Structural Evolution of SiC From Polycarbosilane

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  • 7/26/2019 Structural Evolution of SiC From Polycarbosilane

    1/8

    J O U R N A L O F M A T E R I A L S S C I E N C E 2 5 I I 9 9 O ) 3 8 8 6 - 3 8 9 3

    Structural

    evolutions

    rom

    polycarbosilane

    o

    SiGceramic

    G . D .

    S O R A R U - ,

    L O R E N C EA B O N N E A U l ,. D . M A C K E N Z I E

    Departmentof MaterialsScienceand Engineering,Universityof California,Los Angeles,California 90024. USA

    The

    pyrolysis rocess

    f a

    polycarbosilane

    nto

    a

    microcrystalline

    iliconcarbideceramic

    has

    been ol lowedup to 1700"C mainlyby means f sol idstate

    sSi

    and

    13C

    nuclear

    magnetic

    resonance,ransmission lectronmicroscopy nd X-ray diffractionanalysis. structuralmodel

    has

    been

    proposed

    or the amorphous iliconcarbide

    phase

    hat is formedduring he

    pyrolysis

    process.

    he ceramic btained t

    h igh

    emperature

    s formed

    by a

    mixture

    f

    p-SiC

    and a-SiC;

    however,

    ome difficulties

    n

    the

    identification

    f the crystalline

    hases

    have

    been

    pointed

    out.

    1. lnt roduct ion

    Recently, t has beenshown hat non-oxideceramics

    suchascarbides nd nitridescanbe obtainedby

    firing

    suitablemetal-organic

    olymer

    precursors

    n con-

    trolled atmospheres

    ].

    A common feature of the

    polymer

    oute o carbides r nitrides s the formation

    of intermediates hich are amorphoussolids.These

    are formed after the removal of the organic com-

    ponents

    and before crystallization

    [2].

    We have

    already

    pointed

    out the mportance

    f regarding hese

    amorphouscovalent

    ceramics

    ACC)

    as an entirely

    new family of disordered olidswhosestructureand

    propertiesareworthy of independent tudy

    3,

    4].

    Among the

    various

    systemsalready synthesized,

    SiC obtained

    from

    polycarbosilane

    s certainly the

    most widely

    studied

    [5-7].

    Commercially available

    Nicalon

    SiC

    ibres

    are obtained

    rom

    polycarbosilane

    following the

    process

    irst developed y

    Yajrma

    et al.

    [8].

    The feasibilityof this method

    n

    producing

    ibres

    or coatings

    s not restricted o this material. It is

    mainly due to the

    polymeric

    nature of the ceramic

    precursors,

    and it accounts or the many research

    efforts hat arecurrentlybeingconducted.

    Despite he

    increasing umberofstudieson SiC

    ibres

    obtained

    by

    the Yajimaprocess,he structural onversionrom the

    starting

    polycarbosilane

    o the resulting ceramic

    matedal

    is not well

    understood.

    n this

    paper

    the

    pyrolysis

    mechanism f

    polycarbosilane,

    he structure

    ofthe

    intermediate CC

    phase

    nd

    ts conversionnto

    the microcrystalline ilicon carbideceramics,

    will

    be

    discussedmainly basedon

    2eSi

    and

    r3C

    magic-angle

    spinning uclearmagnetic esonance

    MAS-NMR),

    electron spin

    resonance

    ESR),

    X-ray diffraction

    (XRD)

    and ransmission lectron

    microscopy/selected

    areaelectrondiffraction

    (TEM/SAED)

    experiments.

    2. Exper imental

    procedure

    Commercially

    available

    polycarbosilane

    PC,

    Dow

    CorningX9-6348)

    with

    a

    molecular eightof 1400,

    was used n this study.All the firing

    treatmentswere

    performed

    n flowing argon with a heating rate of

    2'C min

    I

    up

    to the complete

    emoval

    of the organic

    components

    t around8400C.

    The resulting norganic

    solid, that is amorphous according to XRD and

    TEM/SAED experiments,can be considered as

    the ACC

    phase precursor

    or

    SiC

    microcrystalline

    ceramics.n order o study he subsequentensification

    and crystallization

    process,

    he ACC

    phase

    was

    fired at different temperatures

    up to

    1700'C

    al

    l0'Cmin

    I.

    The

    amountsof silicon,carbon and

    hydrogenwere

    analysed

    or

    selected amples.Oxygen

    contentwasnot analysed. hermogravimetricnalysis

    was

    performed

    n flowing argonusinga PerkinElmer

    equipment.

    esi,rC

    and

    H

    liquid NMR

    spectra

    were

    recorded n a AM 360Brukerspectrometerl. '71.5,

    90.5 and 360

    MHz, respectively.

    he

    polymer

    wa s

    dissolvedn CDC!. For

    "Si

    NMR experiments,

    pulsewidth

    of l0

    p

    secwas applied with a relaxation

    delayof 6 sec. H and

    rrC

    NMR spectrawere ecorded

    wi th

    pulsewidths

    f24sec orrH and

    5gsec

    or

    |C.

    and delays etween

    ulses

    f

    I

    sec

    or

    I

    H

    and

    2

    sec

    or

    'rC.

    Solid-state

    esi

    and

    r3C

    NMR

    spectra were

    obtainedon a

    MSL

    300 Bruker spectrometer t 59.6

    and75.5MHz. A pulsewidth f 2.5p secand a delay

    between

    ulses

    of 60sec

    were

    used for the

    zosi

    MAS-NMR spectra. contact ime of 2mse c was

    appliedor thecross-polarization

    xperimenrs.

    'C

    CP

    MAS-NMR

    spectra

    were

    ecordedwith a contact ime

    of 3 m sec.Tetramethylsilane

    TMS)

    was used as a

    reference or all the NMR data. ESR expedments

    were carried out on a Varian E09

    spectrometer.

    Bruker

    gaussmeter

    asused o measure

    he

    magnetic

    field with

    diphenylpicrylhydrazyl

    DPPH)

    as a stan-

    dard. The numberof spinswas estimated y com-

    parison

    with copper sulphate

    as

    reference.XRD

    pattems

    were recorded

    on a Philips diffractometer

    usinga Cu,(c radiationwith a

    nickel ilter. For TEM

    observations he sampleswere

    ground

    to very fine

    *

    Permanent ddress. ipartimentodi Ingegneria, nivrsitdi Trento, 38050Mesiano,Trento, talia.

    I

    Permanent ddress:Chimiede la Matire

    Condense.

    nivelsilParis6. Tour 54. 4

    olace

    Jussieu. 5005Paris.

    France.

    3886

    0022-2461/q001.00

    .12

    O

    1990

    Chapman

    d Hall Ltd.

  • 7/26/2019 Structural Evolution of SiC From Polycarbosilane

    2/8

    50

    0

    -50

    Chemical

    shift

    {g.o.m.}

    Frgrre 1

    (a)

    ?'Si

    MAS-NMR and

    O),,Si

    Cp MAS-NMR

    sr,ctra f

    polycarbosilane.

    powders

    which

    were then dispersed

    on to a TEM

    copper grid using an eye dropper. TEM/SAED

    investigations

    were

    performed

    using a Jeol

    STEM

    100

    CX equipment. Density measurements

    were

    performed

    on fine

    powders

    by immersion n

    CClo

    following

    the Archimedesmethod.

    BET measure-

    ments ryere

    one with a Flow

    Sorb

    II 2300

    Micro-

    meritics

    equipment.

    3. Results

    3.1 Characterization

    f the

    polymer

    orecursor

    The chernical

    analysisof

    PC, reported n

    Table I,

    shows Si :C:H rat ioof l :2.2:5.bs i MAS-NMR

    and

    2esi

    CP MAS-NMR

    spectrahave

    been ecorded

    on this starting material

    (Fig.

    l).

    The two spectra

    reveal

    he

    same

    eatures,

    with an

    enhancement f

    the

    resolution for

    the

    cross-polarizedspectrum. The

    spectra show two different

    silicon

    units, already

    reported n

    the iterature

    7].

    The

    peak

    at

    -

    0.8

    p.p.m.

    is

    due to silicon

    atoms bonded o four

    carbonatoms

    (SiCa)

    as type I units and

    the second

    peak

    at

    -

    17.6p.p.m.s

    due to type II

    units n which the

    silicon atoms are

    surroundedby three

    carbon atoms

    and one hydrogen

    atom

    (SiCrH).

    No

    distinct

    peaks

    appeararound

    -

    35

    p.p.m:

    Si-Si bonds, f

    they exist,

    are thus not abundant n this starting PC

    [7].

    These

    two typesof units

    are shown

    below.

    CH '

    I

    CH"_Si_CH,

    CH"

    l

    CH,

    (r)

    TABLE

    I Atomic ratio

    Si:C:H in

    the

    preculsor

    and in some

    fired

    samples

    Sample

    PC

    PC8,l0

    PCl200

    PCt500

    cH.,

    I

    -si-cH,

    I

    H

    OD

    ffi

    ffi

    Chemicalshift

    (

    p.p.m.l

    F8rle

    2"Si,rH andr3C

    NMR spectra f

    polycarbosilane

    issolved

    in

    CDClr.

    PC

    wasdissolved

    n CDClr.

    2esi,

    H and

    ,C

    NM R

    spectra ere ecorded

    n

    solution

    Fig.2).

    The,,Si

    NMR

    spectrums

    quite

    similar o the

    CP MAS-NMR

    spectrum

    on th

    powder.

    The ratio

    between

    he two

    kindsof units (I and II) appearso be I :0.8.The

    'H

    NMR

    spectrum

    of PC shows

    two regions for

    the

    resonance,rom

    4 to

    5p.p.m. due o

    Si-H bonds

    and

    around0

    p.p.m.

    due o C-H

    bonds.The ntegration

    of

    the

    peaksgives

    a value

    of

    11

    or the

    C-H/Si-H ratio.

    In

    the Si-H region,

    everal

    eaks

    re

    present

    t 4.1,4.3

    and 4.6p.p.m.

    due to

    differentSi-H

    sites.The C-H

    region

    hows main

    peak

    at 0.17p.p.m.,

    ue o CHj

    groups,

    and two

    shoulderswith lower

    chemical

    hift

    values,

    at 0 and

    0.5p.p.m. assigned,

    espectively,

    o

    CH, and CH

    groups.

    The

    '3C-{rH}

    spectrum

    of the

    solution

    shows a broad

    peak

    centred

    on 3

    p.p.m.

    corresponding

    o the aliphatic

    carbon

    atoms

    present

    in PC in CH3,CH, and CH units.Somesharppeaks

    are superimposed,

    ertainly

    due o some

    quite

    mobile

    units

    nside he

    polymer.

    All the NMR

    spectrandeed

    have

    broad

    peaks,

    and

    0. 0.0.0

    2. 2

    1 .6

    t.44

    1.43

    5

    0.65

    0.10

    0.07

    3887

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    3/8

    no

    resolution as

    obtained speciallyor

    rH

    and

    r3C

    NMR experiments.

    hisseemso ndicate

    hata arge

    distribution

    f units s

    present

    n

    this

    polycarbosilane.

    The

    structure f

    polycarbosilane

    hat emergesrom

    these esults

    s morecomplicated

    hana simple inear

    chainof

    type and I unitswith

    a

    I

    :

    I ratio

    suchas

    CH. CH

    t t

    -cH,

    si cH, si-cH,-

    l l

    CH.. H

    In thiscase he

    chemical nalysis hould

    be Si C : H

    :

    I :2.5:7. The low

    carbon and hydrogen

    contents n

    the

    studiedPC and the

    presence

    f CH units n the

    '

    H

    NMR

    spectrum suggest

    hat some cross-linkngha s

    already

    occurred between he

    chains. This has

    already

    been suggested y

    Okamura et a/.

    [9].

    3.2.

    Character izal ion

    f he

    pyrolysis

    rocess

    3.2.1 From the prccursorpolymer to the

    ACC

    phase

    The

    low molecular

    weightcomponents

    f the

    poly-

    carbosilane

    ave been

    previously

    emoved

    by melt-

    ing

    the

    polymer

    n flowing

    nitrogen

    gas.

    Thermo-

    gravmetric

    nalysis

    TGA)

    performed

    n this material

    (PCD)

    showed hat

    the

    weight

    osses nd at

    around

    800'C.At this emperature

    he

    precursorolymer

    as

    been onvertednto

    an inorganic olid

    hat appea$

    to

    be amorphous y XRD

    and TEM/SAED nvesti-

    gations Fig.

    3) .

    According

    to TGA

    experiments,he

    pyrolysis

    processeading o the formation of the amorphous

    slcon carbide

    phase,

    consists

    of two stages: rom

    300

    o 500'C with a weight oss

    of l37o

    and

    from

    500 to 800'C with

    a

    further

    weight oss

    of

    1270.

    The PCD was heated

    at 2'Cmin

    '

    in argon up

    to

    500"c

    (PC500),

    700'c

    (PC700)

    and

    840.C

    (PC840).

    he

    chemical nalysis

    f PC840appeared

    o

    b e

    S i : C : H :

    l : 1 . 6 : 0 . 6 5

    T a b l e

    ) .

    E x c e s sa r b o n

    TABLE II

    "Si

    MAS-NMR data for the

    precursor

    nd rhe

    fircd samples

    Sample Chemical hift

    (p.p.m.)

    Linewidth

    p.p.m.)

    Fgurc

    3 TEM bright-field

    micrograph with

    SAED

    pattems

    of

    polycarbosilane

    yrolysed

    t 8,10" .

    was

    hus

    present

    n

    this

    amorphous ilicon

    carbide

    phase.

    The

    "Si

    MAS-NMR and

    r3C

    CP MAS-NMR

    spectra ecorded

    n these amples re shown

    n Fig. 4

    aswell as he specra

    fthe

    precursor

    s eference.

    he

    "Si

    MAS-NMR

    spectrum f PC

    shows he wo

    peaks

    assignedo SiCo nd

    SiCrHunits. n thesample

    red

    at 500'C, the peakat l6p.p.m. assignedo the

    SiC,H

    units has disappeared.

    he major

    peak

    at

    0

    p.p.m.

    due o SiCa nits

    appears lmostunchanged

    with

    onlya slight hift

    ofthe

    position

    frhe

    maximum

    and a small ncrease

    f the linewidth

    (Table

    II). By

    increasing

    he firing

    temperature ver

    500oC and up

    to

    840'C his rend s maintained:

    he

    peak

    elated

    o

    the

    SiCa nits s continuousl y

    oving oward

    ower

    values

    of chemical

    shift typical of the

    crystalline

    silicon

    carbide

    phase

    while ts Iine',vidth

    s increasing

    up to 700'C. The

    evolution

    i

    rhe

    esi

    MAS-NMR

    spectra as

    alreadybeen explained

    n detail in

    a

    previous tudy 3]. n the firststage f the pyrolysis

    process!

    up to 500"C, a

    possible

    reaction is

    the

    consumption f

    Si-H

    groups

    and the formation

    of

    bridging Si-C

    bonds between he

    polycarbosilane

    chains.Above

    this temperature

    he shift of the

    peak

    due o

    SiCo nits eflects n ncrease

    fthe connectivity

    29si

    laes-rulrR

    13c

    cp

    uls-t'tl,,ta

    *ito---*-t*

    -Zo-:n-*-

    Chemical hift

    (p.p,m

    FErre 4 Evolutionwith the firing

    temperature f

    DSi

    MAS-NMR

    and

    ''C

    CP MAS-NMR spectra

    f

    polycarbosilane.

    PC

    PC500

    PCTOO

    PC84O

    0 1 6

    -

    4. 5

    -6 .3

    -8 .0

    l0

    12.5

    3888

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    Fur ESRspectrum

    ecordedt room emperature

    n PC840-

    of the network by the formation

    of Si C-Si bonds.

    At the same time

    the evolution of t he linewidth is

    correlated

    to an increase of the disorder

    of the local

    environment

    around the silicon atoms. During

    th e

    pyrolysis

    process,

    condensation reactions lead

    to

    the

    consumption of CH., and

    CH,

    groups

    and to the

    formation of CH or C u nits with the evolution of H,

    or CH"

    [7].

    These reactons

    obviously increase he

    number

    of different SiC, units that can exist in

    th e

    material

    and

    may account for the observed ncreaseof

    the

    peak

    linewidth already mentioned.

    "Si

    MAS-NMR

    study of the fired samples shows no other

    peaks

    than

    thoseassignedo SiCa nits. No

    Si-Si

    nor

    Si O bonds

    seem o be ormed

    during the

    pyrolysisprocess.

    Information

    about the evolution of the local

    environment

    of the carbon sites during the

    pyrolysis

    process

    can be obtained from the

    rrC

    CP

    MAS-NMR

    spectra n Fig. 4.

    The spectrumof PC shows

    one

    peak

    at 4.2p.p.m. and a small absorption near 55p.p.m.

    that has been dentified

    as a spinning side band. By

    increasing he firing

    temperature he main

    peak

    shifts

    toward

    higher values of chemical shift with a cor-

    responding increase

    of its line\,/idth. The resonance

    present

    at 4.2p.p.m. n

    the spectrumof PC is due to

    the cont r ibu t ion f a l l the

    carbon

    groupspresenr

    n

    the starting

    polymer,

    namely

    CH,, CH, and CH. It is

    wel known

    that the chemical shifts of

    CH,, units

    increase

    when the r value s decreased. hen,

    accord-

    ing

    to thesedata, the shift

    of the

    peak

    with the f ir ing

    temperature reflects

    a co nsumption of the more

    hydrogenated

    species due to the occurrence of

    the

    condensation eactionsduring the pyrolysisprocess.

    The

    ncreasen the i newidthhas o

    be

    related

    with the

    same evolution in the

    resi

    MAS-NMR

    spectra. It

    reveals

    n

    increasen

    the disorderofthe Ioca

    environ-

    ment ofthe aliphatic

    carbon atoms during the

    pyrolysis

    process.

    Moreover,

    an

    interesting

    eatureappearsat

    above 700'C: new

    peaks

    are

    present

    n

    the

    100

    to

    200p.p.m.

    range.These

    peaks

    become

    more ntense

    t

    840'C. The broad

    peak

    centred around 135p.p.m.,

    can

    be assigned o the

    presence

    f aromatic

    carbon

    atoms.and

    could be

    related

    o th e formation of

    C:C

    bonds. t has alreadybeen

    suggestedhat suchbonds

    could be present n the ntermediate morphousphase

    but

    no

    experimental videncewas

    given.

    They

    should

    be

    precursor

    bonds

    or

    graphitic

    carbon hat is formed

    around

    1200'C

    according o Raman

    data

    [9].

    ESR was

    perormed

    on the

    sample fired at 840" C

    r '- '.1

    '.

    u- l.,.tn\,

    ," /

    r..,2" ',.- lr

    i ,

    , L .

    S t

    I

    ,').,-'./"'t.-i.

    I

    .r'"

    -c '

    |

    |

    I

    s l - " \

    ,

    - l

    - s r - c \

    / s i -

    )sr..

    /

    r,-cr

    I

    -cH-t.

    i' i,-

    cfl7.r

    ./

    _s f

    si-uc/

    \

    / \

    Fr,g/fe Proposedtructure

    ftheamorphousilcon arbide

    hase

    obtainedrom

    polycarbosilane-

    (Fig.

    5).

    The

    spectrum xhibitsa single sotropic

    signal

    centredat

    g

    :

    2.0030,with

    a

    linewidth

    of 3.9G. This

    valuecorresponds

    o carbon danglingbonds

    0].

    Th e

    integration

    of the signal

    gave

    the number

    of defect:

    to

    be

    2.5 x

    lOrecm

    I,

    considering

    a densit,v o

    2.2gcm-l for

    this sample.This value s in

    agreemenL

    with the number

    of defect s ound in amorphous

    SiC,

    samples

    prepared

    rom chemical vapour

    deposition

    l l0 l .

    3.2.2.

    Characterization

    f the ACC

    phase

    The

    proposed

    structure

    of the amorphous

    silicon

    carbide

    phase

    obtained

    at 840'C is il lustrated

    in

    Fig.

    6.

    It is

    basedmainly on rhe

    2esi

    MAS-NMR and

    rC

    CP

    MAS-NMR

    resultsalthough

    he broadness

    f

    the NMR

    peaks

    n these

    samplesmade it diflculr

    to

    obtain

    precise

    structural data. These

    amorphous

    phases

    how

    a

    wide

    distribution of

    siliconand carbon

    atoms types. However, some relevant

    features

    can be

    pointed

    out.

    (a)

    The silicon

    carbide

    phase

    is not

    stoichiometric,but an excessof carbon is present

    (C/Si

    :

    1.6).

    (b)

    All

    the sili con atoms

    seem to be

    bonded to four carbon

    atoms and Si Si or Si-H

    bonds, f they

    are

    present

    hould

    be

    minimal.

    (c)

    Some

    C:C bonds

    are

    present

    sclearly

    shown by the

    rrC

    CP

    MAS-NMR

    experiments.

    d)

    The residual

    hydrogen

    content

    H/Si

    :

    0.65)should

    be mainly

    present

    n

    th e

    structure

    as CH

    groups

    as suggested

    by the chemical

    shift of the main

    peak

    in

    the

    rrc

    Cp MAS-NMR

    spectra.

    (e)

    The

    condensation reactions

    occurdng

    during the

    pyrolysisprocess

    an ead

    o the formation

    of

    six-member ings like

    those

    present

    n

    crystal l ine

    SiC,but

    the

    ormation

    ofdistorted

    ive-or seven-aton

    rings cannot be ruled out and should lead to the

    presence

    of C{

    bonds.

    (f)

    The

    presence

    of

    para-

    magnetic defectshas

    been shown

    by

    ESR

    experiments

    and

    these defects were

    assigned to carbon

    dangling

    bonds.

    A

    density of 2.21gcm

    r

    has

    been measured

    on a

    sample of fine

    powders

    of this

    phase.

    This

    value is

    lower

    than the

    density of

    p-SiC

    (3.21gcm

    r).

    A

    theoretical density

    (2.70gcm

    r)

    can be estimated

    from the

    chemical nalysis

    fPC840

    (Table

    )

    by using

    the rule

    of

    mixtures

    and assuming

    hat al l

    the silicon

    atoms are engaged n forming

    amorphous

    SiC

    (density

    3.0gcm

    r)

    [tl]while the remainingcarbon s present

    as

    graphite density

    2.2gcm

    3;.

    The low

    value

    of the

    density

    of the amorphous

    phase

    annot be

    ascribed o

    the

    presence

    f

    porosity

    n

    the material.

    SEM investi-

    gations (Cambridge

    Sterescan)have

    shown only few

    3889

  • 7/26/2019 Structural Evolution of SiC From Polycarbosilane

    5/8

    10000c

    9500c

    9000c

    o 2 4

    6 I 1 0 1 2

    Time

    (h )

    Figwe 7 Etoltion of the

    density,

    p,

    of the ACC

    phase

    with the

    lring

    time.

    isolated

    pores

    for

    the

    ACC

    phase

    while TEM studies

    (Fig.

    3)

    have

    shown

    no

    porosity

    at a sub-microscopic

    level- This

    evidence

    s

    also supported by BET analysis

    that

    gave

    a

    value

    of surfacearea

    ower

    than I m' g-

    |

    lor

    the samesample.

    Therefore,

    a

    quite

    open structure,

    with a l arge amount of free volume must be invoked

    to account for the low value of density

    of

    the

    amor-

    phous

    ceramics. With the aim of following

    the

    evolution

    of

    the

    density of

    PC840

    as a function of

    the firing time, isohermal treatments in

    an argon

    atmosphere

    at 900, 950 and

    1000'C

    were

    performed

    and the results epo rted n Fig .

    7. An activa tionenergy

    of 82 kcal mol

    I

    was obtained rom the nitial slopeof

    the densilcatio n urves

    Fig.

    8).

    Assuming

    a negligible

    value ol

    porosity

    in

    PC840, he observed

    ncrease

    f

    densityduring the firing treatment

    must

    be

    primarily

    ascribed o a reduct ion of its free volume. Two main

    processesmay account for this effect. (i) The progress

    of the condensation

    eactions

    between esidual CH

    groups

    n the structurewith the elimination

    ofH, and

    CHo and the formation of new

    Si-C Si bridges with a

    consequentncrease

    fthe crosslinkingofthe network.

    Actually, chemical

    analysis f the

    ACC

    phase

    ired at

    950 and 1000"C for

    the

    longest

    t imes, showed a

    decrease

    f the

    hydrogen

    down to H/Si

    :

    0.2 com-

    pared

    to the initial value of H/Si

    :

    0.65;

    ii)

    a

    rear-

    rangement

    of the open amorphous covalent structure

    toward more

    compact configurations with no

    change

    in

    chemical composition. For both

    of these mech-

    anisrns, key stepshould be the

    cleavage f chemical

    bonds.either C-H

    (99

    kcal mol

    r)

    in

    the

    first

    caseor

    S i -C

    (T6kca lmol

    ' )

    and C C

    (82kca lmol

    r )

    [2 ]

    i n

    the

    atter one.The obtained alueofactivation energy

    suggestshat, at

    least n

    the

    nitial

    stages,

    he densifi-

    cation

    process

    occurs via the cleavage f chemical

    bonds

    present

    n the material.On the

    ground

    of

    ' esi

    MAS-NMR experiments,t hasalreadybeen eported

    in a

    previous

    study

    [3]

    that, during the isothermal

    treatments, he rarrangement f the structure eads

    to an orderingof the local environment f the

    silicon toms.Moreover, t the highest emperature

    (1000'C),

    XRD

    and

    TEM/SAED investigations

    showeda concomitant

    eorganization

    f the

    network

    also

    n

    the

    medium rangewith the forrnation of

    SiC

    microcrystals

    3] .

    3.2.3. From

    the

    ACC

    Dhase to

    microcrystalline SiC

    The amorphous

    iliconcarbide

    hase

    an

    beconverted

    into

    a

    microcrystalline

    eramic by firing it

    at

    high

    temperatures.n

    order o follow

    such ransformation,

    thePC840washeated !t10'Cmin-r

    in argon low at

    1000'c

    PCl000),

    200"

    (PCl200),

    500.c(pcls00)

    and 1700'C (PCl700).XRD and "Si MAS-NMR

    spectra recorded on these

    samplesare shown in

    Figs

    9a and b, respectively,

    ogetherwith the spectra

    obtainedon a commerical

    B-SiC

    as reference.

    In

    the XRD

    patterns Fig.9a),

    broad

    peaks,

    or -

    responding

    o crystallineSiC

    phase,

    tart to appearat

    1000'C

    and sharpen

    y

    increasing

    he firing tempera-

    ture. The correspondng

    rystallite sizes,evaluated

    from the diffraction

    resultsby usinga

    peak

    broaden-

    ing

    procedure,

    re reported n Table III. The

    micro-

    structure

    f thesample eated t 15000

    , as

    revealed

    by

    TEM investigations,

    s

    shown

    n

    Fig. 10.Although

    a detailed nalysis f the crystalsizes rom TEM

    micrographs asnot

    performed,

    he meancrystal

    size

    seems

    o be slightly igher ompared

    o XRD results.

    This could be due o the fact that the crystallites ave

    a range

    of sizedistribution n the

    sample nd the

    largest

    particles

    are more readily

    observed. Fine

    porosity,

    as revealed

    y the white spots n the micro-

    graph,

    seems

    o be

    present

    in

    this sample. This

    observation s in

    agreementwith a recent

    study

    [

    3]

    that

    showed he formation

    of

    porosity

    n Nicalon

    fibresafterannealing

    t

    14000

    in argonatmospheres.

    BET analysis esultedn

    a valueoi surface

    rea

    ower

    than m' g

    I

    indicatinghatclosed

    orosity

    spresent

    in these amples.

    The

    position

    of the diffraction lines in the fired

    samplesndicateshat the microcrystall ine

    hase

    s

    mainly

    B-SiC.

    n

    the XRD

    pattern

    of the sample

    heated

    up to

    1700"C

    a small

    shoulder

    s

    seenat

    around20

    :

    34". t hasbeen

    ssignedo a-SiC, ug-

    gesting

    that, at the highest

    temperatures he

    crystalline

    hase

    onsists

    f a

    mixture

    of cubic

    p-SiC

    with traces

    of the

    hexagonal

    orm

    TABLE III

    Sizes

    f the

    SiC microcrystalsn thc fired

    poly-

    carbosilane alculatedrom

    the broadness f the main

    peak

    n the

    diffractionpattern

    Firing

    temperature

    "C)

    ^

    2.4

    -

    2.3

    f= 82

    kco lmo t - r

    4 . 1

    1 0 4 1 R r

    Fre 8

    Arrhenius

    plot

    for the inital densificalion

    ate.

    3890

    -1

    4 . "

    4 .2

    . Q

    1700

    Crystalsize

    nm)

    1000 t 500

    16 .0

  • 7/26/2019 Structural Evolution of SiC From Polycarbosilane

    6/8

    Chemical

    shift

    (p.p.m.)

    In the X-ray patterns

    of the fired

    samples a small

    peak

    around 20

    :

    26'is

    clearly visible. ts intensi ty

    reaches the maximum

    value in the

    sample heated at

    1200'C

    and

    decreases ith further heating. t

    could be

    assigned

    ither o the

    (l

    0 l) ref lect ion

    f(-quartz or to

    the

    (002)

    l ine of carbon. In the literature, he dis-

    appearance

    ofthis

    peak

    after a treatment with HF has

    been reported

    [7].

    This

    result has

    been assumed o be

    proof

    for the existence

    of crystalline

    silica in the fired

    ceramics. However,

    in the

    present

    study, the

    samples

    were heatcd

    in an inert

    atmosphere

    to avoid major

    oxygen

    contamination; moreover

    SiOo

    units should

    give

    rise ro a

    peak

    in

    the

    "Si

    MAS-NMR

    spectra

    around

    -

    I l0 p.p.m.

    Such

    a

    peak

    s completely

    bsent

    in

    the spectra. Therefore

    it seems hat

    the X-ray dif-

    fraction

    peak

    af 20

    :

    26"

    should be assigned

    o the

    presence

    of small clusters

    of

    graphite

    rather

    than

    crystal l i tes

    f d-quartz.

    The evolutionwith the firing temperature fthe' eSi

    MAS-NMR

    spectra s

    shown in Fig.

    9b.

    The

    main

    peak

    corresponding

    o the SiC4

    nits s shiftingdown-

    field

    approaching the value

    corresponding

    to the

    crystalline form

    (Table

    IV). At the

    same time, irs

    linewidth is

    decreasing suggesting

    an ordering

    of the

    ocal environment

    of the

    sil icon atoms in

    the SiCr

    units. At 1500"C

    some

    structures tart to

    appear n

    this

    peak

    hat becomemore

    evidentat 1700"

    C. At this

    temperature,

    he MAS-NMR

    spectrum eveals

    hree

    TABLE

    IV

    2'Si

    MAS-NMR

    dataof the ired

    oolvcarbosilane

    PC840

    PC 000 PCr200 PCl500

    PCt700

    Figule

    9 Evolution of

    (a)

    XRD

    patterns

    and

    (b)

    "Si

    MAS-NMR

    spectra of ACC

    phase

    during

    the firing

    processP-SiC

    ampl

    rovided

    by

    Superior raphite).

    dist inct

    eaks

    t

    -16.2, -20and -25 p.p.m.Sucha

    spectrum as alreadybeen

    published

    n

    the literature

    [4,

    l5]. In a first approximation,

    he

    main

    peak

    at

    16.2

    .p.m.

    can

    be assignedo

    B-SiC

    and the two

    minor

    peaks

    ould be due o some

    a

    phase.

    However,

    this assignmentwill be discussedater in the dis-

    cussion.

    4. Discussion

    and conclus ion

    In the

    pyrolysis

    of

    PC,

    the removal of organiccom-

    ponents

    occur

    via

    condensation eactions beween

    CH.,and CH,

    groups

    of the strting

    polymer.

    When

    this

    process

    s completehe

    polymer

    hasbeen

    onverted

    into an amorphous

    covalentceramic

    ACC)

    phase.

    The

    temperature t which the condensationeactions

    end and the ACC is formed can be

    obtained

    rom

    a

    TGA experiment:t

    canbe defined s he emperature

    at which

    he

    weight osses

    re complete nd the

    curve

    approachesconstant eight alue.However,his s

    FBrre 10 TEM bright-fildmicrograph f PC

    frredat 1500'C.

    \ ,[ Pcl7oo

    \--./q*JL_L

    PC1500

    \"*-/"..***--".-

    \.-l\.*....-...,-

    \-_-.r,r.*.,*.,.*"-

    40

    20

    (des

    PC1200

    PC1000

    Pc84o

    i

    "t*"*,/

    200

    10 0

    Chemical

    8

    shift

    (p.p.m.)

    -

    t6.2

    -

    16.2

    20

    -20

    l 6

    3891

  • 7/26/2019 Structural Evolution of SiC From Polycarbosilane

    7/8

    not an absolute hreshold alue: t is reasonableo

    think that

    the emperaturef formationof the ACC

    phase

    s

    dependentupon the heating rate and the

    heating

    atmosphere. or example,by

    processing

    he

    PC in vacuum

    or by using a lower heating rate it

    shouldbe

    possible

    o

    complete he

    pyrolysis rocess

    t

    lower emperature

    nd hus

    t

    shouldbe

    possible

    o

    get

    an amorphous norganic solid at lower temperature.

    Moreover, he structure tself

    and the compositionof

    the orming norganicdisordered hase an be affected

    by the same

    processingarameters

    .e. emperature,

    heating ate and heating

    atmosphere.

    In the

    present

    study,

    TGA

    experiments btained

    usinga

    heating

    ate of 2"Cmin

    I

    in flowingargon,

    showed hat the weight osses nd at around

    800oC.

    Thus

    according to these results the PC has been

    converted

    nto

    the ACC

    phase

    or the subsequent

    structuraland crystallization tudies y heating t with

    the same

    processing

    parameters

    at temperatures

    slightly

    higher

    hen800'C, namely 40'C.

    A

    wide tange of different ypesof defectseemso

    exist n thisamorphousil icon arbide hase sshown

    in Fig. 6. NMR and ESR experiments

    howed he

    presence

    f C:C bonds

    and carbon dangling

    bonds

    respectively.

    he

    presence

    f distorted

    ive- or seven-

    atom rings can

    be reasonably

    assumed

    3];

    excess

    carbonand

    residual ydrogen

    C/Si

    :

    1.6;

    H/Si

    :

    0.65)

    havebeen vinced y

    chemical nalysis.

    hemical

    and structural modificationsoccur n this

    phase

    by

    increasing he temperature

    ver 840'C.

    Residual

    hydrogen ontentand carbonexcess

    re considerably

    reduced

    Table

    )

    at

    1200'C

    H/Si

    :

    0.1;C/Si

    :

    1.44)

    and are sti l l decreasing t l500oc

    (H/Si:0.07;

    C/Si

    :

    1.43) ue mainly

    o the completion f con-

    densationreactions.The other major modification

    occurring uring he iring

    process

    f theACC

    phase

    is its structural rearrangement

    hat

    leads

    to the

    formation

    of a

    microcrystalline

    eramic.This trans-

    formaton

    tarts, ccordingo XRD andTEM/SAED

    experiments,

    t around

    1000'C.

    t is known

    16]

    hat

    the crystallizationmechanism f disordered ovalent

    four-coordinatedmaterials ike

    amorphous iliconor

    germanium

    nvolves he ruptureofthe

    Si-Si or Ge-Ge

    bonds, espectively.n these

    ases he experimentally

    observed ctivationenergies re close o the covalent

    bond energies or both silicon

    !7]

    and

    germanium

    [8]. In thepresent ase,he crystallizationmechanism

    ofthe amorphous ilicon arbide

    hase

    houldbe more

    complicated because

    t

    occurs together with the

    mentioned hemicalmodificationof the system.The

    crystallization f the ACC

    phase

    esults n an ncrease

    of

    its

    density.

    Kinetic

    studies of the densification

    process

    n the early stagesof crystallization,below

    1000'C,

    gave

    an activation nergy lose o the energies

    of the

    Si-C

    and

    C-C bonds.

    However,t is not

    possible

    to

    regard

    this value as the activation energy lor

    crystallizationbecause he

    observeddensification s

    due not only

    to crystallizationbut also to the con-

    comitant ompletion f the condensationrocess.

    At 1200'C

    crystallites f SiC with dimensio n f

    2.5nm are

    present

    n

    the

    material

    Table

    II); brighr

    fieldTEM

    observations erestill featurelessike those

    obtained on PC840. However, he

    diffraction rings

    3892

    Chemical

    hi f t

    (p.p.m.)

    Fgrle / 1

    Coparison betweenhe

    zesi

    MAS-NMR

    spectra f the

    sampleired

    at 1700'Canda commerical

    -SiC

    (Suprior

    raphite).

    were

    quite

    narrow,

    confirming the microcrystalline

    nature of this sample.As suggested y X-ray dif-

    fraction

    pattems,

    lusters f

    graphite

    re

    present

    n

    the material.As

    already

    eported

    9]

    they should

    be

    present

    t the edgeof

    SiC

    microcrystals

    nd could

    play

    an

    important

    role

    preventing

    r slowing he rate

    of crystal

    rowth.

    At 1500 nd 1700"Checr ls ta l

    ize

    ncrease

    p Lo

    8 and 16nm, espectively

    Table

    ll). As reported

    n

    the

    iterature

    7]

    his

    process

    houldbeconnected ith

    an evolution of CO from the system. n the

    present

    case, owever,fthis reactionakes

    lace,

    t, should

    e

    minimal concerningonly the oxygen

    present

    n

    the

    system s mpurities:ndeed,n the firing

    process

    f

    PC care has

    been aken to avoid

    major

    oxygencon-

    taminaion.

    The

    density fthe sample

    ired

    at 1500o approaches

    Lhe

    value

    of

    2.7gcm-' .

    The thcoret ical ensi t l .

    calculated s

    previously

    described rom the chemical

    analysis nd using

    n

    this case he density f

    B-SiC

    (3.2gcm

    ).

    is2.9gcm

    .

    Thedi f ferenceetweenhe

    two values an be ascribedo a

    possible

    lose

    porosity

    present

    n the sample s evealed

    y

    TEM

    observations.

    A value

    ol 77o of

    porosity

    shouldaccount or the

    observed ifference

    n

    the densityvalues.

    According o XRD analysis

    -SiC

    eemso be the

    principalcrystallinephasen the samplesired at the

    highest

    emperaturesogetherwith small amountsof

    the hexagonalorm. The

    presence

    fa-SiC in Nicalon

    fibresheated t temperaures igher

    han

    1400'C has

    already een eportedn the iterature

    13].

    However,

    due to the broadnessof the diffraction

    peaks,

    a

    definitiveassignment eems ificult. Many

    different

    polytypes

    fthe

    hexagonal

    hase

    re

    known,

    differing

    from each

    other only

    in

    the stackingsequence f the

    sil icon nd carbon ayers

    20].

    "Si

    MAS-NMR has beensuccesslullypplied o

    distinguish between the different SiC

    polytypes

    4. 21.1.n Fig. l l a comparisonerweenhe

    -"Si

    MAS-NMR spectrum f the sampleiredat 1700'C

    and that recordedon commerical

    P-SiC

    s reported.

    The NMR spectrum of SiC from

    polycarbosilane

    shows hree distinct

    peaks

    at

    -16.2, -20

    and

    80

    40

    0

    -40 -B0

  • 7/26/2019 Structural Evolution of SiC From Polycarbosilane

    8/8

    TABLE V

    Chemical hifts of siliconcarbide

    polytypes

    Sample

    Chemical hift

    (p.p.m.,

    silicon

    siteswith slight

    differencesn

    the Si-C bond-

    lengths.

    his s

    only an assumption,

    nd he dentif i-

    cation of

    the crystalline

    phase

    formed

    during the

    pyrolysis rocess

    fPC

    seems orthy

    offurther studies.

    Ackn ow ledg

    eme nts

    Mike

    Jeckle

    and Richard Lysse

    are thanked or

    their

    respective

    ontribution n

    the MAS-NMR

    and TEM/

    SAED nvestigations.SF is alsoacknowledgedor

    financial

    upport fthis study,

    Contract o.

    DMR 87

    063'79.

    References

    LL K. J. WYNNE and R. W. P.ICE,

    Ann. Re\,.Mater.

    Sci.

    14

    (1984\

    291

    2 .

    B . A . BENDER, R. W. R ICE and

    J .

    R.

    SPANN, " / .

    Amet. Ceram.Soc.70

    (1987)

    C58.

    3 .

    G .

    D.

    SORARU, F . BABONNEAU and

    J , D .

    MACKENZIE.

    J. Non-Cr))st.olrZr 06

    1988)

    56 .

    4 .

    G . D . SORARU, F . BABONNEAU

    ANd J . D . MAC.

    KENZIE,

    "Procedings

    of the 7th

    International

    Symposium n Ceramics

    ,

    14

    o

    16

    December 988,Bologna,

    Italy, in

    prcss.

    5. S. YAJIMA et al.,J. Matet.

    Scl.

    13

    1978)

    569.

    6 . Y . HASEGAWA,M. I IMURA

    andS. YAJ IMA, i d 15

    Reference

    ,-sic,

    3c

    a-SiC,6H

    d-SiC, 5R

    -

    18 .3

    -

    18 .9

    I2r]

    Present

    [2 t

    12u

    -

    25

    p.p.m.

    whereas he commerical

    one displays

    just

    one

    peak

    at l9

    p.p.m.

    A detailedNMR

    study

    of silicon

    carbide

    polytypes

    has

    been

    published

    by Hartman ef al.

    l2ll.

    Among

    the large number

    of known

    polytypes,

    t seemshat

    only four types

    of

    silicon nvironment

    xist,designated

    , B, C and D

    by these uthors.The

    cubicsiliconcarbide

    B phase

    r

    3C

    polytype)

    has only type A silicon

    sites,while the

    H or 15Rpolytypesexhibit three silicon sitesA, B

    and C in relative ntensities

    : I : I and I

    :

    2

    :

    2, respect-

    ively. The

    chemical shifts for these

    polytypes

    are

    reported

    n Table V. The

    fype D site s more unusual:

    it is the only

    site

    present

    n the 2H

    polytype,

    but

    no

    NMR data seem

    available.The chemical shift

    has

    been

    predicted

    o be

    -31p.p.m.

    [21].

    The two

    resonances

    t

    -20

    and

    -25p.p.m.

    in thePC

    sample

    pyrolysed

    at 1700'C,

    can be assignedo the

    presence

    of type B

    and C silicon units

    of somea

    phases.

    he

    third

    componentdue to type A

    units could lie under

    the major

    peak

    at

    -

    16.2

    .p.m.

    The assignment

    f

    this

    peak

    s more complicated, ecausehe chemical

    shift

    does

    not

    correspondo the

    usually eported alue

    for

    -SiC.

    Thisvalue,

    round l6

    p.p.m.

    as

    already

    been eported or

    powdered

    samples hat were sup-

    posed

    o be

    P-SiC

    4,

    l5],

    and also or

    p-SiC

    single

    crystals

    22.

    nkrott

    e/ a/.

    [

    5] found such

    peak

    n a

    plasma

    synthesized

    iC sample.After annealing

    his

    material

    above 1600'C under inert

    atmosphere,he

    expected

    -SiC

    peak

    at l8.3p.p.rn. ppeared.

    -SiC

    has only type A

    silicon units. However,

    he chemical

    shift s different rom

    that oftype A units n

    6H or l5R

    polytypes

    -13.9

    and

    -

    14.9p.p.m.,

    espectively).

    Hatman et

    al.

    [21]

    assignedhis

    differenceo different

    Si-C bondlengths:n p-SiC, he siliconsite has a full

    tetrahedra

    ymmetry,while

    one

    ong

    and three

    short

    Si-C

    distances re

    present

    n

    the 6H

    polytype.

    The

    anomalous

    eak

    around

    l6

    p.p.m.,

    ancertainly e

    assignedo typeA

    units.The

    shift compared o

    the 3C

    polytype

    could

    be due to a lower

    symmetry

    of the

    and K. OKAMURA,

    rr id l8

    (1983)

    HAYASHandM.

    OMORt , Chcm.,? ! ! .

    -

    13 .9 )

    - " - |

    , r4.e

    -

    20.81

    24.4)

    (1980)

    20.

    7 - Y . HASEGAWA

    3633.

    8 . S , YAJ IMA, J ,

    (1975)

    31.

    9. K.

    OKAMURA et d1.,

    "Ultrastructure

    Processing f

    Advaced

    Ceramics", edited by J. D. Mackenzie

    and

    D. R.

    Ulrich

    (Wiley,

    New York, 1988)

    .

    501.

    i0. S. LIEDIKE

    et al., J. Non-Crts.Solrzs 7198

    1987)

    1083.

    l l .

    J. LIPOWITZet al.,Adv.

    Ceram.Matet.2

    (1987)

    2l .

    12. T.

    L. COTTRELL,

    "The

    Strength f ChemicalBonds"

    (Butterworths,

    ondon,

    1958).

    13 . R . CHAIM, A . HEUER and R. T . CHEN,

    Ceran.

    Soc.7l

    (1988)

    960.

    14. c. L. MARSHALL

    et al., Proc.

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    (t987)

    341

    K. E . INKROTT,

    S .

    M. WHARRY

    and

    D. J .

    O

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    Mater.Res. oc.

    Symp. roc.73

    1986)

    55 .

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    J. Non-Cr)st. o/rzs. 5

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    9? .

    L.

    CZEPREGI et al., J. Appl. Phrs.

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    et al.,J. Mater.Srt.a?r. 7

    (1988)

    85.

    v. HAASE

    er a/.,

    "Gmeln

    Handbook

    of Inorganic

    Chemistry",

    Springer,

    Berlin,

    Heidelberg,New York,

    1984)

    Supplement olume82,

    Si-Silicon,

    Propertes

    of Crystalline

    SiliconCarbide".

    J.

    S.

    HARTMAN

    et al., J. Amer.

    Chen. Soc. 109

    (198'7)

    6059.

    22.

    J. R. GUTH and W. T.

    PETRUSKEY. . Ph},s,

    Chem.

    9t

    (1987)

    361.

    Received

    4

    May

    and accepted

    29 September

    1989

    Cerum. l4

    1 5 .

    6 .

    1 7 .

    8 .

    19 .

    20.

    21.

    3893