swollen, pre-patterned photoresist thin films with
crosslinking gradient
Chi-Mon Chen, Jason C Reed and Shu Yang
Department of Materials Science and Engineering, University of Pennsylvania
3231 Walnut Street, Philadelphia, PA 19104 (USA)
E-mail: [email protected]
Electronic Supplementary Material (ESI) for Soft MatterThis journal is © The Royal Society of Chemistry 2013
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Figure S1. The relative transmittance of dyed SU-8 (3.8µm, 6.26 mM rhodamine B) vs. a pure
SU-8 film.
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200 300 400 500 600 700 800
Rel
ativ
e tra
nsm
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on (%
)
Wavelength (nm)
Electronic Supplementary Material (ESI) for Soft MatterThis journal is © The Royal Society of Chemistry 2013
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Figure S2. Curling of a free-standing dyed SU-8 film (3.8µm). (a) As-detached film. (b) Sample
shown in (a) was exposed to THF vapor for 16 h.
Electronic Supplementary Material (ESI) for Soft MatterThis journal is © The Royal Society of Chemistry 2013
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Figure S3. Edge undulation (highlighted in red) and premature wrinkle on the SU-8 pre-patterns
(p=20 µm, h=800 nm) after swollen in THF for ~30 min. The deformation in the valley region
caused by the wrinkle formation can also be observed (highlighted in green).
Electronic Supplementary Material (ESI) for Soft MatterThis journal is © The Royal Society of Chemistry 2013
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Figure S4. Schematic of the shifting of neutral plane for bending and the parameters, t: the
thickness of a flat plate; zp: the shifting distance of the neutral plane.
Electronic Supplementary Material (ESI) for Soft MatterThis journal is © The Royal Society of Chemistry 2013
