SECTION CONTENTS 06 - Premier Pump S 6 Valves Series.pdf · SECTION CONTENTS 06 VALVE SERIES...

SECTION CONTENTS

06VALVE SERIESGeneral Information

Ordering Information

ANGLE VALVE

Z-INLINE VALVE

Y-INLINE VALVE

BAKEABLE ALL-METAL VALVEBakeable All-Metal Valve

BALL VALVEBall Valve

FORMED BELLOWS SEAL STAINLESS VALVEAngle Valve

Y-inline Valve

Two-Stage Valve

Manually Operated with Bellows

Manually Operated without Bellows

Manually Operated Copper Seal Bonnet with Bellows

Pneumatically Actuated

Pneumatically Actuated with Bellows Attached Reed Sensor








Pneumatically Actuated with Bellows


6-Ⅰ

6-Ⅲ

6-54

6-55

6-56

6-57

6-58

6-1

6-5

6-8

6-11

6-22

6-26

6-29

6-32

6-35

6-39

6-42

6-45

6-48

6-51

VACUUM VALVECHAPTER06

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

General Information

6 - Ⅰ

Features

Specifications

HTC is pleased to offer vacuum valves designed and manufactured in Tainan, Taiwan, R.O.C. These valves are the result of a

long and careful development program designed to insure product quality, reliability and value. Every effort has been made to

provide a valve family suited to the requirements of various users.

They will function reliably in applications ranging from semiconductor production system with chemical and particulate

contamination.

Long life operation.

Stainless steel welded bellows seal.

Manual and electropneumatic actuation or fail safe operators (closes in the event of air pressure loss).

Bakeable to 200ºC intermittently, Viton seal bonnet.

Compact size.

Simple and fast maintenance.

Simple control via solenoid valve with manual override.

Body : 304 S.S. (Other material available upon request)

Poppet : 304 S.S. (Other material available upon request)

Bellows : Welded AM-350 (option)

Solenoid : Option

Position indicator : Option

Seal : Viton O'ring

Leak rate : 2x10-9 std.cc./second

Pressure range : 1x10-9 torr to 760 torr Viton seal bonnet

Maximum△pressure before opening : 1.2 Bar

Operating air pressur : 4~6.5 kg/cm2

Cycles until service : 16 to 50~500,000

(full orifice open) : 63 to 150~250,000

: 200 to larger~application dependent

Bake-out limitation : 150ºC Viton seal bonnet

Larger or special size available upon request



6 - Ⅱ

�Applications

KF, ISO and ANSI port models are designed for high vacuum applications where vacuum pressures approximate 10-9 torr and

bake-out temperature do not exceed 150ºC. The standard international KF/ISO configurations and ANSI configurations are used

in areas requiring an easily mountable and demountable flange type seal.

CF port models are designed for ultra-high vacuum applications where the vacuum pressure approximates 10-10 torr and

bake-out temperatures do not exceed 200ºC. These valves are used in applications during an OFHC copper gasket rather the

conventional Viton O'ring because of higher bake-out temperatures, lower vacuum pressures, (minimal outgassing) and reduced

permeability. They are also commonly used in applications requiring a more permanent seal.

�Manually�Operated�Angle�Valve:

�Pneumatically�Actuated�Angle-In-Line�Valve:

HAnd�WHEEL

BOnnET�PLATE

BOnnET�SEAL

SIdE�PORT

POPPET�SEAL

POPPET

BOTTOM�PORT

SPRIng�guIdE

AIR�CyLIndER

SPRIng

PISTOn

SHAFT

WELdEd�BELLOWS

VALVE�BOdy

VALVE�SEAT

KF�FLAngE




6 - Ⅲ

Ordering Information

(Table�1�)

(Table�2�)

0�=�manual�1�=�pneumatic�(spring�to�close)2�=�double�pneumatic4�=�pneumatic�(spring�to�Open)

0�=�Tube�End1�=�KF2�=�CF3�=�CR4�=�ISO5�=�AnSI6�=�VF7�=�Vg

0�=�no�Solenoid1�=�24VdC2�=�110VAC3�=�220VAC4�=�24VAC�(60HZ)5�=�24VAC�(50HZ)

0�=�no�bellows1�=�Stainless�corrugated�bellows2�=�304ss�welded�bellows��3�=�304Lss�welded�bellows4�=�316ss�welded�bellows5�=�316Lss�welded�bellows6�=�AM350ss�welded�bellows

1�=�Stainless�steel2�=�Aluminum��

0�=�no�reed�sensor1�=�1�reed�sensor2�=�2�reed�sensor��

�VALVE�3000�SERIES

�FLAngE�TyPE

�dIMEnSIOn

�ACTuATOR

SOLEnOId�VOLTAgE

�BELLOWS

�BOdy�MATERIAL

�POSITIOn�IndICATOR



6 - Ⅳ

Table 1. Valve 3000 SeriesVALVE U.S.A. Series code

Angle Valve3001

3019

Z-lnline Valve3021

3039

Y-lnline Valve3041

3059

Tee Valve3061

3069

Straight-Through

3001

3089

VITON POPPET BONNET SEAL 3001KALREZ POPPET BONNET SEAL 3003KALREZ POPPET METAL BONNET SEAL 3004BONNET ALL-METAL 3005VITON POPPET METAL BONNET SEAL 3006VITON POPPET BONNET SEAL 3021KALREZ POPPET BONNET SEAL 3023KALREZ POPPET METAL BONNET SEAL 3024BONNET ALL-METAL 3025VITON POPPET BONNET SEAL 3026VITON POPPET BONNET SEAL 3041KALREZ POPPET BONNET SEAL 3043KALREZ POPPET METAL BONNET SEAL 3044BAKEABLE ALL-METAL 3045VITON POPPET METAL BONNET SEAL 3046VITON POPPET BONNET SEAL 3061KALREZ POPPET BONNET SEAL 3063KALREZ POPPET METAL BONNET SEAL 3064BAKEABLE ALL-METAL 3065VITON POPPET METAL BONNET SEAL 3066VITON POPPET BONNET SEAL 3071KALREZ POPPET BONNET SEAL 3073KALREZ POPPET METAL BONNET SEAL 3074BAKEABLE ALL-METAL 3075VITON POPPET METAL BONNET SEAL 3076




6 - Ⅴ

Table 1. ContinuousVALVE Europe Series code

VITON POPPET BONNET SEAL 3101KALREZ POPPET BONNET SEAL 3103KALREZ POPPET METAL BONNET SEAL 3104BONNET ALL-METAL 3105VITON POPPET METAL BONNET SEAL 3106VITON POPPET BONNET SEAL 3121KALREZ POPPET BONNET SEAL 3123KALREZ POPPET METAL BONNET SEAL 3124BONNET ALL-METAL 3125VITON POPPET BONNET SEAL 3126VITON POPPET BONNET SEAL 3141KALREZ POPPET BONNET SEAL 3143KALREZ POPPET METAL BONNET SEAL 3144BAKEABLE ALL-METAL 3145VITON POPPET METAL BONNET SEAL 3146VITON POPPET BONNET SEAL 3161KALREZ POPPET BONNET SEAL 3163KALREZ POPPET METAL BONNET SEAL 3164BAKEABLE ALL-METAL 3165VITON POPPET METAL BONNET SEAL 3166VITON POPPET BONNET SEAL 3171KALREZ POPPET BONNET SEAL 3173KALREZ POPPET METAL BONNET SEAL 3174BAKEABLE ALL-METAL 3175VITON POPPET METAL BONNET SEAL 3176

Angle Valve3101

3119

Z-lnline Valve3121

3139

Y-lnline Valve3141

3159

Tee Valve3161

3169

Straight-Through

3171

3189



6 - Ⅵ

01 1/16" 1A 2 A1 1/8" AA 6(1/8") 02 1/8" 1B 3 A2 1/4" AB 8(1/4") 03 3/16" 1C 4 A3 3/8" AC 10(3/8") 04 1/14" 1D 6 A4 1/2" AD 15(1/2") 05 5/16" 1E 8 A5 3/4" AE 20(3/4") 06 3/8" 1F 10 A6 1" AF 25(1")00 07 1/2" 1G 12 A7 1-1/4" AG 32(1-1/4") 08 5/8" 1H 16 A8 1-1/2" AH 40(1-1/2") 09 3/4"(16) 1J 20 A9 2" AJ 50(2") 10 7/8" 1K 22 B1 2-1/2" AK 65(2-1/2") 11 1"(25) 1L 25 B2 3" AL 80(3") 12 1-1/4" 1M B3 3-1/2" AM 90(3-1/2") 13 1-1/2"(40) 1N B4 4" AN 100(4") 14 2"(50) 1P B5 5" AP 125(5") 15 2-1/2"(63) 1Q B6 6" AQ 150(6") 16 3"(80) 1R B7 8" AR 100(4") 17 3-1/2" 1S B8 10" AS 125(5") 18 4"(100) 1T B9 12" AT 150(6") 19 5" 1U C1 AU 200(8") 20 6"(160) 1V C2 AV 250(10") 21 8"(200) 1W C3 AW 300(12") 22 10"(250) 1X C4 AX 23 12" 1Y C5 AY 24 14" 1Z C6 AZ 25 16" 26 18" 27 20" 28 22" 29 24"

Code dimension Code dimension Code dimension Code dimension

AA�~��ZZ�PIPE(JIS)

A1�~�Z9�PIPE(AnSI)

1A�~�9Z�TuBE(Metric)

01�~�99TuBE(Fractional)

Table 2. DimensionCodes and Dimensions Description




6 - Ⅶ

Specifcations for No Port Flange Angle Valve

note

Conductance tables based on air at 25ºC.

Measure using helium search gas with test time less than one minute to avoid the leak signal caused by permeation through

elastomer seal.

Model No.

CharacteristicConductanceSeal Leak RateBody Leak Rate

Cylinder AirPressure

Required ForFully Opening

UnitsLiters/second

Std cc/sStd cc/s

AVB-TE16-P

<10-9

<10-9

4AVB-TE50-P

<10-9

<10-9

29AVB-TE40-P

<10-9

<10-9

26AVB-TE25-P

Bar 4 ~ 6.5 4 ~ 6.54 ~ 6.54 ~ 6.5

<10-9

<10-9

7



6 - 1


ANGLE VALVE

Tube End Figure 1

KF Flange Figure 2

d

CB

A

O.d

.

O.d.

A

d

CB

A

O.d

.

O.d.

A




6 - 2


ANGLE VALVE

CF Flange Figure 3

ISO Flange Figure 4

d

O.d.

O.d

.

A

A

CB

d

O.d.

O.d

.

A

A

CB



6 - 3


ANGLE VALVE

Model�no. O.d. Parts�no.

Port Connections : Tube End

AVB-TE16-M

AVB-TE40-M

AVB-TE63-MAVB-TE80-M

AVB-TE50-M

AVB-TE25-M

2.503.00

1.502.00

0.751.00

A

3.003.25

2.253.25

2.001.88

B

8.378.69

6.288

5.254.97

C

10.5710.04

9.767.505.706.00

d

3.924.49

2.983.48

2.242.24

11

11

11

300115000016300116000016

300113000016300114000016

300109000016300111000016

Figure

Available Area : U.S.A.


Port Connections : KF FlangeA B C d

300113010016300114010016

300109010016300111010016

22

22

2.403.40

2.152.03

6.208.15

5.415.13

9.917.485.896.15

2.983.48

2.242.24

1.502.00

0.751.00

AVB-KF16-M

AVB-KF40-MAVB-KF50-M

AVB-KF25-M

Figure


Port Connections : CF Rotatable FlangeA B C d

3

33

AVB-CR16-M

AVB-CR63-MAVB-CR35-M

Figure

0.751.502.50

2.502.463.37

5.76.508.75

7.786.50

10.42

2.242.983.92

300109030016300113030016300115030016


Port Connections : ISO FlangeA B C d

44

Figure

AVB-ISO63-MAVB-ISO80-M

2.503.00

3.263.51

8.638.95 10.83

10.30 3.924.49

300115040016300116040016

Specifications

Polished 304 stainless steel body.

3/4~3 inch port ODs.

Bakeable to 150ºC.

Viton Seal Bonnet : 10-9 Torr vacuum rating KF, ISO and CF flange.

Note : All dimensions shown on this page are in inch.




6 - 4

Specifications


19.05~76.2 mm port ODs.

Bakeable to 150ºC.


ANGLE VALVE

Manually Operated with BellowsAvailable Area :Europe (Special Sizes Available Upon Request)


Port Connections : KF FlangeA B C d Figure

AVB-KF16-M-E

AVB-KF40-M-EAVB-KF50-M-E

AVB-KF25-M-E38.150.8

19.0525.4

6570

4050

167.5190.5

121.9128.6

235.5200148.1141.5

75.888.4

56.856.8

22

22

310113010016310114010016

310109010016310111010016


Port Connections : CF Rotatable FlangeA B C d Figure

AVB-CR16-M-EAVB-CR35-M-EAVB-CR63-M-E

19.0538.163.5

3863

105

119.9165.5241.5

198139.5

283.9

56.875.8

151.6

333

310109030016310113030016310115030016


Port Connections : ISO FlangeA B C d Figure

AVB-ISO63-M-EAVB-ISO80-M-E

63.576.2

8898

224.5236.3 283.9

266.9 151.6114

44

310115040016310116040016



6 - 5


ANGLE VALVE

Tube End Figure 5

KF Flange Figure 6

d

O.d

.

O.d.

CB

A

A

d

O.d

.

O.d.

CB

A

A




6 - 6

Manually Operated without BellowsAvailable Area : U.S.A.


Port Connections : Tube EndA B C d

2.983.48

2.242.24

1.502.00

0.751.00

Figure

Specifications



Bakeable to 150ºC.

Viton Seal Bonnet : 10-9 Torr vacuum rating KF flange.

ANGLE VALVE



AV-KF16-M

AV-KF40-MAV-KF25-M

AV-KF50-M

0.75

1.502.00

1.002.15

2.403.40

2.036.59

7.509.80

6.35 7.22

8.7811.39

6.972.24

2.983.48

2.246

66

6300109010010

300114010010

300111010010300113010010

AV-TE16-M

AV-TE40-MAV-TE50-M

AV-TE25-M2.253.25

2.001.88

7.359.65

6.456.20

11.248.636.827.07

55

55

300113000010300114000010

300109000010300111000010



6 - 7



Specifications


19.05~50.8 mm port ODs.

Bakeable to 150ºC.


ANGLE VALVE

Available Area :Europe(Special Sizes Available Upon Request)


AV-KF16-M-E

AV-KF40-M-EAV-KF50-M-E

AV-KF25-M-E38.150.8

19.0525.4

6570

4050

194.5232.7

152.9159.6

273.1227175.4168.7

75.888.4

56.856.8

66

66

310113010010310114010010

310109010010310111010010




6 - 8


ANGLE VALVE

Tube End Figure 7

KF Flange Figure 8

d

A

A

CB

O.d.

O.d

.

d

A

A

CB

O.d.

O.d

.



6 - 9

ANGLE VALVE

CF Flange Figure 9


d

AA

CB

O.d.O

.d.




6 - 10

ANGLE VALVE

Manually Operated Copper Seal Bonnet with BellowsAvailable Area : U.S.A.

Specifications



Bakeable to 150ºC. (200ºC intermittently for CF flange port).

Metal Seal Bonnet : 10-9 Torr vacuum rating KF, and approximate 10-10 Torr vacuum rating CF flange.



Port Connections : Tube EndA B C d Figure

AVB-CU-TE16-M

AVB-CU-TE40-MAVB-CU-TE50-M

AVB-CU-TE25-M

AVB-CU-TE63-M

1.502.00

0.751.00

2.50

2.253.25

2.001.88

3.00

6.487.99

5.204.96

8.35 9.76 7.70 5.74 5.98

11.01

3.374.47

2.752.75

4.47

77

77

7

300613000016300614000016

300609000016300611000016

300615000016



AVB-CU-KF16-M

AVB-CU-KF40-MAVB-CU-KF50-M

AVB-CU-KF25-M1.502.00

0.751.00

2.403.40

2.152.03

6.628.14

5.245.11

9.917.855.896.01

3.374.47

2.752.75

88

88

300613010016300614010016

300609010016300611010016


Port Connections : CF Rotatable FlangeA B C d Figure

300609030016300613030016300615030016

AVB-CU-CR16-MAVB-CU-CR35-MAVB-CU-CR63-M

0.751.502.50

2.502.453.38

5.586.688.72

7.906.36

11.38

2.753.374.47

999



6 -11


ANGLE VALVE

Tube End Figure 10

Tube End Figure 11

C

O.d.

O.d

.

A

B

A

C

O.d.

O.d

.

A

B

A




6 - 12


ANGLE VALVE

KF Flange Figure 12

CF Flange Figure 13

C

A

A

B

O.d.

O.d

.

C

A

A

B

O.d.

O.d

.



6 -13

ANGLE VALVE

CF Flange Figure 14

ISO Flange Figure 15


C

AA

B

O.d.O

.d.

C

A

A

B

O.d.

O.d

.




6 - 14

ANGLE VALVE

Pneumatically ActuatedAvailable Area : U.S.A.With bellows, air to open, spring to close.

Model�no. Parts�no.

Port Connections : Tube EndO.d. A B C Figure

AVB-TE16-PAVB-TE25-PAVB-TE40-PAVB-TE50-P

2.242.242.983.48

5.77 6.03

10.18 7.69

2.001.882.253.25

0.751.001.502.00

10101010

300109100016300111100016300113100016300114100016


Port Connections : KF FlangeO.d. A B C Figure

2.242.242.983.48

0.751.001.502.00

5.92 6.17

10.33 7.60

2.152.032.403.40

AVB-KF16-PAVB-KF25-PAVB-KF40-PAVB-KF50-P

12121212

300109110016300111110016300113110016300114110016


Port Connections : CF Rotatable FlangeO.d. A B C Figure

AVB-CR16-PAVB-CR35-P

2.502.46 7.89

6.52 2.242.98

0.751.50

1313

300109130016300113130016

Specifications



4~6.5 kg/cm2 operating air pressure.

Bakeable to 150ºC.

Viton Seal Bonnet : 10-9 Torr vacuum rating KF and CF flange.




6 -15

ANGLE VALVE

Pneumatically ActuatedAvailable Area : U.S.A.With bellows, air to open, air to close.

Specifications




Bakeable to 150ºC.

Viton Seal Bonnet : 10-9 Torr vacuum rating KF and ISO flange.




300109200016300111200016

300115200016300116200016

300120200016

300113200016300114200016

300118200016

AVB-TE16-P2 AVB-TE25-P2 AVB-TE40-P2 AVB-TE50-P2

AVB-TE100-P2

AVB-TE63-P2 AVB-TE80-P2

AVB-TE160-P2

0.751.001.502.002.503.004.006.00

2.001.882.253.253.003.254.216.00

6.17 6.41

9.44 7.18

10.6910.44

13.6017.56

2.242.242.983.483.924.495.979.45

1111111111111111


Port Connections : ISO Flange O.d. A B C Figure


Port Connections : CF Rotatable Flange

O.d. A B C Figure

3.374.7

10.8118.06 5.97

3.92 AVB-CR63-P2 AVB-CR100-P2

2.504.00

1414

300115230016300118230016

AVB-ISO-63-P2AVB-ISO-80-P2AVB-ISO-100-P2AVB-ISO-160-P2

2.503.004.006.00

3.263.514.476.26

10.9513.86

10.70

17.825.974.493.92

9.4515

1515

15300118240016

300115240016300116240016

300120240016




6 - 16

ANGLE VALVE

Pneumatically ActuatedAvailable Area : U.S.A.Without bellows, air to open, spring to close.



AV-TE16-PAV-TE25-PAV-TE40-PAV -TE50-P

2.242.242.983.48

5.77 6.03

10.18 7.69

2.001.882.253.25

0.751.001.502.00

10101010

300109100010300111100010300113100010300114100010



2.242.242.983.48

0.751.001.502.00

5.92 6.17

10.33 7.60

2.152.032.403.40

AV-KF16-PAV-KF25-PAV-KF40-PAV-KF50-P

12121212

300109110010300111110010300113110010300114110010



AV-CR16-PAV-CR35-P

2.502.46 7.89

6.52 2.242.98

0.751.50

1313

300109130010300113130010

Specifications




Bakeable to 150ºC.





6 -17

ANGLE VALVE

Pneumatically ActuatedAvailable Area : U.S.A.Without bellows, air to open, air to close.

Specifications




Bakeable to 150ºC.

Viton Seal Bonnet : 10-9 Torr vacuum rating KF and ISO flange.




300109200010300111200010

300115200010300116200010

300120200010

300113200010300114200010

300118200010

AV-TE16-P2 AV-TE25-P2 AV-TE40-P2 AV-TE50-P2

AV-TE100-P2

AV-TE63-P2 AV-TE80-P2

AV-TE160-P2

0.751.001.502.002.503.004.006.00

2.001.882.253.253.003.254.216.00

6.16 6.41

9.44 7.17

10.6810.44

14.1117.71

2.242.242.983.483.924.495.979.45

1111111111111111





O.d. A B C Figure

3.374.70

10.8114.61 5.97

3.92 AV-CR63-P2 AV-CR100-P2

2.504.00

1414

300115230010300118230010

AV-ISO-63-P2AV-ISO-80-P2AV-ISO-100-P2AV-ISO-160-P2

2.503.004.006.00

3.263.514.476.26

10.9414.37

10.70

17.975.974.493.92

9.4515

1515

15300118240010

300115240010300116240010

300120240010




6 - 18

ANGLE VALVE

Pneumatically ActuatedAvailable Area :Europe (Special Sizes Available Upon Request)With bellows, air to open, spring to close.

Specifications


19.05~50.8 mm port ODs.


Bakeable to 150ºC.



Port Connections : KF Flange

O.d. A B C Figure

19.0525.438.150.8

AVB-KF16-P-EAVB-KF25-P-EAVB-KF40-P-EAVB-KF50-P-E

149142

246203

56.856.875.888.4

40506570

12121212

310109110016310111110016310113110016310114110016



1313

AVB-CR16-P-EAVB-CR35-P-E

3863 201

140 56.875.8

19.0538.1

310109130016310113130016



6 -19

ANGLE VALVE

Specifications


63.5~101.6 mm port ODs.


Bakeable to 150ºC.

Viton Seal Bonnet : 10-9 Torr vacuum rating CF and ISO flange.

Pneumatically ActuatedAvailable Area :Europe (Special Sizes Available Upon Request)With bellows, air to open, air to close.



15

1515AVB-ISO80-P2-E

AVB-ISO63-P2-E

AVB-ISO100-P2-E 76.2101.6

63.5 98108

88294346.6

277114.0151.6

99.5

310118240016

310115240016310116240016



1414

AVB-CR63-P2-EAVB-CR100-P2-E

63.5101.6 373.6

294 99.5151.6

310115230016310118230016

105135




6 - 20

ANGLE VALVE

Pneumatically ActuatedAvailable Area :Europe (Special Sizes Available Upon Request)Without bellows, air to open, spring to close.

Specifications


19.05~50.8 mm port ODs.


Bakeable to 150ºC.




O.d. A B C Figure

19.0525.438.150.8

AV-KF16-P-EAV-KF25-P-EAV-KF40-P-EAV-KF50-P-E

149142

246203

56.856.875.888.4

40506570

12121212

310109110010310111110010310113110010310114110010



1313

AV-CR16-P-EAV-CR35-P-E

3863 201

140 56.875.8

19.0538.1

310109130010310113130010



6 -21

ANGLE VALVE

Specifications


63.5~101.6 mm port ODs.


Bakeable to 150ºC.

Viton Seal Bonnet : 10-9 Torr vacuum rating CF and ISO flange.

Pneumatically ActuatedAvailable Area :Europe (Special Sizes Available Upon Request)Without bellows, air to open, air to close.



15

1515AV-ISO80-P2-E

AV-ISO63-P2-E

AV-ISO100-P2-E 76.2101.6

63.5 98108

88287360

277114.0151.6

99.5

310118240010

310115240010310116240010



1414

AV-CR63-P2-EAV-CR100-P2-E

63.5101.6 387

294 99.5151.6

310115230010310118230010

105135




6 - 22


ANGLE VALVE

Tube End Figure 16

KF Flange Figure 17

C

O.d.O

.d.

A

A

B

C

O.d.

O.d

.

A

A

B



6 -23

ANGLE VALVE

CF Flange Figure 18


C

O.d.

O.d

.A

A

B




6 - 24

ANGLE VALVE

Pneumatically Actuated with Bellows Attached Reed SensorAvailable Area : U.S.A.



2.242.242.983.48

2.001.882.253.25

0.751.001.502.00



2.242.242.983.48

0.751.001.502.00

2.152.032.403.40



2.502.46

2.242.98

0.751.50

6.38 6.63

10.39 8.13

AVBS-TE16-PAVBS-TE25-PAVBS-TE40-PAVBS-TE50-P

16161616

300109100216300111100216300113100216300114100216

8.33 7.13AVBS-CR16-P

AVBS-CR35-P1818

300109130216300113130216

6.53 6.78

11.08 8.28

AVBS-KF16-PAVBS-KF25-PAVBS-KF40-PAVBS-KF50-P

17171717

300109110216300111110216300113110216300114110216

Specifications



3/4~2 inch : air to open, spring to close. (Normally Close)

4~6.5kg/cm2 operating air pressure.

Sensor Specification : Voltage DC/AC 4~240V Amps : 5~40mA

Options Available : Air solenoid DC24V, AC24V, AC110V, AC220V.

Viton Seal Bonnet : 10-9 Torr vacuum rating KF and CF flange..




6 -25

ANGLE VALVE

Pneumatically Actuated with Bellows Attached Reed SensorAvailable Area : Europe (Special Sizes Available Upon Request)





Specifications




4~6.5kg/cm2 operating air pressure.

Sensor Specification : Voltage DC/AC 4~240V Amps : 5~40mA

Options Available : Air solenoid DC24V, AC24V, AC110V, AC220V.

Viton Seal Bonnet : 10-9 Torr vacuum rating KF and CF flange..

56.856.875.888.4

164.3158

251.3214

40506570

AVBS-KF16-P-EAVBS-KF25-P-EAVBS-KF40-P-EAVBS-KF50-P-E

19.0525.438.150.8

17171717

310109110216310111110216310113110216310114110216

3863 212

155.6 56.875.8

AVBS-CR16-P-EAVBS-CR35-P-E

19.0538.1

1818

310109130216310113130216




6 - 26


Z-INLINE VALVE

Tube End Figure 19

KF Flange Figure 20

F

O.d

.

A

B

C

O.d

.

d E

A

F

B

O.d

.

O.d

.

C

d E

AA



6 -27

Z-INLINE VALVE

CF Flange Figure 21


F

B

O.d

. C

d E

AO

.d.

A




6 - 28

Z-INLINE VALVE

Manually Operated with BellowsAvailable Area : U.S.A.




Specifications



Bakeable to 150ºC.



Model�no. Parts�no.O.d. A B C Figure

1.872.253.124.12

1.371.13

2.621.88

2.001.882.253.25

2.242.242.983.48

6.11 5.86

10.61 8.44

5.095.357.168.85

19191919

0.751.001.502.00

IVB-TE16-MIVB-TE25-MIVB-TE40-MIVB-TE50-M

302109000016302111000016302113000016302114000016

d E F

Model�no. Parts�no.O.d. A B C Figured E F

1.872.253.124.12

1.371.13

2.621.88

2.152.032.403.40

2.242.242.983.48

6.11 5.86

10.61 8.44

5.095.357.168.85

20202020

0.751.001.502.00

IVB-KF16-MIVB-KF25-MIVB-KF40-MIVB-KF50-M

302109010016302111010016302113010016302114010016


302109030016302113030016

0.751.50

IVB-CR16-MIVB-CR35-M

2.502.46 1.88

1.13 1.873.12

2121

5.097.16 8.44

5.86 2.242.98



6 -29

Z-INLINE VALVE

Tube End Figure 22

KF Flange Figure 23


F

O.d

.

O.d

.

A A

B

C

d E

F

B

O.d

.

O.d

.

d E

C

A A




6 - 30

Z-INLINE VALVE

CF Flange Figure 24


B

O.d

.

F

CA A

d E

O.d

.



6 -31

Z-INLINE VALVE





Specifications



Bakeable to 150ºC.





1.872.253.124.12

1.371.13

2.621.88

2.001.882.253.25

2.242.242.983.48

7.19 6.94

12.12 9.32

6.32 6.57 8.2210.53

22222222

0.751.001.502.00

IV-TE16-MIV-TE25-MIV-TE40-MIV-TE50-M

302109000010302111000010302113000010302114000010


1.872.253.124.12

1.371.13

2.621.88

2.152.032.403.40

2.242.242.983.48

7.19 6.94

12.12 9.32

6.32 6.57 8.2210.53

23232323

0.751.001.502.00

IV-KF16-MIV-KF25-MIV-KF40-MIV-KF50-M

302109010010302111010010302113010010302114010010


IV-CR16-MIV-CR35-M

0.751.50

2.502.46 1.88

1.13 1.873.12

2424

302109030010302113030010

6.32 8.22 9.32

6.94 2.242.98




6 - 32


Z-INLINE VALVE

Tube End Figure 25

KF Flange Figure 26

F

B

O.d

. C

d E

O.d

.

A A

F

B

O.d

.

O.d

.

Cd E

A A



6 -33

Z-INLINE VALVE

CF Flange Figure 27

F

B

O.d

.

O.d

.

C

d E

A A





6 - 34

Z-INLINE VALVE

Manually Operated Copper Seal Bonnet with BellowsAvailable Area : U.S.A.




Specifications



Bakeable to 150℃.(200ºC intermittently for CF flange port).

Metal Seal Bonnet : 10-9 Torr vacuum rating KF and approximate 10-10 Torr vacuum rating CF flange.



1.872.253.124.12

1.371.12

2.621.88

2.001.882.253.25

2.752.753.374.47

6.11 5.85

10.63 8.57

5.075.337.358.86

25252525

0.751.001.502.00

IVB-CU-TE16-MIVB-CU-TE25-MIVB-CU-TE40-MIVB-CU-TE50-M

302609000016302611000016302613000016302614000016


IVB-CU-KF16-MIVB-CU-KF25-MIVB-CU-KF40-MIVB-CU-KF50-M

1.872.253.124.12

1.371.12

2.621.88

2.152.032.403.40

2.752.753.374.17

6.11 5.86

10.63 8.57

5.075.337.358.86

26262626

0.751.001.502.00

302609010016302611010016302613010016302614010016


0.751.50

2.502.45 1.88

1.12 1.873.12

5.077.35 8.57

5.85 2.753.37

IVB-CU-CR16-MIVB-CU-CR35-M

2727

302609030016302613030016



6 -35

Z-INLINE VALVE

Tube End Figure 28

KF Flange Figure 29


E

B

O.d

.

O.d

.

C

d

A A

E

B

O.d

.

A A

O.d

.

C

d




6 - 36

Z-INLINE VALVE

CF Flange Figure 30


E

B

O.d

.

O.d

.

A A

C

d



6 -37

Z-INLINE VALVE

Available Area : U.S.A.With bellows, air to open, spring to close.





Model�no. Parts�no.O.d. A B C Figured E

2.001.882.253.25

28282828

1.872.253.124.12

1.371.13

2.621.88

2.242.24

3.482.98

5.90 6.14 8.56 11.05

0.751.001.502.00

IVB-TE16-PIVB-TE25-PIVB-TE40-PIVB-TE50-P

302109100016302111100016302113100016302114100016


IVB-KF16-PIVB-KF25-PIVB-KF40-PIVB-KF50-P

2.152.032.403.40

29292929

1.872.253.124.12

1.371.13

2.621.88

2.242.24

3.482.98

5.90 6.14 8.5611.05

0.751.001.502.00

302109110016302111110016302113110016302114110016


IVB-CR16-PIVB-CR35-P

0.751.50

2.502.46 1.88

1.13 1.873.12

302109130016302113130016

5.908.56 2.98

2.24 3030

Specifications




Bakeable to 150ºC.






6 - 38

Z-INLINE VALVE

Available Area : U.S.A.Without bellows, air to open, spring to close.








Specifications




Bakeable to 150ºC.



2.001.882.253.25

28282828

1.872.253.124.12

1.371.13

2.621.88

2.242.24

3.482.98

5.90 6.14 8.5611.05

0.751.001.502.00

IV-TE16-PIV-TE25-PIV-TE40-PIV-TE50-P

302109100010302111100010302113100010302114100010

2.152.032.403.40

29292929

1.872.253.124.12

1.371.13

2.621.88

2.242.24

3.482.98

5.90 6.14 8.5611.05

0.751.001.502.00

IV-KF16-PIV-KF25-PIV-KF40-PIV-KF50-P

302109110010302111110010302113110010302114110010

IV-CR16-PIV-CR35-P

0.751.50

2.502.46 1.88

1.13 1.873.12

302109130010302113130010

5.90 8.56 2.98

2.24 3030



6 -39

Z-INLINE VALVE

Tube End Figure 31

KF Flange Figure 32


B

O.d

.

O.d

.

E

Cd

A A

E

B

O.d

. Cd

A AO

.d.




6 - 40

Z-INLINE VALVE

CF Flange Figure 33


E

B

O.d

.

O.d

.

A AC

d



6 -41

Z-INLINE VALVE


Port Connections : Tube EndModel�no. Parts�no.O.d. A B C Figured E

2.001.882.253.25

1.872.253.124.12

1.371.13

2.621.88

2.242.24

3.482.98

0.751.001.502.00


31313131

6.51 6.75 8.9011.26

IVBS-TE16-PIVBS-TE25-PIVBS-TE40-PIVBS-TE50-P

302109100216302111100216302113100216302114100216

Port Connections : KF FlangeModel�no. Parts�no.O.d. A B C Figured E

2.152.032.403.40

1.872.253.124.12

1.371.13

2.621.88

2.242.24

3.482.98

0.751.001.502.00

32323232

6.51 6.75 8.9011.26

IVBS-KF16-PIVBS-KF25-PIVBS-KF40-PIVBS-KF50-P

302109110216302111110216302113110216302114110216

Port Connections : CF Rotatable FlangeModel�no. Parts�no.O.d. A B C Figured E

IVBS-CR16-PIVBS-CR35-P

0.751.50

2.502.46 1.88

1.13 1.873.12

302109130216302113130216

6.518.90 2.98

2.24 3333

Specifications




4~6.5 kg/cm2 operating pressure.

Sensor Specification : Voltage DC/AC 4~240V Amps : 5~40 mA.

Option Available : Air Solenoid DC24V, AC24V, AC110V, AC220V.






6 - 42


Y-INLINE VALVE

Tube End Figure 34

KF Flange Figure 35

d

B C

O.d

.

A

O.d

.

A

B

d

C



6 -43

Y-INLINE VALVE

CF Flange Figure 36


d

B C

O.d

.A




6 - 44

Y-INLINE VALVE






Model�no. Parts�no.O.d. A B C Figured

Specifications



Bakeable to 150ºC.



0.751.001.502.00

3.703.904.826.70

4.434.435.806.83

3.893.89

5.594.89

2.242.242.983.48

34343434

YVB-TE16-MYVB-TE25-MYVB-TE40-MYVB-TE50-M

304109000016304111000016304113000016304114000016


0.751.001.502.00

4.004.205.127.00

4.434.435.806.83

3.893.89

5.594.89

2.242.242.983.48

35353535

YVB-KF16-MYVB-KF25-MYVB-KF40-MYVB-KF50-M

304109010016304111010016304113010016304114010016


304109030016304113030016

YVB-CR16-MYVB-CR35-M

3636

0.751.50

4.705.24 4.89

3.89 4.435.80

2.242.98



6 -45

Y-INLINE VALVE

Tube End Figure 37

KF Flange Figure 38


d

B C

O.d

.A

d

B C

O.d

.

A




6 - 46

Y-INLINE VALVE

CF Flange Figure 39


d

B C

O.d

.

A



6 -47

Y-INLINE VALVE







Specifications



Bakeable to 150ºC. (200ºC intermittently for CF flange port).

Metal Seal Bonnet : 10-9 Torr vacuum rating KF and approximate 10-10 Torr vacuum rating CF flange.




0.751.001.502.00

3.703.904.826.70

4.764.445.876.55

3.923.88

5.305.01

2.752.753.374.47

37373737

YVB-CU-TE16-MYVB-CU-TE25-MYVB-CU-TE40-MYVB-CU-TE50-M

304609000016304611000016304613000016304614000016

0.751.001.502.00

4.004.205.127.00

4.764.445.876.55

3.923.88

5.305.01

2.752.753.374.47

38383838

YVB-CU-KF16-MYVB-CU-KF25-MYVB-CU-KF40-MYVB-CU-KF50-M

304609010016304611010016304613010016304614010016

YVB-CU-CR16-MYVB-CU-CR35-M

3939

304609030016304613030016

0.751.50

4.705.24 5.01

3.88 4.765.87

2.753.37




6 - 48


Y-INLINE VALVE

Tube End Figure 40

KF Flange Figure 41

C

B

O.d

.

A

C

B

O.d

.

A



6 -49

Y-INLINE VALVE

CF Flange Figure 42


C

B

O.d

.A




6 - 50

Y-INLINE VALVE




Model�no. Parts�no.O.d. A B C Figure

YVB-TE16-PYVB-TE25-P

YVB-TE50-PYVB-TE40-P

YVB-TE63-P2

0.751.00

2.002.50

1.50

3.703.90

6.707.75

4.824.164.15

7.157.87

5.71

2.242.24

3.92

2.983.48

4040

40

4040

304109100016304111100016

304115200016

304113100016304114100016

Port Connections : KF FlangeModel�no. Parts�no.O.d. A B C Figure

YVB-KF16-PYVB-KF25-P

YVB-KF50-PYVB-KF40-P

0.751.00

2.001.50

4.004.20

7.005.12

4.164.15

7.155.71

2.242.242.983.48

41414141

304109110016304111110016304113110016304114110016

Port Connections : CF Rotatable FlangeModel�no. Parts�no.O.d. A B C Figure

304109130016304113130016304115230016

YVB-CR16-PYVB-CR35-P

YVB-CR63-P2

0.751.502.50

4.705.248.5

5.714.15

7.87

2.242.983.48

424242

Specifications



3/4"~2 inch : air to open, spring to close.

Over 2 inch : air to open, air to close.


Bakeable to 150ºC.





6 -51

Y-INLINE VALVE

Tube End Figure 43

KF Flange Figure 44


C

B

O.d

.

A

C

B

O.d

.

A




6 - 52

Y-INLINE VALVE

CF Flange Figure 45


C

O.d

.

A

B



6 -53

Y-INLINE VALVE


Port Connections : Tube EndModel�no. Parts�no.O.d. A B C Figure

Port Connections : KF FlangeModel�no. Parts�no.O.d. A B C Figure

Port Connections : CF Rotatable FlangeModel�no. Parts�no.O.d. A B C Figure

Specifications



3/4"~2 inch : air to open, spring to close. (Normally Close)


Sensor Specification : Voltage DC/AC 4~240V Amps : 5~40 mA.

Option Available : Air Solenoid DC24V, AC24V, AC110V, AC220V.




YVBS-TE16-PYVBS-TE25-P

YVBS-TE50-PYVBS-TE40-P

0.751.00

2.001.50

3.703.90

6.704.82

4.734.74

7.436.17

2.242.24

3.482.98

4343

4343

304109100216304111100216304113100216304114100216

YVBS-CR16-PYVBS-CR35-P

0.751.50

4.705.24 6.17

4.74 2.242.98

4545

304109130216304113130216

YVBS-KF16-PYVBS-KF25-P

YVBS-KF50-PYVBS-KF40-P

0.751.00

2.001.50

4.004.20

7.005.12

4.734.74

7.436.17

2.242.242.983.48

44444444

304109110216304111110216304113110216304114110216




6 - 54

Bakeable All-Metal Valve

Specifications

Bakeability :400ºC (open), 300ºC (close).

Pressure Range : Below 10-10 torr.

All stainless steel construction.

Bellows stem seal.

Leak Rate : 8.7 x 10-11 Pa.m3/sec.

Closure Torque : CR16 First 150kg-cm, Maximum 250kg-cm.

CR35 First 300kg-cm, Maximum 600kg-cm.

Orientation : Any position.

Model�no. Parts�no.O.d. A B C

AVBAK-CR16AVBAK-CR35

19.0538.1

38.162.5

122.2170 189

133 38.154

300509030011300513030011

d

O.d

.

d

A

O.d.

BC

A



6 -55

A

B

Ball Valve

Model�no. Parts�no.Connector A B

KF16BV092(3/4")

KF40BV130(1.5")KF50BV151(2")

KF25BV107(1")32011331011313201143101131

32010931011313201113101131

KF40KF50

KF16KF25

106.9 121.7

64.4 80

130151

92107

Description Description

3/4" 1" 1.5" 2"

KF (NW) 1/4 Turn manual open and close N/A N/A SS316, Viton, PTFE 9.0*10-9

56.8 PSI N/A N/A 150ºC MAX

4.4KG 2.8KG 1.2KG 0.6KG

Operation

Flange

Fittngs Sensors Wetted materials Leak rate mbar-L/sec Max pressure Pneumatic supply Operation time Operating temperature

Weight




6 - 56

Specifications



Operation : Air to open, spring to close.

Operating pressure : 4~6 kg/cm2


Bakeable to 150ºC.


Parts�no. O.d. A B C d

ZFP0081520040K00 99.51.50 65 214.325.5 76.2

E

FORMED BELLOWS SEAL STAINLESS VALVE

Angle Valve

AO.d.

BC

A

Eø

d



6 -57

Y-inline Valve

Specifications






Bakeable to 150ºC.


Parts�no. O.d. A B C d

ZFP0081620040K00 2241.50 130 25.5 76.2

B

Cd

O.d

.

A




6 - 58

FORMED BELLOWS SEAL STAINLESS VALVE

Two-Stage Valve

Parts�no. O.d. A B C d E

ZFP008V2040AK00ZFP008V2050AK00 126.5

1022.001.50

8976.2

4025.5

129.4 99.5

107.2 99

303251.3

89.176.2

63.362

25.425.4

F g H I

Specifications

Polished 304 stainless steel body .

3/4~2 inch port ODs .




Bakeable to 150ºC.


Provides soft pumpdown and isolation for vacuum system.

Reduces particulate contamination during early turbulent pumpdown.

g

F A

H

O.d

.

BC

d

E

I

SECTION CONTENTS 06 - Premier Pump S 6 Valves Series.pdf · SECTION CONTENTS 06 VALVE SERIES...

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Transcript of SECTION CONTENTS 06 - Premier Pump S 6 Valves Series.pdf · SECTION CONTENTS 06 VALVE SERIES...