SEMICONDUCTOR Rectangular Gate Valve Slot Valve Fitting … · 2019. 6. 18. · SEMICONDUCTOR...
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Slot Valve SEMICONDUCTOR Rectangular Gate Valve Non-Standard 39.6mm x 329mm < 1.0 X E-7 ~ 1.2 X E5 Pa(abs) < 1.0 X E-10 Pa*㎥/sec < 1.0 X E-10 Pa*㎥/sec Welded Bellows Double Acting OD Ø6 0.5 MPa N/A Lock 3,000,000 3,000,000 1,000,000 1,000,000 ≤ 120℃ ≤ 60℃ Non lubrication PFPE Grease AL 6061 AL 6061 AL 6061 STS304 AM350 STS304 FKM FKM Bare Bare Anodizing Fitting Standard Gate Size(mm) Pressure Range Helium Leak Rate Feed Through Pneumatic Actuator Type Air Connection Air Pressure Air Less Lock Life Cycles Temperature Lubrication Materials Materials Surface Treatment Open Close Mechanism Bellows O-Ring(Seal) Lubrication Body Actuator Vacuum Inside Mechanism Valve Housing Gate(Seat) Bonnet Shaft(Stem) Bellows Bellows end Piece Vacuum Seal Pneumatic Seal Valve Housing Gate(Blade) Actuator External Internal
Transcript of SEMICONDUCTOR Rectangular Gate Valve Slot Valve Fitting … · 2019. 6. 18. · SEMICONDUCTOR...
Slot Valve
SEMICONDUCTORRectangular Gate Valve
Non-Standard
39.6mm x 329mm
< 1.0 X E-7 ~ 1.2 X E5 Pa(abs)
< 1.0 X E-10 Pa*㎥/sec
< 1.0 X E-10 Pa*㎥/sec
Welded Bellows
Double Acting
OD Ø6
0.5 MPa
N/A
Lock
3,000,000
3,000,000
1,000,000
1,000,000
≤ 120℃
≤ 60℃
Non lubrication
PFPE Grease
AL 6061
AL 6061
AL 6061
STS304
AM350
STS304
FKM
FKM
Bare
Bare
Anodizing
Fitting Standard
Gate Size(mm)
Pressure Range
Helium Leak Rate
Feed Through
Pneumatic Actuator Type
Air Connection
Air Pressure
Air Less Lock
Life Cycles
Temperature
Lubrication
Materials
Materials
Surface Treatment
Open
Close
Mechanism
Bellows
O-Ring(Seal)
Lubrication
Body
Actuator
Vacuum Inside
Mechanism
Valve Housing
Gate(Seat)
Bonnet
Shaft(Stem)
Bellows
Bellows end Piece
Vacuum Seal
Pneumatic Seal
Valve Housing
Gate(Blade)
Actuator
External
Internal
