Sirris materials day 2011 thin film sensors - a key to intelligent production - smart coating...
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het collectief centrum van de Belgische technologische industrie
Thin film sensors: a key to intelligent production
Materials Day 2011
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Why use thin film sensors?
• Measurement on every position in the system
• The integrity of the tool is not decreased
• The coating has no influence on the behavior of the system
• Fast response time due to the small mass of the sensor
• No interference with other components of the system
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Key to intelligent production?
Case: The machining industry• Machining of high-end applications
• Too expensive limiting cost is a must
Higher productivity using high quality tools
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Modern Machine Shop, 2008
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Machining: Ceramic Wear- ResistantCoatings
• Widely accepted and applied• Deposited mainly using PVD and CVD• Increase in tool life up to a factor 10 compared to uncoated
tools
IFused correctly!
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Machining: Lifetime of a Tool
• Influenced by the temperature• Too high temperature for too long: degradation of the coating• For some coatings, too low working temperature: no advantage
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Machining: optimal tool usage
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in time40%
400k€
too early45%
450k€
too late15%
scrap 45k€
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Machining: Tool Condition Monitoring
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Technique Principle Advantages Disadvantages Acoustic emission Measurement of
released energy from dislocation movements
• Good technique for tool breakage or fracture
• Difficult analysis of signals • Interference from cutting
condition variations • Only suitable as additional
technique for increased reliability for TCM
• Difficult to measure wear • Lack of database on AE for
different materials and machining conditions
Cutting edge temperature
The temperature has an influence on the rate and mode of wear and friction
• Ideal for wear monitoring • Temperature distribution is not uniform
• Cutting edge temperature is very difficult to monitor exactly
Cutting forces Measurement and
interpretation of force measurements
• Correlated to tool wear • Interference from tool vibrations • High degree of variability
Vibrations • Sensitive to tool wear • Only usable in combination with force measurements
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Machining: Tool Condition Monitoring
Advantages of knowing the tool’s cutting edge temperature
• Prevention of excessive heating• In time feedback to machining parameters
• Prevention of sub-optimal use of the tools• Cost reduction in purchasing new tool• Minimal scrap production
• Constant product quality
• Higher productivity and efficiency
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Machining: cutting edge temperature
• „However, none of the laboratory methods for measuring temperatures reported in the literature is simple and reliable enough for routine testing” [1993].
• “However, the search for a practical method that can be used in an industrial environment continues” [2000].
• „Unfortunately, determination of cutting tool temperature distributions is technically difficult and past research has not provided sufficiently accurate temperature data” [2005].
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Machining: Temperature MeasurementMethods
Tool thermocouple Radiation techniqueBuilt-in thermocouple
Inverse heat conduction method (IHCM)Metallographic technique
Powder techniqueThermo-luminescence
OpticalTemperature Sensor Coatings:
• The integrity of the tool is not decreased• The coating has no influence on the temperature behavior and the
heat flow of the system • Fast response time due to the small mass of the sensor• No chip interference
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Sensor- development
Sensor coating(isolation and sensor)
StructuringLithography
Laser caving
Aerosol printing
Wireless
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Concept of the sensor
RTD Thermocouple
larger measurement spot small size
Power source needed thermoelectric power
easy signal amplification more difficult signal amplification
1 layer sensor 2 layer sensor
signal can be customized signal depending on materialcomposition
4 bond pads 2 bond pads
Accurate and stable in time extreme temperatures
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Concept of the sensor
RTD Thermocouple
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substrateisolatorsensorisolator
Wear resistant layer
substrateisolator
sensor
isolatorWear resistant layer
sensor isolatorisolatorisolisol
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Concept of the sensor
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• Multilayer stack • The different layers have to be compatible. • Important parameters are the linear coefficient of
expansion and hardness
• High temperature stability• High oxidation resistance and structural stability at high
temperature
• Economically• Can the sensor coating stack be deposited in a limited
number of steps.
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The dielectric layer
• Required properties• Electric isolation• High break down voltage
• Influenced by defects and porosities in the layer• High temperature stability• Compatible with substrate and coating• As thin as possible• Low cost
• Some possible coatings
• Al2O3, AlN, Si3N4, SiO2,…
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• Effect on deposition rate
The dielectric layer
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(Glockner et al. 2000)
(Chiba et al 2007)
Al2O3
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Requirements for structuring of a sensor
Structuring a sensor coating on a 3D-shape
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• 2D 3D• High resolution• Conformal• Reproducible• Scalable• Flexible• Low cost
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Structuring Techniques
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• Investigation on possible techniques for structuring a sensor coating on a 3D surface
• Cost, time, accuracy, degree of difficulty, compatibility with PVD
• Methods for thin film structuring described in literature• Masking, • Laser ablation• Photolithography
• Aerosol• Ink jetting • Screen printing a chemical etching
Well known techniques
Development stage
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Laser ablation
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• Locally remove coating by sublimation using a laser beam• Flexible design adaptation (CAD drawing)• Non-contact, non-chemical• Maskless• Low cost
• Contour laser ablation• Efficiency process depends on thermal and optical properties of material• Ablation rate and depth influenced by
• Absorption properties material• Laser parameters
• Laser energy• Pulse duration• Pulse repetition rate
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Laser ablation
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Substrate: steel
Coating: ceramic
Ablation time: 5 seconds!
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Laser ablation TiAlN
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Melting edgeSmall cracks
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Laser ablation
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• Optimisation of parameters
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Photolithography versus laser ablation
Photolithography: 6 steps Laser ablation: 1 stepLong throughput times 40 seconds complete wafer
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Laser ablation
• High resolution• Contourscan
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Photolithography versus laser ablation
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Building a proof of concept for a wirelessconnection
Basis = CC2520 development kit TI (Texas Instruments)• Complete platform to test advanced prototype RF systems
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Proof- of- concept wireless system
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R-meas.
Sensor
Heating element
Solid state relais
PT100
Interface
Master
Slave
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Sensor interface specifications
• Wireless Communication: Zigbee (2.4 GHz)• Sensor sample rate: 1600 Hz• Accuracy: 0,5 °C • # sensors: 2• Dimensions: ± 5cm x 3cm
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Measurement set- up
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Electrical characterization
• Positioning of components important• No hysteresis when Pt 100 reference is
positioned on sample
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If a thin temperature sensor is available
• development of thin film pressure sensorsis possible
Outlook
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het collectief centrum van de Belgische technologische industrie
Thank you for your attention!
Questions?