SCREEN and SOKUDO - Semieurope

1 DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL

SCREEN and SOKUDO Secondary Equipment and Parts

Remanufacturing and Refurbishment

Joerg Gundrum Manager

Munich Refurbishment Center


The availability of affordable equipment allows Semiconductor

Fabs to upgrade faster and more cost effective

The secondary equipment market reached $6.0 billion

in sales 2010

77% increase over 2009 for secondary equipment

13% of total equipment spending for secondary equipment

Secondary Equipment Market is complex and growing

Source: SEMI and Semico Secondary Semiconductor Equipment Market Study, Mai 2011


Key Advantages

Only the Original Equipment Manufacturer (OEM)

ensures high quality refurbishment because….

Detailed knowledge on equipment history

Full access to the manufacturing records

Authorized to provide software licenses

Can provide certified equipment support


Sourcing SCREEN and SOKUDO Equipment

Remanufacturing and refurbishment

Spare part remanufacturing and refurbishment

Unit modification

Customized solutions

FC821L

Munich Refurbishment Center MRC

SK80B


Track Systems:

60/80A

60/80B

200W

SK-2000

SCRUBBER

Wet Stations:

AS2000

MP2000

SPW612

SPW813

WS620/WS820

FC821L

Our Experience


Customer

Request

Audit &

Quotation Shipment

to MRC

Refurbishment

PO

The Way to your Refurbished Equipment

Equipment sourcing

DNS pre-owned equipment

Buyback

Customer owned

Source

Inspection (optional)

Shipment

Training (optional)


Factory trained engineers

Standardized refurbishment

procedures

Remanufacturing to the original

factory specification

OEM spare parts only

Latest version software upgrades

CE marking

Detailed inspection report

Installation

High Quality Standards

Each peace of equipment goes through our

superior refurbishment process


Default replacement of key parts

Robot overhaul

Detailed function test procedure

Onsite installation

Warranty

Standard OEM Refurbishment Services


Spare Part Remanufacturing and Refurbishment


Available for SK60/80A, SK60/80B, 200W

Test certificate

Spin Motor Repair & Refurbishment

Test bench


ETU / ACU Repair and Refurbishment

Electro Thermostatic Unit repair

SK80B and SK200W

Air Conditioning Unit repair

SK2000

ETU

ACU

SK2000


Repair and Spare Part service for IDI-Cybor pumps

Resist Pump Service

IDI 300 Series

IDI 400 Series


MRC Customized Development


MEMS edge grip chuck

Developed for wafer thickness from 250µm to 850µm

Available for 150mm and 200mm wafers

SK80B MEMS Upgrade


“Quick and Easy” change by software

No hardware modification required

100mm and 150mm wafer processing change 80B

Double-side Scrubber SS-80BW


Summary

Our team of experienced engineers at the MRC is available to help you with any secondary equipment needs or questions.

Cost effective equipment for ramp of matured technologies

Customized Solutions

OEM guaranteed service, spare part and software support

Access to knowledge/experience of worldwide service and

process support organization

OEM approved refurbishment center (the only one in Europe)

http://www.screen-dsd.de/en/refurbished-tools.html

THE ONLY OFFICIAL SOURCE

SCREEN and SOKUDO - Semieurope

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Transcript of SCREEN and SOKUDO - Semieurope