SEMI-GAS Centurion · SEMI-GAS® CONSULTM Programmable Logic Controller Powered by a Siemens S7-300...
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SEMI-GAS ® Centurion TM Gas Source Panels/Manifolds and Cylinder Enclosure Systems
Transcript of SEMI-GAS Centurion · SEMI-GAS® CONSULTM Programmable Logic Controller Powered by a Siemens S7-300...
SEMI-GAS® CenturionTM
Gas Source Panels/Manifolds and Cylinder Enclosure Systems
SEMI-GAS® CenturionTM
Gas Source Panels/Manifolds
Matheson Tri-Gas’ SEMI-GAS® Gas Source Panels/Manifoldspioneered specialty gas handling technology over 20 yearsago. Today, these panels continue to deliver the safety,performance and reliability required in the most advancedsemiconductor production and R&D environments.Matheson Tri-Gas now has one of the largest installedbases of gas handling equipment worldwide.
Engineered to Outperform
Gas Source Panels are engineered to deliver theperformance required in the manufacturing of the mostadvanced electronic devices. This is achieved by astreamlined gas flow path with minimized internalvolume and unswept space. In addition, only field provencomponents manufactured from electropolished 316Lstainless steel are utilized. Whether the gas is toxic,flammable, corrosive or inert, Matheson Tri-Gas has a gassource panel that will deliver the highest process purity,improving product performance and reducing the overallcost of ownership.
Reliability Built In
With the high cost of downtime, Matheson Tri-Gasrecognizes the need for a gas source panel that requiresminimal maintenance. Because of this need, Gas SourcePanels are engineered for long-term performance. AtMatheson Tri-Gas’ ISO 9001 certified facility, panels areassembled using only qualified components in acleanroom environment. As part of a comprehensivequality assurance program, each panel is rigorously testedfor proper performance, first at the component level, thenin the panel, and finally after installation on the cabinet.
In the field, Matheson Tri-Gas’ SEMI-GAS® Gas SourcePanels have the best reliability record in the industry.Components are clearly labeled and easily accessible fromthe front panel for improved serviceability. In addition,the modular design reduces spare part stockingrequirements and makes adding options easy.
Features and Benefits
• Compact and efficient internal flow path minimizesdead space for consistent, repeatable, high purityoperation.
• Automatic switchover capability provides criticalredundancy and guaranteed uptime.
• Vacuum venturi – assisted purging provides quick andefficient evacuation of the manifold.
• Front removable components simplify maintenance.
• Continuous purge gas bleed during cylinder changesprevents atmospheric contamination of the pigtail.
• Modular design reduces lead times and spare partstocking requirements and makes adding options easy.
• Leak tested and certified to <1x10-9 sccs
• Isolated electronic components
• All orbital automated butt-welded construction
• Opposing pigtail brackets to prevent the transmissionof force to the VCR connection
• Excess flow protection
• Emergency Shutoff Valve (ESO) for all HPMapplications
• Intuitive designs reduce the potential for operatorerror
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With ever smaller linewidth challenges in theelectronics industries,gas purity is paramount.The CENTURIONTM GasSource Manifoldrepresents the nextgeneration of ultra puregas source manifoldsdesigned specifically foruse in submicronfabricationenvironments.
Utilizing springless diaphragm valves, pressure transducers, and tieddiaphragm regulators, the CENTURIONTM Manifold is engineered toeliminate contamination of the source supply of specialty gases. Anin-line architecture, unique to Matheson Tri-Gas, and a compactmodular design reduce the dead space volume compared to otherhigh-purity manifold configurations.
The result is a manifold with excellent purge efficiency providingmaximum protection for both your operators and your processes.
The CENTURIONTM Gas Source Manifold design is ideal for supplyingspeciatly gases to process tools that manufacture the mostchallenging nanotechnology applications. The system is available ina variety of process-specific configurations.
• Auto-Purge Manifolds designed for flammable, toxic, pyrophoricor corrosive HPM gases.
• Safety protected manual manifolds with Emergency Shutofffeatures for lower cost HPM applications.
• Manual and Auto-Purge Manifolds for inert process gases.
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Standard Features• Springless diaphragm valves• Tied diaphragm regulators• Pressure transducers• Gas specific pre-filter• Excess flow switch• Purge and vent transducer• Manifold purity validation
Options• Manifold purity certification• High pressure leak test• Vacuum access port• Damage control configurations• Dual isolation valves• NANOCHEM® purge gas purification• All-metal final filter• Coaxial process outlet• Auto guard• Purge gas bleed• Mass flowmeter
SpecificationsInboard leak rate: <1 x 10-9 sccsOutboard leakage: <2 ppm He above
backgroundParticulates per ft3: 0.1-0.3 µm <5 Counts
>0.3 µm 0 CountElectropolished
surface finish: 5-7µ in Ra AverageMoisture: <10 ppbOxygen: <10 ppb
SEMI-GAS® CenturionTM Cylinder Enclosure Systems
Matheson Tri-Gas Redefines The Traditional "Gas Cabinet"
As the worldwide leadingsupplier of specialty gases andequipment for over 75 years,Matheson Tri-Gas understandsthe safe handlingrequirements for the gasesused in today’s semiconductormanufacturing environment.This legacy continues with theSEMI-GAS® Cylinder EnclosureSystems that pioneered and
redefined the storage and handling of toxic, corrosive, flammableand reactive gases and liquids. Today this expertise translates intoproviding unsurpassed utility, flexibility, performance and safety inthe design and manufacture of cylinder enclosures.
Engineered to comply with all building and fire codes SEMI-GAS®
Cylinder Enclosure Systems are fabricated from 11-gauge coldrolled sheet steel and are available in one-, two- and three-cylinder configurations.
• Efficient Air Flow, Reduced Exhaust Needs
By improving door and window seals, adding diffused air inletsand repositioning elements within the enclosure, air flowefficiency is maximized, and scrubbed exhaust capacity isminimized. In addition, continuous, efficient ventilation ensurespotentially harmful gases do not accumulate within the enclosure.
By reducing exhaust requirements the SEMI-GAS® CylinderEnclosure Systems translate into substantial cost savings inscrubbed exhaust equipment. And when enclosures are installedin a temperature controlled environment, reductions inconditioned air flow add to the savings.
• Improved Visibility
Limited light sources found in many gas rooms reduce visibilitywithin the cylinder enclosure making manifold operation andmaintenance more difficult. Matheson Tri-Gas’ SEMI-GAS® CylinderEnclosure Systems feature large self-closing windows and a lightinterior color to maximize internal lighting and improved visibility.
• Central Information Location
Access to information is critical when handling hazardousmaterials. The SEMI-GAS® Cylinder Enclosure Systems are designedto provide clear, easy-to-read information where it is neededmost, on the front of the door. Gas labels are mounted on thesafety glass and the controller interface on the door for easyviewing, which meets SEMI S-8 requirements.
Optimized enclosure maximizes air flow efficiency.
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• Customer Driven Design
In addition to the minimum industry building, fireand safety codes, the SEMI-GAS® Cylinder EnclosureSystems incorporate numerous customer-driven value-added features that improve operability, reliability,and maintainability.
• High Flow Silane Gas Cabinets
Silane is a pyrophoric gas that has a tendency toaccumulate in areas with low air flow, and the resultcan be explosive. Matheson Tri-Gas provides a gascabinet specifically engineered to address the hazardsof handling silane and silane mixtures. Each cylinderis housed in its own enclosure and a ventilationvelocity of 200 feet per minute (fpm) is achievedacross manifold connections by using an additional airintake and an enlarged 8-inch diameter exhaust duct.
Maximum flow is with fully-open damper on door. Minimum flow is with closed damper. Exhaust sizing should be based onmaximum flow.Minimum static pressure requirement at enclosure exhaust connection is -0.4 in. H2O except for 1CE-200 which is at -1.00 in. H2O.Damper on 1CE-200 must be adjusted to meet the 200 fpm ventilation velocity as required by the Uniform Fire Code.Height dimension includes controller.
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Cylinder Enclosure Specifications
(With Window Open) (With Window Closed)Cabinet Exhaust Duct Duct Flow Duct Velocity Window Opening Max Flow Min Flow Dimensions in inches (cm)Model Diameter Size (scfm) (fpm) (sq. inches) (scfm) (scfm) W x D x H1CE 6" 350 1,780 72 150 50 15x23x87 (38x58x221cm)2CE 6" 350 1,780 187 200 75 25x23x87 (64x58x221cm)3CE 8" 550 1,575 259 320 100 40x23x87 (102x58x221cm)1CE-200 8" 850 2,435 72 500 425 15x23x87 (38x58x221cm)
Features
• WindowLarge self-closing, 1/4"wire-reinforced safetyglass window allowsexterior lighting insidecabinet and providesquick access tomanifold components
• DoorSelf-closing, self-latchingbeveled door withgasket provides tightseal to eliminate leaks.
• User interfaceProvides centralizedand convenientaccess to criticalcabinet information.
• Fire sprinkler headUL approved/beeswax coated with155° F actuation temperature.
• Floor materialDurable, corrosion-proof, non-skidmaterial prevents damage to enclosurefloor. Also helps secure cylinder scale foreasy cylinder removal and replacement.
• Face shieldExtremely toughpolycarbonate sheetimproves viewingangle whileprotecting theoperator’s face andeyes from injury.
• Steel constructionEnclosures are manufactured from 11 gauge steel, all-welded construction.Paint is polyurethane, light gray withdark gray trim. • Cylinder scale ramp (not shown)
Allows easy installation and removal of cylinder.
• Door louversProvides air intakeat door bottom.
• Cylinder boostershelf (not shown)Adjustable shelf forcylinders up to 34"tall. Raises cylinder toproperly align withpigtail cylinderconnection. Mountsdirectly to back wallof enclosure.
• Cyl-SafeTM
cylinder mountingbracketHeavy steel bracketholds cylinders 6" to11" in diameter.Equipped withpolypropylene strapand chrome steelsafety chain.
• Adjustable damper/filterFilter diffuses air throughoutenclosure. User-selectable damper forcontrol of airflow.
SEMI-GAS® CONSULTM Programmable Logic ControllerPowered by a Siemens S7-300 PLC
Matheson Tri-Gas’ newest line of fullyautomated SEMI-GAS® Gas Cabinet Systemsare designed to meet the industry needs fortotally integrated systems. The CONSULTM
System is a proven PLC design that is thebenchmark throughout the industry today.Integration of the Programmable Controllerensures customers the highest reliability,safety, ultra high purity and ease of use withcost effectiveness. It also provides theflexibility in control and communicationwith today’s building safety systems.
For years, thousands of users have usedSiemens products in industrial and electroniccontrol systems. These robust PLC controllerswere reserved for the more complexindustrial tasks where uptime, repeatabilityand reliability were key factors. Now, withnew compact packaging, Matheson Tri-Gasengineering successfully achieves all of thecustomer quality requirements identified fortotal industry acceptance. From the simplestsingle source system to highly integratedprocess and purge panel assemblies, theCONSULTM System is ready to meet the moststringent demands.
The new CONSULTM System brings forwardall the safety and operating features youhave come to expect from Matheson Tri-Gas.
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Features and Benefits:
Integrated menu driven color touch screen display monitors critical parameters and performs all operations
• Feature-based password access• Proven automated purge procedures for all aspects of maintenance and operations• Multi-source switchover for uninterrupted gas supply• Flexible communications capabilities for ease of integration into building control systems• Modular architecture to tailor each controller to the equipment requirements• Full time graphical status of the panel and operation parameters• Fully automated procedures for cylinder change, component replacement and tool relocation and additions• Comprehensive alarm log for post incident troubleshooting• Sensor feed back tests each procedure step to ensure all critical parameters are met each time • Full operator prompts to ensure each operation is performed correctly regardless of personnel experience level• Strong field service support with worldwide capability• Low pneumatic pressure detection prevents process gas interruption • PLC and touch screen are approved and certified for UL, CSA, NEC Class 1 Div 2 and CE Marked
The following describes the hardware available on the CONSULTM controller. Thanks to the modular design of thesecontrollers additional input or output features can be added for each customer specific application.
Value Added Benefits• Provides connectivity with Ethernet/IP SCADA systems• Integrates purification into a CENTURIONTM purge gas panel• Provides Class I Div 2 controller compliance• Fully integrated sensor for real time monitoring and control of flammable or
pyrophoric gas flames• Covers CGA nut until proper prepurge is complete
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Component Programmable Logic Controller
Digital inputs
Digital outputsAnalog inputsGraphical user interface
Size or Quantity128 K Memory
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481212" diagonal TFT color LCD touch screen
7.4" diagonal passive matrix touch screen
Purpose• Performs all automated operations.
Monitors, annunciates and responds to allalarm conditions. Provides MPI serialcommunication
• Monitors internal and external alarmsensors
• Controls status lights, horns, and valves• Monitors scales and pressure transducers• Active graphical operator interface, built
into the door, monitors and controls allequipment operations
• Reduced size for single cylinder enclosures
These are available engineered options to any CONSULTM controller to enhance its control capabilities.
Option Ethernet moduleNANOCHEM® purificationZ-PURGEFire detector
Auto-Guard
BR-90/11-06R Printed in USA
To place an order, or to obtain more information, pleasecontact our Customer Service Center for your area:
ME, NH, VT, RI, MA, CT, NJ,NY, PA, DE, MD, VA, WV,NC, SC, AL, GA, FL, TN, KY,OH, IN, MI, IL, IA, WI, MN,ND, SD, NE, KS, MO
OR, WA, CA, ID, NV,MT, WY, UT, CO, AZ,NM, AK, HI
TX, OK, AR,LA, MS
CUSTOMER SERVICE CENTERS
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GAS SYSTEMS AND EQUIPMENT
WORLDWIDE EQUIPMENTTECHNOLOGY CENTER166 Keystone DriveMontgomeryville, PA 18936
Phone: 800-828-4313Fax: 215-619-0458Email: [email protected]
MATERIAL SAFETY DATASHEETS (MSDS)
Data Sheets for gases can be downloadedfrom the Matheson Tri-Gas, Inc. Web site at
www.mathesontrigas.com/msds
GENERAL INQUIRIES
24 HOUR EMERGENCY ASSISTANCECHEMTREC
Phone: 800-424-9300
MATHESON TRI-GAS, INC.DIVISIONAL OFFICES
SPECIALTY GAS AND EQUIPMENT
GROUP166 Keystone DriveMontgomeryville, PA 18936Phone: 215-641-2700
INDUSTRIAL GAS GROUP1525 Walnut Hill Lane, Suite 100 Irving, TX 75038 Phone: 972-870-7000
ELECTRONIC GAS GROUP5600 Mowry School Road, Suite 310 Newark, CA 94560Phone: 510-771-0090
ELECTRONIC GASES
16775 Central AvenueNewark, CA 94560
Phone: 510-793-2559Fax: 510-790-6241Email: [email protected]
2 & 32550 Kyle CrossingKyle, TX 78640
Phone: 512-262-2129Fax: 512-262-4011Email: [email protected]
EUROPELinde Nippon Sanso GmbH & Co. KGHoeffgeshofweg 1047807 KrefeldGermany
Phone :+49 2151 82097 0 Fax: +49 2151 82097 98Email: [email protected]
ASIAKOREAMatheson Gas Products Korea91 Samgu-riEnmbong-myonAsan, Choongnam
Phone: +82-41-539-7400 Fax: +82-41-539-7499Email: [email protected]
OTHER INTERNATIONAL LOCATIONS6775 Central AvenueNewark, CA 94560
Phone: 510-793-2559Fax: 510-790-6241Email: [email protected]
SPECIALTY GASES
16775 Central AvenueNewark, CA 94560
Phone: 510-793-2559Fax: 510-790-6241Email: [email protected]
22200 Houston AvenueHouston, TX 77007
Phone: 713-869-7351Fax: 713-869-0994Email: [email protected]
3166 Keystone DriveMontgomeryville, PA 18936
Phone: 800-416-2505Fax: 215-619-0458Email: [email protected]
INTERNATIONAL6775 Central AvenueNewark, CA 94560
Phone: 510-793-2559Fax: 510-790-6241Email: [email protected]
