Semiconductor Semiconductor EquipmentEquipment

Fire Suppression Fire Suppression ComplianceComplianceforfor

SESHA North Texas ChapterSESHA North Texas Chapter

bybyMatt WymanMatt Wyman

Semiconductor Division ManagerSemiconductor Division Manager

KOETTER FIRE PROTECTIONKOETTER FIRE PROTECTIONMarch 22, 2007March 22, 2007

Koetter Fire ProtectionKoetter Fire Protection Specialize in Semiconductor Equipment Fire Specialize in Semiconductor Equipment Fire

ProtectionProtection GlobalGlobal Design & Install CO2 & FWS Design & Install CO2 & FWS Bulk Control Systems for CO2 & FWSBulk Control Systems for CO2 & FWS Corrosive Applications (Combustible Plastics)Corrosive Applications (Combustible Plastics)

SEMI Standards Fire Protection Task Force LeaderSEMI Standards Fire Protection Task Force Leader Specialize in Equipment Design & IntegrationSpecialize in Equipment Design & Integration Code Review & Compliance ConsultingCode Review & Compliance Consulting

NFPA/FM StandardsNFPA/FM Standards SEMI StandardsSEMI Standards

Semiconductor Fire Protection Training SeminarsSemiconductor Fire Protection Training Seminars KFP Test & Training BenchKFP Test & Training Bench

Industry FormsIndustry Forms Industry White PapersIndustry White Papers Industry Presentations (SESHA)Industry Presentations (SESHA) 7 Texas Locations & International7 Texas Locations & International

OverviewOverview Are my new and/or existing fire Are my new and/or existing fire

suppression systems compliant?suppression systems compliant? ““Quick” CO2 Design ReviewQuick” CO2 Design Review Local Application NozzlesLocal Application Nozzles Fire DetectorsFire Detectors NFPA 12 2005 ChangesNFPA 12 2005 Changes Bulk SystemsBulk Systems Hatsuta Cabinex EquipmentHatsuta Cabinex Equipment Fine Water SprayFine Water Spray Fire Suppression SubmittalsFire Suppression Submittals

Fire CodesFire Codes IFC2006 IFC2006

Combustible Tool >4ft. WideCombustible Tool >4ft. Wide Sprinkler Head Inside or Gaseous Fire SuppressionSprinkler Head Inside or Gaseous Fire Suppression

FM DS 7-7FM DS 7-7 “Semiconductor Fabrication Facilities” “Semiconductor Fabrication Facilities” CO2 or FWS (Fine Water Spray)CO2 or FWS (Fine Water Spray) CO2 is most widely utilizedCO2 is most widely utilized Extinguish 13kW Fire Extinguish 13kW Fire

NFPA 12NFPA 12 “Carbon Dioxide” “Carbon Dioxide” SEMI S14SEMI S14 “Safety Guidelines for Fire Risk “Safety Guidelines for Fire Risk

Assessment & Mitigation for Semiconductor Assessment & Mitigation for Semiconductor Manufacturing Equipment”Manufacturing Equipment”

SEMI S2SEMI S2 “Environmental, Health, & Safety “Environmental, Health, & Safety Guideline for Semiconductor Manufacturing Guideline for Semiconductor Manufacturing Equipment”Equipment” Chapter 14 “Fire Protection”Chapter 14 “Fire Protection”

CO2 DesignCO2 Design Total Flood (TF)Total Flood (TF) Enclosed CompartmentsEnclosed Compartments

Mini-EnvironmentsMini-Environments Plenums, Head Cases, Chemical CabinetsPlenums, Head Cases, Chemical Cabinets

50% CO2 Concentration50% CO2 Concentration 60 Second Discharge60 Second Discharge Compensate CO2 Demand for:Compensate CO2 Demand for:

Process Exhaust VentilationProcess Exhaust Ventilation Damper Violates SEMI S2Damper Violates SEMI S2

Unclosable OpeningsUnclosable Openings

CO2 DesignCO2 Design

Local Application (LA)Local Application (LA) Open CompartmentsOpen Compartments

Working SurfacesWorking Surfaces Rate by VolumeRate by Volume

““Assumed” 3D VolumeAssumed” 3D Volume 30 Second Discharge30 Second Discharge

No Compensation for Exhaust Ventilation & No Compensation for Exhaust Ventilation & OpeningsOpenings

Combination System (TF & LA)Combination System (TF & LA) Typically 30 Second DischargeTypically 30 Second Discharge

Existing CO2 SystemsExisting CO2 Systems ““Quick CO2 Review”Quick CO2 Review”

No CalculationsNo Calculations Check that Supply = DemandCheck that Supply = Demand

Typical “Wet Bench”Typical “Wet Bench” Exhaust Rates = ~125cfm/linear foot Exhaust Rates = ~125cfm/linear foot

(typical)(typical) ““Quick” Demand CalcsQuick” Demand Calcs

TF Demand = 11.5% of Volume (60sec)TF Demand = 11.5% of Volume (60sec) Volume = Dimension + Exhaust (60sec)Volume = Dimension + Exhaust (60sec)

LA Demand = AverageLA Demand = Average (8ft = 50lbs, 6ft = 35lbs, 4ft = 20lbs)(8ft = 50lbs, 6ft = 35lbs, 4ft = 20lbs)

Quick CO2 ReviewQuick CO2 Review ExampleExample – 8’L x 4’D x 6’H Enclosed Plastic Bench- – 8’L x 4’D x 6’H Enclosed Plastic Bench-

100lbs. CO2100lbs. CO2 Total Volume (TF) = 192cuft x 11.5% = 22.1 lbs.Total Volume (TF) = 192cuft x 11.5% = 22.1 lbs. Exhaust Volume (TF) = 125cfm/ft x 8ft x 11.5% = 115 lbs.Exhaust Volume (TF) = 125cfm/ft x 8ft x 11.5% = 115 lbs. Total Demand (TF) = Total Demand (TF) = 137 lbs. CO2137 lbs. CO2 CO2 Supply = CO2 Supply = NOT ADEQUATENOT ADEQUATE

ExampleExample – 6’L x 4’D x 5’H Open Solvent Bench-100lbs – 6’L x 4’D x 5’H Open Solvent Bench-100lbs CO2CO2 Working Surface (LA) = 35 lbs. (Typical)Working Surface (LA) = 35 lbs. (Typical) Plenum Volume (TF) = 6ft x 4ft x 3ft = 72cuft x 11.5% = 8.3 Plenum Volume (TF) = 6ft x 4ft x 3ft = 72cuft x 11.5% = 8.3

lbs.lbs. Plenum Exhaust (TF) = 125cfm/ft x 6ft x 11.5%Plenum Exhaust (TF) = 125cfm/ft x 6ft x 11.5%/2/2 = 43.1 lbs = 43.1 lbs Total Demand = Total Demand = 86.4 lbs.86.4 lbs. CO2 System = CO2 System = ADEQUATEADEQUATE

Nozzle ComparisonsNozzle Comparisons LA NozzlesLA Nozzles

All have “cone” to absorb All have “cone” to absorb discharge pressuredischarge pressure

Reflected discharge from orifice Reflected discharge from orifice Less exit velocity (same flow rate)Less exit velocity (same flow rate) Nozzle absorbs most 600psi Nozzle absorbs most 600psi

discharge pressuredischarge pressure

TF NozzlesTF Nozzles ““V” Nozzle is “Vent” nozzle (TF)V” Nozzle is “Vent” nozzle (TF) Straight discharge from orificeStraight discharge from orifice Full effects of 600+psi discharge Full effects of 600+psi discharge

pressure on tool (especially pressure on tool (especially baths)baths)

Much higher velocityMuch higher velocity

Local Application Local Application NozzlesNozzles

Working Surface Areas (Wet)Working Surface Areas (Wet) Cone shaped for “Soft” dischargeCone shaped for “Soft” discharge Cone shape provides larger 2D coverage areaCone shape provides larger 2D coverage area Nozzles pointed downward towards back wallNozzles pointed downward towards back wall Provides “rolling” effect across Working Provides “rolling” effect across Working

SurfaceSurface

Side View Front View

All Local Application Nozzles Must Have All Local Application Nozzles Must Have Coverage ChartCoverage Chart 2D Coverage of LA Nozzle2D Coverage of LA Nozzle

Ansul CR D NozzleAnsul CR D Nozzle

Ansul D NozzleAnsul D Nozzle

Identical NozzlesIdentical Nozzles FM Listing = FM testingFM Listing = FM testing

LA Nozzle LA Nozzle Listings/ApprovalsListings/Approvals

LA Nozzle CoverageLA Nozzle Coverage Does this apply to other manufacturers and Does this apply to other manufacturers and

models?models? AnsulAnsul

Has Other LA NozzlesHas Other LA Nozzles Not for Wet Bench (different coverage chart)Not for Wet Bench (different coverage chart)

Hatsuta Cabinex-EWTHatsuta Cabinex-EWT Has FM Approved LA Nozzle for Wet BenchHas FM Approved LA Nozzle for Wet Bench Has Own Coverage ChartHas Own Coverage Chart

ChemetronChemetron Has FM Approved LA Nozzle(s) Has FM Approved LA Nozzle(s) Not for Wet Bench (different coverage chart)Not for Wet Bench (different coverage chart)

KiddeKidde Has FM Approved LA Nozzle(s)Has FM Approved LA Nozzle(s) Not for Wet Bench - (different coverage chart)Not for Wet Bench - (different coverage chart) What about Kidde “V” Nozzle for LA?What about Kidde “V” Nozzle for LA?

Kidde “V” NozzleKidde “V” Nozzle Kidde “V” Nozzle from Kidde “V” Nozzle from ComplianceCompliance review review

11stst - Listed & Approved by UL/FM as TF Nozzle - Listed & Approved by UL/FM as TF Nozzle ONLYONLY

No LA Coverage Chart in Design ManualNo LA Coverage Chart in Design Manual NOT LISTED/APPROVED FOR USE AS LA NOZZLENOT LISTED/APPROVED FOR USE AS LA NOZZLE

““V”=“Vent” type is designed for “high velocity” V”=“Vent” type is designed for “high velocity” discharge to overcome exhaust discharge to overcome exhaust ventventilation.ilation.

22ndnd - CAN CREATE A - CAN CREATE A SEVERE SPLASH HAZARDSEVERE SPLASH HAZARD Many documented cases where discharge splashed acid bathsMany documented cases where discharge splashed acid baths Dangerous Exposure to PersonnelDangerous Exposure to Personnel

33rdrd - Kidde began manufacturing and listing of - Kidde began manufacturing and listing of Stainless Steel “V” nozzle in Stainless Steel “V” nozzle in June 2005June 2005. .

Previously only available in brass.Previously only available in brass. Previous SS installations were not listed/approved Previous SS installations were not listed/approved

componentscomponents 44thth - Not supported by Kidde for LA Coverage - Not supported by Kidde for LA Coverage

Kidde “V” NozzleKidde “V” Nozzle

Copy of Letter Copy of Letter from Kidde from Kidde regarding use regarding use of “V” Nozzle of “V” Nozzle for LA for LA CoverageCoverage

Dated May 26, Dated May 26, 20062006

CO2 Nozzles

CO2 Tubing

SS Corrosion ProtectionSS Corrosion Protection

HalarHalar Coating for Stainless Steel Nozzles, Coating for Stainless Steel Nozzles, Fittings, & Tubing in Corrosive AreasFittings, & Tubing in Corrosive Areas

CO2 Fittings

DetectionDetection Optical Flame Detection (13kW Fire)Optical Flame Detection (13kW Fire)

Solvent AreasSolvent Areas Corrosive AreasCorrosive Areas High Exhaust Rate AreasHigh Exhaust Rate Areas

Heat DetectionHeat Detection Low Exhaust Rates – 400cfm limitLow Exhaust Rates – 400cfm limit Slower Response = Tolerate Larger FireSlower Response = Tolerate Larger Fire Linear Heat Detection (Corrosive Areas)Linear Heat Detection (Corrosive Areas)

Cross-Zoning Flame & Heat Detectors Cross-Zoning Flame & Heat Detectors (Asia)(Asia) Prevents “False Discharges”Prevents “False Discharges” But Negative Affect to PerformanceBut Negative Affect to Performance

Flame DetectorsFlame Detectors Infrared (IR) & Ultraviolet Infrared (IR) & Ultraviolet

(UV) Sensors(UV) Sensors UVUV

Quartz WindowQuartz Window Can be “Masked” by Can be “Masked” by Gases, Smoke, FumesGases, Smoke, Fumes

IRIR Near Band (4.3µ)Near Band (4.3µ)

Hydrocarbon FireHydrocarbon Fire Wide Band (0.7-3.5µ)Wide Band (0.7-3.5µ) Visible (0.4-0.7µ)Visible (0.4-0.7µ)

Sierra DCR1(S)Sierra DCR1(S) UV/IRUV/IR CheapestCheapest Leakage Problems Leakage Problems

Quartz WindowQuartz Window HFHF

Flame DetectorsFlame Detectors Cabinex SX-7000Cabinex SX-7000

Triple Band IR (Near)Triple Band IR (Near) Reliability?Reliability? Chemical Compatibility?Chemical Compatibility?

Det-Tronics PM-5MPDet-Tronics PM-5MP Dual Band IR (Near) Dual Band IR (Near)

Really FastReally Fast False Alarm IssuesFalse Alarm Issues

Fire Sentry FS7Fire Sentry FS7 Near Band, Wide Band™, & Near Band, Wide Band™, & Visible Visible IRIR

Hydrocarbon & Non-hydrocarbonHydrocarbon & Non-hydrocarbon Alarm & Pre-Alarm OutputsAlarm & Pre-Alarm Outputs 5-sec Alarm Verification (Flash Fires)5-sec Alarm Verification (Flash Fires) FirePic HistoryFirePic History Most Reliable Flame Detector!Most Reliable Flame Detector!

Flame Detector Flame Detector ReliabilityReliability False Alarm ImmunityFalse Alarm Immunity

KFP TESTKFP TEST Compare Reliability of FS7 Compare Reliability of FS7

vs. PM-5MP to “Steam”vs. PM-5MP to “Steam” Blackbody IR RadiationBlackbody IR Radiation

Alarm Signal (False Alarm Signal (False Alarm)Alarm)

300ºF - 600ºF300ºF - 600ºF 6” – 36” Distance6” – 36” Distance

Det-Tronics Technical Det-Tronics Technical NoteNote Alarm from Mini Maglite Alarm from Mini Maglite

@ 2” w/o window@ 2” w/o window Alarm from Maglite @ 1-3” Alarm from Maglite @ 1-3”

with & w/o windowwith & w/o window Alarm from Quartz Alarm from Quartz

Halogen Light @ 3ft.Halogen Light @ 3ft.

Spot Smoke DetectorsSpot Smoke Detectors 2 Types2 Types

120VAC “First Alert” Spot Smoke Detector120VAC “First Alert” Spot Smoke Detector UL Listed as RESIDENTIAL detectorUL Listed as RESIDENTIAL detector

24VDC Fire Alarm System Spot Smoke Detector24VDC Fire Alarm System Spot Smoke Detector UL Listed for use with compatible “cross-listed” FACPUL Listed for use with compatible “cross-listed” FACP

SEMI S2 Section 14.4.4 Fire Detection, Alarm, & SEMI S2 Section 14.4.4 Fire Detection, Alarm, & ControlsControls 14.4.4.1&2 All detectors, alarms, and 14.4.4.1&2 All detectors, alarms, and controlscontrols be accepted be accepted

and listed by an accredited laboratory (example UL or FM) and and listed by an accredited laboratory (example UL or FM) and installed in accordance with the terms of that acceptance and installed in accordance with the terms of that acceptance and appropriate national or international standards (ex. NFPA 72)appropriate national or international standards (ex. NFPA 72)

Spot Detectors are NOT Compliant Spot Detectors are NOT Compliant (NFPA/SEMI/UL)(NFPA/SEMI/UL) Without connection to Fire Control PanelWithout connection to Fire Control Panel

Spot Detectors require ~2.5% obs./ft. Spot Detectors require ~2.5% obs./ft. concentrationconcentration Not effective in Exhausted or “Open” CompartmentsNot effective in Exhausted or “Open” Compartments

NFPA 12 2005NFPA 12 2005 NEW Changes to NFPA 12 2005 NEW Changes to NFPA 12 2005

EditionEdition Retroactive upon AHJRetroactive upon AHJ

LabelsLabels must meet ANSI Z535 must meet ANSI Z535 Orange “Warning” ColorOrange “Warning” Color ““Warning” Triangle SymbolWarning” Triangle Symbol Aspiration SymbolAspiration Symbol Outside Protected SpaceOutside Protected Space At Manual ActivationAt Manual Activation

SEMI S1 CompliantSEMI S1 Compliant

NFPA 12 2005NFPA 12 2005 Lockout Valves Lockout Valves (Not Required)(Not Required)

Required except where personnel can’t enter space Required except where personnel can’t enter space (4.3.3.6)(4.3.3.6)

Where CO2 can migrate to expose personnel (4.3.3.6.1)Where CO2 can migrate to expose personnel (4.3.3.6.1) System should “Lockout” during maintenance or testing System should “Lockout” during maintenance or testing

(4.3.3.6.3)(4.3.3.6.3) ““Lockout” Valve should be supervisedLockout” Valve should be supervised Pressure Switch installed between Supply and Lockout Pressure Switch installed between Supply and Lockout

Valves (4.5.4.11)Valves (4.5.4.11) Disable/By-Pass Switch Disable/By-Pass Switch (Required)(Required)

Electrically operated systems should have service Electrically operated systems should have service disconnect switch (4.3.3.7)disconnect switch (4.3.3.7)

Switch should be supervised (keyed)Switch should be supervised (keyed)

Bulk SystemsBulk Systems High Pressure or Low Pressure CO2 High Pressure or Low Pressure CO2

or FWSor FWS Large Supply of Agent to Protect Large Supply of Agent to Protect

Multiple SystemsMultiple Systems Main & ReserveMain & Reserve

Controlled Release of CO2Controlled Release of CO2 BenefitsBenefits

Floor SpaceFloor Space ControlsControls Tool UptimeTool Uptime Life Cycle CostLife Cycle Cost

NegativeNegative Higher Install CostHigher Install Cost

Major Retrofit or New Fab ProjectMajor Retrofit or New Fab Project

Bulk CO2 ComplianceBulk CO2 Compliance What is wrong What is wrong

with this design?with this design? 40 Tools on 1 HP 40 Tools on 1 HP

Manifold SystemManifold System 11stst - Largest - Largest

FACP has FACP has maximum maximum approval of 10 approval of 10 independent independent releasing releasing hazardshazards

Solution – Solution – Minimum of 4 Minimum of 4 releasing panelsreleasing panels

Bulk CO2 DesignBulk CO2 Design FACP FACP

Approval/Listings Approval/Listings Limited to Limited to

maximum of 10 maximum of 10 independent independent releasing hazardsreleasing hazards 10 Tools10 Tools

Bulk CO2 ComplianceBulk CO2 Compliance Anything else?Anything else? 22ndnd - Location of - Location of

Selector ValvesSelector Valves AT EACH TOOL?AT EACH TOOL?

Where does CO2 Where does CO2 go?go?

What about phase What about phase change in pipe?change in pipe?

How do you Calc How do you Calc this?this? CAN’T!!CAN’T!!

Bulk CO2 DesignBulk CO2 Design

Selector Valves Selector Valves Must Be @ CO2 Must Be @ CO2 Supply LocationSupply Location Minimize CO2 LossMinimize CO2 Loss Per Listed Hydraulic Per Listed Hydraulic

Calculation Calculation ProgramsPrograms

Deck

Fab Level

HP HP Manifold Manifold

ConfiguratConfigurationion

STI

CO2 Cylinder

Bank

LCD80 Wet Deck Annunciator

Manual Pull

Horn / Strobe Light

Building Panel

Interface

Manifold Network Panel(s)

SLC Loop (Device Signals)

Fiber Network (Comms)

Copper (Comms)

Sensor(s)Nozzle(s)

Selector Valve(s) & Flow Switch(s)

Valve Control Signal

Other Decks (10 max)

RS485 Comms (Signal Data)

Manifold Control Panel

CO2 Line

Slab

Sub Fab Level

Owner: Tech Serv

Owner: Fac Ops

Keyed By-Pass Switch

HATSUTA CABINEX-EWTHATSUTA CABINEX-EWT

FM Approved for Semiconductor ToolsFM Approved for Semiconductor Tools September 2004September 2004

Manufactured in Osaka, JapanManufactured in Osaka, Japan Specifically designed for SemiconductorSpecifically designed for Semiconductor Total Flood & Local ApplicationTotal Flood & Local Application Excellent OEM product!Excellent OEM product!

Packaged cabinet for cylinder(s) & panelPackaged cabinet for cylinder(s) & panel Worldwide Compliance!Worldwide Compliance!

CABINEX-EN = NOT COMPLIANT IN CABINEX-EN = NOT COMPLIANT IN USAUSA

Cabinex-EWTCabinex-EWT Control CabinetControl Cabinet

Up to 2, 100lb. CylindersUp to 2, 100lb. Cylinders 50 & 100-lbs.50 & 100-lbs. 1.8’ x 1.7’ x 7.0’ Cabinet1.8’ x 1.7’ x 7.0’ Cabinet

Integrated PanelIntegrated Panel Up to 32 “Addressable” InputsUp to 32 “Addressable” Inputs Cross-Zoning CapableCross-Zoning Capable Single Release ZoneSingle Release Zone

Solenoid & Gas Cartridge Solenoid & Gas Cartridge ActuatorsActuators

Popular with OEMsPopular with OEMs TEL, DNS, AMATTEL, DNS, AMAT

Fine Water Spray (FWS)Fine Water Spray (FWS) SecuriplexSecuriplex

Wet Bench ApplicationWet Bench Application FM ApprovedFM Approved

Extinguishing AgentExtinguishing Agent Fab DI Water (DIW)Fab DI Water (DIW) Fab Nitrogen (N2)Fab Nitrogen (N2)

Mixed at nozzleMixed at nozzle Dual pipingDual piping Unlimited SupplyUnlimited Supply

Low PressureLow Pressure PVDF or PFA Nozzles & PVDF or PFA Nozzles &

TubingTubing

Submittal Submittal DocumentationDocumentation

Stamped Drawings of CO2 Mechanical & Stamped Drawings of CO2 Mechanical & Electrical Systems including IsometricElectrical Systems including Isometric FPE or NICET Level 3FPE or NICET Level 3

CO2 Hazard Design Demand CalculationsCO2 Hazard Design Demand Calculations CO2 Hydraulic Flow CalculationsCO2 Hydraulic Flow Calculations Power Supply & Battery Backup CalculationsPower Supply & Battery Backup Calculations Bill of Material ListBill of Material List Equipment Data Sheet SubmittalsEquipment Data Sheet Submittals Sequence of EventsSequence of Events Acceptance Test & Certification FormAcceptance Test & Certification Form

CO2 Solid ModelingCO2 Solid Modeling

QuestionsQuestions

Any Questions?Any Questions?

Matt WymanMatt WymanSemiconductor Division ManagerSemiconductor Division Manager

KOETTER FIRE PROTECTIONKOETTER FIRE PROTECTIONDallas, TexasDallas, Texas

972.333.4965 – cell972.333.4965 – cellmwyman@koetterfire.commwyman@koetterfire.com

Discharge TestsDischarge Tests

DemonstrationDemonstration Mock of Open Wet Mock of Open Wet

BenchBench 8’W x 1.6’W x 2.5’H8’W x 1.6’W x 2.5’H Recessed bathsRecessed baths Exhaust VentilationExhaust Ventilation

Various DischargesVarious Discharges Various Various

ConfigurationsConfigurations VIDEOVIDEO

Test ResultsTest Results

CO2 ConcentrationsCO2 Concentrations See TableSee Table

AnalysisAnalysis All Extinguish Fire All Extinguish Fire

SourceSource IPA/PP Pan FireIPA/PP Pan Fire

Measure CO2 Measure CO2 concentrations at concentrations at various pointsvarious points

Vent type nozzles had Vent type nozzles had significant splashingsignificant splashing resultsresults

Not recommended over Not recommended over open bathsopen baths

FronFront t

LeftLeft

Front Front MiddlMiddl

ee

Rear Rear LoweLowe

r r MiddMidd

lele

Test Test #1#1

36%36% 48%48% 51%51%

Test Test #2#2

28%28% 52%52% 39%39%

Test Test #3#3

29%29% 44%44% 24%24%