pegasus™ s200FA, S300FAsemi-automatic analytical probers:

Key features

LabMaster™ FA software Simple to integrate with LabVIEW™ software and other standard industry platforms

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DESIGNED FOR A WIDE RANGE OF APPLICATIONS

% Failure analysis

% Design verification

% Parametric testing

% Ideal for MEMS, HV/HC, RF and mmWave testing

Chuck load/unload access Extended stage for easy wafer loading

GuardMaster™ For EMC shielding and safe and accurate temperature probing from –65°C to +400°C

Joystick/keypad For simple and intuitive system operation Wide range of chucks

Thermal and non-thermal chucks

Anti vibration table For high performance vibration isolation

Microscope with optional camera Stable microscope bridge mount, choice of high power and stereo optics available

Large area platen Suitable for mounting up to 8 manipulators

Pegasus™ controller Configurable for multi-axis applications

Microscope mount Programmable and manual options available

HIGH PRECISION

All Wentworth probers feature a robust chassis for mounting the prober stage.

The XY stage uses high precision motors with micro-stepping for greater accuracy. Ultra-high precision ball-screws reduce back lash and improve accuracy and repeatability.

The Z stage uses ultra-high precision multi-point lift ball-screws for superior linear rigidity. Additional multi-point linear bearings ensure increased torsional stiffness. All stages are controlled by the Pegasus™ Controller consisting of the drive electronics, joystick, keypad and optional Windows user interface. Interfacing is made easy with TTL, GPIB (IEEE488.2), RS232 and ethernet ports located on the back panel.

STAGE SPECIFICATIONSRepeatability 5.0 μm

Accuracy ± 5.0 μm

The Microscope Bridge is designed for strength. With standard PMM (Programmable Microscope Mount) as well as multiple Z axes PMM, test equipment such as thermal cameras, spectrometers, integrating spheres, laser cutters and light sources can be independently controlled via the prober joystick functions.

This feature allows the optics to be repositioned to enable direct device access from the top side.

ROBUST MECHANICSUsing highest quality materials in its construction, the FA series probers provide an extremely stable platform for sub-micron probing and precision applications such as laser cutting.

Lightweight chucks and drive mechanics allow extremely fast probing with no loss of accuracy.

EASE OF USEThe Pegasus™ S200FA and S300FA probers are designed with the operator in mind. Ergonomic controls make this one of the easiest prober platforms on the market today. Quick start up and simple menus allow users to be probing in minutes, whilst intuitive controls ensure that minimal operator training is required.

The FA series probers can be used in 'local' or 'remote' mode. This flexibility allows the prober to be easily integrated with industry standard testers and data acquisition software, such as LabVIEW™.

Using either the stand alone joystick (with menu driven controls) or our windows based graphical interface LabMaster™ FA, this platform is an ideal choice for both universities and commercial users.

CONFIGURABLE DESIGNThe Pegasus™ S200FA and S300FA can be configured for a variety of applications at affordable cost.

With over 50 years of experience serving the electronics industry, we can support even the most challenging application to be managed within standard lead times and budgets.

THE design

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Pegasus™ S300FA semi-automatic probe station

Pegasus™ S200FA with GuardMaster™ for low signal and low temperature probing

FAILURE ANALYSISFailure analysis applications require mechanical versatility and adaptability to make multiple measurements. The Pegasus™ S200FA and S300FA have been designed with these aspects in mind. Our full range of failure analysis tools and options such as manipulator probe heads/needles, laser-ready optics and control/monitoring analysis software offer a wide choice of upgrade paths to ensure your system can grow with your testing requirements.

THERMAL CHARACTERIZATIONOur high performance thermal chuck solutions for device testing cover temperatures from -60°C to +400°C. To reduce thermal effects and keep the probing environment controlled, our propriety GuardMaster™ heating and cooling management system is an integral part of GuardMaster™, utilizing CDA or nitrogen.

OPTIONSTemperature Control

-30°C to +400°C Active air cooled chuck system

-60°C to +300°CAir cooled high end system combining very low and high temperatures within one chuck system

-60°C to +300°C Liquid cooled for high power applications

Analytical Flexibility

Pegasus™ S200FA with lower GuardMaster™ chamber

Analytical flexibility, as well as mechanical stability and accuracy, is at the core of our products. Different measurements require different test methods and cabling solutions. Therefore, our bespoke and standard tester solution packages are configured in an easy-to-use 'plug and play' set-up. Our LabMaster™ FA software has the ability to communicate with both the tester and the prober's associated accessories, offering real-time data analysis and data acquisition.

DYNAMIC TESTINGThe Pegasus™ FA series probers include advanced utilities which allow the experienced user to design sophisticated test routines. These test routines may then be re-used for automated testing, saving time and increasing productivity. A 'quiet mode' option removes power to all motors to reduce the floor noise.

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user interfaceLABMASTER™ CONTROL & MONITORING SOFTWARE

OFFLINE TOOLSThe Wentworth Labs Wafer Map Editor is an offline editor/viewer for LabMaster™ compatible wafer map files and wafer map file templates. It allows for wafer map templates to be created and modified prior to being used for wafer testing. Wafer results files can also be viewed in this application and used to generate further template files.

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Video Window Displays real-time video from the camera attached to the microscope by using an overlay video board. Any image shown in the LabMaster™ FA video window can be saved to disk in a variety of image formats, or copied to the Windows clipboard for pasting into other Windows applications.

Text Editor Window Used to create, edit and run REXX and Python programs. Multiple edit windows can be open at any one time, allowing you to cut and paste text from one window to another. The edit window toolbar contains buttons for frequently used functions such as Open, Save, Run, Stop and Syntax Check.

Wafer Map Window Powerful failure analysis tool used for device navigation and positioning, as well as for displaying and storing die-binning information. Using the Wafer Map window, enables the user to quickly position the chuck to any die on the wafer. Wafer maps can be stored locally at the prober and saved as a simple text file (SINF - comma separated value), for easy transfer import/export.

Pegasus™ Motion Control Window Used to control the motion of the prober’s chuck, SAMs and the PMM. All can be controlled individually, and, in addition, the SAM and PMM can be moved together for in-die probing. The arrow buttons are used to index the prober the distance specified by the index step values entered using the probers setup dialogue box. Slow, medium and fast velocity function buttons allow easy navigation between different areas on the wafer.

Device Toolbar Contains the device buttons for controlling external devices such as the probe platform, programmable microscope mount (PMM), submicron automated manipulators (SAMs), thermal chucks, lasers and microscope auto zoom functions. The hardware setup dialogue box is used to add or remove devices from the toolbar. It can also be used to modify a device's hardware setup parameters.

LabMaster™ FA is a simple-to-use Windows based graphical interface which allows real-time, fully integrated monitoring and control. It integrates with LabVIEW™ and other industry standard platforms and controls the Pegasus™ prober via either an RS232 interface or a GPIB (IEEE488.2) interface using the National Instruments PCI-GPIB board.

DC PARAMETRICUtilizing Wentworth's replaceable Pegasus™ probes or DC cantilever probe cards, the Pegasus™ S200FA and S300FA probers are an ideal platform for parametric testing. Tunable stage speeds and product enhancing accessories allow for fast probing and increased through-put, whilst chuck solutions enable probing of full wafers, shards, single chips and packaged devices.

SPECIFICATIONSFrequency DC > 100 Mhz

Breakdown voltage 500 V

Leakage (depending on configuration)

Down to ± 10 fA -65°C > +200°CDown to ± 20 fA +200°C > +400°C

HIGH POWERA high power configuration addresses today’s power semi-conductor test challenges with low contact resistance measurements requiring accuracy at high voltages. Kelvin chucks and backside probing solutions allow contact resistance measurements in the milliohm range.

High current probes and probe cards (up to 100 A) handle and distribute excessive current loads. Dedicated HV and HC probes reduce probe and device destruction at high voltages/currents by preventing arcing at the tip.

SPECIFICATIONSVoltage 3 kV (triax), 10 kV (coax)

Current 200 Amps (pulsed)Leakage

options & accessoriesMICROSCOPE MOUNTS

Type Travel XY Travel Z Resolution Drive Recommended Microscope Application

Manual stereozoom (MMM)

50x50 mm 50 mm* 0.9 μm High precision lead screwsBinocular or trinocular stereozoom microscope

General probing, pad sizes down to 50 x 50 µm

Manual high powered (MMM) 50x50 mm

75 mm quicklift + 50 mm**

0.9 μm High precision lead screwsCompound high mag objective microscope

Small geometry pad or line probing down to 1-2 µm

Programmable (PMM) 50x50 mm

100 mm + 50 mm** 0.1 μm Stepper motors

Compound high mag objective microscope

Small geometry pad or line probing down to 1-2 µm

MICROSCOPESMicroscope Type Models Available ApplicationStereo zoom Wentworth, Leica Pad probing and internal features down to 5.0 μm.High magnification Mitutoyo FS-70 series Offers the most flexibility and options for features down to 0.5 μm.Without eyepieces A-Zoom Micro Use with CCD or video systems.

MANIPULATORSType TPI/Resolution/TravelPVX400 (vacuum or magnetic)

50 TPI / 1.2 µm/º / X = ± 5 mm, Y = ± 5 mm, Z = >5 mm

PVX500-100 (vacuum or magnetic)

100 TPI / 0.7 µm/º / X = ± 5 mm, Y = ± 5 mm, Z = >5 mm

PVX500-200 (vacuum or magnetic)

200 TPI / 0.4 µm/º / X = ± 5 mm, Y = ± 5 mm, Z = >5 mm

CAP (programmable) 0.1 µm/º / X = 30 mm, Y = 30 mm, Z = 30 mm

COMMUNICATION INTERFACESType Vendors

TTL (2) 15-way D plugs each providing (4) TTL signal outputs & (8) TTL inputs

RS232 Serial 9-pin D connector

GPIB (IEEE488.2) 8-bit parallel multi-master interface bus

Ethernet 48-bit MAC address

ACCESSORIESProbes: Triaxial, coaxial, low impedance, Kelvin, high power. Thermal chucks: Heating, cooling, fast ramp/cool times.

Probe tips: Tungsten, Tungsten-Carbide, BeCu, gold plated. Probe cards: Ceramic blade, epoxy cantilever, custom solutions.

GuardMaster™: Combined light-tight and EMC shielded enclosure for low level measurements and frost-free low temperature probing.

Automatic 2-point align: Provides system automation and fast device set-up routine.

Manual manipulators (PVX): Magnetic and vacuum options. Pattern recognition: Automatic die detection and probe to pad alignment.

Computer assisted probe (CAP): For sub-micron and in die probing. Packaged device holders: Held down by vacuum on the chuck’s surface.Pin hole chucks: Designed for thin wafers

Pegasus™ S200FA Pegasus™ S300FA

Chuck stage

X-Y stage

Precision ball-screws & stepper motors

Travel 210 x 314 mm 310 x 400 mm

Resolution 0.312 μm 0.312 μm

Repeatability ± 4.0 μm ± 4.0 μm

Accuracy ± 5.0 μm ± 5.0 μm

Planarity 8.0 μm 8.0 μm

Maximum speed 100 mm/sec 100 mm/sec

Z stage

Precision ball-screws & stepper motors

Travel 11 mm 11 mm

Resolution 0.156 μm 0.156 μm

Repeatability ± 1.0 μm ± 1.0 μm

Theta stage

Travel ± 8.0° ± 8.0°

Resolution 0.0001° 0.0001°

Programmable microscope mount

Stepper motors

Travel 50 x 50 x 100 mm 50 x 50 x 100 mm

Resolution 0.15 μm 0.15 μm

Repeatability ± 1.0 μm ± 1.0 μm

Accuracy ± 2.5 μm ± 2.5 μm

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Wentworth Laboratories Ltd 1 Gosforth Close, Sandy Bedfordshire SG19 1RB United KingdomTel: +44 1767 681221 Email: info@wentworthlabs.com v 10/20

Pegasus™ S200FA Pegasus™ S300FA

Probe platform

Drive type Stepper motors Stepper motors

Z travel 18 mm 18 mm

Material Nickel plated steel Nickel plated steel

Graphical user interface

Windows 7, 8.1 and 10

Communication interfaces

PC TTL, RS232, GPIB (IEEE488.2), ETHERNET

Utilities

Power 100-240 VAC 50/60 Hz select 600V A

Vacuum 0.5 cfm @20” Hg (min)

Compressed air 4 bar min

Dimensions (w x d x h)

Prober (excl. optics) 840 x 842 x 610 mm 880 x 875 x 610 mm

Controller 450 x 480 x 180 mm (17.5 x 19.5 x 7")

Shielding

Light > 120 db

EMI > 20 db 0.05 - 0.5 Ghz, 30 db 0.5 - 3Ghz

Weight

Prober 155 kg 190 kg

Controller 13 kg 13 kg

specificationsPEGASUS™ S200FA/S300FA SEMI-AUTOMATIC PROBE STATIONS

About Wentworth LaboratoriesWith over 50 years' experience in wafer probing technology, our solutions are the number one choice for many leading-edge wafer test applications across the globe.

With the support of a world-wide network of representatives, we enable our customers to fulfil even the most challenging wafer probing goals, maximizing their productivity and reducing costs.

We look forward to discussing your wafer probing requirements.

Wentworth Laboratories, Inc 1087 Federal Road, Unit 4 Brookfield, Connecticut 06804 United StatesTel: +1 203 775 0448 Email: info@wentworthlabs.com

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