Structural Evolution of SiC From Polycarbosilane
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Transcript of Structural Evolution of SiC From Polycarbosilane
-
7/26/2019 Structural Evolution of SiC From Polycarbosilane
1/8
J O U R N A L O F M A T E R I A L S S C I E N C E 2 5 I I 9 9 O ) 3 8 8 6 - 3 8 9 3
Structural
evolutions
rom
polycarbosilane
o
SiGceramic
G . D .
S O R A R U - ,
L O R E N C EA B O N N E A U l ,. D . M A C K E N Z I E
Departmentof MaterialsScienceand Engineering,Universityof California,Los Angeles,California 90024. USA
The
pyrolysis rocess
f a
polycarbosilane
nto
a
microcrystalline
iliconcarbideceramic
has
been ol lowedup to 1700"C mainlyby means f sol idstate
sSi
and
13C
nuclear
magnetic
resonance,ransmission lectronmicroscopy nd X-ray diffractionanalysis. structuralmodel
has
been
proposed
or the amorphous iliconcarbide
phase
hat is formedduring he
pyrolysis
process.
he ceramic btained t
h igh
emperature
s formed
by a
mixture
f
p-SiC
and a-SiC;
however,
ome difficulties
n
the
identification
f the crystalline
hases
have
been
pointed
out.
1. lnt roduct ion
Recently, t has beenshown hat non-oxideceramics
suchascarbides nd nitridescanbe obtainedby
firing
suitablemetal-organic
olymer
precursors
n con-
trolled atmospheres
].
A common feature of the
polymer
oute o carbides r nitrides s the formation
of intermediates hich are amorphoussolids.These
are formed after the removal of the organic com-
ponents
and before crystallization
[2].
We have
already
pointed
out the mportance
f regarding hese
amorphouscovalent
ceramics
ACC)
as an entirely
new family of disordered olidswhosestructureand
propertiesareworthy of independent tudy
3,
4].
Among the
various
systemsalready synthesized,
SiC obtained
from
polycarbosilane
s certainly the
most widely
studied
[5-7].
Commercially available
Nicalon
SiC
ibres
are obtained
rom
polycarbosilane
following the
process
irst developed y
Yajrma
et al.
[8].
The feasibilityof this method
n
producing
ibres
or coatings
s not restricted o this material. It is
mainly due to the
polymeric
nature of the ceramic
precursors,
and it accounts or the many research
efforts hat arecurrentlybeingconducted.
Despite he
increasing umberofstudieson SiC
ibres
obtained
by
the Yajimaprocess,he structural onversionrom the
starting
polycarbosilane
o the resulting ceramic
matedal
is not well
understood.
n this
paper
the
pyrolysis
mechanism f
polycarbosilane,
he structure
ofthe
intermediate CC
phase
nd
ts conversionnto
the microcrystalline ilicon carbideceramics,
will
be
discussedmainly basedon
2eSi
and
r3C
magic-angle
spinning uclearmagnetic esonance
MAS-NMR),
electron spin
resonance
ESR),
X-ray diffraction
(XRD)
and ransmission lectron
microscopy/selected
areaelectrondiffraction
(TEM/SAED)
experiments.
2. Exper imental
procedure
Commercially
available
polycarbosilane
PC,
Dow
CorningX9-6348)
with
a
molecular eightof 1400,
was used n this study.All the firing
treatmentswere
performed
n flowing argon with a heating rate of
2'C min
I
up
to the complete
emoval
of the organic
components
t around8400C.
The resulting norganic
solid, that is amorphous according to XRD and
TEM/SAED experiments,can be considered as
the ACC
phase precursor
or
SiC
microcrystalline
ceramics.n order o study he subsequentensification
and crystallization
process,
he ACC
phase
was
fired at different temperatures
up to
1700'C
al
l0'Cmin
I.
The
amountsof silicon,carbon and
hydrogenwere
analysed
or
selected amples.Oxygen
contentwasnot analysed. hermogravimetricnalysis
was
performed
n flowing argonusinga PerkinElmer
equipment.
esi,rC
and
H
liquid NMR
spectra
were
recorded n a AM 360Brukerspectrometerl. '71.5,
90.5 and 360
MHz, respectively.
he
polymer
wa s
dissolvedn CDC!. For
"Si
NMR experiments,
pulsewidth
of l0
p
secwas applied with a relaxation
delayof 6 sec. H and
rrC
NMR spectrawere ecorded
wi th
pulsewidths
f24sec orrH and
5gsec
or
|C.
and delays etween
ulses
f
I
sec
or
I
H
and
2
sec
or
'rC.
Solid-state
esi
and
r3C
NMR
spectra were
obtainedon a
MSL
300 Bruker spectrometer t 59.6
and75.5MHz. A pulsewidth f 2.5p secand a delay
between
ulses
of 60sec
were
used for the
zosi
MAS-NMR spectra. contact ime of 2mse c was
appliedor thecross-polarization
xperimenrs.
'C
CP
MAS-NMR
spectra
were
ecordedwith a contact ime
of 3 m sec.Tetramethylsilane
TMS)
was used as a
reference or all the NMR data. ESR expedments
were carried out on a Varian E09
spectrometer.
Bruker
gaussmeter
asused o measure
he
magnetic
field with
diphenylpicrylhydrazyl
DPPH)
as a stan-
dard. The numberof spinswas estimated y com-
parison
with copper sulphate
as
reference.XRD
pattems
were recorded
on a Philips diffractometer
usinga Cu,(c radiationwith a
nickel ilter. For TEM
observations he sampleswere
ground
to very fine
*
Permanent ddress. ipartimentodi Ingegneria, nivrsitdi Trento, 38050Mesiano,Trento, talia.
I
Permanent ddress:Chimiede la Matire
Condense.
nivelsilParis6. Tour 54. 4
olace
Jussieu. 5005Paris.
France.
3886
0022-2461/q001.00
.12
O
1990
Chapman
d Hall Ltd.
-
7/26/2019 Structural Evolution of SiC From Polycarbosilane
2/8
50
0
-50
Chemical
shift
{g.o.m.}
Frgrre 1
(a)
?'Si
MAS-NMR and
O),,Si
Cp MAS-NMR
sr,ctra f
polycarbosilane.
powders
which
were then dispersed
on to a TEM
copper grid using an eye dropper. TEM/SAED
investigations
were
performed
using a Jeol
STEM
100
CX equipment. Density measurements
were
performed
on fine
powders
by immersion n
CClo
following
the Archimedesmethod.
BET measure-
ments ryere
one with a Flow
Sorb
II 2300
Micro-
meritics
equipment.
3. Results
3.1 Characterization
f the
polymer
orecursor
The chernical
analysisof
PC, reported n
Table I,
shows Si :C:H rat ioof l :2.2:5.bs i MAS-NMR
and
2esi
CP MAS-NMR
spectrahave
been ecorded
on this starting material
(Fig.
l).
The two spectra
reveal
he
same
eatures,
with an
enhancement f
the
resolution for
the
cross-polarizedspectrum. The
spectra show two different
silicon
units, already
reported n
the iterature
7].
The
peak
at
-
0.8
p.p.m.
is
due to silicon
atoms bonded o four
carbonatoms
(SiCa)
as type I units and
the second
peak
at
-
17.6p.p.m.s
due to type II
units n which the
silicon atoms are
surroundedby three
carbon atoms
and one hydrogen
atom
(SiCrH).
No
distinct
peaks
appeararound
-
35
p.p.m:
Si-Si bonds, f
they exist,
are thus not abundant n this starting PC
[7].
These
two typesof units
are shown
below.
CH '
I
CH"_Si_CH,
CH"
l
CH,
(r)
TABLE
I Atomic ratio
Si:C:H in
the
preculsor
and in some
fired
samples
Sample
PC
PC8,l0
PCl200
PCt500
cH.,
I
-si-cH,
I
H
OD
ffi
ffi
Chemicalshift
(
p.p.m.l
F8rle
2"Si,rH andr3C
NMR spectra f
polycarbosilane
issolved
in
CDClr.
PC
wasdissolved
n CDClr.
2esi,
H and
,C
NM R
spectra ere ecorded
n
solution
Fig.2).
The,,Si
NMR
spectrums
quite
similar o the
CP MAS-NMR
spectrum
on th
powder.
The ratio
between
he two
kindsof units (I and II) appearso be I :0.8.The
'H
NMR
spectrum
of PC shows
two regions for
the
resonance,rom
4 to
5p.p.m. due o
Si-H bonds
and
around0
p.p.m.
due o C-H
bonds.The ntegration
of
the
peaksgives
a value
of
11
or the
C-H/Si-H ratio.
In
the Si-H region,
everal
eaks
re
present
t 4.1,4.3
and 4.6p.p.m.
due to
differentSi-H
sites.The C-H
region
hows main
peak
at 0.17p.p.m.,
ue o CHj
groups,
and two
shoulderswith lower
chemical
hift
values,
at 0 and
0.5p.p.m. assigned,
espectively,
o
CH, and CH
groups.
The
'3C-{rH}
spectrum
of the
solution
shows a broad
peak
centred
on 3
p.p.m.
corresponding
o the aliphatic
carbon
atoms
present
in PC in CH3,CH, and CH units.Somesharppeaks
are superimposed,
ertainly
due o some
quite
mobile
units
nside he
polymer.
All the NMR
spectrandeed
have
broad
peaks,
and
0. 0.0.0
2. 2
1 .6
t.44
1.43
5
0.65
0.10
0.07
3887
-
7/26/2019 Structural Evolution of SiC From Polycarbosilane
3/8
no
resolution as
obtained speciallyor
rH
and
r3C
NMR experiments.
hisseemso ndicate
hata arge
distribution
f units s
present
n
this
polycarbosilane.
The
structure f
polycarbosilane
hat emergesrom
these esults
s morecomplicated
hana simple inear
chainof
type and I unitswith
a
I
:
I ratio
suchas
CH. CH
t t
-cH,
si cH, si-cH,-
l l
CH.. H
In thiscase he
chemical nalysis hould
be Si C : H
:
I :2.5:7. The low
carbon and hydrogen
contents n
the
studiedPC and the
presence
f CH units n the
'
H
NMR
spectrum suggest
hat some cross-linkngha s
already
occurred between he
chains. This has
already
been suggested y
Okamura et a/.
[9].
3.2.
Character izal ion
f he
pyrolysis
rocess
3.2.1 From the prccursorpolymer to the
ACC
phase
The
low molecular
weightcomponents
f the
poly-
carbosilane
ave been
previously
emoved
by melt-
ing
the
polymer
n flowing
nitrogen
gas.
Thermo-
gravmetric
nalysis
TGA)
performed
n this material
(PCD)
showed hat
the
weight
osses nd at
around
800'C.At this emperature
he
precursorolymer
as
been onvertednto
an inorganic olid
hat appea$
to
be amorphous y XRD
and TEM/SAED nvesti-
gations Fig.
3) .
According
to TGA
experiments,he
pyrolysis
processeading o the formation of the amorphous
slcon carbide
phase,
consists
of two stages: rom
300
o 500'C with a weight oss
of l37o
and
from
500 to 800'C with
a
further
weight oss
of
1270.
The PCD was heated
at 2'Cmin
'
in argon up
to
500"c
(PC500),
700'c
(PC700)
and
840.C
(PC840).
he
chemical nalysis
f PC840appeared
o
b e
S i : C : H :
l : 1 . 6 : 0 . 6 5
T a b l e
) .
E x c e s sa r b o n
TABLE II
"Si
MAS-NMR data for the
precursor
nd rhe
fircd samples
Sample Chemical hift
(p.p.m.)
Linewidth
p.p.m.)
Fgurc
3 TEM bright-field
micrograph with
SAED
pattems
of
polycarbosilane
yrolysed
t 8,10" .
was
hus
present
n
this
amorphous ilicon
carbide
phase.
The
"Si
MAS-NMR and
r3C
CP MAS-NMR
spectra ecorded
n these amples re shown
n Fig. 4
aswell as he specra
fthe
precursor
s eference.
he
"Si
MAS-NMR
spectrum f PC
shows he wo
peaks
assignedo SiCo nd
SiCrHunits. n thesample
red
at 500'C, the peakat l6p.p.m. assignedo the
SiC,H
units has disappeared.
he major
peak
at
0
p.p.m.
due o SiCa nits
appears lmostunchanged
with
onlya slight hift
ofthe
position
frhe
maximum
and a small ncrease
f the linewidth
(Table
II). By
increasing
he firing
temperature ver
500oC and up
to
840'C his rend s maintained:
he
peak
elated
o
the
SiCa nits s continuousl y
oving oward
ower
values
of chemical
shift typical of the
crystalline
silicon
carbide
phase
while ts Iine',vidth
s increasing
up to 700'C. The
evolution
i
rhe
esi
MAS-NMR
spectra as
alreadybeen explained
n detail in
a
previous tudy 3]. n the firststage f the pyrolysis
process!
up to 500"C, a
possible
reaction is
the
consumption f
Si-H
groups
and the formation
of
bridging Si-C
bonds between he
polycarbosilane
chains.Above
this temperature
he shift of the
peak
due o
SiCo nits eflects n ncrease
fthe connectivity
29si
laes-rulrR
13c
cp
uls-t'tl,,ta
*ito---*-t*
-Zo-:n-*-
Chemical hift
(p.p,m
FErre 4 Evolutionwith the firing
temperature f
DSi
MAS-NMR
and
''C
CP MAS-NMR spectra
f
polycarbosilane.
PC
PC500
PCTOO
PC84O
0 1 6
-
4. 5
-6 .3
-8 .0
l0
12.5
3888
-
7/26/2019 Structural Evolution of SiC From Polycarbosilane
4/8
Fur ESRspectrum
ecordedt room emperature
n PC840-
of the network by the formation
of Si C-Si bonds.
At the same time
the evolution of t he linewidth is
correlated
to an increase of the disorder
of the local
environment
around the silicon atoms. During
th e
pyrolysis
process,
condensation reactions lead
to
the
consumption of CH., and
CH,
groups
and to the
formation of CH or C u nits with the evolution of H,
or CH"
[7].
These reactons
obviously increase he
number
of different SiC, units that can exist in
th e
material
and
may account for the observed ncreaseof
the
peak
linewidth already mentioned.
"Si
MAS-NMR
study of the fired samples shows no other
peaks
than
thoseassignedo SiCa nits. No
Si-Si
nor
Si O bonds
seem o be ormed
during the
pyrolysisprocess.
Information
about the evolution of the local
environment
of the carbon sites during the
pyrolysis
process
can be obtained from the
rrC
CP
MAS-NMR
spectra n Fig. 4.
The spectrumof PC shows
one
peak
at 4.2p.p.m. and a small absorption near 55p.p.m.
that has been dentified
as a spinning side band. By
increasing he firing
temperature he main
peak
shifts
toward
higher values of chemical shift with a cor-
responding increase
of its line\,/idth. The resonance
present
at 4.2p.p.m. n
the spectrumof PC is due to
the cont r ibu t ion f a l l the
carbon
groupspresenr
n
the starting
polymer,
namely
CH,, CH, and CH. It is
wel known
that the chemical shifts of
CH,, units
increase
when the r value s decreased. hen,
accord-
ing
to thesedata, the shift
of the
peak
with the f ir ing
temperature reflects
a co nsumption of the more
hydrogenated
species due to the occurrence of
the
condensation eactionsduring the pyrolysisprocess.
The
ncreasen the i newidthhas o
be
related
with the
same evolution in the
resi
MAS-NMR
spectra. It
reveals
n
increasen
the disorderofthe Ioca
environ-
ment ofthe aliphatic
carbon atoms during the
pyrolysis
process.
Moreover,
an
interesting
eatureappearsat
above 700'C: new
peaks
are
present
n
the
100
to
200p.p.m.
range.These
peaks
become
more ntense
t
840'C. The broad
peak
centred around 135p.p.m.,
can
be assigned o the
presence
f aromatic
carbon
atoms.and
could be
related
o th e formation of
C:C
bonds. t has alreadybeen
suggestedhat suchbonds
could be present n the ntermediate morphousphase
but
no
experimental videncewas
given.
They
should
be
precursor
bonds
or
graphitic
carbon hat is formed
around
1200'C
according o Raman
data
[9].
ESR was
perormed
on the
sample fired at 840" C
r '- '.1
'.
u- l.,.tn\,
," /
r..,2" ',.- lr
i ,
, L .
S t
I
,').,-'./"'t.-i.
I
.r'"
-c '
|
|
I
s l - " \
,
- l
- s r - c \
/ s i -
)sr..
/
r,-cr
I
-cH-t.
i' i,-
cfl7.r
./
_s f
si-uc/
\
/ \
Fr,g/fe Proposedtructure
ftheamorphousilcon arbide
hase
obtainedrom
polycarbosilane-
(Fig.
5).
The
spectrum xhibitsa single sotropic
signal
centredat
g
:
2.0030,with
a
linewidth
of 3.9G. This
valuecorresponds
o carbon danglingbonds
0].
Th e
integration
of the signal
gave
the number
of defect:
to
be
2.5 x
lOrecm
I,
considering
a densit,v o
2.2gcm-l for
this sample.This value s in
agreemenL
with the number
of defect s ound in amorphous
SiC,
samples
prepared
rom chemical vapour
deposition
l l0 l .
3.2.2.
Characterization
f the ACC
phase
The
proposed
structure
of the amorphous
silicon
carbide
phase
obtained
at 840'C is il lustrated
in
Fig.
6.
It is
basedmainly on rhe
2esi
MAS-NMR and
rC
CP
MAS-NMR
resultsalthough
he broadness
f
the NMR
peaks
n these
samplesmade it diflculr
to
obtain
precise
structural data. These
amorphous
phases
how
a
wide
distribution of
siliconand carbon
atoms types. However, some relevant
features
can be
pointed
out.
(a)
The silicon
carbide
phase
is not
stoichiometric,but an excessof carbon is present
(C/Si
:
1.6).
(b)
All
the sili con atoms
seem to be
bonded to four carbon
atoms and Si Si or Si-H
bonds, f they
are
present
hould
be
minimal.
(c)
Some
C:C bonds
are
present
sclearly
shown by the
rrC
CP
MAS-NMR
experiments.
d)
The residual
hydrogen
content
H/Si
:
0.65)should
be mainly
present
n
th e
structure
as CH
groups
as suggested
by the chemical
shift of the main
peak
in
the
rrc
Cp MAS-NMR
spectra.
(e)
The
condensation reactions
occurdng
during the
pyrolysisprocess
an ead
o the formation
of
six-member ings like
those
present
n
crystal l ine
SiC,but
the
ormation
ofdistorted
ive-or seven-aton
rings cannot be ruled out and should lead to the
presence
of C{
bonds.
(f)
The
presence
of
para-
magnetic defectshas
been shown
by
ESR
experiments
and
these defects were
assigned to carbon
dangling
bonds.
A
density of 2.21gcm
r
has
been measured
on a
sample of fine
powders
of this
phase.
This
value is
lower
than the
density of
p-SiC
(3.21gcm
r).
A
theoretical density
(2.70gcm
r)
can be estimated
from the
chemical nalysis
fPC840
(Table
)
by using
the rule
of
mixtures
and assuming
hat al l
the silicon
atoms are engaged n forming
amorphous
SiC
(density
3.0gcm
r)
[tl]while the remainingcarbon s present
as
graphite density
2.2gcm
3;.
The low
value
of the
density
of the amorphous
phase
annot be
ascribed o
the
presence
f
porosity
n
the material.
SEM investi-
gations (Cambridge
Sterescan)have
shown only few
3889
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7/26/2019 Structural Evolution of SiC From Polycarbosilane
5/8
10000c
9500c
9000c
o 2 4
6 I 1 0 1 2
Time
(h )
Figwe 7 Etoltion of the
density,
p,
of the ACC
phase
with the
lring
time.
isolated
pores
for
the
ACC
phase
while TEM studies
(Fig.
3)
have
shown
no
porosity
at a sub-microscopic
level- This
evidence
s
also supported by BET analysis
that
gave
a
value
of surfacearea
ower
than I m' g-
|
lor
the samesample.
Therefore,
a
quite
open structure,
with a l arge amount of free volume must be invoked
to account for the low value of density
of
the
amor-
phous
ceramics. With the aim of following
the
evolution
of
the
density of
PC840
as a function of
the firing time, isohermal treatments in
an argon
atmosphere
at 900, 950 and
1000'C
were
performed
and the results epo rted n Fig .
7. An activa tionenergy
of 82 kcal mol
I
was obtained rom the nitial slopeof
the densilcatio n urves
Fig.
8).
Assuming
a negligible
value ol
porosity
in
PC840, he observed
ncrease
f
densityduring the firing treatment
must
be
primarily
ascribed o a reduct ion of its free volume. Two main
processesmay account for this effect. (i) The progress
of the condensation
eactions
between esidual CH
groups
n the structurewith the elimination
ofH, and
CHo and the formation of new
Si-C Si bridges with a
consequentncrease
fthe crosslinkingofthe network.
Actually, chemical
analysis f the
ACC
phase
ired at
950 and 1000"C for
the
longest
t imes, showed a
decrease
f the
hydrogen
down to H/Si
:
0.2 com-
pared
to the initial value of H/Si
:
0.65;
ii)
a
rear-
rangement
of the open amorphous covalent structure
toward more
compact configurations with no
change
in
chemical composition. For both
of these mech-
anisrns, key stepshould be the
cleavage f chemical
bonds.either C-H
(99
kcal mol
r)
in
the
first
caseor
S i -C
(T6kca lmol
' )
and C C
(82kca lmol
r )
[2 ]
i n
the
atter one.The obtained alueofactivation energy
suggestshat, at
least n
the
nitial
stages,
he densifi-
cation
process
occurs via the cleavage f chemical
bonds
present
n the material.On the
ground
of
' esi
MAS-NMR experiments,t hasalreadybeen eported
in a
previous
study
[3]
that, during the isothermal
treatments, he rarrangement f the structure eads
to an orderingof the local environment f the
silicon toms.Moreover, t the highest emperature
(1000'C),
XRD
and
TEM/SAED investigations
showeda concomitant
eorganization
f the
network
also
n
the
medium rangewith the forrnation of
SiC
microcrystals
3] .
3.2.3. From
the
ACC
Dhase to
microcrystalline SiC
The amorphous
iliconcarbide
hase
an
beconverted
into
a
microcrystalline
eramic by firing it
at
high
temperatures.n
order o follow
such ransformation,
thePC840washeated !t10'Cmin-r
in argon low at
1000'c
PCl000),
200"
(PCl200),
500.c(pcls00)
and 1700'C (PCl700).XRD and "Si MAS-NMR
spectra recorded on these
samplesare shown in
Figs
9a and b, respectively,
ogetherwith the spectra
obtainedon a commerical
B-SiC
as reference.
In
the XRD
patterns Fig.9a),
broad
peaks,
or -
responding
o crystallineSiC
phase,
tart to appearat
1000'C
and sharpen
y
increasing
he firing tempera-
ture. The correspondng
rystallite sizes,evaluated
from the diffraction
resultsby usinga
peak
broaden-
ing
procedure,
re reported n Table III. The
micro-
structure
f thesample eated t 15000
, as
revealed
by
TEM investigations,
s
shown
n
Fig. 10.Although
a detailed nalysis f the crystalsizes rom TEM
micrographs asnot
performed,
he meancrystal
size
seems
o be slightly igher ompared
o XRD results.
This could be due o the fact that the crystallites ave
a range
of sizedistribution n the
sample nd the
largest
particles
are more readily
observed. Fine
porosity,
as revealed
y the white spots n the micro-
graph,
seems
o be
present
in
this sample. This
observation s in
agreementwith a recent
study
[
3]
that
showed he formation
of
porosity
n Nicalon
fibresafterannealing
t
14000
in argonatmospheres.
BET analysis esultedn
a valueoi surface
rea
ower
than m' g
I
indicatinghatclosed
orosity
spresent
in these amples.
The
position
of the diffraction lines in the fired
samplesndicateshat the microcrystall ine
hase
s
mainly
B-SiC.
n
the XRD
pattern
of the sample
heated
up to
1700"C
a small
shoulder
s
seenat
around20
:
34". t hasbeen
ssignedo a-SiC, ug-
gesting
that, at the highest
temperatures he
crystalline
hase
onsists
f a
mixture
of cubic
p-SiC
with traces
of the
hexagonal
orm
TABLE III
Sizes
f the
SiC microcrystalsn thc fired
poly-
carbosilane alculatedrom
the broadness f the main
peak
n the
diffractionpattern
Firing
temperature
"C)
^
2.4
-
2.3
f= 82
kco lmo t - r
4 . 1
1 0 4 1 R r
Fre 8
Arrhenius
plot
for the inital densificalion
ate.
3890
-1
4 . "
4 .2
. Q
1700
Crystalsize
nm)
1000 t 500
16 .0
-
7/26/2019 Structural Evolution of SiC From Polycarbosilane
6/8
Chemical
shift
(p.p.m.)
In the X-ray patterns
of the fired
samples a small
peak
around 20
:
26'is
clearly visible. ts intensi ty
reaches the maximum
value in the
sample heated at
1200'C
and
decreases ith further heating. t
could be
assigned
ither o the
(l
0 l) ref lect ion
f(-quartz or to
the
(002)
l ine of carbon. In the literature, he dis-
appearance
ofthis
peak
after a treatment with HF has
been reported
[7].
This
result has
been assumed o be
proof
for the existence
of crystalline
silica in the fired
ceramics. However,
in the
present
study, the
samples
were heatcd
in an inert
atmosphere
to avoid major
oxygen
contamination; moreover
SiOo
units should
give
rise ro a
peak
in
the
"Si
MAS-NMR
spectra
around
-
I l0 p.p.m.
Such
a
peak
s completely
bsent
in
the spectra. Therefore
it seems hat
the X-ray dif-
fraction
peak
af 20
:
26"
should be assigned
o the
presence
of small clusters
of
graphite
rather
than
crystal l i tes
f d-quartz.
The evolutionwith the firing temperature fthe' eSi
MAS-NMR
spectra s
shown in Fig.
9b.
The
main
peak
corresponding
o the SiC4
nits s shiftingdown-
field
approaching the value
corresponding
to the
crystalline form
(Table
IV). At the
same time, irs
linewidth is
decreasing suggesting
an ordering
of the
ocal environment
of the
sil icon atoms in
the SiCr
units. At 1500"C
some
structures tart to
appear n
this
peak
hat becomemore
evidentat 1700"
C. At this
temperature,
he MAS-NMR
spectrum eveals
hree
TABLE
IV
2'Si
MAS-NMR
dataof the ired
oolvcarbosilane
PC840
PC 000 PCr200 PCl500
PCt700
Figule
9 Evolution of
(a)
XRD
patterns
and
(b)
"Si
MAS-NMR
spectra of ACC
phase
during
the firing
processP-SiC
ampl
rovided
by
Superior raphite).
dist inct
eaks
t
-16.2, -20and -25 p.p.m.Sucha
spectrum as alreadybeen
published
n
the literature
[4,
l5]. In a first approximation,
he
main
peak
at
16.2
.p.m.
can
be assignedo
B-SiC
and the two
minor
peaks
ould be due o some
a
phase.
However,
this assignmentwill be discussedater in the dis-
cussion.
4. Discussion
and conclus ion
In the
pyrolysis
of
PC,
the removal of organiccom-
ponents
occur
via
condensation eactions beween
CH.,and CH,
groups
of the strting
polymer.
When
this
process
s completehe
polymer
hasbeen
onverted
into an amorphous
covalentceramic
ACC)
phase.
The
temperature t which the condensationeactions
end and the ACC is formed can be
obtained
rom
a
TGA experiment:t
canbe defined s he emperature
at which
he
weight osses
re complete nd the
curve
approachesconstant eight alue.However,his s
FBrre 10 TEM bright-fildmicrograph f PC
frredat 1500'C.
\ ,[ Pcl7oo
\--./q*JL_L
PC1500
\"*-/"..***--".-
\.-l\.*....-...,-
\-_-.r,r.*.,*.,.*"-
40
20
(des
PC1200
PC1000
Pc84o
i
"t*"*,/
200
10 0
Chemical
8
shift
(p.p.m.)
-
t6.2
-
16.2
20
-20
l 6
3891
-
7/26/2019 Structural Evolution of SiC From Polycarbosilane
7/8
not an absolute hreshold alue: t is reasonableo
think that
the emperaturef formationof the ACC
phase
s
dependentupon the heating rate and the
heating
atmosphere. or example,by
processing
he
PC in vacuum
or by using a lower heating rate it
shouldbe
possible
o
complete he
pyrolysis rocess
t
lower emperature
nd hus
t
shouldbe
possible
o
get
an amorphous norganic solid at lower temperature.
Moreover, he structure tself
and the compositionof
the orming norganicdisordered hase an be affected
by the same
processingarameters
.e. emperature,
heating ate and heating
atmosphere.
In the
present
study,
TGA
experiments btained
usinga
heating
ate of 2"Cmin
I
in flowingargon,
showed hat the weight osses nd at around
800oC.
Thus
according to these results the PC has been
converted
nto
the ACC
phase
or the subsequent
structuraland crystallization tudies y heating t with
the same
processing
parameters
at temperatures
slightly
higher
hen800'C, namely 40'C.
A
wide tange of different ypesof defectseemso
exist n thisamorphousil icon arbide hase sshown
in Fig. 6. NMR and ESR experiments
howed he
presence
f C:C bonds
and carbon dangling
bonds
respectively.
he
presence
f distorted
ive- or seven-
atom rings can
be reasonably
assumed
3];
excess
carbonand
residual ydrogen
C/Si
:
1.6;
H/Si
:
0.65)
havebeen vinced y
chemical nalysis.
hemical
and structural modificationsoccur n this
phase
by
increasing he temperature
ver 840'C.
Residual
hydrogen ontentand carbonexcess
re considerably
reduced
Table
)
at
1200'C
H/Si
:
0.1;C/Si
:
1.44)
and are sti l l decreasing t l500oc
(H/Si:0.07;
C/Si
:
1.43) ue mainly
o the completion f con-
densationreactions.The other major modification
occurring uring he iring
process
f theACC
phase
is its structural rearrangement
hat
leads
to the
formation
of a
microcrystalline
eramic.This trans-
formaton
tarts, ccordingo XRD andTEM/SAED
experiments,
t around
1000'C.
t is known
16]
hat
the crystallizationmechanism f disordered ovalent
four-coordinatedmaterials ike
amorphous iliconor
germanium
nvolves he ruptureofthe
Si-Si or Ge-Ge
bonds, espectively.n these
ases he experimentally
observed ctivationenergies re close o the covalent
bond energies or both silicon
!7]
and
germanium
[8]. In thepresent ase,he crystallizationmechanism
ofthe amorphous ilicon arbide
hase
houldbe more
complicated because
t
occurs together with the
mentioned hemicalmodificationof the system.The
crystallization f the ACC
phase
esults n an ncrease
of
its
density.
Kinetic
studies of the densification
process
n the early stagesof crystallization,below
1000'C,
gave
an activation nergy lose o the energies
of the
Si-C
and
C-C bonds.
However,t is not
possible
to
regard
this value as the activation energy lor
crystallizationbecause he
observeddensification s
due not only
to crystallizationbut also to the con-
comitant ompletion f the condensationrocess.
At 1200'C
crystallites f SiC with dimensio n f
2.5nm are
present
n
the
material
Table
II); brighr
fieldTEM
observations erestill featurelessike those
obtained on PC840. However, he
diffraction rings
3892
Chemical
hi f t
(p.p.m.)
Fgrle / 1
Coparison betweenhe
zesi
MAS-NMR
spectra f the
sampleired
at 1700'Canda commerical
-SiC
(Suprior
raphite).
were
quite
narrow,
confirming the microcrystalline
nature of this sample.As suggested y X-ray dif-
fraction
pattems,
lusters f
graphite
re
present
n
the material.As
already
eported
9]
they should
be
present
t the edgeof
SiC
microcrystals
nd could
play
an
important
role
preventing
r slowing he rate
of crystal
rowth.
At 1500 nd 1700"Checr ls ta l
ize
ncrease
p Lo
8 and 16nm, espectively
Table
ll). As reported
n
the
iterature
7]
his
process
houldbeconnected ith
an evolution of CO from the system. n the
present
case, owever,fthis reactionakes
lace,
t, should
e
minimal concerningonly the oxygen
present
n
the
system s mpurities:ndeed,n the firing
process
f
PC care has
been aken to avoid
major
oxygencon-
taminaion.
The
density fthe sample
ired
at 1500o approaches
Lhe
value
of
2.7gcm-' .
The thcoret ical ensi t l .
calculated s
previously
described rom the chemical
analysis nd using
n
this case he density f
B-SiC
(3.2gcm
).
is2.9gcm
.
Thedi f ferenceetweenhe
two values an be ascribedo a
possible
lose
porosity
present
n the sample s evealed
y
TEM
observations.
A value
ol 77o of
porosity
shouldaccount or the
observed ifference
n
the densityvalues.
According o XRD analysis
-SiC
eemso be the
principalcrystallinephasen the samplesired at the
highest
emperaturesogetherwith small amountsof
the hexagonalorm. The
presence
fa-SiC in Nicalon
fibresheated t temperaures igher
han
1400'C has
already een eportedn the iterature
13].
However,
due to the broadnessof the diffraction
peaks,
a
definitiveassignment eems ificult. Many
different
polytypes
fthe
hexagonal
hase
re
known,
differing
from each
other only
in
the stackingsequence f the
sil icon nd carbon ayers
20].
"Si
MAS-NMR has beensuccesslullypplied o
distinguish between the different SiC
polytypes
4. 21.1.n Fig. l l a comparisonerweenhe
-"Si
MAS-NMR spectrum f the sampleiredat 1700'C
and that recordedon commerical
P-SiC
s reported.
The NMR spectrum of SiC from
polycarbosilane
shows hree distinct
peaks
at
-16.2, -20
and
80
40
0
-40 -B0
-
7/26/2019 Structural Evolution of SiC From Polycarbosilane
8/8
TABLE V
Chemical hifts of siliconcarbide
polytypes
Sample
Chemical hift
(p.p.m.,
silicon
siteswith slight
differencesn
the Si-C bond-
lengths.
his s
only an assumption,
nd he dentif i-
cation of
the crystalline
phase
formed
during the
pyrolysis rocess
fPC
seems orthy
offurther studies.
Ackn ow ledg
eme nts
Mike
Jeckle
and Richard Lysse
are thanked or
their
respective
ontribution n
the MAS-NMR
and TEM/
SAED nvestigations.SF is alsoacknowledgedor
financial
upport fthis study,
Contract o.
DMR 87
063'79.
References
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Reference
,-sic,
3c
a-SiC,6H
d-SiC, 5R
-
18 .3
-
18 .9
I2r]
Present
[2 t
12u
-
25
p.p.m.
whereas he commerical
one displays
just
one
peak
at l9
p.p.m.
A detailedNMR
study
of silicon
carbide
polytypes
has
been
published
by Hartman ef al.
l2ll.
Among
the large number
of known
polytypes,
t seemshat
only four types
of
silicon nvironment
xist,designated
, B, C and D
by these uthors.The
cubicsiliconcarbide
B phase
r
3C
polytype)
has only type A silicon
sites,while the
H or 15Rpolytypesexhibit three silicon sitesA, B
and C in relative ntensities
: I : I and I
:
2
:
2, respect-
ively. The
chemical shifts for these
polytypes
are
reported
n Table V. The
fype D site s more unusual:
it is the only
site
present
n the 2H
polytype,
but
no
NMR data seem
available.The chemical shift
has
been
predicted
o be
-31p.p.m.
[21].
The two
resonances
t
-20
and
-25p.p.m.
in thePC
sample
pyrolysed
at 1700'C,
can be assignedo the
presence
of type B
and C silicon units
of somea
phases.
he
third
componentdue to type A
units could lie under
the major
peak
at
-
16.2
.p.m.
The assignment
f
this
peak
s more complicated, ecausehe chemical
shift
does
not
correspondo the
usually eported alue
for
-SiC.
Thisvalue,
round l6
p.p.m.
as
already
been eported or
powdered
samples hat were sup-
posed
o be
P-SiC
4,
l5],
and also or
p-SiC
single
crystals
22.
nkrott
e/ a/.
[
5] found such
peak
n a
plasma
synthesized
iC sample.After annealing
his
material
above 1600'C under inert
atmosphere,he
expected
-SiC
peak
at l8.3p.p.rn. ppeared.
-SiC
has only type A
silicon units. However,
he chemical
shift s different rom
that oftype A units n
6H or l5R
polytypes
-13.9
and
-
14.9p.p.m.,
espectively).
Hatman et
al.
[21]
assignedhis
differenceo different
Si-C bondlengths:n p-SiC, he siliconsite has a full
tetrahedra
ymmetry,while
one
ong
and three
short
Si-C
distances re
present
n
the 6H
polytype.
The
anomalous
eak
around
l6
p.p.m.,
ancertainly e
assignedo typeA
units.The
shift compared o
the 3C
polytype
could
be due to a lower
symmetry
of the
and K. OKAMURA,
rr id l8
(1983)
HAYASHandM.
OMORt , Chcm.,? ! ! .
-
13 .9 )
- " - |
, r4.e
-
20.81
24.4)
(1980)
20.
7 - Y . HASEGAWA
3633.
8 . S , YAJ IMA, J ,
(1975)
31.
9. K.
OKAMURA et d1.,
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and
D. R.
Ulrich
(Wiley,
New York, 1988)
.
501.
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1987)
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J. LIPOWITZet al.,Adv.
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K. E . INKROTT,
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M. WHARRY
and
D. J .
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CZEPRECI et al.,
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1984)
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May
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29 September
1989
Cerum. l4
1 5 .
6 .
1 7 .
8 .
19 .
20.
21.
3893