Silicon Inchworm Motors

1mm

Autonomous MicrorobotSeth Hollar, Sarah Bergreiter

Anita Flynn, Kris PisterSolar Cells

Motors

Legs

CMOSSequencer

8.6 mm

“The Actuation” – Hinges, Motors, Legs, Frame

“The Power” – Solar Cell Arrays and High Voltage Transistors

“The Brain” - CMOS Digital Circuits

Microrobot – Three Processes

Solar Cell/High Voltage ChipCMOS Chip

Robot Legs and Motors Chip

– Affix robot to wax for wirebonding

– 21 wirebonds

Assembly

Inchworm Motor

Preset Structure Leg and Linkage

Drive Actuator

Clutch

ActuatorsShuttle

Robot Leg Layout

Design of 2DOF Leg

ShuttlesKnee

Tendons

FootHip

Poly Crossover

Thrust and Power from Solid Propellant Microrockets

William Lindsay, Dana Teasdale, Veljko Milanovic, Kristofer Pister, and Carlos Fernandez-PelloBerkeley Sensor and Actuator Center

University of California Berkeley

Combustion – Teasdale, Lindsey• Solid rocket propellant

• 7 seconds thrust, Isp=15s

• ~1mJ out

Altitude vs. Average Thrust

050

100150200250300350

0.001 0.1 10 1000

Thrust Force (Newtons)

Alt

itu

de

(m

ete

rs)

Assuming pressure drag, constant total impulse

Next Generation Design

Increase the thrust and decrease the mass, while controlling thermal losses

Thrust Measurements vs. Theory

0

5

10

15

20

25

0 0.5 1 1.5 2 2.5

Time (sec)

Thru

st (m

illin

ewto

ns)

Predicted altitude: 50 m

Rocket in Action

ROCKETBOY THANKS

YOU!

(Bill Lindsay)