Spectral SensorsIEXYVIW 117 EQMP] 'SQTEGX TIVQERIRX]P EMKRIHP W]WXIQ 6SFYWX ERH XLIVQEPP] WXEFIP...

Spectral Sensors

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Spectral Sensors

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Spectral Sensors

0,2 0,4 0,6 0,8 1,0 1,2 1,4 1,6 1,8 2,0 2,2 λ(µm)

Price Straylight/Noise

Opticalresolution

Sensitivity

MMS IR PbS*(0,91-2,2 µm)

< 20 nm

MMS IR InGaAs*(0,6-2,1 µm)

< 20 nm

MCS 551 NIR(0,7-1,1 µm)

2.5 nm

MCS 551 VIS(0,36-0,78 µm)

2.5 nm

MCS 501 UV-NIR(0,19-1,015 µm)

2.5 nm

MCS 551 UV(0,20-0,62 µm)

2.5 nm

MMS 1(0,30-1,1 µm)

< 10 nm

MMS UV-VIS(0,19-0,74 µm)

< 7 nm

MMS UV(0,19-0,4 µm)

< 3 nm

Spectral Sensors

Spectral range Accuracy Resolution

MMS 1 305...1150 nmspecification for therange360---900 nm

0.3 nm 10 nm

MMS UV 200...400 nmspecification for therange220---400

0.2 nm 3 nm

MMS UV VIS 305...1150 nmspecification for therange360---900 nm

0.2 nm 7 nm

Spectral Sensors

Spectral Sensors

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Spectral Sensors

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Spectral Sensors

Spectral Sensors

Spectral Sensors

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Spectral Sensors

Measuring method

Background

Demands on sensor

Suitable CZ sensors

Fields of application

Transmission

Spectral dependence of absorption constant

High speedHigh wavelength reproducibility

All MMS/MCS

Concentration analyses of fluidsFilter measurementMeasurement ofarchitectural glass

Interference spectrum evaluation

Evaluation of phase differences in the light reflected by optically transparent layers

High wavelength accuracy High wavelength reproducibility

MMS VIS for optical layer thicknessmeasurement <40 µmMCS VIS/NIR <150 µm

Layer thickness measurement on transparent materials such as coating films, plastics, films

Spectral Sensors

Measuring method

Background

Demands on sensor

Suitable CZ sensors

Fields of application

Emission

Spectral emission of light sources

High wavelengthaccuracyHigh wavelengthreproducibilityGood spectralresolving powerHigh light sensitivity

All MMS/MCSLimited spectralresolution in case of veryclosely spaced lines

Monitoring of plasmsMeasuring the solarspectrumFluorescenceProduction screening of lampsWavelength determination of LEDs

Remission

Diffuse reflection

High light sensitivityHigh reproducibility

MMS VISMCS UV-VISMCS VIS

Colour measurement on different surfaces

Reflection

Directly reflected light

High wavelength accuracy

All MMS/MCS

Measurement of metal surfaces

Spectral Sensors

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Spectral Sensors

SimultaneousSpectrometer MCS 500

ConcentrationAbsorpt ion A

ColourRemiss ion R

LayerThicknessReflect ion, Transmission

Flow through cel lA T R

Immersion probe

Standard opt icsY-f ibre bundle

O F T

OFT 0°/dOFR d/0°

OMK 0°/45°Colour Immersion probe

Dissolution testingSewage moni tor ingBenzene synthesis

Print ing machinesTexti l colours

Architecture glass

IC productionCopier drums

Headlight coating

Spectral Sensors

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Spectral Sensors


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Spectral Sensors

Method for Layer Thickness Measurement X-ray Fluorescence Method

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Measuring range Remarks

X-ray tube

Counter tube X-rays

Sample

Non-contact layer thickness measurement

• Multi-layer systems can be analyzed• State-of-the-art measuring method, but still relatively expensive• At present, few on-line applications possible

The measuring range depends on the material and the software.Single layers approx. 0.1 - 100 µmDouble layers <25 µm per layer

Spectral Sensors

Methods for Layer Thickness Measurement - Beta Reflection Method

Non-contact thickness measurement of layers whose atomic number differs substantiallyfrom the substrate material.

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Substrate

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Reflected beta particle

Isotopic source

Layer thickness d

Annular diaphragm

Spectral Sensors

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Evaluation of the reference pattern caused by the phase differences in the light reflected by the upper and lower boundary surfaces.

1IEWYVMRK VERKI

• Upper limit depends on the spectrometer resolution• MMS: 10 nm - 40 µm optical layer thickness• MCS: 10 nm - 150 µm optical layer thickness

6IQEVOW

w Contact-free, non-destructive measurement• Reflection and transmission measurement possible• Relatively insensitive to vibrations• No hazardous or harmful radiation• Simple installation for on-line use

Spectral Sensors

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The tristimulis values can be derived from:

X=100 ∗∫ R (λ) ∗ I (λ) ∗ x (λ) dλ ∫ I (λ)* y (λ) dλ

Y=100 ∗∫ R (λ) ∗ I (λ) ∗ y (λ) dλ ∫ I (λ)* y (λ) dλ

Z=100 ∗∫ R (λ) ∗ I (λ) ∗ z (λ) dλ ∫ I (λ)* y (λ) dλ

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The colour impression received from an illumi-nated body can be described by means of 3 colours. To determine the values the following data must be provided:1. Spectral diffuse remission R (l ) or transmis-sion T ( l ) curve, obtained by spectral-photo-metric measurement of the sample using a corresponding measuring geometry.2. Defined norm light types described as a function of relative intensity against wavelength.I rel (l)3. Normalized spectralfunction x (l),y (l), z (l) that define the standard colour sensitive human eye

In order to achieve a better correspondenc

with subjective colorimetric distances the tristimulis values can be transformed

into colour coordinates of difficult

colourspaces eye.

Spectral Sensors


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Spectral Sensors

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Principle: differential absorption spectroscopyLaser: 1W CO2 -Laser;10,80 µm/ 10,78 µmLower DetectableLimit: <1 ppmSwitching Frequency: 1 KHzMeasuring Length: 1 - 20 m

Application: Waste incineration plantsPower plants

Spectral Sensors

Spectral SensorsIEXYVIW 117 EQMP] 'SQTEGX TIVQERIRX]P EMKRIHP W]WXIQ 6SFYWX ERH XLIVQEPP] WXEFIP...

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Transcript of Spectral SensorsIEXYVIW 117 EQMP] 'SQTEGX TIVQERIRX]P EMKRIHP W]WXIQ 6SFYWX ERH XLIVQEPP] WXEFIP...

Spectral Sensors*IEXYVIW 117 *EQMP] 'SQTEGX TIVQERIRX]P EMKRIHP W]WXIQ 6SFYWX ERH XLIVQEPP] WXEFIP...

Documents

Transcript of Spectral Sensors*IEXYVIW 117 *EQMP] 'SQTEGX TIVQERIRX]P EMKRIHP W]WXIQ 6SFYWX ERH XLIVQEPP] WXEFIP...

Spectral SensorsIEXYVIW 117 EQMP] 'SQTEGX TIVQERIRX]P EMKRIHP W]WXIQ 6SFYWX ERH XLIVQEPP] WXEFIP...

Transcript of Spectral SensorsIEXYVIW 117 EQMP] 'SQTEGX TIVQERIRX]P EMKRIHP W]WXIQ 6SFYWX ERH XLIVQEPP] WXEFIP...