Semiconductor Device Fabrication (Chapter 9) (1)

download Semiconductor Device Fabrication (Chapter 9) (1)

of 13

Embed Size (px)

Transcript of Semiconductor Device Fabrication (Chapter 9) (1)

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    1/13

    EE1022

    E

    E

    9:DF

    B:D..

    :

    1.

    E304E

    D,,,

    K

    C

    1.

    D

    A

    2.

    BJ

    3.

    FE

    4.

    A

    5.

    GD

    6.

    CD

    7.

    D

    8.

    D

    2

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    2/13

    9.1

    I

    9.

    D

    F

    3

    9.2

    IC

    (IC)

    4

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    3/13

    9.2.1DIC

    5

    9.2

    .2

    6

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    4/13

    9.2

    .3F

    7

    9.3

    C

    8

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    5/13

    9.3.

    1CI

    9

    2AD

    .

    9.3

    .2KEDE

    AE

    10

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    6/13

    9.4

    /

    D

    11

    A

    9.5

    A

    D

    12

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    7/13

    9.5.1D13(,A

    )

    13

    9.6

    DC

    14

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    8/13

    9.6.1D45

    15

    9.6.2D68

    16

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    9/13

    9.6.3D9

    17

    9.6.4AAIICCA

    ACIACE

    ()

    I

    AC

    ()

    18

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    10/13

    9.6.4AAIICCA

    ACIACE

    19

    :FF(F)

    1015F

    9.6.5D

    ,

    /

    :

    B

    F

    :

    20

    9.6.6E

    H

    5008005

    ?

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    11/13

    9.7

    IFABICAIEHD

    F

    (

    ),

    :

    9.7.1

    B

    ()

    21

    9.7.2

    D

    I

    )

    I

    2

    8501100C

    (+22)

    E

    22

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    12/13

    9.7.2

    D

    )

    )

    I

    C

    .

    ,

    .I

    ,

    ,

    ,

    .23

    C

    9.7.3

    I

    A

    2

    G

    A

    24

    9.7.4

    A

    B

    2,,

    F

    C

  • 8/10/2019 Semiconductor Device Fabrication (Chapter 9) (1)

    13/13

    9.7.5

    A

    ,

    ,

    25