SEMI A1/A1.1 Horizontal Communication- An Advanced Equipment Interface for Flow Shop type Manufacturing Line -

As of May 23, 2019

Visit http://www1.semi.org/jp/Standards/SmartManufacturing/FlowShopLine

Japan Chapter of Global Automation Technology Technical Committee /SEMI

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Position of This Document

• This document is prepared to introduce

SEMI A1 Horizontal Communication (HC)

An equipment communication Standardfor flow shop type manufacturing line

• For detail, see the latest version of the following SEMI Standards– SEMI A1 Horizontal Communication

• SEMI A1 Specification for Horizontal Communication Between Equipment for Factory Automation System

– SEMI A1.1 HC Message• SEMI A1.1 Specification for Media Interface Specifications for a Horizontal

Communication Between Equipment

• For further information:– SEMI Japan

– Standards & EHS

– Junko Collins jcollins@semi.org

SEMI Coverage - SEMI A1 GEM300 Application GEM300/300A / EDA

Controller

Topology

Plant Equipment

Equipment

Complexity

Low High

Equipment Layout Flow Shop Job Shop

Product Examples

Type of WIP Fluid Continuum Discrete

Intended Application Area of SEMI A1

• Areas which have the following characteristics– Flow Shop manufacturing line

– Discrete WIP

– Integration of Equipment with Production Control capability

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Oil Steel Automobile Consumer

Electronics

PCBBiomedical Battery

Equipment

S A S A

MES MCS

ERP

EESYMS

Equipment

S A S A

AMHS

S A S A S A

ERP

Production Management

Photovoltaic

Production Management

ERP

S A S A S A

Production Control

S: Sensor, A: Actuator

LCD Semiconductor

Backend Frontend

SEMI A1

Transfer of General Data and WIP with its Data (Material Data)

SEMI E84 for Job Shop vs. SEMI A1 for Flow Shop

• Job Shop line– Complicated WIP routing

• WIP transfer by independent AMHS for random access to any equipment

– SEMI E84• WIP Handoff only, no WIP Data

transfer

• No General Data (GD) communication between equipment

• Flow Shop line– Simple WIP flow

• WIP transfer between adjacent equipment including Branch and Merge

– SEMI A1• WIP and its Data at a time

• General Data (GD) communication between adjacent equipment

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Fab System (Host)

WIP

Equipment

Equipment

Equipment

Equipment Equipment

Equipment Equipment Equipment Equipment

AMHS

WIP

WIP

WIP

WIP

WIP WIP WIP

Fab System (Host)

All control is taken by the host; Settings, Execution, and Log Less Dependency to the Host; Settings and Log

SEMI E84 PIO

Transfer of WIP without its Data

GD GD GD

Data Data Data

Definition Overview of SEMI A1/1.1

• SEMI A1 defines communication channels for equipment– Material Data (MD) Handshake

• which performs handoff of Material and its Data simultaneously

– General Data (GD) Handshake• which performs generic communication

• ➔Potential use for “Vertical Communication”

– Simple “Memory Image Exchange” type of messaging of the GD Handshake may have better conformance with equipment which is controlled by PLC

• SEMI A1.1 defines the messaging for SEMI A1– Media interface for both MD and GD Handshakes

– “Memory Image Exchange” messaging scheme• for better conformance with low cost control components such as PLC

– Direct mapping on TCP/IP• for higher compatibility among various control components

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HC

Connectivity and Interoperability

• Interoperable functionality for production line (SEMI A1)– Messaging between the host and equipment General Data Handshake extension

– Messaging between adjacent equipment General Data Handshake

– Material and Data handoff Material Data Handshake

• Communication Protocol for SEMI A1 (SEMI A1.1)– Direct mapping on TCP/IP

• Connectivity between different Fieldbus based PLCs(Intra equipment communication is done by own Fieldbus)

• PLC conformance (SEMI A1/1.1)– Messaging to exchange Memory Mapped Data

TCP/IP TCP/IP

Applications

TCP/IP

Fieldbus

A SEMI A1.1

TCP/IP

Fieldbus

BSEMI A1.1SEMI A1.1SEMI A1.1

SEMI A1SEMI A1SEMI A1SEMI A1 Fieldbus

B

Fieldbus

A

Applications Applications Applications

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Fab System (Host)

VC VC VC VC

TCP/IP

SEMI A1.1System

SEMI A1

Applications

SEMI A1

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Motivation for SEMI A1

Industry Network free

PLC conformance

Management

Production Control

Set, Trace, and Log

by the Host

Object Oriented “Material and Material Data” Transfer

Autonomous Process Execution by Equipment

Enhance Inter-equipment Communication for Flow Shop Manufacturing Line

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Handoff Handoff

HC HC

Concept of SEMI A1

Host

Equipment

VC

Preset of Recipe,

Route, etc.

Completion Event

Log (for analysis)

Exception

Handling

Material Data + Material

Start

Event

Material Data + Material

Autonomous Execution by Equipment

➢ Refer Material Data and follow to the

preset recipes

➔Reduction of load and cost of the host

Inter-Equipment CollaborationInter-Equipment Collaboration

Line Management by the Host

➢ Equipment setting, watch, log

➢ Material Data creation, trace, log

➔Information aggregation to the host

Standardized communication specification

➢ Direct use of TCP/IP

➢ Memory Block transfer for PLC

conformance

➔Connectivity, quick launch

Simultaneous handoff of Material and

Material Data

➢ Instance ID, Product ID, Log

➢ Material require equipment to

process according to the Material

Data

➔Object Oriented

Inter Equipment Communication

➢ Autonomous coordination along

with the line

➔Reduction of Host load/cost

VC: Vertical Communication

HC: Horizontal Communication

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SEMI A1

• Three communications– Host and Equipment communication

– Equipment and Equipment communication via the adjacent Equipment

– Simultaneous handoff of Material and its Material Data

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Equipment Equipment Equipment Equipment

Material Data Material Data Material Data

General Data General Data General Data

Material Material Material

Object Oriented “Material and Material Data” Transfer throughout Equipment Chain

SEMI A1 SEMI A1 SEMI A1

SEMI A1

HostEquipment

Setting &

Log by the

Host

General

Data

Autonomous Process Execution and Line Management by Equipment Chain

Pizza Factory Analogy of SEMI A1 Usage

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Material Data:

➢My name is #132

➢I am going to be Pizza Type A

➢13:20.15 Started

Material Data:

➢My name is #132

➢I am going to be Pizza Type A

➢13:20.15 Started

➢13:20.45 12in. t=5mm @E1

Material Data:

➢My name is #132

➢I am going to be Pizza Type A

➢13:20.15 Started

➢13:20.45 12in. t=5mm @E1

➢13:21.30 Cheese and

tomatoes are put @E2

Material Data:

➢My name is #132

➢I am going to be Pizza Type A

➢13:20.15 Started

➢13:20.45 12in. t=5mm @E1

➢13:21.30 Cheese and

tomatoes are put @E2

➢13:24.55 3 minutes @E3

Work Order:

➢If Type A comes, I make

it t=5mm

➢If Type B comes, I make

it t=4mm

E1 E2 E3

Work Order:

➢If Type A comes, I bake

it for 3 minutes

➢If Type B comes, I bake

it for 2 minutes

Host

Work Order:

➢If Type A comes, I put

cheese and tomatoes

➢If Type B comes, I put

four different cheeses

Manufacturing Management:

➢I am the host.

➢I preset all work orders to my workers.

➢I start material and take all working log.

General Data: Autonomous Process Execution and Line Management by Equipment Chain

Material Data: Object Oriented “Material and Material Data” Transfer throughout Equipment Chain

General Data:

Hey, getting thick!

➔Ok, I adjust!

General Data:

I’m getting sick

➔Ok, I halt.

GD Handshake

MD Handshake

SEMI A1

GD Handshake

MD Handshake

SEMI A1

GD Handshake

MD Handshake

SEMI A1

GD Handshake

MD Handshake

SEMI A1

General Data:

Work Order Setting and Log

by the Host

GD Handshake GD Handshake GD Handshake

SEMI A1 SEMI A1 SEMI A1

General Data Communication

Equipment Equipment Equipment Equipment

General Data General Data General Data

SEMI A1 SEMI A1 SEMI A1

Host

Autonomous Process Execution and Line Management by Equipment Chain

Broadcast

Response

Specify equipment

Adjacent Equipment

Interleave

Full Duplex

Direct Inter-Equipment Communication

Full Duplex, Broadcasting, Thread Management, Interleave Management

Time

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Material and Material Data

Equipment Equipment Equipment Equipment

Material Data Material Data Material Data

Material Material Material

Object Oriented “Material and Material Data” Transfer throughout Equipment Chain

SEMI A1 SEMI A1 SEMI A1

Host

Simultaneous Handoff of Material and Material Data

Object Oriented

Material shows its characteristics by Material Data

Equipment refers Material Data and executes predefined operation

Material Data

Material

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Typical Example of Material Data (MD)

• Material Data is an identification tag of the WIP

• Consists of the following three sections– Instance ID Identifier of the individual material

– Class ID Identifier of the product class, the material belongs to

– Log Result record at each equipment• Applied parameters or measured results (value or classification)

• To be used as process log

• May also be used for notifications for process/route changes to the equipment after

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Field Mnemonic Definition Usage

Instance ID Material ID Identifier of this individual material To be used to identify this individual material

Class ID Product ID Identifier of Product this material to be To be used to select recipe or route

Version ID Identifier of Version of the product May be used for modification of recipe or route

Log Result E0 Result record at equipment 0 Control of process or branch in the equipment after

Result E1 Result record at equipment 1

Result E2 Result record at equipment 2

……. …….

Result En Result record at equipment n

Communication Channels

• Line Information– Full duplex data channel

– For “General Data”

– By “Data Handshake”

• Track Information 1 .. n– n tracks of half duplex

transportation channels

– For “Material” and “Material Data”

– By “Material Handshake”

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Track Types

• Three Track Types– Uni-Direction

– Alternate-Direction

– Bi-Direction

• Multiple Tracks per Line

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Multiple set

Single set

“Alternate-Direction”

Equipment A Equipment B

A(S/R) A(S/R)

: :

“Bi-Direction”

Equipment A Equipment B

X(S+R) X(S+R)

: :

S: “Send Port” R: “Receive Port” A: “Alternate Port” X: “Exchange Port”

“Uni-Direction”

Equipment A Equipment B

S R

: :

: :

A(S/R) A(S/R)

A(S/R) A(S/R)

X(S+R) X(S+R)

X(S+R) X(S+R)

R S

R S

S R

S R

Line Topology

• Supports line topology that includes:

– Branch

– Merge

– Loop

– Turn back

Equipment

原図：SEMI A1 HC

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Handoff Function

• Compatible with handoff mechanisms which require multiple handoff steps– Handoff Step function

• Operator assistance and recovery– Pause – Recovery functions

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Thank you!

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